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51. 发明授权

EP0843175B1 Scanning probe microscope and signal processing apparatus 失效
标题翻译：扫描探针显微镜和信号处理装置
公开(公告)号：EP0843175B1
公开(公告)日：2004-09-15
申请号：EP97203486.2
申请日：1997-11-10
申请人： HITACHI CONSTRUCTION MACHINERY CO., LTD.
发明人： Morimoto, Takafumi , Murayama, Ken , Husaka, Sumio
IPC分类号： G01N27/00 , G01B7/34
CPC分类号： G01Q10/06 , G01Q20/02 , G01Q30/06 , G01Q60/38 , Y10S977/851 , Y10S977/852

52. 发明公开

EP1257780A1 METHOD FOR INCREASING THE MEASUREMENT INFORMATION AVAILABLE FROM A TRANSMISSION ELECTRON MICROSCOPE AND A TRANSMISSION ELECTRON MICROSCOPY DEVICE 审中-公开
标题翻译：法用于提高测量信息的电子和电子显微镜
公开(公告)号：EP1257780A1
公开(公告)日：2002-11-20
申请号：EP01906496.3
申请日：2001-02-20
申请人： Nanofactory Instruments AB
发明人： OLIN, Hakan
IPC分类号： G01B7/34 , G01B21/30 , H01J37/26
CPC分类号： G01Q30/02 , H01J37/26 , Y10S977/852
摘要： This invention relates to a method for increasing the measurement information available from a transmission electron microscope, said information relating to a measurement sample, comprising the step of: including, in said transmission electron microscope, an atomic force microscopy device. This invention also relates to a transmission electron microscopy device, characterised in that a transmission electron microscope is combined with an atomic force microscope, positioned within said transmission electron microscope. Finally, the invention relates to a device for insertion in a transmission electron microscope, characterised in that said device comprises an atomic force microscopy device.

53. 发明公开

EP1135691A4 ELECTROSTATIC FORCE DETECTOR WITH CANTILEVER AND SHIELD 有权
标题翻译：大臂和屏蔽静态功率探头
公开(公告)号：EP1135691A4
公开(公告)日：2002-03-13
申请号：EP99956922
申请日：1999-11-05
申请人： TREK INC
发明人： UEHARA TOSHIO , WILLIAMS BRUCE T , ITOH AKIYOSHI , NAKAGAWA KATSUJI , TANI MANABU
IPC分类号： G01R29/12 , G01B20060101 , G01B7/06 , G01Q20/00 , G01Q60/30 , G01R20060101
CPC分类号： G01Q60/30 , Y10S977/852 , Y10S977/864
摘要： An electrostatic force microscope for measuring electrostatic force of a sample (40) under test including a detector (10) comprising a cantilever arm (12) having a tip formation (14) at one end and located so that electrostatic force is induced at the tip due to electrostatic charge on the sample under test, an optical system (20) for transforming bending of the cantilever arm due to electrostatic force induced at the tip into an electrical signal containing a frequency component of the electrostatic force induced at the tip, a source (92) for applying bias voltage to the detector, a detector circuit (30) for detecting the frequency component of the electrostatic force induced at the detector tip so that a measurement of electrostatic force on the sample under test can be obtained, and an electrostatic shield operatively associated with the cantilever arm.

54. 发明授权

EP0720216B1 Linewidth metrology of integrated circuit structures 失效
标题翻译：集成电路结构的线宽计测
公开(公告)号：EP0720216B1
公开(公告)日：2001-10-17
申请号：EP95309307.7
申请日：1995-12-20
申请人： AT&T Corp.
发明人： Bindell, Jeffrey B. , Schrope, Dennis E. , Stevie, Fred A. , Dare, Richard J. , Plew, Larry E.
IPC分类号： H01L21/66
CPC分类号： H01L22/20 , H01L22/12 , Y10S977/852 , Y10S977/86 , Y10S977/869 , Y10S977/881 , Y10S977/888

55. 发明公开

EP1025416A1 METHOD AND APPARATUS FOR OBTAINING IMPROVED VERTICAL METROLOGY MEASUREMENTS 审中-公开
标题翻译：方法和设备得到改良垂直测
公开(公告)号：EP1025416A1
公开(公告)日：2000-08-09
申请号：EP98951955.8
申请日：1998-09-23
申请人： VEECO INSTRUMENTS INC.
发明人： BABCOCK, Kenneth, L. , ELINGS, Virgil, B. , GURLEY, John, A. , KJOLLER, Kevin
IPC分类号： G01B5/28
CPC分类号： G01Q10/06 , G01B7/34 , G01Q30/04 , Y10S977/852
摘要： A probe-based surface characterization or metrology instrument accounts for errors in the vertical positioning of its probe and errors in detecting the vertical position of its probe. These errors are accounted for by subtracting reference scan data from measurement scan data. The measurement scan data is obtained from an area that includes the feature of interest as well as a portion of a reference area that includes the feature of interest, as well as a portion of the reference area which is featureless. The reference scan data is obtained from an area that includes the reference area and that, preferably, excludes the features of interest. This procedure is particularly well-suited for measuring pole tip recession in a magnetic head.

56. 发明公开

EP0899561A1 Microscope system equipped with an electron microscope and a scanning probe microscope 有权
标题翻译： Mikroskopsystem mit Elektronenmikroskop und Rastersondenmikroskop
公开(公告)号：EP0899561A1
公开(公告)日：1999-03-03
申请号：EP98115635.9
申请日：1998-08-19
申请人： Japan Science and Technology Corporation
发明人： Ohnishi, Hideaki , Kondo, Yukihito , Takayanagi, Kunio
IPC分类号： G01N27/00
CPC分类号： G01Q30/02 , H01J2237/204 , H01J2237/28 , Y10S977/852 , Y10S977/86 , Y10S977/864 , Y10S977/871
摘要： The present invention is to provide a microscopic system by which a simultaneous observation at an ultra high vacuum condition by an electron microscope and by a scanning probe microscope is possible in an ultra high vacuum electron microscope chamber 9 equipped with an observation stage 3, to which an ultra high vacuum chamber 1 for a scanning probe microscope equipping with a scanning probe microscope holder 2 in which scanning probe microscope is contained and a specimen treatment chamber 5 possessing a specimen holder 4 on which a specimen is held are connected. Said each chamber of microscopic system can be separately exhausted to the ultra high vacuum level and the specimen holder and the scanning probe microscope holder can voluntarily be fixed to said observation stage and be removed from said observation stage.
摘要翻译：本发明是提供一种微观系统，在具有观察台3的超高真空电子显微镜室9中，通过电子显微镜和扫描探针显微镜在超高真空条件下同时观察是可能的，其中用于扫描探针显微镜的超高真空室1与装有扫描探针显微镜架2的扫描探针显微镜夹持器2和具有保持有试样的试样架4的试样处理室5相连接。所述每个微观系统室可以分别耗尽到超高真空水平，并且试样架和扫描探针显微镜支架可以自愿地固定到所述观察台并从所述观察台移除。

57. 发明公开

EP0869354A1 Method of measuring exchange force and method of evaluating magnetism using the exchange force 失效
标题翻译：一种用于测量DSER Austauchwechselwirkung和方法，用于使用所述交换相互作用确定所述磁性方法
公开(公告)号：EP0869354A1
公开(公告)日：1998-10-07
申请号：EP98302589.1
申请日：1998-04-02
申请人： HOKKAIDO UNIVERSITY
发明人： Mukasa, Koichi , Hayakawa, Kazunohu , Sueoka, Kazuhisa , Nakamura, Kohji , Tazuke, Yuichi, c/o Iharaki University , Hasegawa, Hideo, c/o Tokyo Gakugei University , Oguchi, Tamio, c/o Hiroshima University
IPC分类号： G01N27/00 , G01B7/34
CPC分类号： G01Q60/08 , G01Q60/32 , G01Q60/38 , G01Q60/54 , H01F41/303 , Y10S977/852
摘要： In a method of measuring an exchange force between a specimen and a probe, the specimen and probe are faced to each other with a distance within a close proximity or RKKY-type exchange interaction region from a distance at which conduction electron clouds begin to be overlapped with each other to a distance at which localized electron clouds are not substantially overlapped with each other, a relative displacement of the specimen and probe is detected to measure a first force under such a condition that directions of magnetic moments of said specimen surface and probe are in parallel with each other to derive a first force and under such a condition that directions of magnetic moments of said specimen surface and probe are in anti-parallel with each other to derive a second force. An exchange force is derived as a difference between said first and second forces. Magnetic property of the specimen can be evaluated on the basis of the thus measured exchange force.
摘要翻译：在试样和，试样和探头之间的测量探头在交换力的方法都面临到彼此的距离从距离，其中传导电子云开始重叠紧密接近或RKKY型交换交互作用区内 witheachother在定域电子云的距离基本上不与海誓山盟重叠，检测试样和探头的相对位移来测量被调查的第一力的条件下做了所述样本表面和探头的磁矩方向是在平行海誓山盟以导出第一力和研究中的条件没有所述样本表面和探头的磁矩方向是反平行的彼此以导出第二力。的交换力推导在所述第一和第二力之间的差。样品的磁属性可以交换这样测力的基础上进行评估。

58. 发明授权

EP0600452B1 Scanning probe instrument using stored topographical data 失效
标题翻译：扫描探针装置，其利用所存储的地形数据的
公开(公告)号：EP0600452B1
公开(公告)日：1998-09-09
申请号：EP93119307.2
申请日：1993-11-30
申请人： DIGITAL INSTRUMENTS, INC.
发明人： Elings, Virgil B. , Gurley, John A.
IPC分类号： G01B7/34 , G01N27/00
CPC分类号： G01Q10/06 , Y10S977/851 , Y10S977/852

59. 发明公开

EP0800081A1 Method of performing fine working 失效
标题翻译： Verfahren und Vorrichtung zur elektrochemischen Feinbearbeitung von Materialien
公开(公告)号：EP0800081A1
公开(公告)日：1997-10-08
申请号：EP97302155.3
申请日：1997-03-27
申请人： SEIKO INSTRUMENTS INC.
发明人： Suda, Masayuki, c/o Seiko Instruments Inc , Sakuhara, Toshihiko, c/o Seiko Instruments Inc , Ataka, Tatsuaki, c/o Seiko Instruments Inc
IPC分类号： G01N27/416 , C25D21/12 , C25F3/00
CPC分类号： C25D21/12 , C25F3/00 , Y10S977/852 , Y10S977/855
摘要： An electrochemical cell is constructed with the use of a four-electrode system that comprises a probe 1, material to be worked 2, reference electrode 10 and outer electrode 11. Respective potentials of the probe 1 and material to be worked 2 are set to be at potentials that cause no electrochemical reaction to occur. Then, the Z-axial position of the probe 1 is controlled so that the tunnel current that flows between the probe 1 and the material to be worked 2 may be fixed. Then, while the probe 1 is being moved along a working line, the Z-axial position of the probe 1 is stored continuously in a memory device 8 whereby storage is performed of the irregularities configuration and inclinations of the material to be worked 2. When working is performed, the electrochemical cell is reconstructed in the form of a three-electrode system that comprises the probe 1, material to be worked 2, and reference electrode 10, whereby, the probe 1 is again moved along the working line while controlling the Z-axial position of the probe 1 to be kept at the stored position or a position that has been obtained by adding thereto a certain offset. Simultaneously, a voltage is applied between the probe 1 and the material to be worked 2 to thereby perform the working operation along the working line through an electrochemical reaction.
摘要翻译：使用包括探针1，待加工材料2，参比电极10和外部电极11的四电极系统构建电化学电池。将探针1和待加工材料2的各个电位设定为在不会发生电化学反应的电位下。然后，控制探针1的Z轴位置，使得在探针1和待加工材料2之间流动的隧道电流可以被固定。然后，当探头1沿着工作线移动时，探针1的Z轴位置被连续地存储在存储装置8中，从而进行不规则结构的存储和待加工材料的倾斜2.当进行工作时，电化学电池以包括探针1，待加工材料2和参考电极10的三电极系统的形式重建，由此，探针1再次沿着工作线移动，同时控制要保持在存储位置的探针1的Z轴位置或通过加上某个偏移而获得的位置。同时，在探针1和待加工材料2之间施加电压，由此通过电化学反应沿着工作线进行加工操作。

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