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    • 10. 发明公开
    • Electron beam lithography machine and image display apparatus
    • Elektronen emittierende Vorrichtung,Elektronenstrahllithographiemaschine und diese verwendender Bildwiedergabeapparat。
    • EP0394698A2
    • 1990-10-31
    • EP90106038.4
    • 1990-03-29
    • CANON KABUSHIKI KAISHA
    • Morikawa, YukoYanagisawa, YoshihiroTakimoto, Kiyoshi
    • H01J1/30H01J29/48H01J37/317
    • B82Y10/00H01J1/312H01J29/481H01J37/073
    • An electron-emitting device comprises a substrate (5), an electrode (1) provided on said substrate, an insulating layer laminated on the electrode (2), and a second electrode (3) having an opening (4) and laminated on the insulating layer in such a manner that the insulating layer is uncovered at the opening and electrons are emitted from the opening of the second electrode as a result of application of an voltage between the electrodes. An image display apparatus comprises the electron-emitting device, a modulating electrode capable of modulating an electron beam emitted from the electron-emitting device, in accordance with an information signal, and an image forming member capable of forming an image as a result of irradiation with the electron beam, these of which are successively disposed. An image forming apparatus comprises the electron-emitting device, and a means for modulating an electron beam emitted from said electron-­emitting device, in accordance with an information signal.
    • 电子发射器件包括衬底(5),设置在所述衬底上的电极(1),层压在所述电极(2)上的绝缘层和具有开口(4)的第二电极(3) 绝缘层以绝缘层在开口处未覆盖,并且由于在电极之间施加电压而从第二电极的开口发射电子。 图像显示装置包括电子发射装置,能够根据信息信号调制从电子发射装置发射的电子束的调制电极和能够形成作为照射结果的图像的图像形成部件 其中电子束依次排列。 图像形成装置包括电子发射器件和用于根据信息信号调制从所述电子发射器件发射的电子束的装置。