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热词
    • 9. 发明公开
    • COATED X-RAY WINDOW
    • 涂层的X射线窗口
    • EP2856493A1
    • 2015-04-08
    • EP12725697.2
    • 2012-05-29
    • Excillum AB
    • TUOHIMAA, TomiHEMBERG, Oscar
    • H01J35/18
    • H01J35/18H01J35/025H05G1/02
    • An X-ray window comprises a primary (22) and a secondary window element (72, 74, 76). In order to evaporate debris by ohmic heating, current flows through the secondary (upstream) window element. Meanwhile, electric charge originating from electron irradiation and/or depositing charged particles is to be drained off the secondary window element via a charge-drain layer (76). To prevent large debris particles from short-circuiting the secondary window element, the current for heating the window element flows through heating circuitry (72) which is electrically insulated from the charge- drain layer.
    • X射线窗口包括主要窗口元件(22)和次要窗口元件(72,74,76)。 为了通过欧姆加热来蒸发碎片,电流流过次级(上游)窗口元件。 同时,源自电子照射和/或沉积带电粒子的电荷将经由电荷 - 漏极层(76)从副窗口元件排出。 为了防止大的碎片颗粒使次窗元件短路,用于加热窗元件的电流流过与电荷漏层电绝缘的加热电路(72)。