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    • 100. 发明公开
    • SEMICONDUCTOR DEVICE, TEST APPARATUS AND MEASURING METHOD
    • HALBLEITERBAUEMENT,TESTVORRICHTUNG UND MESSVERFAHREN
    • EP1837668A1
    • 2007-09-26
    • EP05809363.4
    • 2005-11-24
    • ADVANTEST CORPORATION
    • YAMAZAKI, Makoto, ADVANTEST CORPORATIONMATSUMURA, Hidenobu, ADVANTEST CORPORATIONFURUKAWA, Yasuo, ADVANTEST CORP.
    • G01R31/317H01L27/04
    • G01R31/3016G01R31/31717
    • A semiconductor device for measuring delay time of a wiring under test provided therein is provided, in which the semiconductor device includes: a loop path on which the wiring under test is provided; a delay element for delaying an input signal by a predetermined time; a delay selecting unit for determining whether or not the delay element is connected on the loop path; a loop delay measuring unit for measuring delay time of the loop path; a first gate delay estimating unit for estimating delay time of the delay element by subtracting delay time of the loop path in case the delay element is not connected on the loop path from delay time of the loop path in case the delay element is connected on the loop path; a second gate delay estimating unit for estimating delay time of a logic circuit connected on the loop path on the basis of the delay time of the delay element; and a wiring delay estimating unit for estimating delay time of the wiring under test.
    • 提供一种半导体装置,用于测量在其中提供的被测配线的延迟时间,其中半导体器件包括:设置有被测线路的环路; 用于将输入信号延迟预定时间的延迟元件; 延迟选择单元,用于确定所述延迟元件是否连接在所述环路径上; 环路延迟测量单元,用于测量环路径的延迟时间; 第一门延迟估计单元,用于通过在所述延迟元件连接到所述延迟元件的情况下从所述环路径的延迟时间在所述环路径上未连接所述延迟元件的情况下减去所述环路径的延迟时间来估计所述延迟元件的延迟时间 循环路径 第二门延迟估计单元,用于基于延迟元件的延迟时间估计连接在环路上的逻辑电路的延迟时间; 以及布线延迟估计单元,用于估计被测线路的延迟时间。