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    • 44. 发明公开
    • ELECTRONIC MEMBER PEELING METHOD AND LAMINATED BODY
    • 电子元件剥离方法和层压体
    • EP3007211A1
    • 2016-04-13
    • EP14803829.2
    • 2014-05-22
    • Mitsui Chemicals Tohcello, Inc.
    • USUGI ShinichiIGARASHI KoujiMORIMOTO Akimitsu
    • H01L21/304
    • H01L21/6835B32B43/006C09J5/00C09J2203/326C09J2205/302C09J2205/31H01L2221/68318H01L2221/68327H01L2221/68381H01L2221/68386
    • Provided is a method of peeling an electronic member (16) from a laminate (10) composed of the electronic member (16) adhered to a supporting substrate (12) via an adhesive film (14), the adhesive film (14) having a self-peeling adhesive layer (17) on a surface located on the side of the supporting substrate (12) and an exposed region A in at least one part of a surface (14a) which is located on the side of the electronic member (16). The method includes: a step of reducing adhesive strength between the supporting substrate (12) and the self-peeling adhesive layer (17) in the region A by applying energy on the region A; a step of removing the supporting substrate (a) from the laminate by further applying energy on the region and thus further reducing the adhesive strength reduced in the prior step between the supporting substrate (a) and the self-peeling adhesive layer from a starting point of the interface between the supporting substrate (a) and the self-peeling adhesive layer; and a step of peeling the electronic member (16) from the laminate by removing the adhesive film (14) from the electronic member (16).
    • 本发明提供一种从经由粘接膜(14)粘接于支撑基板(12)的电子部件(16)构成的层叠体(10)上剥离电子部件(16)的方法,该粘接膜(14) 在位于支撑基板(12)一侧的表面上的自剥离粘合剂层(17)和位于电子部件(16)侧的表面(14a)的至少一部分中的暴露区域A )。 该方法包括:通过在区域A上施加能量来降低区域A中的支撑基板(12)和自剥离粘合剂层(17)之间的粘合强度的步骤; 通过在该区域上进一步施加能量而从层压体去除支撑基材(a)的步骤,并且因此进一步降低在支撑基材(a)和自剥离粘合剂层之间的先前步骤中从开始点降低的粘合强度 支撑基板(a)和自剥离粘合剂层之间的界面; 以及通过从电子部件(16)去除粘合膜(14)而从层压体上剥离电子部件(16)的步骤。