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1. 发明公开

EP1220280A2 Scanning and high resolution x-ray photoelectron spectroscopy and imaging 失效
标题翻译： HochauflösendeRasterröntgenphotoelektronenspektroskopie
公开(公告)号：EP1220280A2
公开(公告)日：2002-07-03
申请号：EP01120818.8
申请日：1993-08-25
申请人： Physical Electronics, Inc.
发明人： Larson, Paul E., Physical Electronics, Inc. , Palmberg, Paul W.
IPC分类号： H01J37/256 , G01N23/227
CPC分类号： H01J49/48 , G01N23/227 , G01N23/2273 , H01J37/256 , H01J37/285 , H01J2237/2522
摘要： The invention refers to an instrument for analysis of a specimen surface which comprises an electron gun for producing a focused electron beam, an anode with an anode surface disposed to receive the focused electron beam so as to generate x-rays from an anode spot on the anode surface, rastering means for rastering the focused electron beam over the anode surface, thereby scanning the anode spot over the anode surface, focusing means receptive of at least a portion of the x-rays from the scanning anode spot for focusing an energy band of x-rays of predetermined energy as an x-ray spot on a pixel area scanning correspondingly over the specimen surface, such that photoelectrons are emitted from the scanning pixel area with electron energies characteristic of chemical species at the pixel area, wherein the x-rays and thereby the photoelectrons have a natural energy shift across the specimen surface, analyzer means receptive of at least a portion of the photoelectrons from the scanning pixel area for analyzing the electron energies, compensating means associated with the analyzer means for compensating for the shift, and processing means cooperative with the rastering means and the analyzer means for generating specimen information representative of the electron energies and thereby chemical species of the specimen surface. The invention also refers to an instrument for analysis of an insulating specimen surface which comprises detector means receptive of the photoelectrons for generating corresponding photoelectron signals, flood means for flooding the specimen surface with low energy electrons during periodic intervals so as to neutralize loss of photoelectrons from the specimen surface, and processing means receptive of the photoelectron signals and cooperative with the rastering means so as to effect an imaging of the specimen surface, wherein the photoelectron signals are omitted from the imaging during the periodic intervals.
摘要翻译：本发明涉及一种用于分析样品表面的仪器，其包括用于产生聚焦电子束的电子枪，具有阳极表面的阳极，阳极表面设置为接收聚焦的电子束，从而产生来自阳极点的X射线阳极表面，用于在阳极表面上对聚焦电子束进行扫描的雷击装置，从而在阳极表面上扫描阳极点，聚焦装置接收来自扫描阳极点的x射线的至少一部分，用于聚焦预定能量的X射线作为在样本表面上相应扫描的像素区域上的x射线点，使得光电子从扫描像素区域以像素区域的化学物质特征的电子能量发射，其中x射线因此光电子在样品表面上具有自然能量偏移，分析器装置从扫描像素接收至少一部分光电子用于分析电子能量的区域，与用于补偿偏移的分析装置相关联的补偿装置，以及与扫描装置协调的处理装置和用于产生代表电子能量的样本信息，从而产生样品表面的试样表面的化学物种的分析装置。本发明还涉及一种用于分析绝缘样品表面的仪器，其包括接收用于产生相应光电子信号的光电子的检测器装置，用于在周期性间隔期间用低能电子淹没样品表面的淹没装置，以便中和光电子的损失样品表面和接收光电子信号的处理装置，并且与rastering装置协调，以便实现样品表面的成像，其中在周期性间隔期间从成像中省略光电子信号。

2. 发明公开

EP1170778A2 Scanning and high resolution electron spectroscopy and imaging 失效
标题翻译：扫描和高分辨率电子光谱和成像
公开(公告)号：EP1170778A2
公开(公告)日：2002-01-09
申请号：EP01120822.0
申请日：1995-02-02
申请人： Physical Electronics, Inc.
发明人： Larson, Paul E. , Palmberg, Paul W.
IPC分类号： H01J49/06 , H01J49/48 , G01N23/227
CPC分类号： G01N23/2273 , G01N23/227 , H01J37/256 , H01J37/285 , H01J49/48 , H01J2237/2522
摘要： An instrument (10) for analysis of a specimen surface (14) comprises an electron gun (16) for producing a focused electron beam (20), an anode (24) with an anode surface (22) disposed to receive the focused electron beam so as to generate x-rays from an anode spot on the anode surface, rastering means (36) for rastering the focused electron beam over the anode surface, thereby scanning the anode spot over the anode surface, focusing means (34) receptive of at least a portion of the x-rays from the scanning anode spot for focusing an energy band of x-rays of predetermined energy as an x-ray spot on a pixel area scanning correspondingly over the specimen surface, such that photoelectrons are emitted from the scanning pixel area with electron energies characteristic of chemical species at the pixel area, wherein the x-rays and thereby the photoelectrons have a natural energy shift across the specimen surface, analyzer means (54) receptive of at least a portion of the photoelectrons from the scanning pixel area for analyzing the electron energies, compensating means associated with the analyzer means for compensating for the shift, and processing means cooperative with the rastering means and the analyzer means for generating specimen information representative of the electron energies and thereby chemical species of the specimen surface. Also described is an instrument for analysis of an insulating specimen surface which comprises detector (88) means receptive of the photoelectrons for generating corresponding photoelectron signals, flood means (98) for flooding the specimen surface with low energy electrons during periodic intervals so as to neutralize loss of photoelectrons from the specimen surface, and processing means receptive of the photoelectron signals and cooperative with the rastering means so as to effect an imaging of the specimen surface, wherein the photoelectron signals are omitted from the imaging during the periodic intervals.
摘要翻译：一种用于分析样品表面（14）的仪器（10）包括用于产生聚焦电子束（20）的电子枪（16），具有阳极表面（22）的阳极（24），阳极表面（22）被设置为接收聚焦电子束以便从阳极表面上的阳极点产生X射线，光栅装置（36），用于在阳极表面上光栅聚焦的电子束，由此扫描阳极表面上的阳极点，聚焦装置（34）接收在来自扫描阳极点的X射线的至少一部分用于将具有预定能量的X射线的能量带聚焦为相应地在样本表面上扫描的像素区域上的X射线点，使得光电子从扫描像素区域，其具有在像素区域处的化学物质的电子能量特性，其中x射线和由此的光电子具有穿过样本表面的自然能量漂移;分析装置（54），其接收来自t的至少一部分光电子扫描用于分析电子能量的像素区域，与用于补偿偏移的分析器装置相关联的补偿装置，以及与光栅装置和分析器装置配合的处理装置，用于生成代表电子能量的样本信息，试样表面。还描述了一种用于分析绝缘样品表面的仪器，其包括接收光电子以产生相应光电子信号的检测器（88）装置，用于在周期性间隔期间用低能量电子淹没样品表面以便中和的散射装置（98）光电子从样品表面的损失以及处理装置接收光电子信号并与光栅装置配合以实现样品表面的成像，其中在周期性间隔期间光电子信号从成像中被省略。

3. 发明授权

EP0295653B1 High luminosity spherical analyzer for charged particles 失效
标题翻译：球分析器高亮度带电粒子。
公开(公告)号：EP0295653B1
公开(公告)日：1994-10-12
申请号：EP88109543.4
申请日：1988-06-15
申请人： Physical Electronics, Inc.
发明人： Gerlach, Rovert L.
IPC分类号： H01J49/44 , H01J37/05
CPC分类号： H01J49/482

4. 发明公开

EP0590308A2 Scanning and hig resoloution x-ray photo electron spectroscopy and imaging 失效
标题翻译： HochauflösendeRasterröntgenphotoelektronenspektroskopiezur Bilderzeugung。
公开(公告)号：EP0590308A2
公开(公告)日：1994-04-06
申请号：EP93113582.6
申请日：1993-08-25
申请人： Physical Electronics, Inc.
发明人： Larson, Paul E. , Palmberg, Paul W.
IPC分类号： G01N23/227 , H01J49/08 , G21K1/06
CPC分类号： H01J49/48 , G01N23/227 , G01N23/2273 , H01J37/256 , H01J37/285 , H01J2237/2522
摘要： An instrument (10) for surface analysis includes an electron gun (16) for selectively focusing an electron beam on an anode spot (26), or rastering the beam across an array of such spots, to generate x-rays. A concave monochromator (34) focuses an energy peak of the x-rays to a specimen surface (14), in a spot on a selected pixel area or across an array of pixel areas on the surface to emit photoelectrons. An analyzer (54) with a detector (76) provides information on the photoelectrons and thereby chemical species in the surface. A second detector (88) of low energy photoelectrons is cooperative with the rastering to produce a scanning photoelectron image of the surface, for viewing of a specimen to be positioned, or for imaging an insulator surface. The monochromator is formed of platelets produced by cutting an array of platelets from a single crystal member, and bonding the platelets to a concave face of a base plate juxtaposed in crystalline alignment in a positioned array identical to that of the initial array.
摘要翻译：用于表面分析的仪器包括用于选择性地将电子束聚焦在阳极点上的枪，或者将光束穿过这样的点的阵列，以产生x射线。凹形单色仪将X射线的能量峰值聚焦到样品表面，在选定的像素区域上或者表面上的像素区域阵列上的点中以发射光电子。具有检测器的分析仪提供关于光电子的信息，从而提供表面上的化学物质的信息。低能量光电子的第二检测器与扫描相协调以产生表面的扫描光电子图像，用于观察待定位的样品或用于对绝缘体表面进行成像。单色仪由通过从单晶构件切割血小板阵列而产生的血小板形成，并且将血小板结合到以与初始阵列相同的定位阵列中以结晶对准并列的基板的凹面。

5. 发明公开

EP0510334A2 Apparatus and method for locating target area for electron microanalysis 失效
标题翻译： Gerätund Verfahren zur Lokalisierung des Auftreffereeres in der Elektronen-Mikroanalyse。
公开(公告)号：EP0510334A2
公开(公告)日：1992-10-28
申请号：EP92103620.8
申请日：1992-03-03
申请人： Physical Electronics, Inc.
发明人： Larson, Paul E.
IPC分类号： H01J37/22 , H01J37/256
CPC分类号： H01J37/256 , H01J2237/2448 , H01J2237/24495 , H01J2237/2511 , H01J2237/2522
摘要： Target area on a specimen surface is located in an electron microanalyzer system that includes an electron energy analyzer and an analyzer detector. An electron gun impinges a rastering beam of incident electrons across the surface, and a secondary electron detector provides corresponding signals for producing a scanning electron microscope image of the surface. Backscattered electrons effected from the incident electrons are passed through the analyzer for producing a further image that is superimposed on the SEM image to locate the target area to be subject to a separate microanalysis. Particularly for an electrically insulating specimen surface, the images are produced in a single frame of rastering, and surface area and beam current are sufficient to produce the images without substantial charge buildup.
摘要翻译：样品表面上的目标区域位于包括电子能量分析仪和分析仪检测器的电子微量分析仪系统中。电子枪冲击入射电子的掠过光束穿过表面，二次电子检测器提供相应的信号以产生表面的扫描电子显微镜图像。从入射的电子产生的背散射电子通过分析器，以产生叠加在SEM图像上的另外的图像，以将目标区域定位成单独的微量分析。特别是对于电绝缘的样品表面，图像以单一的扫描框架产生，并且表面积和束流电流足以产生图像而没有实质的电荷积聚。

6. 发明公开

EP0295653A3 High luminosity spherical analyzer for charged particles 失效
标题翻译：用于充电颗粒的高亮度球形分析仪
公开(公告)号：EP0295653A3
公开(公告)日：1990-12-27
申请号：EP88109543.4
申请日：1988-06-15
申请人： Physical Electronics, Inc.
发明人： Gerlach, Rovert L.
IPC分类号： H01J49/44 , H01J37/05
CPC分类号： H01J49/482
摘要： An energy analyzer for electrons comprises three spherically configured cylindrically symmetric members (34, 36, 38). An outer member (34) is a hollow spherical section having a first inlet edge (46). A first inner member (36) is a spherical portion disposed concentrically within the outer member with a defined space therebetween, and has a second inlet edge (50) cooperative with the first inlet edge to form an inlet opening (30) receptive of electrons from a conical lens. A second inner member (38) is a spherical segment disposed concentrically within the outer member and has a second outlet edge (54) cooperative with a first outlet edge (56) of the first inner member to define an exit slot (60) for egress of charged particles having selected trajectories in the defined space. A cylindrical detector (72) is situated within the spherical members for detecting the egressed charged particles. The inlet opening and the exit slot are such the the angle subtended by the selected trajectories between the inlet opening and the exit slot is preferably between about 0.8π and π radians.

7. 发明公开

EP0788136A1 Anode assembly for generating x-rays and instrument with such anode assembly 失效
标题翻译： Anodenanordnung zur Erzeugung vonRöntgenstrahlenund Instrument mit derartiger Anodenanordnung
公开(公告)号：EP0788136A1
公开(公告)日：1997-08-06
申请号：EP96119101.2
申请日：1996-11-28
申请人： Physical Electronics, Inc.
发明人： Larson, Paul E.
IPC分类号： H01J35/08 , G01N23/227
CPC分类号： G01N23/2273 , H01J2235/081 , H01J2235/1204 , H01J2235/1262
摘要： An anode assembly (25) for generating x-rays has a mounting block (82,84) with a channel (86) therethrough, with a diamond wafer (110) mounted sealingly across an opening in the block so as to have an inner surface in contact with the coolant (88) flowing in the channel. Alternatively, a thicker diamond member is mounted in the block with thermal conduction through the metal block. A metal anode film (114) bonded to the outer surface of the diamond is receptive of a focused electron beam to generate x-rays. The diamond provides cooling in compensation for the film being heated by the electron beam. The assembly is useful in a scanning x-ray monochromator instrument for chemical analysis of a specimen surface.
摘要翻译：一种用于产生x射线的阳极组件具有一个具有穿过其中的通道的安装块，金刚石晶片密封地安装在块体中的开口上，以便具有与在通道中流动的冷却剂接触的内表面。或者，较厚的金刚石构件通过金属块的热传导安装在块中。结合到金刚石的外表面的金属阳极膜接受聚焦的电子束以产生x射线。金刚石提供冷却补偿由电子束加热的薄膜。该组件在用于样品表面的化学分析的扫描x射线单色仪中是有用的。

8. 发明公开

EP0470478A3 Multichannel charged-particle analyzer 失效
标题翻译：多通道充电粒子分析仪
公开(公告)号：EP0470478A3
公开(公告)日：1993-05-12
申请号：EP91112735.5
申请日：1991-07-29
申请人： Physical Electronics, Inc.
发明人： Gerlach, Robert L. , Negri, Ronald E.
IPC分类号： H01J49/06 , H01J49/48
CPC分类号： H01J37/252 , H01J49/482
摘要： A charged-particle energy analyzer includes a hollow axi-symmetrical body with an annular opening therein receptive of input electrons from a cylindrical mirror analyzer, the electrons having a distribution of electron energies and a range of electron trajectories. The trajectories each have a radially inward directional component and an axial directional component in a forward direction parallel to the axis. Annular deflectors with negative potentials are disposed coaxially in the body so as to reverse the axial directional components of the electron trajectories. A ring-shaped channel detector detects the electrons relative to radial distance and thereby to energy.

9. 发明公开

EP0293924A3 Direct imaging monochromatic electron microscope 失效
标题翻译：直接成像单色电子显微镜
公开(公告)号：EP0293924A3
公开(公告)日：1990-02-28
申请号：EP88108932.0
申请日：1988-06-03
申请人： Physical Electronics, Inc.
发明人： Gerlach, Robert L.
IPC分类号： H01J37/26 , H01J37/141 , H01J37/05
CPC分类号： H01J37/141 , H01J37/26
摘要： A direct-imaging, monochromatic electron microscope includes an objective lens (20) for collecting a substantial portion of emitted electrons from an area across a sample surface (12), a first transfer lens (62) for focusing the electrons into beams, an energy filter (82) receptive of the beams to transit monochromatic beams, and a second transfer lens (102) receptive of the monochromatic beams for refocusing the same through a projection lens (106) to effect an image of the plurality of spots in a projection plane (108). The objective lens is formed of a magnetic toroidal coil having a central hole therein with a dish-shaped magnetically permeable member cupped coaxially over the toroidal coil. The permeable member has a neck portion protruding through the central hole. The sample surface is interposed proximate the objective lens between the objective lens and the energy filter.

10. 发明公开

EP0293924A2 Direct imaging monochromatic electron microscope 失效
标题翻译： Direkt-abbildendes monochromatisches Elektronenmikroskop。
公开(公告)号：EP0293924A2
公开(公告)日：1988-12-07
申请号：EP88108932.0
申请日：1988-06-03
申请人： Physical Electronics, Inc.
发明人： Gerlach, Robert L.
IPC分类号： H01J37/26 , H01J37/141 , H01J37/05
CPC分类号： H01J37/141 , H01J37/26
摘要： A direct-imaging, monochromatic electron microscope includes an objective lens (20) for collecting a substantial portion of emitted electrons from an area across a sample surface (12), a first transfer lens (62) for focusing the electrons into beams, an energy filter (82) receptive of the beams to transit monochromatic beams, and a second transfer lens (102) receptive of the monochromatic beams for refocusing the same through a projection lens (106) to effect an image of the plurality of spots in a projection plane (108). The objective lens is formed of a magnetic toroidal coil having a central hole therein with a dish-shaped magnetically permeable member cupped coaxially over the toroidal coil. The permeable member has a neck portion protruding through the central hole. The sample surface is interposed proximate the objective lens between the objective lens and the energy filter.
摘要翻译：直接成像单色电子显微镜包括用于从穿过样品表面（12）的区域收集发射电子的大部分的物镜（20），用于将电子聚焦成束的第一转移透镜（62），能量接收光束以过滤单色光束的滤光器（82）和接收单色光束的第二传输透镜（102），用于通过投影透镜（106）重新聚焦其，以实现投影平面中的多个光斑的图像（108）。物镜由具有中心孔的磁环形线圈形成，其中具有与环形线圈同轴地盘形的碟形磁导构件。可渗透构件具有通过中心孔突出的颈部。样品表面靠近物镜插入在物镜和能量过滤器之间。

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