专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

81. 发明公开

EP1463086A2 Method of fabricating a multipole lens, multipole lens, and charged-particle beam instrument equipped therewith 有权
标题翻译： Verfahren zur Herstellung einer Multipollinse，Multipollinse und damitausgerüsteterTeilchenstrahlapparat
公开(公告)号：EP1463086A2
公开(公告)日：2004-09-29
申请号：EP04251594.0
申请日：2004-03-19
申请人： Jeol Ltd.
发明人： Kawai, Eiji
IPC分类号： H01J37/10 , H01J9/02 , H01J37/141
CPC分类号： H01J37/141 , H01J9/236 , Y10S430/143
摘要： A method of efficiently fabricating a multipole lens using a simple procedure is offered. The multipole lens has plural polar elements (23) and an annular holding member (25). Each polar element has a held portion (22). The annular holding member is provided with through-holes (25a) for holding the held portions of the polar elements. A resin (24) is injected into the through-holes in the holding member via openings (32) formed in the holding member, the openings being in communication with the through-holes. The injected resin is cured, thus holding the held portions of the polar elements to the holding member within the through-holes.
The invention also extends to the multipole lens so fabricated, and to a charged-particle beam instrument comprising the multipole lens.
摘要翻译：提供了一种使用简单的程序有效地制造多极镜的方法。多极透镜具有多个极性元件（23）和环形保持构件（25）。每个极性元件具有保持部分（22）。环形保持构件设置有用于保持极性元件的保持部分的通孔（25a）。通过形成在保持构件中的开口（32）将树脂（24）注入到保持构件的通孔中，开口与通孔连通。注入的树脂被固化，从而将极性元件的保持部分保持在通孔内的保持构件上。本发明还延伸到如此制造的多极透镜，以及包括多极透镜的带电粒子束仪器。

82. 发明授权

EP0870316B1 COMPOSITE CONCENTRIC-GAP MAGNETIC LENS AND DEFLECTOR WITH CONICAL POLE PIECES 失效
标题翻译：同心柱和挠度锥形极片多片磁透镜
公开(公告)号：EP0870316B1
公开(公告)日：2003-02-19
申请号：EP97942507.1
申请日：1997-09-16
申请人： Applied Materials, Inc.
发明人： VENEKLASEN, Lee, H. , DeVore, William, J.
IPC分类号： H01J37/141
CPC分类号： H01J37/141
摘要： A composite magnetic lens and deflector for particle beam optical systems has a concentric gap and concentric conical lower pole pieces arranged to allow more accurate magnetic deflection. The flux generated by a solenoidal lens coil is shared by magnetically soft inner and higher saturation flux outer pole pieces to minimize saturation effects, while the flux generated by internal deflection coils is confined to magnetically soft inner pole pieces that minimize flux leakage and associated eddy current settling efffects. Shielding rings further contain leakage flux. The inner magnetic circuit is mounted and adhesively bonded to radial flexures to minimize thermal expansion drifts.

83. 发明公开

EP1018757A4 CHARGED PARTICLE BEAM EMITTING DEVICE 失效
标题翻译：货物承载器光束发射装置
公开(公告)号：EP1018757A4
公开(公告)日：2000-07-12
申请号：EP97941215
申请日：1997-09-24
申请人： HITACHI LTD
发明人： SATO MITSUGU , IWABUCHI YUKO
IPC分类号： H01J37/141 , H01J37/14
CPC分类号： H01J37/141 , H01J2237/1035 , H01J2237/1405
摘要： A charged particle beam emitting device with which an image of a sample can be observed with high resolution and in a well contrasted state by securing the moving distance of the sample or installing area of a sample stage. The emitting device which scans the sample with a charged particle beam emitted from a charged article source and accquires the scanned image of the sample based on charged particles obtained by the scanning is provided with an electromagnetic lens having a magnetic pole provided between the sample and charged particle source and at least one pair of magnetic poles which are arranged below the sample and constituted to generate a magnetic field between the poles. Therefore, the image of the sample can be observed with high resolution and in a well contrasted state while the moving distance of the sample is secured within a wide acceleration voltage range.

84. 发明公开

EP1018757A1 CHARGED PARTICLE BEAM EMITTING DEVICE 失效
标题翻译：货物承载器光束发射装置
公开(公告)号：EP1018757A1
公开(公告)日：2000-07-12
申请号：EP97941215.2
申请日：1997-09-24
申请人： Hitachi, Ltd.
发明人： SATO, Mitsugu , IWABUCHI, Yuko
IPC分类号： H01J37/14
CPC分类号： H01J37/141 , H01J2237/1035 , H01J2237/1405
摘要： The present invention relates to a charged particle beam irradiator which makes it possible to observe an image at a high resolution and preferable contrast while reserving an operating distance of a sample or an area for the installation of a sample stage.
In order to achieve this object, according to the present invention, a charged particle beam irradiator for scanning charged particle beams emitted by a charged particle source on a sample and to obtain a scanned image of said sample based on charged particles obtained as a result of said scanning is equipped with an electromagnetic lens having a magnetic pole provided between said sample and said charged particle source and at least a pair of magnetic poles provided under said sample and configured to generate a magnetic field therebetween.
The above-described configuration makes it possible to observe an image at a high resolution and preferable contrast while reserving an operating distance of the sample throughout a wide range of acceleration voltage.

85. 发明授权

EP0329097B1 Magnetic object lens of electron beam exposure apparatus 失效
标题翻译：磁物镜用于电子束曝光装置。
公开(公告)号：EP0329097B1
公开(公告)日：1994-08-31
申请号：EP89102564.5
申请日：1989-02-15
申请人： FUJITSU LIMITED
发明人： Yasuda, Hiroshi c/o Fujitsu Limited , Suzuki, Masahiko
IPC分类号： H01J37/141 , H01J37/30 , H01J37/317
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/141 , H01J37/3174 , H01J2237/0209 , H01J2237/1415

86. 发明公开

EP0580212A1 Variable axis stigmator 失效
标题翻译： Stigmator mit variabler Achse。
公开(公告)号：EP0580212A1
公开(公告)日：1994-01-26
申请号：EP93201985.4
申请日：1993-07-07
申请人： International Business Machines Corporation
发明人： Langer, Guenther Otto , Petric, Paul F.
IPC分类号： H01J37/153 , H01J37/141 , H01J37/30
CPC分类号： H01J37/141 , H01J37/153 , H01J37/3007
摘要： The magnetic axis of a stigmation yoke is varied from the mechanical axis of the stigmation yoke by differentially driving pairs of coils in a quadrupole configuration with currents which differ from a nominal stigmation current by approximately equal amounts, applied in opposite senses. Set-up procedures for electron beam deflection systems, such as in e-beam tools, are automated by emulating manual procedures in combination with electrical alteration of the magnetic axis of the stigmator yoke. Stigmation errors can also be collected under automated set- up procedure control to allow dynamic correction of astigmatism in electron beam deflection system. Electrically variability of the magnetic axis of the stigmator yoke also allows the placement of the stigmator yoke at a position in the electron optical column other than prior to deflection stages as well as improved freedom from positional and aberrational errors.
摘要翻译：通过以四极配置差异驱动线圈对，电流不同于以相反的方向施加的额定极化电流大约相等的电流，柱形磁轭的磁轴线从标称磁轭的机械轴线变化。用于电子束工具的电子束偏转系统的设置程序通过模拟手动过程与喷枪轭的磁轴的电气变化相结合而自动化。也可以在自动设置程序控制下收集标记误差，以允许电子束偏转系统中的散光动态校正。柱状磁轭的磁轴的电学可变性还允许将标称磁轭放置在电子光学柱的位置之外，而不是在偏转阶段之前，以及改进的位置和像差误差的自由度。

87. 发明公开

EP0418894A3 A scanning electron microscope and a method of displaying cross sectional profiles using the same 失效
标题翻译：扫描电子显微镜和使用其显示跨部分轮廓的方法
公开(公告)号：EP0418894A3
公开(公告)日：1992-01-02
申请号：EP90118131.3
申请日：1990-09-20
申请人： MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. , HOLON Co. Ltd.
发明人： Nomura, Noboru , Nakagawa, Hideo , Koizumi, Taichi , Harafuji, Kenji , Okuni, Mitsuhiro , Anazawa, Norimichi
IPC分类号： H01J37/141 , H01J37/28 , H01J37/20 , H01J37/153
CPC分类号： H01J37/141 , H01J37/153
摘要： A scanning electron microscope is disclosed in which an objective lens includes a first pole piece (18) and a second pole piece (21). The first pole piece is provided with a hole through which an electron beam (12) passes, and is disposed between an electron gun (11) for emitting the electron beam and the second pole piece. The second pole piece (21) has a planar portion on which a specimen (22) is placed, and the second pole piece being mounted on a supporting block (23) movable in a plane substantially perpendicular to the projecting direction of the electron beam.

88. 发明公开

EP0389342A1 Lentille électromagnétique composite à focale variable 失效
标题翻译：多电磁透镜具有可变焦距。
公开(公告)号：EP0389342A1
公开(公告)日：1990-09-26
申请号：EP90400714.3
申请日：1990-03-16
申请人： CAMECA
发明人： Rouberol, Jean-Michel , Tong, Mathias
IPC分类号： H01J37/141 , H01J3/22
CPC分类号： H01J37/141
摘要： La lentille est formée par l'association de deux lentilles électromagnétiques partageant un même circuit magnétique (4). La première lentille est traversée par un canal central (10) et comporte l'une de ses extrémités un entrefer annulaire (8) qui coupe le canal central suivant une direction de plan perpendiculaire à l'axe optique (1).
La deuxième lentille entoure l'entrefer annulaire 8 de la première lentille, elle comporte un entrefer annulaire (15) délimité par deux lèvres dont les parois sont de révolution autour de l'axe optique (1) et dont les bords (5b, 14) ont la forme de deux surfaces planes situées dans un même plan perpendiculaire à l'axe optique (1). Des bobines d'induction (2 et 3) permettent de faire varier le flux magnétique des entrefers (8) et (15).
Application : microscope électronique à balayage et de test, sonde électronique.

89. 发明公开

EP0330310A3 Integrated electron optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope 失效
标题翻译：用于环境扫描电子显微镜的集成电子光学/差分泵浦/成像信号检测系统
公开(公告)号：EP0330310A3
公开(公告)日：1990-08-08
申请号：EP89300744.3
申请日：1989-01-26
申请人： ELECTRO-SCAN CORPORATION
发明人： Danilatos, Gerasimos D. , Lewis, George C.
IPC分类号： H01J37/28 , H01J37/20 , H01J37/244
CPC分类号： H01J37/244 , H01J37/141 , H01J37/16 , H01J37/28 , H01J2237/2448 , H01J2237/2449 , H01J2237/24507 , H01J2237/2608
摘要： This invention provides for an integrated electron optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope (ESEM). The ESEM includes a substantially cylindrical objective lens magnetic housing containing an axially disposed vacuum liner tube and containing means for magnetically focusing a beam of electrons passing through said liner tube. An annular ring comprised of magnetic materials abuts said magnetic housing at the lower end thereof and contains at least two pumping ports therein located axially with respect to one another. At least two annular nonmagnetic diaphragms and a final magnetic annular diaphragm are attached to the annular ring at different axial locations and extending inwardly therefrom. The diaphragms define at least two interior passages which each communicate with one of the pumping ports formed in the annular ring. A combination aperture holder and electron detector is releasably received and sealed with in the central openings of the annular diaphragms. The aperture holder has apertures therein for the passage of the electron beam and gas into and out of the specimen chamber of the ESEM and the interior passages and has electron detector means associated with the lower portion thereof.

90. 发明公开

EP0329097A3 Magnetic object lens of electron beam exposure apparatus 失效
标题翻译：电子束曝光装置的磁性物镜
公开(公告)号：EP0329097A3
公开(公告)日：1990-06-27
申请号：EP89102564.5
申请日：1989-02-15
申请人： FUJITSU LIMITED
发明人： Yasuda, Hiroshi c/o Fujitsu Limited , Suzuki, Masahiko
IPC分类号： H01J37/141 , H01J37/30 , H01J37/317
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/141 , H01J37/3174 , H01J2237/0209 , H01J2237/1415
摘要： A magnetic object lens for electron beam exposure apparatus, an output or lower pole piece of which, facing an object to be exposed in the electron beam exposure apparatus, has a bore therethrough, through which the electron beam passes to the object, which bore provides a restricted opening, for the electron beam to pass through the pole pieces, corresponding to the restricted range and direction of scanning of the electron beam in the apparatus, thereby the allow scanning of the electron beam on the object but to substatially inhibit or restrict leakage of magnetic flux from the lens towards the object.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式