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    • 37. 发明公开
    • A semiconductor device and a method for producing the same
    • 一种半导体器件及其制造方法
    • EP0525971A3
    • 1993-02-24
    • EP92305782.2
    • 1992-06-24
    • SHARP KABUSHIKI KAISHA
    • Kudo, HiroakiInoguchi, KazuhikoSugahara, SatoshiTakiguchi, Haruhisa
    • H01L33/00H01S3/19H01S3/085H01L29/76
    • H01L33/06B82Y20/00H01L33/20H01S5/026H01S5/1228H01S5/1231H01S5/223H01S5/32H01S5/32308H01S5/327H01S5/341H01S5/3412H01S5/3428H01S5/343H01S5/3432
    • A semiconductor device includes a multiple layer structure including a substantially flat active layer (103), and a first semiconductor layer (101) and a second semiconductor layer (102) adjacent to each other, the semiconductor layers (101,102) having a corrugation (106) at an interface therebetween; and a generating device which is connected to the multiple layer structure. An electromagnetic field intensity distribution is generated by use of the generating device in a waveguide region including the active layers (103), and the active layer (103) includes a gain distribution having a distribution pattern corresponding to the corrugation. The multiple layer structure is produced by forming the corrugation (106) on an upper surface of the first semiconductor layer (101), and forming the rest of the multiple layer structure including the second semiconductor layer (102) and the active layer (103) by using a vapor phase growth method once so as to make the active layer substantially flat. Then, the generating device is formed to be in contact with the multiple layer structure.
    • 一种半导体器件包括多层结构,该多层结构包括基本平坦的有源层(103)以及彼此相邻的第一半导体层(101)和第二半导体层(102),半导体层(101,102)具有波纹 )在它们之间的界面处; 以及连接到多层结构的发电装置。 通过在包括有源层(103)的波导区域中使用生成装置来生成电磁场强度分布,并且有源层(103)包括具有与波纹对应的分布模式的增益分布。 通过在第一半导体层(101)的上表面上形成波纹(106)并且形成包括第二半导体层(102)和有源层(103)的多层结构的其余部分来产生多层结构, 通过一次使用气相生长法以使活性层基本平坦。 然后,发生装置形成为与多层结构接触。