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1. 发明授权

EP0330310B1 Integrated electron optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope 失效
标题翻译：用于环境扫描电子显微镜的集成电子光学/差分泵浦/成像信号检测系统
公开(公告)号：EP0330310B1
公开(公告)日：1993-05-26
申请号：EP89300744.3
申请日：1989-01-26
申请人： ELECTRO-SCAN CORPORATION
发明人： Danilatos, Gerasimos D. , Lewis, George C.
IPC分类号： H01J37/28 , H01J37/20 , H01J37/244
CPC分类号： H01J37/244 , H01J37/141 , H01J37/16 , H01J37/28 , H01J2237/2448 , H01J2237/2449 , H01J2237/24507 , H01J2237/2608

2. 发明公开

EP0330310A3 Integrated electron optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope 失效
标题翻译：用于环境扫描电子显微镜的集成电子光学/差分泵浦/成像信号检测系统
公开(公告)号：EP0330310A3
公开(公告)日：1990-08-08
申请号：EP89300744.3
申请日：1989-01-26
申请人： ELECTRO-SCAN CORPORATION
发明人： Danilatos, Gerasimos D. , Lewis, George C.
IPC分类号： H01J37/28 , H01J37/20 , H01J37/244
CPC分类号： H01J37/244 , H01J37/141 , H01J37/16 , H01J37/28 , H01J2237/2448 , H01J2237/2449 , H01J2237/24507 , H01J2237/2608
摘要： This invention provides for an integrated electron optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope (ESEM). The ESEM includes a substantially cylindrical objective lens magnetic housing containing an axially disposed vacuum liner tube and containing means for magnetically focusing a beam of electrons passing through said liner tube. An annular ring comprised of magnetic materials abuts said magnetic housing at the lower end thereof and contains at least two pumping ports therein located axially with respect to one another. At least two annular nonmagnetic diaphragms and a final magnetic annular diaphragm are attached to the annular ring at different axial locations and extending inwardly therefrom. The diaphragms define at least two interior passages which each communicate with one of the pumping ports formed in the annular ring. A combination aperture holder and electron detector is releasably received and sealed with in the central openings of the annular diaphragms. The aperture holder has apertures therein for the passage of the electron beam and gas into and out of the specimen chamber of the ESEM and the interior passages and has electron detector means associated with the lower portion thereof.

3. 发明公开

EP0330310A2 Integrated electron optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope 失效
标题翻译：在集成系统相结合的电子光学差动泵浦装置及图像信号记录用于原位扫描电子显微镜。
公开(公告)号：EP0330310A2
公开(公告)日：1989-08-30
申请号：EP89300744.3
申请日：1989-01-26
申请人： ELECTRO-SCAN CORPORATION
发明人： Danilatos, Gerasimos D. , Lewis, George C.
IPC分类号： H01J37/28 , H01J37/20 , H01J37/244
CPC分类号： H01J37/244 , H01J37/141 , H01J37/16 , H01J37/28 , H01J2237/2448 , H01J2237/2449 , H01J2237/24507 , H01J2237/2608
摘要： This invention provides for an integrated electron optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope (ESEM). The ESEM includes a substantially cylindrical objective lens magnetic housing containing an axially disposed vacuum liner tube and containing means for magnetically focusing a beam of electrons passing through said liner tube. An annular ring comprised of magnetic materials abuts said magnetic housing at the lower end thereof and contains at least two pumping ports therein located axially with respect to one another. At least two annular nonmagnetic diaphragms and a final magnetic annular diaphragm are attached to the annular ring at different axial locations and extending inwardly therefrom. The diaphragms define at least two interior passages which each communicate with one of the pumping ports formed in the annular ring. A combination aperture holder and electron detector is releasably received and sealed with in the central openings of the annular diaphragms. The aperture holder has apertures therein for the passage of the electron beam and gas into and out of the specimen chamber of the ESEM and the interior passages and has electron detector means associated with the lower portion thereof.
摘要翻译：本发明提供一种综合电子光学/差压抽气/成像信号检测系统在环境扫描电子显微镜（ESEM）。该ESEM具有大致圆筒状的物镜磁屏蔽罩在轴向设置的真空衬管和含用于磁聚焦穿过所述衬管的电子束。由磁性材料的环形设计环抵接在其下端，所述磁性外壳，并包含至少两个泵送端口位于其中轴向相对于彼此。的至少两个环形设计非磁性膜片和最终磁性环形设计膜片连接到在不同的轴向位置处的环形设计环和延伸向内那里。隔膜限定至少两个内部通道，每个具有在环形设计环形成的泵送端口中的一个进行通信。的组合孔座和电子检测器被可释放地接收，并与在环形设计膜片的中央开口部密封。光圈保持器具有孔，以使电子束的通路和气体流入和流出的ESEM样品室和所述内部通道，并且具有电子检测器同其下部相关联的装置。

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