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1. 发明授权

EP3924295B1 MEMS UND VERFAHREN ZUM HERSTELLEN DESSELBEN 有权
公开(公告)号：EP3924295B1
公开(公告)日：2024-05-22
申请号：EP20705167.3
申请日：2020-02-12
IPC分类号： B81B3/00
CPC分类号： B81B2201/04220130101 , B81B2203/016320130101 , B81B2203/018120130101 , B81B2203/05820130101 , B81B3/0051 , B81B3/0062

2. 发明授权

EP2435789B1 MEMS MASS SPRING DAMPER SYSTEMS USING AN OUT-OF-PLANE SUSPENSION SCHEME 有权
标题翻译：微机电系统 - 麦克风 - 美国麻醉师联合会
公开(公告)号：EP2435789B1
公开(公告)日：2015-04-08
申请号：EP10732533.4
申请日：2010-05-27
申请人： King Abdullah University Of Science And Technology
发明人： AZIZ, Ahmed Kamal Said Abdel , SHARAF, Abdel Hamid , SHERRY, Mohamed , SEDKY, Sherif
IPC分类号： G01C19/5719 , G01P15/08 , G01P15/18 , G01P15/125 , B81B3/00
CPC分类号： G01C19/5719 , B81B3/0062 , B81B2201/0242 , G01P15/08 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/082
摘要： MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclosed. Such out-of-plane suspension scheme helps such MEMS mass-spring-damper systems achieve inertial grade performance. Methods of fabricating out-of-plane suspensions in MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) are also disclosed.
摘要翻译：公开了使用平面外（或垂直）悬浮方案的MEMS质量弹簧阻尼器系统（包括MEMS陀螺仪和加速度计），其中悬架与校验物质垂直。这种平面外悬架方案有助于这种MEMS质量弹簧阻尼器系统实现惯性等级性能。还公开了在MEMS质量弹簧阻尼器系统（包括MEMS陀螺仪和加速度计）中制造平面外悬架的方法。

3. 发明授权

EP1476780B1 FOLDED LONGITUDINAL TORSIONAL HINGE FOR GIMBALED MEMS MIRROR HINGE 有权
标题翻译：折叠好的纵长-TORSIONALSCHWENKGLIED通用MEMS镜摆杆
公开(公告)号：EP1476780B1
公开(公告)日：2009-01-14
申请号：EP03709211.1
申请日：2003-02-18
申请人： Glimmerglass Networks, Inc.
发明人： STAKER, Bryan, P. , BANYAI, William, C.
IPC分类号： G02B7/182 , G02B26/08
CPC分类号： G02B26/0841 , B81B3/0062 , G02B26/0833 , G02B26/105
摘要： A circular mirror (12) is connected to the gimble (44) at opposing, but offset from center axis locations (36) and (37) and by compound longitudinal hinges (40) and (42).

4. 发明授权

EP1738181B1 OUT-OF-PLANE COMPENSATION ELECTRODE SUSPENSION FOR AN ACCELEROMETER 失效
标题翻译： PADS悬架挠度补偿衬底高度加速计作者：
公开(公告)号：EP1738181B1
公开(公告)日：2008-02-06
申请号：EP04796864.9
申请日：2004-10-29
申请人： Honeywell International Inc.
发明人： BALLAS, Gary, J. , ESKRIDGE, Mark, H.
IPC分类号： G01P15/125 , G01P15/08 , B81B3/00
CPC分类号： G01P15/0802 , B81B3/0062 , B81B2201/0235 , G01P15/125
摘要： A high aspect ratio microelectromechanical system device for measuring an applied force and having a suspension structure for compensating out-of-plane displacements of the device proof mass, wherein the device includes a frame; a proof mass coupled to the frame for in-plane motion along an axis of symmetry, the proof mass having first and second sets of spaced apart capacitor plates projected therefrom on each side of the axis of symmetry and oriented substantially crosswise to the axis of symmetry; and third and fourth sets of spaced apart capacitor plates oriented substantially crosswise to the axis of symmetry of the proof mass and intermeshed respectively with the first and second sets of capacitor plates, the third and fourth sets of capacitor plates being suspended for motion relative to the frame about respective first and second axes of motion oriented substantially parallel with the axis of symmetry of the proof mass.

5. 发明公开

EP1479646A3 Electrode configuration for pivotable MEMS micromirror 有权转让
标题翻译：可旋转MEMS微镜的电极配置
公开(公告)号：EP1479646A3
公开(公告)日：2005-01-05
申请号：EP04405316.3
申请日：2004-05-21
申请人： JDS Uniphase Inc.
发明人： Miller, John Michael , Ma, Yuan , Keyworth, Barrie , Jin, Wenlin , Hess, David R.
IPC分类号： B81B7/02 , B81B7/04 , G02B26/08 , G02B6/35 , B81B7/00
CPC分类号： G02B6/3584 , B81B3/0062 , B81B2201/042 , G02B6/3518 , G02B6/3544 , G02B6/356 , G02B6/357
摘要： A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A "piano"-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these "piano" MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an "internal" gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes.
摘要翻译：公开了一种用于光开关的微机电（MEMs）镜装置。 “钢琴”式MEMS装置包括通过扭转铰链枢转地安装在其中部附近的细长平台。平台的中间部分和扭转铰链具有小于平台其余部分的宽度的组合宽度，由此这些“钢琴”MEM装置中的几个可以被定位成彼此相邻且绕相同的轴线枢转地安装，它们之间的小气隙。在为波长切换应用而特别设计的本发明的优选实施例中，通过使平台围绕两个垂直轴线旋转来提供安装在其上的镜子的更大范围的弓形运动。根据本发明的优选实施例的MEMS反射镜装置通过使用“内部”万向环结构使得反射镜能够围绕两个垂直轴倾斜，这确保了多个相邻反射镜装置具有高填充因子，而不必依赖复杂且昂贵的制造工艺。

6. 发明公开

EP3245156A1 MINIATURE KINETIC ENERGY HARVESTER FOR GENERATING ELECTRICAL ENERGY FROM MECHANICAL VIBRATIONS 审中-公开
标题翻译：用于从机械振动中产生电能的微型动能收集器
公开(公告)号：EP3245156A1
公开(公告)日：2017-11-22
申请号：EP16700196.5
申请日：2016-01-08
申请人： Chambre de Commerce et d'Industrie de Region Paris Ile de France
发明人： COTTONE, Francesco , BASSET, Philippe
IPC分类号： B81B3/00 , H02N2/18 , H02N1/00
CPC分类号： H02N1/08 , B81B3/0021 , B81B3/0051 , B81B3/0062 , B81B2203/0136 , B81B2203/0163 , B81B2203/051 , B81B2203/055 , B81B2203/056 , B81C1/00182 , H02K35/00 , H02N2/188
摘要： The invention relates to a miniature kinetic energy harvester (1) for generating electrical energy, comprising: —a support (2), —a first element (3) having walls (32-35) surrounding at least one cavity (31), —at least one spring (4) mounted between the first element (3) and the support (2), the spring (4) being arranged so that the first element (3) may be brought into oscillation relative to the support (2) according to at least one direction (X) of oscillation, —a transducer (5) arranged between the first element (3) and the support (2) for converting oscillation of the first element (3) relative to the support (2) into an electrical signal, —at least one second element (7) housed within the cavity (31) and mounted to freely move within the cavity (31) relative to the first element (3) so as to impact the walls (32-35) of the cavity (31) when the harvester (1) is subjected to vibrations.

7. 发明公开

EP3190421A1 3-AXIS ANGULAR ACCELEROMETER 审中-公开
标题翻译：三轴角加速度计
公开(公告)号：EP3190421A1
公开(公告)日：2017-07-12
申请号：EP16206408.3
申请日：2016-12-22
申请人： Analog Devices, Inc.
发明人： Zhang, Xin , Zhang, Jianglong , Chen, Baoxing , Yang, Kuang L. , Errico, Paul Vincent
IPC分类号： G01P15/08 , G01P15/125 , G01P15/18
CPC分类号： G01P15/125 , B81B3/001 , B81B3/0062 , B81B2201/0235 , G01P15/0888 , G01P15/18 , G01P2015/0871 , G01P2015/0874
摘要： Angular accelerometers are described, as are systems employing such accelerometers. The angular accelerometers may include a proof mass and rotational acceleration detection beams directed toward the center of the proof mass. The angular accelerometers may include sensing capabilities for angular acceleration about three orthogonal axes. The sensing regions for angular acceleration about one of the three axes may be positioned radially closer to the center of the proof mass than the sensing regions for angular acceleration about the other two axes. The proof mass may be connected to the substrate though one or more anchors.
摘要翻译：描述了角加速度计，采用这种加速度计的系统也是如此。角加速度计可以包括检测质量块和指向检测质量块中心的旋转加速度检测梁。角加速度计可以包括关于三个正交轴的角加速度的感测能力。围绕三个轴中的一个轴的角加速度的感测区域可以比围绕另外两个轴的角加速度的感测区径向更靠近检测质量的中心定位。检测质量块可以通过一个或多个锚固件连接到基底。

8. 发明公开

EP2811331A4 MEMS DEVICE AND ELECTRONIC INSTRUMENT HAVING PROJECTOR FUNCTION 有权
标题翻译： MEMS装置和投影功能电子仪器
公开(公告)号：EP2811331A4
公开(公告)日：2015-06-24
申请号：EP13743464
申请日：2013-01-08
申请人： FUNAI ELECTRIC CO
发明人： MURAYAMA MANABU , KUGO KOUICHI , INOUE NAOKI , FUJII HITOSHI
IPC分类号： G02B26/10 , B81B3/00 , G02B26/08
CPC分类号： G02B26/101 , B81B3/0062 , B81B2201/042 , G02B26/0833 , G02B26/0841 , G02B26/0858 , G02B26/105 , G02B27/646
摘要： In a MEMS device (1), a first drive portion (40) is divided into a first drive section (41) and a second drive section (42). A second drive portion (50) is divided into a third drive section (51) and a fourth drive section (52). The first drive section, the second drive section, the third drive section, and the fourth drive section are controlled for driving independently of each other to incline an optical component (10).

9. 发明授权

EP2530508B1 Display device 有权
公开(公告)号：EP2530508B1
公开(公告)日：2015-04-29
申请号：EP12170726.9
申请日：2012-06-04
申请人： Pixtronix, Inc.
发明人： Kimura, Yasukazu , Fujiyoshi, Jun , Kuriyagawa, Takeshi , Sonoda, Daisuke
IPC分类号： G02B26/02 , B81C1/00
CPC分类号： G02B26/02 , B32B3/00 , B81B3/0062 , B81B7/02 , B81B2201/047 , B81B2203/0307 , B81B2203/0376 , B81C1/00103 , G02B26/04 , G02F2203/12 , G09G3/34 , G09G5/10 , G09G2300/08 , H02N1/006

10. 发明授权

EP2336082B1 Translating and rotation micro mechanism 有权
标题翻译：平移和旋转微机构
公开(公告)号：EP2336082B1
公开(公告)日：2013-03-27
申请号：EP10275103.9
申请日：2010-10-01
申请人： He, Siyuan , Ben-Mrad, Ridha
发明人： He, Siyuan , Ben-Mrad, Ridha
IPC分类号： B81B5/00 , B81B3/00 , G02B26/08 , G02B26/10
CPC分类号： G02B26/0841 , B81B3/0062 , B81B2201/042 , B81B2203/053 , B81B2203/058 , G02B26/101

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