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1. 发明公开

EP2785153A3 Plasma waveguide using step part and block part 有权转让
标题翻译：等离子体波导与裆部分和块部
公开(公告)号：EP2785153A3
公开(公告)日：2014-11-05
申请号：EP14161587.2
申请日：2014-03-25
申请人： Triple Cores Korea Co., Ltd.
发明人： Kim, Ik Nyun , Kang, Sung Ok , Eum, Min Heum
IPC分类号： H05H1/46 , H01J37/32 , H01P5/02 , H03C7/02
CPC分类号： H01J37/32229 , H01P5/024 , H03H7/38 , H05H1/46 , H05H2001/4622
摘要： In a magnetron and a plasma waveguide through which a microwave oscillated from the magnetron moves, there is provided a plasma waveguide including a plurality of step parts formed at any one side on an inner side surface of the waveguide, and a block part of a predetermined height formed at any other side on the inner side surface of the waveguide, wherein the block part is formed at a side opposite to a boundary part between the plurality of step parts.
The present disclosure forms the step part having a height decreasing to a predetermined level formed within the waveguide, and provides the block part of the predetermined height at the inner side surface of the waveguide opposite to the step part of the waveguide. Thereby, a problem with microwave leaks involved in a 3-stub system penetrating through an overall waveguide and a problem with damage to an external system due to microwaves traveling outward may be effectively solved. Further, because the block part of the predetermined height provided at the inner side surface of the waveguide is located at an opposite surface to the step part, an effect of microwave concentration within the waveguide having a gradual reduction in height in a microwave propagation direction is maximized.

2. 发明授权

EP2785153B1 Plasma waveguide using step part and block part 有权转让
公开(公告)号：EP2785153B1
公开(公告)日：2019-05-01
申请号：EP14161587.2
申请日：2014-03-25
申请人： Triple Cores Korea Co., Ltd.
发明人： Kim, Ik Nyun , Kang, Sung Ok , Eum, Min Heum
IPC分类号： H05H1/46 , H01J37/32 , H01P5/02 , H03C7/02

3. 发明公开

EP2785153A2 Plasma waveguide using step part and block part 有权转让
标题翻译：使用台阶部分和块部分的等离子体波导
公开(公告)号：EP2785153A2
公开(公告)日：2014-10-01
申请号：EP14161587.2
申请日：2014-03-25
申请人： Triple Cores Korea Co., Ltd.
发明人： Kim, Ik Nyun , Kang, Sung Ok , Eum, Min Heum
IPC分类号： H05H1/46
CPC分类号： H01J37/32229 , H01P5/024 , H03H7/38 , H05H1/46 , H05H2001/4622
摘要： In a magnetron and a plasma waveguide through which a microwave oscillated from the magnetron moves, there is provided a plasma waveguide including a plurality of step parts formed at any one side on an inner side surface of the waveguide, and a block part of a predetermined height formed at any other side on the inner side surface of the waveguide, wherein the block part is formed at a side opposite to a boundary part between the plurality of step parts.
The present disclosure forms the step part having a height decreasing to a predetermined level formed within the waveguide, and provides the block part of the predetermined height at the inner side surface of the waveguide opposite to the step part of the waveguide. Thereby, a problem with microwave leaks involved in a 3-stub system penetrating through an overall waveguide and a problem with damage to an external system due to microwaves traveling outward may be effectively solved. Further, because the block part of the predetermined height provided at the inner side surface of the waveguide is located at an opposite surface to the step part, an effect of microwave concentration within the waveguide having a gradual reduction in height in a microwave propagation direction is maximized.
摘要翻译：在从磁控管振荡的微波移动的磁控管和等离子体波导管中，提供了一种等离子体波导管，该等离子体波导管包括在波导管的内侧表面上的任意一侧形成的多个台阶部分，在所述波导的内侧表面的任意另一侧形成的高度，其中所述阻挡部分形成在与所述多个台阶部分之间的边界部分相对的一侧。本公开形成高度降低到波导内形成的预定高度的台阶部分，并且在波导的与波导的台阶部分相对的内侧表面处提供预定高度的块部分。因此，可以有效解决涉及穿过整个波导的三根系统中的微波泄漏的问题以及由于微波向外传播而导致的对外部系统的损坏问题。此外，因为设置在波导内侧表面处的预定高度的块部分位于与台阶部分相对的表面处，所以在微波传播方向上高度逐渐减小的波导内的微波集中的效果是最大化。

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