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41. 发明公开

EP1196939A4 OBJECT INSPECTION AND/OR MODIFICATION SYSTEM AND METHOD 审中-公开
标题翻译：装置和方法用于分析和/或财产变化
公开(公告)号：EP1196939A4
公开(公告)日：2002-09-18
申请号：EP00946927
申请日：2000-06-30
申请人： GEN NANOTECHNOLOGY LLC
发明人： KLEY VICTOR B
IPC分类号： B82B3/00 , G01N23/00 , G01Q20/02 , G01Q70/02 , G01Q80/00 , G21K7/00 , H01J37/26 , H01L21/00 , G12B21/20
CPC分类号： G01Q20/02 , G01Q20/00 , G01Q60/04 , G01Q60/06 , G01Q70/02 , G01Q70/06 , G01Q80/00
摘要： A scanning probe microscope system (100) includes an objective lens (147), a clamping circuit (404), a tip deflection measurement circuit (421), a cantilever (136), and a probe (137) for modifying and inspecting an object (102) disposed on a stage (129).

42. 发明公开

EP1113980A1 APERTUR IN EINEM HALBLEITERMATERIAL SOWIE HERSTELLUNG DER APERTUR UND VERWENDUNG 有权
标题翻译：孔径的半导体材料和生产光圈和使用
公开(公告)号：EP1113980A1
公开(公告)日：2001-07-11
申请号：EP99950524.1
申请日：1999-09-10
申请人： Universität Gesamthochschule Kassel
发明人： KASSING, Rainer , MIHALCEA, Christophe , OESTERSCHULZE, Egbert
IPC分类号： B81B1/00 , G01B7/34
CPC分类号： B81C1/00087 , B81B2201/047 , B81B2203/0361 , B81C2201/0132 , G01Q60/06 , G01Q60/22 , G01Q60/38 , G02B27/58 , H01J9/02 , H01J37/09
摘要： The invention relates to a method for producing an aperture (10) in a semiconductor material (12) comprising the following steps: Preparing a semiconductor wafer (14), for example, a (100)-oriented silicon wafer having an upper surface (16) and a lower surface (18); producing a cavity (20) with a side wall (22) in the upper surface (16) of the semiconductor wafer (14) by partially etching said upper surface (16), whereby the cavity (20) comprises a closed bottom area (24) which faces the lower surface (18) and which preferably has, in particular, a convex or, in particular, a concave corner or edge or a curvature of this type. After depositing an oxide layer (26) on the semiconductor material (12) at least in the area of the cavity (20) by oxidizing the semiconductor material (12), whereby the oxide layer (26) preferably comprises an inhomogeneity (28) in the bottom area (24), the semiconductor material (14) is selectively etched back on the lower surface (18) of the semiconductor wafer (14) until at least the oxide layer (26) located in the bottom area (24) is exposed. Afterwards, the exposed oxide layer (26) is etched until it is at least severed. In addition, the invention relates to an aperture (10) in a semiconductor material (12) especially produced according to the inventive method, and to different uses of such an aperture (10).

43. 发明公开

EP0846932A3 Scanning near-field optic/atomic force microscope 失效
标题翻译：光近场原子力显微镜扫描
公开(公告)号：EP0846932A3
公开(公告)日：2000-12-20
申请号：EP98101571.2
申请日：1994-10-28
申请人： SEIKO INSTRUMENTS INC.
发明人： Chiba, Norio , Muramatsu, Hiroshi
IPC分类号： G01B7/34 , G02B21/00
CPC分类号： G01Q60/06 , G01Q60/22 , G01Q60/38
摘要： The present invention relates to a scanning near-field optic/atomic force microscope adapted to observe topography and optical characteristics of a sample (13), said microscope comprising: a cantilever (2) having a probe (1) in an end portion thereof consisting primarily of a lightpropagating medium having an optical opening for passing light, said optical opening forming a sharp front end; a light-transmitting device (6) having a light-transmitting optical opening in both ends thereof, wherein one of said ends of said light-transmitting device is disposed close to a back surface of said probe (1); a light source (10) and optics (11, 12) for generating a light to measure a feature of the sample (13) and for directing generated light to the sample (13); a photoelectric converter device (7) and optics for receiving light from the sample (13); a deflection-detecting means for optically detecting deflection of said cantilever (2), comprising a light source (3) for generating a laser light for use of deflection-detection; a condenser lens (4) for directing the laser light to a back surface of said cantilever (2); and another photoelectric converter device (5) and optics for detecting reflected light from back surface of said cantilever (2); a motion mechanism (21, 22) for making a relative movement between the sample and said probe; and a gap control means (23) for controlling a distance between the surface of the sample (13) and the sharp front end of said probe (1); wherein the the probe (1) of the cantilever (2) comprises an overhang portion (43) and the condenser lens (4) directs the laser light to said overhang portion (43).

44. 发明公开

EP0853251A3 Microprobe chip for detecting evanescent waves and method for making the same, probe provided with the microprobe chip and method for making the same, and evanescent wave detector, nearfield scanning optical microscope, and information regenerator provided with the microprobe chip 失效
标题翻译：微探针芯片用于感测所述倏逝波和方法，用于其生产，用该探针探针芯片及其制造方法，以及渐逝波探头，近场光学扫描显微镜，和Informationsregenerator与微探针芯片
公开(公告)号：EP0853251A3
公开(公告)日：2000-02-23
申请号：EP98100404.7
申请日：1998-01-12
申请人： CANON KABUSHIKI KAISHA
发明人： Yagi, Takayuki
IPC分类号： G02B21/00 , G01B7/34
CPC分类号： G01Q60/06 , G01Q60/22 , G01Q80/00 , Y10S977/868
摘要： A microprobe chip for detecting evanescent waves includes a photoconductive material and a substrate for supporting the photoconductive material. The photoconductive material is connected to electrodes formed on the substrate. A method for making a microprobe chip for detecting evanescent waves includes the following steps of: forming a film comprising a photoconductive material on a peeling layer of a first substrate, the film having a shape of the microprobe chip; and transferring the film on the peeling layer onto a junction layer provided on a second substrate. A method for making a probe provided with a microprobe chip for detecting evanescent waves includes the following steps of: forming a film comprising a photoconductive material and having the shape of the microprobe chip on a peeling layer of a first substrate; forming a thin film cantilever on a second substrate; and transferring the film on the peeling layer onto a junction layer formed on the thin film cantilever.

45. 发明公开

EP0880043A3 Scanning near field optical microscope 失效
标题翻译： Nahfeldrastermikroskop
公开(公告)号：EP0880043A3
公开(公告)日：1999-02-10
申请号：EP98304109.6
申请日：1998-05-22
申请人： SEIKO INSTRUMENTS INC.
发明人： Sato, Katsuaki , Mitsuoka, Yasuyuki , Nakajima, Kunio
IPC分类号： G02B21/00 , G01B7/34 , G01N21/21 , G02B6/10
CPC分类号： G01N21/21 , G01Q20/02 , G01Q60/06 , G01Q60/22 , Y10S977/862
摘要： In a combined scanning near field optical microscope (Nsom) and atomic force microscope (AFM), an optical fibre probe (1) which has a minute opening on the top of a sharpened tip is brought close to a sample (2), and the probe is moved by a piezo actuator (15) along x- and y-axis directions so that a minute spot beam emanating from the minute opening can scan over the sample. For circular polarisation modulation to be incorporated in the process, a beam is given an optical delay, before it is incident on the optical fibre probe (1), changing at a frequency of p (Hz) by means of a piezo-optical modulator (10). A minute spot beam emanating from the minute opening passes through the sample (2) to be received after passage through the sample (2) to be received after passage through an analyser (5) by a light receiving element (7). The output from the light receiving element (7) is fed to a lock-in amplifier, p- and 2p-components are separated through lock-in rectification, and they are rendered into images by a controller (16). It is used for measuring the distribution of magneto-optical effects.
摘要翻译：在组合扫描近场光学显微镜（Nsom）和原子力显微镜（AFM）中，在尖锐的顶部具有微小开口的光纤探针（1）靠近样品（2），并且探头通过压电致动器（15）沿x轴和y轴方向移动，使得从分钟开始发出的微小点光束可以扫描样品。对于要在该过程中并入的圆偏振调制，在光束入射到光纤探针（1）之前，光束被给予光学延迟，通过压电光调制器以p（Hz）的频率改变 10）。从微小开口发出的微小光束通过样品（2），在通过样品（2）之后被接收，以便在通过光谱接收元件（7）通过分析器（5）之后被接收。来自光接收元件（7）的输出被馈送到锁定放大器，p和2p分量通过锁定整流分离，并且它们被控制器（16）渲染成图像。它用于测量磁光效应的分布。

46. 发明公开

EP0884617A1 Scanning near-field optic/atomic-force microscope, probe for use in same, and method of fabricating said probe 失效
标题翻译：合并的近场为原子力显微镜探针及其制造探针法
公开(公告)号：EP0884617A1
公开(公告)日：1998-12-16
申请号：EP98112393.8
申请日：1994-04-06
申请人： SEIKO INSTRUMENTS INC.
发明人： Matsumura, Hiroshi , Chiba, Norio , Ataka, Tatsuaki , Fujihira, Masamichi
IPC分类号： G02B21/00 , G01B7/34
CPC分类号： G01Q30/02 , G01Q60/06 , G01Q60/22 , G01Q60/38 , G01Q70/02 , G02B6/241 , Y10S977/862 , Y10S977/863 , Y10S977/871 , Y10S977/951
摘要： A combined scanning near field optical and atomic force microscope (NSOM/AFM) capable of measuring the topography and the optical characteristics of the surface of a sample (37) at high resolution irrespective of the transmittance and the conductivity of the sample is described. The apparatus, in one embodiment, comprises a probe (4), a light source for illuminating a sample with light (34), a photoelectric converter device (38) and optics for receiving light transmitted through the sample, a laser (30) for detecting deflections of the probe, a condenser lens (31) for directing the laser light on to the rear surface of the probe, a detection system for detecting reflected light (32,33), a rough-motion mechanism (39) and a fine-motion mechanism (40) for moving the sample and the probe relative to each other, a control means for controlling the distance between the sample and the probe, and a computer (42) for controlling the whole apparatus. The probe, comprising a cladded single mode optical fibre, has a front end portion and a light-propagating body continuous with the front end portion. The front end portion and the light-propagating body are shaped like a hook. A method for manufacturing the probe is described.
摘要翻译：近场光学和原子力显微镜（NSOM / AFM）能够测量形貌和高分辨率的样品（37）的表面的光学特性而与透射率和样品的导电性的组合扫描进行说明。的装置，在一个实施例中包括的样本（4），一个光源，用于照明光（34）的样品，一个光电转换装置（38）和光学器件，用于接收光反通过样品mitted，激光（30），用于检测探针，聚光透镜（31）的偏转上的样品的后表面引导激光光中，用于检测的检测系统反射的光（32,33），一个粗动机构（39）和一个细用于移动样品和相对于海誓山盟探针 - 运动机构（40），一个控制装置，用于控制样品和探针，和用于控制整个装置的计算机（42）之间的距离。样品，包括熔覆单模光纤，具有前端部和一个光传播体的前端部连续。前端部和所述光传播主体的形状像一个钩子。描述了一种用于制造样品的方法。

47. 发明公开

EP0880043A2 Scanning near field optical microscope 失效
标题翻译：近场
公开(公告)号：EP0880043A2
公开(公告)日：1998-11-25
申请号：EP98304109.6
申请日：1998-05-22
申请人： SEIKO INSTRUMENTS INC.
发明人： Sato, Katsuaki , Mitsuoka, Yasuyuki , Nakajima, Kunio
IPC分类号： G02B21/00 , G01B7/34 , G01N21/21 , G02B6/10
CPC分类号： G01N21/21 , G01Q20/02 , G01Q60/06 , G01Q60/22 , Y10S977/862
摘要： In a combined scanning near field optical microscope (Nsom) and atomic force microscope (AFM), an optical fibre probe (1) which has a minute opening on the top of a sharpened tip is brought close to a sample (2), and the probe is moved by a piezo actuator (15) along x- and y-axis directions so that a minute spot beam emanating from the minute opening can scan over the sample. For circular polarisation modulation to be incorporated in the process, a beam is given an optical delay, before it is incident on the optical fibre probe (1), changing at a frequency of p (Hz) by means of a piezo-optical modulator (10). A minute spot beam emanating from the minute opening passes through the sample (2) to be received after passage through the sample (2) to be received after passage through an analyser (5) by a light receiving element (7). The output from the light receiving element (7) is fed to a lock-in amplifier, p- and 2p-components are separated through lock-in rectification, and they are rendered into images by a controller (16). It is used for measuring the distribution of magneto-optical effects.

48. 发明公开

EP0791802A1 Scanning type near field interatomic force microscope 失效
标题翻译： Kombiniertes Nahfeld- und Interatomarkraftrastermikroskop
公开(公告)号：EP0791802A1
公开(公告)日：1997-08-27
申请号：EP96120094.6
申请日：1996-12-13
申请人： SEIKO INSTRUMENTS INC.
发明人： Muramatsu, Hiroshi, c/o Seiko Instruments Inc. , Umemoto, Takeshi, c/o Seiko Instruments Inc.
IPC分类号： G01B7/34 , G02B21/00
CPC分类号： G01Q20/04 , G01Q10/045 , G01Q30/14 , G01Q60/06 , G01Q60/22 , Y10S977/862
摘要： A scanning type near field interatomic force microscope has a hook-shaped probe 1 having a sharpened tip end with a transmitting hole, and a quartz oscillator 3 is attached to a shaft portion of the hook-shaped probe. A bending of the probe is electrically detected through electrodes provided on the quartz oscillator 3, so that the scanning type near field interatomic force microscope can measure the surface of a sample 2.
摘要翻译：扫描型近场原子力显微镜具有钩形探针1，其具有带有透孔的尖锐尖端，并且石英振荡器3安装在钩形探针的轴部。通过设置在石英振荡器3上的电极来电探测探针的弯曲，使得扫描型近场原子间力显微镜可以测量样品2的表面。

49. 发明公开

EP0712533A1 PROBE MICROSCOPY 失效
标题翻译：特别观察
公开(公告)号：EP0712533A1
公开(公告)日：1996-05-22
申请号：EP94924544.0
申请日：1994-08-05
申请人： LEWIS, Aaron
发明人： LEWIS, Aaron , LIEBERMAN, Klony
IPC分类号： G01B11 , G01B7 , G01N37 , G01Q20 , G01Q60 , G02B21 , G11B9 , H01J37
CPC分类号： G01Q60/38 , G01Q60/06 , G01Q60/22 , G01Q70/10 , G01Q70/14 , G11B9/1409
摘要： A general purpose force sensor for measuring nanometer scale surface topography and other characteristics includes a hollow micropipette (1.1) having an inner diameter of about 7.5 nanometers at its tip. The probe includes a cantilevered structure obtained by heating it near the tip to bend it. A reflective coating (1.4) is then applied to the outer surface of the micropipette.

50. 发明授权

EP2360481B1 Near field optical microscope with optical imaging system 有权
公开(公告)号：EP2360481B1
公开(公告)日：2018-09-12
申请号：EP10154313.0
申请日：2010-02-23
申请人： Neaspec GmbH
发明人： Ocelic, Nenad , Huth, Florian
IPC分类号： G01Q20/02 , G01Q60/22
CPC分类号： G01Q60/22 , G01Q10/00 , G01Q20/02 , G01Q60/06
摘要： The invention relates to a device for conducting near-field optical measurements of a specimen comprising an optical imaging system, the use of such device and to a method for adjusting the probe or the illumination of the probe in such a device.

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