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    • 3. 发明公开
    • Multichannel charged-particle analyzer
    • Mehrkanal-Ladungsteilchen-Analysator。
    • EP0470478A2
    • 1992-02-12
    • EP91112735.5
    • 1991-07-29
    • Physical Electronics, Inc.
    • Gerlach, Robert L.Negri, Ronald E.
    • H01J49/06H01J49/48
    • H01J37/252H01J49/482
    • A charged-particle energy analyzer includes a hollow axi-symmetrical body with an annular opening therein receptive of input electrons from a cylindrical mirror analyzer, the electrons having a distribution of electron energies and a range of electron trajectories. The trajectories each have a radially inward directional component and an axial directional component in a forward direction parallel to the axis. Annular deflectors with negative potentials are disposed coaxially in the body so as to reverse the axial directional components of the electron trajectories. A ring-shaped channel detector detects the electrons relative to radial distance and thereby to energy.
    • 带电粒子能量分析仪包括中空轴对称体,其中环形开口在其中容纳来自圆柱形镜面分析仪的输入电子,电子具有电子能量分布和电子轨迹范围。 轨迹各自具有径向向内的方向分量和平行于轴线的向前方向上的轴向分量。 具有负电位的环形偏转器同轴地布置在主体中,以便反转电子轨迹的轴向分量。 环形通道检测器相对于径向距离检测电子,从而检测能量。