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41. 发明公开

EP1093003A2 Micro-electro-mechanical optical device 有权
标题翻译：微电子机械光学器件
公开(公告)号：EP1093003A2
公开(公告)日：2001-04-18
申请号：EP00307182.6
申请日：2000-08-21
申请人： LUCENT TECHNOLOGIES INC.
发明人： Aksyuk, Vladimir Anatolyevich , Bishop, David John
IPC分类号： G02B26/08
CPC分类号： G02B26/0866 , B81B3/004 , B81B3/0062 , B81B7/0003 , B81B2201/042 , G02B26/0841
摘要： A method for pivoting an optical device about one or more axes thereof is disclosed. Springs couple the optical device to the micro-electro-mechanical structure. A portion of the springs are fastened on the micro-electro-mechanical structure. Fastening the portion of each spring on the electro-mechanical structure prevents the springs from moving the optical device in a translational direction when such optical device pivots about the one or more axes.
摘要翻译：公开了一种用于围绕其一个或多个轴枢转光学装置的方法。弹簧将光学器件耦合到微电子机械结构。一部分弹簧固定在微电子机械结构上。当这种光学装置围绕所述一个或多个轴线枢转时，将所述每个弹簧的所述部分紧固在所述机电结构上防止所述弹簧沿平移方向移动所述光学装置。

42. 发明公开

EP0924763A2 Self-assembling micro-mechanical device 有权
标题翻译： Einrichtung的Selbstanordnende mikromechanische
公开(公告)号：EP0924763A2
公开(公告)日：1999-06-23
申请号：EP98310061.1
申请日：1998-12-08
申请人： LUCENT TECHNOLOGIES INC.
发明人： Aksyuk, Vladimir Anatolyevich , Bishop, David John
IPC分类号： H01L25/00 , H01L23/13 , H01L21/98 , G02B26/00
CPC分类号： B81B3/0062 , B81B3/004 , B81B7/0003 , B81B2201/042 , G02B26/0866
摘要： A self-assembling micron-sized mechanical device is described. The device comprises hinged plates attached to a support. A beam having a first end free to move in an upwardly-directed arc is associated with each hinged plate comprising the device. The beam has a first engagement member, including a first angled edge, disposed at its freely-movable first end. Each hinged plate includes a second engagement member, including a second angled edge. In the unassembled state, at least a portion of the first engagement member lies beneath the second engagement member on the support. Actuation force is applied to the beam by an actuator, the force causing the first end of the beam to lift. As it does so, the first and second angled edges slide over another, and the hinged plate is rotated upwardly about its hinges away from the support. The mechanical advantage provided by the angled edges allows a hinged plate to be rotated fully ninety degrees away from the support.
摘要翻译：描述了自组装微米尺寸的机械装置。该装置包括连接到支撑件的铰接板。具有自由在向上指向的弧中移动的第一端的梁与包括该装置的每个铰接板相关联。梁具有第一接合构件，其包括设置在其可自由移动的第一端处的第一成角度的边缘。每个铰接板包括第二接合构件，其包括第二倾斜边缘。在未组装状态下，第一接合构件的至少一部分位于支撑件上的第二接合构件的下方。激励力由致动器施加到梁上，导致梁的第一端抬起的力。如此，第一和第二倾斜的边缘滑过另一个，并且铰接板围绕其铰链远离支撑件向上旋转。由倾斜边缘提供的机械优点允许铰链板从支撑件旋转完全九十度。

43. 发明授权

EP3251789B1 OPEN FRAME, PARALLEL, TWO AXIS FLEXURE STAGE WITH YAW COMPENSATION 有权
公开(公告)号：EP3251789B1
公开(公告)日：2018-12-12
申请号：EP17170839.9
申请日：2017-05-12
申请人： AEROTECH, INC.
发明人： Mosier, Evan
IPC分类号： B23Q1/34 , F16M11/18 , F16M11/04 , B81B3/00
CPC分类号： F16M11/125 , B23Q1/25 , B23Q2210/002 , B81B3/0062 , F16M11/18 , H02N2/0095 , H02N2/043 , H02N2/046
摘要： Disclosed is a stage system comprising at least one flexure frame having a fixed center and movable distal ends configured to displace a tabletop operatively connected thereto along at least one axis of movement and at least two actuators comprising a first actuator and a second actuator positioned within the at least one flexure frame. The first actuator is positioned within the at least one flexure frame at a first angle of deflection from at least one beam of the at least one flexure frame and the second actuator is positioned within the at least one flexure frame at a second angle of deflection from the at least one beam. The at least two actuators are configured to produce a compensating displacement to offset yaw error as the at least two actuators expand from a contracted first position to an expanded second position.

44. 发明授权

EP2902358B1 ELECTROSTATICALLY DRIVEN MEMS DEVICE, IN PARTICULAR ROTATABLE MICROMIRROR 有权转让
公开(公告)号：EP2902358B1
公开(公告)日：2018-09-26
申请号：EP15153380.9
申请日：2015-01-30
申请人： STMicroelectronics S.r.l.
发明人： Carminati, Roberto , Conti, Sebastiano
IPC分类号： B81B3/00 , G02B26/08
CPC分类号： B81B3/0062 , B81B3/0043 , B81B7/008 , B81B2201/018 , B81B2201/033 , B81B2201/042 , B81B2201/045 , B81B2203/058 , G02B26/0841 , G03B21/142 , G03B21/2033 , G03B21/28
摘要： The MEMS device has a suspended mass (31) supported via a pair of articulation arms (32) by a supporting region (33). An electrostatic driving system (36), coupled to the articulation arms (32), has mobile electrodes (38) and fixed electrodes (39) that are coupled to each other. The electrostatic driving system is formed by two pairs of actuation assemblies (36), arranged on opposite sides of a respective articulation arm (32) and connected to the articulation arm through connection elements (30). Each actuation assembly (36) extends laterally to the suspended mass (31) and has an auxiliary arm (37) carrying a respective plurality of mobile electrodes (38). Each auxiliary arm is parallel to the articulation arms (32). The connection elements (30) may be rigid or formed by linkages.

45. 发明公开

EP3186189A1 3-DOF MEMS PISTON-TUBE ELECTROSTATIC MICROACTUATOR 审中-公开
标题翻译：三自由度MEMS活塞管静电微操作器
公开(公告)号：EP3186189A1
公开(公告)日：2017-07-05
申请号：EP14899403.1
申请日：2014-08-04
申请人： Ba-Tis, Faez , Ben-Mrad, Ridha
发明人： Ba-Tis, Faez , Ben-Mrad, Ridha
IPC分类号： B81B3/00
CPC分类号： G02B26/0841 , B25J7/00 , B81B3/0037 , B81B3/0062 , B81B2201/047 , B81B2203/0136 , B81B2203/053 , H02N1/002
摘要： A three-degrees-of-freedom MEMS electrostatic piston-tube actuator is disclosed. The actuator comprises two structures. A structure that comprises a plurality of fixed piston-like electrodes that are attached to a base, and form the stator of the actuator. A second structure that comprises a plurality of moving tube-like electrodes that are attached to the body of the upper structure and form the rotor of the actuator. The rotor is attached to the stator through a mechanical spring. The rotor of the actuator provides a 3-DOF motion, comprising vertical translation and bi-axial rotation about the axes of the structures. The present piston-tube actuator utilizes a configuration that enables the use of wide area electrodes, and therefore, provides a high output force enabling translation of the rotor or a high output torque enabling rotation of the rotor.
摘要翻译：公开了一种三自由度MEMS静电活塞管致动器。致动器包括两个结构。一种结构，其包括多个固定的活塞状电极，所述多个固定的活塞状电极连接到基座并形成致动器的定子。第二结构包括多个移动管状电极，所述电极连接到上部结构的主体并形成致动器的转子。转子通过机械弹簧连接到定子上。致动器的转子提供3自由度运动，包括围绕结构轴线的垂直平移和双轴旋转。本发明的活塞管致动器利用了能够使用广域电极的构造，并且因此提供了能够使转子平移的高输出力或允许转子旋转的高输出扭矩。

46. 发明授权

EP1371993B1 Acceleration sensor and manufacturing method for the same 有权
标题翻译：加速度计和其制备方法
公开(公告)号：EP1371993B1
公开(公告)日：2016-04-06
申请号：EP03010605.8
申请日：2003-05-12
申请人： WACOH CORPORATION
发明人： Okada, Kazuhiro
IPC分类号： G01P15/08 , G01P15/125 , G01P15/18 , G01P1/02 , G01P15/12 , B81C3/00 , B81B3/00 , B81B1/00
CPC分类号： G01P15/125 , B81B3/0062 , B81B2201/0235 , B81B2201/0242 , B81B2203/053 , B81B2203/055 , B81B2203/056 , B81B2203/058 , G01P15/08 , G01P15/0802 , G01P15/123 , G01P2015/084 , G01P2015/0842 , G01P2015/0871

47. 发明公开

EP2280906A4 MEMS DEVICE WITH INDEPENDENT ROTATION IN TWO AXES OF ROTATION 审中-公开
标题翻译：与独立的旋转MEMS组件在两个旋转轴
公开(公告)号：EP2280906A4
公开(公告)日：2013-10-23
申请号：EP09737582
申请日：2009-04-29
申请人： MICRALYNE INC
发明人： KEYWORTH BARRIE , KORNELSEN KEVIN , CRAWFORD JARED
IPC分类号： B81B7/02 , B81B3/00 , B81B5/00 , G02B26/08 , H01L23/52
CPC分类号： G02B26/0841 , B81B3/0062 , B81B3/0086 , B81B2201/042 , B81B2203/04 , B81B2203/058 , B81B2207/07 , H02N1/006
摘要： A MEMS arrangement is provided that has a top plane containing a rotatable element such as a mirror. There is a middle support frame plane, and a lower electrical substrate plane. The rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the frame in a first axis of rotation. The frame is mounted so as to be rotatable with respect to a second axis of rotation. Rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation.

48. 发明授权

EP1368690B1 MICROELECTROMECHANICAL MIRROR AND MIRROR ARRAY 有权
标题翻译：微机电镜子和反射镜阵列
公开(公告)号：EP1368690B1
公开(公告)日：2012-11-21
申请号：EP02731090.3
申请日：2002-02-06
申请人： Intel Corporation
发明人： NASIRI, Steven
IPC分类号： G02B26/08 , B81B3/00
CPC分类号： G02B26/0841 , B81B3/0062

49. 发明公开

EP2280906A1 MEMS DEVICE WITH INDEPENDENT ROTATION IN TWO AXES OF ROTATION 审中-公开
标题翻译：与独立的旋转MEMS组件在两个旋转轴
公开(公告)号：EP2280906A1
公开(公告)日：2011-02-09
申请号：EP09737582.8
申请日：2009-04-29
申请人： Micralyne Inc.
发明人： KEYWORTH, Barrie , KORNELSEN, Kevin , CRAWFORD, Jared
IPC分类号： B81B7/02 , B81B3/00 , B81B5/00 , G02B26/08 , H01L23/52
CPC分类号： G02B26/0841 , B81B3/0062 , B81B3/0086 , B81B2201/042 , B81B2203/04 , B81B2203/058 , B81B2207/07 , H02N1/006
摘要： A MEMS arrangement is provided that has a top plane containing a rotatable element such as a mirror. There is a middle support frame plane, and a lower electrical substrate plane. The rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the frame in a first axis of rotation. The frame is mounted so as to be rotatable with respect to a second axis of rotation. Rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation.

50. 发明授权

EP1835294B1 Accelerometre triaxal a membrane 有权
标题翻译：三轴加速度计与膜
公开(公告)号：EP1835294B1
公开(公告)日：2010-03-03
申请号：EP07103819.4
申请日：2007-03-09
申请人： COMMISSARIAT A L'ENERGIE ATOMIQUE
发明人： Robert, Philippe , Hentz, Sébastien
IPC分类号： G01P15/125
CPC分类号： G01P15/18 , B81B3/0062 , B81B2201/0235 , B81B2203/0109 , B81B2203/0181 , G01P15/0802 , G01P15/125 , G01P2015/082 , G01P2015/084

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