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    • 67. 发明公开
    • ANTENNA FOR PLASMA PROCESSING APPARATUS, AND PLASMA PROCESSING APPARATUS USING ANTENNA
    • 天线FÜREINE PLASMABEHANDLUNGSVORRICHTUNG UND PLASMABEHANDLUNGSVORRICHTUNG MIT DER ANTENNE
    • EP2753154A1
    • 2014-07-09
    • EP11871785.9
    • 2011-08-30
    • EMD Corporation
    • SETSUHARA, YuichiEBE, Akinori
    • H05H1/46C23C16/44C23C16/509H01L21/205H01L21/3065
    • H01J37/32651C23C14/358C23C16/509H01J37/32082H01J37/321H01J37/3211H01J2237/0266H05H1/46H05H2001/4667
    • Provided is a radio-frequency antenna with which the blocking or weakening of a radio-frequency induction electric field will not occur even if a thin-film material deposits on the antenna surface. A radio-frequency antenna 10 includes a linear antenna conductor 13, a dielectric protective pipe 14 provided around the antenna conductor 13, and a deposit shield 15 provided around the protective pipe 14, the deposit shield 15 covering at least one portion of the protective pipe 14 and having at least one opening 153 on any line extending along the length of the antenna conductor 13. Although the thin-film material adheres to the surfaces of the protective pipe and the deposit shield, the deposited substance has at least one discontinuous portion in the longitudinal direction of the antenna conductor. Therefore, in the case where the thin-film material is electrically conductive, the blocking of the radio-frequency induction electric field is prevented. In the case where the thin-film material is not electrically conductive, an attenuation in the intensity of the radio-frequency induction electric field is suppressed.
    • 提供一种射频天线,即使薄膜材料沉积在天线表面上也不会发生射频感应电场的阻塞或弱化。 射频天线10包括线状天线导体13,设置在天线导体13周围的介质保护管14和设置在保护管14周围的沉积屏蔽15,沉积屏蔽15覆盖保护管的至少一部分 14,并且在沿着天线导体13的长度延伸的任何线上具有至少一个开口153.尽管薄膜材料粘附到保护管和沉积屏蔽的表面上,但沉积物质具有至少一个不连续部分 天线导体的纵向。 因此,在薄膜材料导电的情况下,防止了射频感应电场的阻塞。 在薄膜材料不导电的情况下,抑制了射频感应电场强度的衰减。
    • 68. 发明公开
    • PLASMA GENERATING DEVICE, AND INTERNAL COMBUSTION ENGINE
    • VASBRENNUNGSMOTOR公司的PLASMAERZEUGUNGSVORRICHTUNG
    • EP2743496A1
    • 2014-06-18
    • EP12815258.4
    • 2012-07-13
    • Imagineering, Inc.
    • IKEDA Yuji
    • F02P23/04F02P3/01H05H1/24
    • F02P23/045F02M27/042F02P3/01F02P3/045F02P9/007F02P15/00F02P23/04H05H1/46H05H1/52H05H2001/463
    • The size of the plasma produced by a plasma-generating device that generates plasma using electromagnetic (EM) radiation is enlarged. The plasma-generating device has an EM-wave-generating device that generates EM radiation, a radiation antenna that emits the EM radiation supplied from the EM-wave-generating device to a target space, and a receiving antenna located near the radiation antenna. The receiving antenna is grounded such that an adjacent portion that is close to the radiation antenna has a higher voltage while the EM radiation is emitted from the radiation antenna. The plasma-generating device generates plasma in the target space near the radiation antenna and the adjacent portion by emitting EM radiation from the radiation antenna.
    • 通过使用电磁(EM)辐射产生等离子体的等离子体产生装置产生的等离子体的尺寸被扩大。 等离子体产生装置具有产生EM辐射的EM波发生装置,将从EM波产生装置提供的EM辐射发射到目标空间的辐射天线和位于辐射天线附近的接收天线。 接收天线接地,使得靠近辐射天线的相邻部分具有较高的电压,同时从辐射天线发射EM辐射。 等离子体产生装置通过从辐射天线发射EM辐射而在辐射天线和相邻部分附近的目标空间中产生等离子体。