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81. 发明公开

EP1463086A3 Method of fabricating a multipole lens, multipole lens, and charged-particle beam instrument equipped therewith 有权
标题翻译： Verfahren zur Herstellung einer Multipollinse，Multipollinse und damitausgerüstetesTeilchenstrahlapparat
公开(公告)号：EP1463086A3
公开(公告)日：2006-05-17
申请号：EP04251594.0
申请日：2004-03-19
申请人： JEOL Ltd.
发明人： Kawai, Eiji
IPC分类号： H01J37/10 , H01J9/02 , H01J37/141
CPC分类号： H01J37/141 , H01J9/236 , Y10S430/143
摘要： A method of efficiently fabricating a multipole lens using a simple procedure is offered. The multipole lens has plural polar elements (23) and an annular holding member (25). Each polar element has a held portion (22). The annular holding member is provided with through-holes (25a) for holding the held portions of the polar elements. A resin (24) is injected into the through-holes in the holding member via openings (32) formed in the holding member, the openings being in communication with the through-holes. The injected resin is cured, thus holding the held portions of the polar elements to the holding member within the through-holes.
The invention also extends to the multipole lens so fabricated, and to a charged-particle beam instrument comprising the multipole lens.
摘要翻译：提供了一种使用简单的程序有效地制造多极镜的方法。多极透镜具有多个极性元件（23）和环形保持构件（25）。每个极性元件具有保持部分（22）。环形保持构件设置有用于保持极性元件的保持部分的通孔（25a）。通过形成在保持构件中的开口（32）将树脂（24）注入到保持构件的通孔中，开口与通孔连通。注入的树脂被固化，从而将极性元件的保持部分保持在通孔内的保持构件上。本发明还延伸到如此制造的多极透镜，以及包括多极透镜的带电粒子束仪器。

82. 发明公开

EP1432007A1 Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens 有权
标题翻译：多轴复合透镜，在该透镜束系统，以及用于这种透镜的制造方法
公开(公告)号：EP1432007A1
公开(公告)日：2004-06-23
申请号：EP02028346.1
申请日：2002-12-17
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： Lanio, Stefan
IPC分类号： H01J37/141
CPC分类号： H01J37/141 , B82Y10/00 , B82Y40/00 , H01J37/145 , H01J37/3177 , H01J2237/1205 , H01J2237/1405
摘要： The invention provides a lens system for a plurality of charged particle beams. Therein, at least one common excitation coil for at least two lens modules is provided. The lens modules comprise an first pole piece, a second pole piece and at least one opening for a charged particle beam. The lens modules constitute a component and share the excitation coil. Thereby, raw material availability, processing of work pieces and symmetry conditions for the lens fields are improved.
摘要翻译：本发明提供了带电粒子束的多个透镜系统。在其中，提供了一种用于至少两个透镜模块的至少一个公共激励线圈。透镜模块包括在第一极靴，第二极靴和用于带电粒子束的至少一个开口。透镜模块构成部件和共享励磁线圈。由此，原料的可用性，工件和对称条件的透镜场处理得到改善。

83. 发明授权

EP0883891B1 METHOD OF OPERATING A PARTICLE-OPTICAL APPARATUS 失效
标题翻译：一种用于操作粒子光学设备
公开(公告)号：EP0883891B1
公开(公告)日：2003-04-23
申请号：EP97909532.0
申请日：1997-11-06
申请人： FEI COMPANY
发明人： KRIJN, Marcellinus, Petrus, Carolus, Michael , HENSTRA, Alexander
IPC分类号： H01J37/141
CPC分类号： H01J37/141 , H01J2237/0492 , H01J2237/1534

84. 发明公开

EP1166320A2 MAGNETIC IMMERSION LENSE WITH DETECTION ARRANGEMENT 有权
标题翻译：的检测装置用磁浸没透镜
公开(公告)号：EP1166320A2
公开(公告)日：2002-01-02
申请号：EP00911062.8
申请日：2000-03-17
申请人： Shimadzu Research Laboratory (Europe) Ltd.
发明人： MARUI, Takao , BADHEKA, Ranjan Krishnachandra , READ, Frank Henry
IPC分类号： H01J37/26
CPC分类号： H01J37/244 , H01J37/141 , H01J2237/1035
摘要： A magnetic immersion lens has inner and outer pole-pieces (10, 11) arranged symmetrically about a longitudinal axis X-X of the lens, the inner pole piece (10) having a through-bore (12) and the lens producing a magnetic imaging field for directing along the through-bore (12) secondary electrons emitted from a specimen (S) positioned in front of the inner pole-piece. The lens has an axially-symmetric detection arrangement (20) located within the through-bore. The detector (20) comprises a focusser electrode (21), a repeller electrode (22), an extractor electrode (23), a detector electrode (24), and a reflector electrode (25).

85. 发明公开

EP1120809A1 Objective lens for a charged particle beam device 有权
标题翻译： ObjektivlinsefüreineLadungsträgerstrahl-Vorrichtung
公开(公告)号：EP1120809A1
公开(公告)日：2001-08-01
申请号：EP00101708.6
申请日：2000-01-27
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： Adamec, Pavel, c/o ICT GmbH
IPC分类号： H01J37/10 , H01J37/14 , H01J37/26 , H01J29/66
CPC分类号： H01J37/1471 , H01J37/141 , H01J37/28
摘要： The present invention provides an improved objective lens for a charged particle beam device. The objective lens comprises a magnetic lens that creates a first magnetic field for focussing the charged particle beam onto the specimen. Furthermore, a deflector is integrated into the magnetic lens by providing at least one additional coil arrangement that creates a second magnetic field used to deflect the charged particle beam. Thereby, the second magnetic field is guided through at least one of the pole pieces of the magnetic lens. The present invention also provides an improved column for a charged particle beam device including the improved objective lens.
摘要翻译：本发明提供了一种用于带电粒子束装置的改进的物镜。物镜包括磁透镜，其产生用于将带电粒子束聚焦到样本上的第一磁场。此外，偏转器通过提供至少一个额外的线圈装置而被集成到磁性透镜中，该线圈装置产生用于使带电粒子束偏转的第二磁场。由此，第二磁场被引导通过磁性透镜的至少一个极片。本发明还提供了一种用于包括改进的物镜的带电粒子束装置的改进的列。

86. 发明授权

EP0330310B1 Integrated electron optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope 有权
标题翻译：用于环境扫描电子显微镜的集成电子光学/差分泵浦/成像信号检测系统
公开(公告)号：EP0330310B1
公开(公告)日：1993-05-26
申请号：EP89300744.3
申请日：1989-01-26
申请人： ELECTRO-SCAN CORPORATION
发明人： Danilatos, Gerasimos D. , Lewis, George C.
IPC分类号： H01J37/28 , H01J37/20 , H01J37/244
CPC分类号： H01J37/244 , H01J37/141 , H01J37/16 , H01J37/28 , H01J2237/2448 , H01J2237/2449 , H01J2237/24507 , H01J2237/2608

87. 发明公开

EP0469679A1 Charged particle beam system, a cooling member, a coil comprising such cooling member and a cooling device incorporating such cooling member 失效
标题翻译：带电粒子束系统以及冷却装置，具有冷却元件的线圈，并且在这种带电粒子束系统中使用的冷却元件。
公开(公告)号：EP0469679A1
公开(公告)日：1992-02-05
申请号：EP91201961.9
申请日：1991-07-26
申请人： Philips Electronics N.V.
发明人： Bakker, Johan Gustaaf , Asselbergs, Peter Emile Stephan Joseph
IPC分类号： H01J37/141 , H01J37/147
CPC分类号： H01J37/1475 , H01J37/141
摘要： A charged particle beam system utilizes a box- shaped cooling member accommodating the lens in order to cool the particle-optical lenses. The cooling medium is circulated between the wall of the lens and the wall of the cooling member, enabling a high transfer of heat by convection. By using a cooling liquid which is undersaturated for air and which is heated prior to its passage through the cooling duct, accumulation of air due to heating can be prevented in the cooling member.
摘要翻译：一种带电粒子束系统使用的盒状的冷却构件容纳透镜，以便冷却所述粒子光学透镜。冷却介质透镜的壁与冷却构件的壁之间循环，使由对流高传输的热量。通过使用冷却液的所有这是欠用于空气和所有其通过冷却管道的通道之前加热，由于加热空气的积累可以在冷却构件来防止。

88. 发明公开

EP0459047A1 Electron-optical system for making a pseudoparallel micro electron-beam 失效
标题翻译： Elektronenoptisches System zur Erzeugung eines pseudoparallelen Elektronenstrahls mit kleinem Strahlquerschnitt。
公开(公告)号：EP0459047A1
公开(公告)日：1991-12-04
申请号：EP90305987.1
申请日：1990-06-01
申请人： SHIMADZU CORPORATION
发明人： Hayashi, Shigeki
IPC分类号： H01J37/141 , H01J37/04 , H01J37/28
CPC分类号： H01J37/141 , H01J37/04
摘要： An electron-optical system devised so as to generate a pseudoeparallel micro electron-beam coverging at a converging angle of 1 x 10⁻³ radian. The system comprises a condenser lens assembly (3, 4) and an asymmetric objective lens (6) whose smaller field gradient side is directed to the condenser lens assembly (3, 4). In another electron-optical system achieved by modifying the above system, the converging angle of the electron beam is made variable with an additional objective lens (8) inserted between the condenser lens assembly (3, 4) and the asymmetric objective lens (6). Theconversion angle can be varied by varying the conversion powers of both the objective lenses (6, 8).
摘要翻译：设计了一种电子光学系统，以便以1×10 -3弧度的会聚角度产生伪并行的微电子束覆盖。该系统包括聚光透镜组件（3,4）和不对称物镜（6），其较小的场梯度侧被引导到聚光透镜组件（3,4）。在通过改变上述系统实现的另一电子 - 光学系统中，通过插入聚光透镜组件（3）和不对称物镜（6）之间的附加物镜（8）使电子束的会聚角度可变，。可以通过改变两个物镜（6,8）的转换功率来改变转换角度。

89. 发明公开

EP0418894A2 A scanning electron microscope and a method of displaying cross sectional profiles using the same 失效
标题翻译：扫描型电子显微镜和其用于使用显示的横截面轮廓的方法。
公开(公告)号：EP0418894A2
公开(公告)日：1991-03-27
申请号：EP90118131.3
申请日：1990-09-20
申请人： MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. , HOLON Co. Ltd.
发明人： Nomura, Noboru , Nakagawa, Hideo , Koizumi, Taichi , Harafuji, Kenji , Okuni, Mitsuhiro , Anazawa, Norimichi
IPC分类号： H01J37/141 , H01J37/28 , H01J37/20 , H01J37/153
CPC分类号： H01J37/141 , H01J37/153
摘要： A scanning electron microscope is disclosed in which an objective lens includes a first pole piece (18) and a second pole piece (21). The first pole piece is provided with a hole through which an electron beam (12) passes, and is disposed between an electron gun (11) for emitting the electron beam and the second pole piece. The second pole piece (21) has a planar portion on which a specimen (22) is placed, and the second pole piece being mounted on a supporting block (23) movable in a plane substantially perpendicular to the projecting direction of the electron beam.
摘要翻译：扫描电子显微镜是圆盘在游离缺失哪些到物镜包括：第一极靴（18）和第二极片（21）。第一极靴上设置有通过电子束，其中（12）中的孔通过，并在电子枪（11）之间设置用于发射电子束和第二极靴。第二极靴（21）具有在其上的检体（22）放置的平面部分，和被安装在支撑块（23）可动的平面内大致垂直于所述电子束的投射方向上第二极靴。

90. 发明公开

EP0331859A3 Telecentric sub-field deflection with a variable axis immersion lens 失效
标题翻译：具有可变轴倾斜透镜的电气子场偏移
公开(公告)号：EP0331859A3
公开(公告)日：1990-05-30
申请号：EP88480086.3
申请日：1988-12-06
申请人： International Business Machines Corporation
发明人： Groves, Timothy Robinson , Pfeiffer, Hans Christian , Stickel, Werner , Sturans, Maris Andris
IPC分类号： H01J37/147 , H01J37/141 , H01J37/317
CPC分类号： H01J37/141 , H01J37/1474
摘要： A two stage, electron beam projection system includes a target, a source of an electron beam and means for projecting an electron beam towards the target with its upper surface defining a target plane. A magnetic projection lens has a principal plane and a back focal plane located between said means for projecting and the target. The means for projecting provides an electron beam directed towards the target. First stage means provides deflection of the beam from area to area within a field. Second stage means provides for deflection of the beam for providing deflection of the beam within an area within a field. The beam crossing the back focal plane produces a telecentric condition of the beam in the image plane with the beam substantially normal to tghe target plane from the principal plane to the target plane. The magnetic projection lens includes a magnetic structure providing for magnetic compensation positioned within the bore of the projection lens, which produces a compensating magnetic field substantially proportional to the first derivative of the axial magnetic projection field. The axial magnetic projection field provides substantially a zero first derivative of the axial magnetic projection field in the vicinity of the target. The projection system projects on the target plane from the projection system as deflected by the upper and lower stages, at all times maintaining the telecentric condition of the electron beam at the target plane throughout the entire range of deflection of the beam, assuring minimum errors due to target height variations.

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