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1. 发明公开

EP3009486A1 ADHESIVE SHEET, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING SAME, METHOD FOR MANUFACTURING THERMAL AIRFLOW SENSOR USING SAME, AND THERMAL AIRFLOW SENSOR 有权转让
标题翻译： KLEBEFOLIE，方法用于制造半导体组件，用于生产热线式空气流量传感器和热空气流量传感器
公开(公告)号：EP3009486A1
公开(公告)日：2016-04-20
申请号：EP14810749.3
申请日：2014-04-18
申请人： Hitachi Automotive Systems, Ltd.
发明人： IKEO, Satoshi , SAGAWA, Toshifumi , DOI, Ryosuke , KIKUCHI, Hiroshi , MUKUNO, Hideki
IPC分类号： C09J7/00 , C09J11/04 , C09J201/00 , G01F1/692 , H01L21/02 , H01L21/301 , H01L21/52
CPC分类号： H01L21/6836 , C09J7/00 , C09J7/20 , C09J201/00 , C09J2203/326 , G01F1/6845 , G01F1/692 , G01F5/00 , G01F15/10 , H01L21/565 , H01L21/78 , H01L23/3107 , H01L2221/68327 , H01L2221/68377 , H01L2224/05554 , H01L2224/27436 , H01L2224/298 , H01L2224/32245 , H01L2224/45144 , H01L2224/48091 , H01L2224/48247 , H01L2224/73265 , H01L2224/83191 , H01L2224/83855 , H01L2924/10155 , H01L2924/10158 , H01L2924/1815 , H01L2924/00014 , H01L2924/00
摘要： Provided is a thermal type airflow volume meter improving measurement accuracy, a method for manufacturing the same, and an adhesive sheet for use therein, the adhesive sheet divided into at least two or more per adherend and having a thickness of approximately 0.1 mm or less is divided to correspond to a shape of the adherend and generates or increases adhesion or stickiness by external energy.

2. 发明公开

EP3244173A1 THERMAL FLUID FLOW-RATE SENSOR 有权转让
标题翻译：热流体流量传感器
公开(公告)号：EP3244173A1
公开(公告)日：2017-11-15
申请号：EP15876969.5
申请日：2015-11-26
申请人： Hitachi Automotive Systems, Ltd.
发明人： SAKUMA, Noriyuki , ONOSE, Yasuo , TASHIRO, Shinobu , DOI, Ryosuke
IPC分类号： G01F1/692 , B81B1/00
CPC分类号： G01F1/6983 , B81B1/00 , G01F1/6845 , G01F1/692 , G01F1/699
摘要： Degradation of reliability of a thermal fluid flow sensor, caused by generation of a crack in an insulating film is prevented in the thermal fluid flow sensor including a detection section and a circuit section formed on the same substrate when stress adjustment is performed by forming a deep concave portion in an interlayer insulating film in the detection section and forming the insulating film having a tensile stress thereon. As a means thereof, stair-like step is provided in a side wall of a concave portion, formed in the interlayer insulating film on a diaphragm. Accordingly, each depth of a first concave portion and a second concave portion, which form the concave portion, is reduced, and coatability of the insulating film for the stress adjustment, which covers a side wall and a bottom face of the concave portion, is improved.
摘要翻译：在通过形成深度来进行应力调节时，在包括形成在同一衬底上的检测部分和电路部分的热流体流量传感器中，防止了由于绝缘膜中产生裂纹而导致的热流体流量传感器的可靠性降低在检测部分中的层间绝缘膜中形成凹陷部分，并在其上形成具有拉应力的绝缘膜。作为其手段，在形成于隔膜上的层间绝缘膜中的凹部的侧壁中设置阶梯状的台阶。因此，形成凹部的第一凹部和第二凹部的深度减小，并且覆盖凹部的侧壁和底面的用于应力调整的绝缘膜的可涂布性为改进。

3. 发明授权

EP2789994B1 AIRFLOW MEASURING APPARATUS 有权转让
公开(公告)号：EP2789994B1
公开(公告)日：2018-02-28
申请号：EP11876912.4
申请日：2011-12-07
申请人： Hitachi Automotive Systems, Ltd.
发明人： MORINO, Takeshi , TASHIRO, Shinobu , TOKUYASU, Noboru , DOI, Ryosuke , HANZAWA, Keiji
IPC分类号： G01F1/692 , F02D41/18 , G01F1/684 , G01F5/00 , H01L35/34
CPC分类号： G01F1/6842 , F02D41/187 , G01F1/6845 , G01F1/692 , G01F5/00 , H01L35/34
摘要： Provided is an airflow measuring apparatus with good measurement accuracy. An airflow measuring apparatus includes: a sub-passage that takes in a part of a flow of fluid flowing through an intake pipe; a sensor element that is disposed in the sub-passage to measure the flow of fluid; a circuit part that converts the flow of fluid detected by the sensor element into an electric signal; a connector part having a connector that is electrically connected to the circuit part to output a signal externally; and a casing that supports the sensor element and the circuit part, the sensor element being disposed in the intake pipe. The sensor element includes a cavity that is disposed at a semiconductor substrate, and a diaphragm including a thin film part that covers the cavity. The sensor element is mounted at a lead frame. The sensor element and the lead frame have surfaces that are mold-packaged with resin so that a diaphragm part of the sensor element and a part of the lead frame are exposed. At least one hole is disposed at the lead frame for communication between the cavity and exterior of the mold package.

4. 发明公开

EP2789994A1 AIRFLOW MEASURING APPARATUS 有权转让
标题翻译： LUFTSTROMMESSVORRICHTUNG
公开(公告)号：EP2789994A1
公开(公告)日：2014-10-15
申请号：EP11876912.4
申请日：2011-12-07
申请人： Hitachi Automotive Systems, Ltd.
发明人： MORINO, Takeshi , TASHIRO, Shinobu , TOKUYASU, Noboru , DOI, Ryosuke , HANZAWA, Keiji
IPC分类号： G01F1/692
CPC分类号： G01F1/6842 , F02D41/187 , G01F1/6845 , G01F1/692 , G01F5/00 , H01L35/34
摘要： Provided is an airflow measuring apparatus with good measurement accuracy. An airflow measuring apparatus includes: a sub-passage that takes in a part of a flow of fluid flowing through an intake pipe; a sensor element that is disposed in the sub-passage to measure the flow of fluid; a circuit part that converts the flow of fluid detected by the sensor element into an electric signal; a connector part having a connector that is electrically connected to the circuit part to output a signal externally; and a casing that supports the sensor element and the circuit part, the sensor element being disposed in the intake pipe. The sensor element includes a cavity that is disposed at a semiconductor substrate, and a diaphragm including a thin film part that covers the cavity. The sensor element is mounted at a lead frame. The sensor element and the lead frame have surfaces that are mold-packaged with resin so that a diaphragm part of the sensor element and a part of the lead frame are exposed. At least one hole is disposed at the lead frame for communication between the cavity and exterior of the mold package.
摘要翻译：提供了具有良好测量精度的气流测量装置。一种气流测量装置，包括：副通路，其接收流过进气管的流体流的一部分; 传感器元件，设置在子通道中以测量流体的流动; 电路部，其将由所述传感器元件检测出的流体流转换为电信号; 连接器部分，其具有电连接到所述电路部分以在外部输出信号的连接器; 以及支撑传感器元件和电路部分的壳体，传感器元件设置在进气管中。传感器元件包括设置在半导体衬底处的空腔和包括覆盖空腔的薄膜部分的隔膜。传感器元件安装在引线框架上。传感器元件和引线框架具有用树脂模制包装的表面，使得传感器元件的隔膜部分和引线框架的一部分被暴露。在引线框架处设置至少一个孔，用于在模具封装的腔体和外部之间连通。

5. 发明授权

EP3009486B1 METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE, METHOD FOR MANUFACTURING A THERMAL TYPE AIRFLOW SENSOR, AND THERMAL TYPE AIRFLOW SENSOR 有权转让
标题翻译：制造半导体器件的方法，制造热式气流传感器的方法以及热式气流传感器
公开(公告)号：EP3009486B1
公开(公告)日：2018-01-31
申请号：EP14810749.3
申请日：2014-04-18
申请人： Hitachi Automotive Systems, Ltd.
发明人： IKEO, Satoshi , SAGAWA, Toshifumi , DOI, Ryosuke , KIKUCHI, Hiroshi , MUKUNO, Hideki
IPC分类号： C09J7/00 , C09J11/04 , C09J201/00 , G01F1/692 , G01F1/684 , H01L21/02 , H01L21/301 , H01L21/52 , G01F5/00 , H01L21/78 , H01L21/683 , C09J7/02 , H01L23/31 , H01L21/56 , G01F15/10
CPC分类号： H01L21/6836 , C09J7/00 , C09J7/20 , C09J201/00 , C09J2203/326 , G01F1/6845 , G01F1/692 , G01F5/00 , G01F15/10 , H01L21/565 , H01L21/78 , H01L23/3107 , H01L2221/68327 , H01L2221/68377 , H01L2224/05554 , H01L2224/27436 , H01L2224/298 , H01L2224/32245 , H01L2224/45144 , H01L2224/48091 , H01L2224/48247 , H01L2224/73265 , H01L2224/83191 , H01L2224/83855 , H01L2924/10155 , H01L2924/10158 , H01L2924/1815 , H01L2924/00014 , H01L2924/00
摘要： Provided is a thermal type airflow volume meter improving measurement accuracy, a method for manufacturing the same, and an adhesive sheet for use therein, the adhesive sheet divided into at least two or more per adherend and having a thickness of approximately 0.1 mm or less is divided to correspond to a shape of the adherend and generates or increases adhesion or stickiness by external energy.

6. 发明公开

EP3147633A1 THERMAL TYPE AIR FLOW SENSOR 有权转让
标题翻译：热水器LUFTDURCHFLUSSSENSOR
公开(公告)号：EP3147633A1
公开(公告)日：2017-03-29
申请号：EP16192517.7
申请日：2011-08-19
申请人： Hitachi Automotive Systems, Ltd.
发明人： DOI, Ryosuke , HANZAWA, Keiji
IPC分类号： G01F1/684 , G01F1/692 , G01F5/00 , G01F15/10
CPC分类号： G01F1/6845 , G01F1/6842 , G01F1/692 , G01F5/00 , G01F15/10 , G01F15/105
摘要： A thermal air flow sensor having a hollow (200) in a portion of a rectangular-shaped detecting element (50), wherein the detecting element is fixed to a substrate (60) by bonding four sides of the detecting element (50) to the substrate so that the hollow (200) is not communicated directly to a passage chamber, by which air flowing in a duct (702) is conducted to an upper surface of the detecting element (50), and a communicating passage (600) is provided to communicate the hollow (200) to a sub-passage chamber (350) having a different path from that of the passage chamber.
摘要翻译：一种热空气流量传感器，其在矩形检测元件（50）的一部分中具有中空（200），其中所述检测元件通过将所述检测元件（50）的四个侧面接合到所述检测元件（50）而固定到基板（60）基板，使得空心（200）不直接连通到通道室，通道中通过管道（702）中流动的空气被传导到检测元件（50）的上表面，并且设置有连通通道（600）以将空心（200）连通到具有与通道室的路径不同的路径的子通道室（350）。

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