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1. 发明授权

EP3072849B1 FILM INDUCED INTERFACE ROUGHENING AND METHOD OF PRODUCING THE SAME 有权
标题翻译：膜引起的界面粗化及其制造方法
公开(公告)号：EP3072849B1
公开(公告)日：2018-04-18
申请号：EP15192910.6
申请日：2015-11-04
申请人： InvenSense, Inc.
发明人： LIU, Fang , LIM, Martin , SHIN, Jong II , SHIN, Jongwoo
IPC分类号： B81B3/00
CPC分类号： B81B3/001
摘要： Various embodiments provide for a method for roughening a surface of a MEMs device or the surface of a CMOS surface. A first material can be deposited in a thin layer over a surface made of a second material. After heating, the first and second materials, they can partially melt and interdiffuse, forming an alloy. The first material can then be removed and the alloy is removed at the same time. The surface of the second material that is left behind has then been roughened due to the interdiffusion of the first and second materials.

2. 发明授权

EP2428783B1 Vibration transducer and its manufacturing method 有权
标题翻译：振动传感器及其制造方法
公开(公告)号：EP2428783B1
公开(公告)日：2017-11-08
申请号：EP11180829.1
申请日：2011-09-09
申请人： Yokogawa Electric Corporation
发明人： Yoshida, Takashi
IPC分类号： G01L1/10 , G01L9/00
CPC分类号： G01L9/0019 , B81B3/001 , B81B2201/025 , B81B2201/0264 , B81B2201/0285 , B81B2203/0118 , G01L1/106 , G01L9/0013 , H03H9/2457 , H03H2009/02496

3. 发明公开

EP2973657A4 SURFACE ROUGHENING TO REDUCE ADHESION IN AN INTEGRATED MEMS DEVICE 有权
标题翻译：表面焊接以减少集成MEMS器件的责任
公开(公告)号：EP2973657A4
公开(公告)日：2016-09-28
申请号：EP14779860
申请日：2014-02-28
申请人： INVENSENSE INC
发明人： WILLIAMS KIRT REED , HUANG KEGANG , XU WENCHENG , SHIN JONGWOO , LIM MARTIN
IPC分类号： H01L21/00
CPC分类号： B81B3/001 , B81C2201/115
摘要： In an integrated MEMS device, moving silicon parts with smooth surfaces can stick together if they come into contact. By roughening at least one smooth surface, the effective area of contact, and therefore surface adhesion energy, is reduced and hence the sticking force is reduced. The roughening of a surface can be provided by etching the smooth surfaces in gas, plasma, or liquid with locally non-uniform etch rate. Various etch chemistries and conditions lead to various surface roughness.
摘要翻译：在集成MEMS器件中，移动具有光滑表面的硅部件如果接触则可以粘在一起。通过使至少一个光滑表面粗糙化，有效的接触面积以及因此的表面附着能减少，因此粘附力降低。可以通过以局部不均匀的蚀刻速率蚀刻气体，等离子体或液体中的光滑表面来提供表面的粗糙化。各种蚀刻化学和条件导致各种表面粗糙度。

4. 发明公开

EP2464595A2 A CONFIGURABLE MICROMECHANICAL DIFFRACTIVE ELEMENT WITH ANTI STICTION BUMPS 审中-公开
标题翻译：与粘附保护SURVEYS可配置的细观衍射元件
公开(公告)号：EP2464595A2
公开(公告)日：2012-06-20
申请号：EP10742505.0
申请日：2010-08-13
申请人： SINTEF
发明人： SAGBERG, Håkon , JOHANSEN, Ib-Rune , MOE,Sigurd, Teodor , LACOLLE, Matthieu , BAKKE, Thor , WANG, Dag, Torstein
IPC分类号： B81B3/00
CPC分类号： B81B3/001 , B81B2201/047 , G02B5/1828 , G02B26/0808
摘要： The invention relates to a micromechanical unit, in particular, an adjustable optical filter, and also a method to manufacture the unit. The unit comprises a first device layer and a second substrate layer at least partially fastened to each other, where the device layer comprises a number of reflecting elements divided between a number of non movable, fixed reflecting elements, where the fixed elements are connected with the substrate, and where a cavity is defined between the substrate and each movable element and each movable element is set up to produce a spring-loaded movement into the cavity, and where a number of dielectric spacer blocks are placed in the cavities between each movable element and the substrate to avoid electric contact between them.

5. 发明公开

EP2428783A1 Vibration transducer and its manufacturing method 有权
标题翻译： Schwingungstransducer和Herstellungsverfahrendafür
公开(公告)号：EP2428783A1
公开(公告)日：2012-03-14
申请号：EP11180829.1
申请日：2011-09-09
申请人： Yokogawa Electric Corporation
发明人： Yoshida, Takashi
IPC分类号： G01L1/10 , G01L9/00
CPC分类号： G01L9/0019 , B81B3/001 , B81B2201/025 , B81B2201/0264 , B81B2201/0285 , B81B2203/0118 , G01L1/106 , G01L9/0013 , H03H9/2457 , H03H2009/02496
摘要： A vibration transducer includes a silicon single crystal vibration beam provided over a silicon single crystal substrate, the vibration beam having a sectional shape that is longer in a direction perpendicular to a surface of the silicon single crystal substrate than in a direction parallel with it, a shell made of silicon, surrounding the vibration beam with a gap, and forming a vacuum room together with the silicon single crystal substrate, a plate-like first electrode plate disposed parallel with the surface of the silicon single crystal substrate, the first electrode plate having one end connected to the vibration beam, plate-like second and third electrode plates disposed parallel with the surface of the silicon single crystal substrate so as to be opposed to each other with the vibration beam interposed in between, and asperities formed on confronting side surfaces of the vibration beam and the second and third electrode plates.
摘要翻译：振动传感器包括设置在硅单晶衬底上的硅单晶振动束，所述振动束具有在与所述硅单晶衬底的表面垂直的方向上比在与其平行的方向上更长的截面形状，由硅制成的外壳围绕着具有间隙的振动梁，与硅单晶基板一起形成真空室，与硅单晶基板的表面平行设置的板状的第一电极板，第一电极板具有一端与振动束连接，板状的第二和第三电极板与硅单晶基板的表面平行设置，以便将振动光束插入其间彼此相对，并且形成在相对侧面上的凹凸的振动束和第二和第三电极板。

6. 发明授权

EP1398811B1 Switchable capacitor 有权
标题翻译：一种开关电容器
公开(公告)号：EP1398811B1
公开(公告)日：2011-08-10
申请号：EP03020159.4
申请日：2003-09-05
申请人： IMEC
发明人： Rottenberg, Xavier , Jansen, Henri , Tilmans, Hendrikus , De Raedt, Walter
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , B81B3/001 , B81B2201/016 , B81C2201/115 , H01G5/16 , H01G5/18

7. 发明公开

EP1979267A2 MICROELECTROMECHANICAL DEVICE AND METHOD UTILIZING A POROUS SURFACE 审中-公开
标题翻译：微机电装置和一种使用多孔表面
公开(公告)号：EP1979267A2
公开(公告)日：2008-10-15
申请号：EP07775496.8
申请日：2007-04-12
申请人： Qualcomm Mems Technologies, Inc.
发明人： SASAGAWA, Teruo , KOGUT, Lior
IPC分类号： B81B3/00
CPC分类号： B81B3/001 , B81B2201/047 , B81C2201/0115 , G02B26/001
摘要： A microelectromechanical device (MEMS) utilizing a porous electrode surface for reducing stiction is disclosed. In one embodiment, a microelectromechanical device is an interferometric modulator 80 that includes a transparent electrode 81 having a first surface 81a; and a movable reflective electrode 82 with a second surface 82a facing the first surface 81a. The movable reflective electrode 82 is movable between a relaxed and actuated (collapsed) position. An aluminum layer is provided on either the first or second surface. The aluminum layer is then anodized to provide an aluminum oxide layer 83 which has a porous surface 83a. The porous surface 83a, in the actuated position, decreases contact area between the electrodes 81 and 82, thus reducing stiction.

8. 发明公开

EP1857406A2 METHOD OF MAKING DIMPLE STRUCTURE FOR PREVENTION OF MEMS DEVICE STICTION 审中-公开
标题翻译： Herstellungsverfahren von Ausnehmungsstukturen zur Vermeidung der Haftreibung in einem MEMS-Bauteil。
公开(公告)号：EP1857406A2
公开(公告)日：2007-11-21
申请号：EP07108010.5
申请日：2007-05-11
申请人： Honeywell International Inc.
发明人： Yang, Ken L. , Yu, Lianzhong
IPC分类号： B81C1/00
CPC分类号： B81B3/001
摘要： A MEMS device having a proof mass (10) resiliently mounted above a substrate (12) has projections (18) formed on adjacent surfaces of the mass (10) and substrate (12). The device is formed by creating a plurality of holes (34) in the upper layer (30). A substance suitable for removing the intermediate layer (32) without substantially removing the upper layer (30) and substrate (12) is introduced through the holes (34). A substance removing the upper layer (30), the substrate (12), or both, is then introduced through the holes (34) to remove a small amount of the substrate (12) and upper layer (30). Portions of the intermediate layer (32) between the projections (18) are then removed. The dimple structure fabricated from this process will prevent MEMS device stiction both in its final release and device operation.
摘要翻译：具有弹性地安装在基板（12）上方的证明物质（10）的MEMS装置具有形成在质量块（10）和基底（12）的相邻表面上的突起（18）。该装置通过在上层（30）中形成多个孔（34）而形成。通过孔（34）引入适合于去除中间层（32）而不基本上除去上层（30）和基材（12）的物质。然后通过孔（34）将去除上层（30），基板（12）或两者的物质引入以除去少量的基板（12）和上层（30）。然后去除突起（18）之间的中间层（32）的部分。通过该工艺制造的凹坑结构将在最终的释放和器件操作过程中阻止MEMS器件的粘滞。

9. 发明公开

EP1847850A2 Hydrophone assembly 有权
标题翻译： Hydrophonanordnung
公开(公告)号：EP1847850A2
公开(公告)日：2007-10-24
申请号：EP07012105.8
申请日：2000-03-08
申请人： Input/Output, Inc.
发明人： Bednar, Eugene, D.
IPC分类号： G01V1/18
CPC分类号： G01P1/023 , B81B3/001 , B81B3/0072 , B81B7/0016 , B81B2201/0235 , G01D11/245 , G01D18/008 , G01N2001/021 , G01P15/0802 , G01P15/13 , G01P21/00 , G01V1/047 , G01V1/053 , G01V1/104 , G01V1/181 , G01V1/186 , H01L2224/48472 , H01L2924/0002 , H01L2924/00
摘要： A hydrophone assembly, (500), is provided that has a frequency response, (510), that matches that of an accelerometer. In a preferred implementation, (500), the frequency response resembles that of a differentiator, (520), in combination with a pair of simple frequency lags, (510), and in combination with the seismic recording system, (550).
摘要翻译：提供了具有与加速度计相匹配的频率响应（510）的水听器组件（500）。（500）中，频率响应类似于微分器的频率响应（520），结合一对简单的频率滞后（510），并结合地震记录系统（550）。

10. 发明授权

EP1502273B1 MICRO-ELECTRO-MECHANICAL SWITCH, AND METHODS OF MAKING AND USING IT. 有权
标题翻译：微机械开关，方法和机械微动开关应用
公开(公告)号：EP1502273B1
公开(公告)日：2007-06-20
申请号：EP03719974.2
申请日：2003-04-30
申请人： RAYTHEON COMPANY
发明人： PILLANS, Brandon, W. , FOREHAND, David, I.
IPC分类号： H01H59/00
CPC分类号： B81B3/0008 , B81B3/001 , B81B2201/014 , B81B2203/0118 , B81B2203/04 , H01H1/06 , H01H59/0009 , H01H2059/0018 , H01H2059/0072
摘要： A micro-electro-mechanical (MEMS) switch (10, 110) has an electrode (22, 122) covered by a dielectric layer (23, 123), and has a flexible conductive membrane (31, 131) which moves between positions spaced from and engaging the dielectric layer. At least one of the membrane and dielectric layer has a textured surface (138) that engages the other thereof in the actuated position. The textured surface reduces the area of physical contact through which electric charge from the membrane can tunnel into and become trapped within the dielectric layer. This reduce the amount of trapped charge that could act to latch the membrane in its actuated position, which in turn effects a significant increase in the operational lifetime of the switch.

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