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91. 发明授权

EP1637909B1 Imaging optical instrument 有权
标题翻译：成像光学仪器
公开(公告)号：EP1637909B1
公开(公告)日：2014-04-30
申请号：EP05026108.0
申请日：2002-05-03
申请人： Dainippon Screen Mfg. Co., Ltd.
发明人： Ueyama, Kenji, c/o Dainippon Screen Mfg. Co. Ltd.
IPC分类号： G03B27/32 , G02B13/22 , G02B3/06 , G02B7/02 , G02B3/00 , G02B5/00
CPC分类号： G02B3/06 , G02B3/00 , G02B5/001 , G02B5/005 , G02B7/02 , G02B7/021 , G02B7/028 , G02B13/22 , G03B27/32

92. 发明公开

EP2613194A2 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine 有权
标题翻译：用于在浸没式光刻机中在晶片交换期间将浸没流体保持在投影透镜下方的间隙中的设备和方法
公开(公告)号：EP2613194A2
公开(公告)日：2013-07-10
申请号：EP13154186.4
申请日：2004-03-17
申请人： Nikon Corporation
发明人： Binnard, Michael
IPC分类号： G03B27/32 , G03B27/42 , G03B27/58 , G03F7/20 , G03B27/52
CPC分类号： G03F7/70341 , G03B27/52 , G03F7/70716 , G03F7/70725 , G03F7/70733
摘要： An apparatus and method for maintaining immersion fluid (212) in the gap adjacent the projection lens (16) during the exchange of a work piece (208) in a lithography machine (10) is disclosed. The apparatus and method includes an optical assembly (16) configured to project an image onto a work piece (208) and a stage assembly (202) including a work piece table (204) configured to support the work piece (208) adjacent the optical assembly (16). An environmental system (26) is provided to supply and remove an immersion fluid (212) from a gap between the optical assembly (16) and the work piece (208) on the stage assembly (202). After exposure of the work piece (208) is complete, an exchange system (216) removes the work piece (208) and replaces it with a second work piece. An immersion fluid containment system (214) is provided to maintain the immersion liquid (212) in the gap during removal of the first work piece (208) and replacement with the second work piece.
摘要翻译：公开了一种用于在光刻机器（10）中更换工件（208）期间将浸没流体（212）保持在邻近投影透镜（16）的间隙中的装置和方法。该设备和方法包括被配置成将图像投影到工件（208）上的光学组件（16）和包括工件台（204）的工作台组件（202），工件台（204）被配置为支撑与光学器件组件（16）。提供环境系统（26）以从台组件（202）上的光学组件（16）和工件（208）之间的间隙供应和移除浸没流体（212）。在工件（208）的暴露完成之后，交换系统（216）移除工件（208）并用第二工件替换它。提供浸没流体容纳系统（214）以在移除第一工件（208）和用第二工件替换期间将浸没液体（212）保持在间隙中。

93. 发明公开

EP2613193A2 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine 有权
标题翻译：装置和方法用于在浸没式光刻机晶片交换期间保持浸没流体在列的投影透镜下
公开(公告)号：EP2613193A2
公开(公告)日：2013-07-10
申请号：EP13154185.6
申请日：2004-03-17
申请人： Nikon Corporation
发明人： Binnard, Michael
IPC分类号： G03B27/32 , G03B27/42 , G03B27/58 , G03F7/20 , G03B27/52
CPC分类号： G03F7/70341 , G03B27/52 , G03F7/70716 , G03F7/70725 , G03F7/70733
摘要： An apparatus and method for maintaining immersion fluid (212) in the gap adjacent the projection lens (16) during the exchange of a work piece (208) in a lithography machine (10) is disclosed. The apparatus and method includes an optical assembly (16) configured to project an image onto a work piece (208) and a stage assembly (202) including a work piece table (204) configured to support the work piece (208) adjacent the optical assembly (16). An environmental system (26) is provided to supply and remove an immersion fluid (212) from a gap between the optical assembly (16) and the work piece (208) on the stage assembly (202). After exposure of the work piece (208) is complete, an exchange system (216) removes the work piece (208) and replaces it with a second work piece. An immersion fluid containment system (214) is provided to maintain the immersion liquid (212) in the gap during removal of the first work piece (208) and replacement with the second work piece.
摘要翻译：用于对工件（208）的在光刻机的交换期间维持浸没流体（212）在所述间隙相邻的投影透镜（16）的装置和方法（10）游离缺失盘。该装置和方法包括：在被配置成将图像投影到工件（208）和一个级组件（202）包括被配置为支持所述工件（208）邻近光学工件表（204）的光学组件（16）组件（16）。环境系统（26）被提供给供给和从所述光学组件（16）和在舞台上的组件（202）该工件（208）之间的间隙中移除到浸没流体（212）。工件（208）的曝光完成后，交换系统（216）移除所述工件（208）和与第二工件替换它。浸没流体容纳系统（214）被设置去除第一工件（208）和替换与第二工件的过程中保持在间隙中的浸没液体（212）。

94. 发明授权

EP1616220B1 APPARATUS AND METHOD FOR MAINTAINING IMMERSION FLUID UNDER A LITHOGRAPHIC PROJECTION LENS 有权
标题翻译： DEVICE AND METHOD FOR浸液下光刻镜头保持在一起
公开(公告)号：EP1616220B1
公开(公告)日：2013-05-01
申请号：EP04721260.0
申请日：2004-03-17
申请人： NIKON CORPORATION
发明人： BINNARD, Michael
IPC分类号： G03B27/32 , G03B27/42 , G03B27/58 , G03F7/20
CPC分类号： G03F7/70341 , G03B27/52 , G03F7/70716 , G03F7/70725 , G03F7/70733
摘要： An apparatus and method for maintaining immersion fluid (212) in the gap adjacent the projection lens (16) during the exchange of a work piece (208) in a lithography machine (10) is disclosed. The apparatus and method includes an optical assembly (16) configured to project an image onto a work piece (208) and a stage assembly (202) including a work piece table (204) configured to support the work piece (208) adjacent the optical assembly (16). An environmental system (26) is provided to supply and remove an immersion fluid (212) from a gap between the optical assembly (16) and the work piece (208) on the stage assembly (202). After exposure of the work piece (208) is complete, an exchange system (216) removes the work piece (208) and replaces it with a second work piece. An immersion fluid containment system (214) is provided to maintain the immersion liquid (212) in the gap during removal of the first work piece (208) and replacement with the second work piece.

95. 发明公开

EP2378357A1 APPARATUS FOR MOVING STEREO IMAGING LENS AND METHOD FOR DIGITAL STEREO PROJECTION 审中-公开
标题翻译： VORRICHTUNG ZUR BEWEGUNG EINER STEREOBILDGEBUNGSLINSE UND DIGITALES STEREOPROJEKTIONSVERFAHREN
公开(公告)号：EP2378357A1
公开(公告)日：2011-10-19
申请号：EP09832937.8
申请日：2009-12-16
申请人： Shanghai Yiying Digital Technology Co., Ltd.
发明人： Shanghai Yiying Digital Technology Co., Ltd.
IPC分类号： G03B27/52 , G03B27/32
CPC分类号： G03B27/32 , G03B25/02 , G03B35/14
摘要： An apparatus for moving a stereo imaging lens, includes: a baseplate(1), a LCD displayer (15) for display an image source, a light source device (4) above the LCD displayer (15), and a lens (5) positioned under the LCD displayer (15). A display surface of the LCD displayer (15) is downwardly embedded into a fixing board (3) horizontally mounted on the baseplate (1). The light source device (4) is mounted on the fixing board (3). The lens (5) is embedded in a lens fixing board (10). The lens fixing board (10) is mounted on the baseplate (1) via a sliding device. The present invention further provides a method for digital stereo projection, the image source obtained by digital devices can be processed for stereopictures with the LCD displayer (15) as display device, and thus has high sensitization accuracy. The focus of the lens (5) according to the present invention can be adjusted by the rail (9) in vertical direction, so as to change the image size, and increase the image effect and size of the stereopictures.
摘要翻译：一种用于移动立体成像镜头的装置，包括：底板（1），用于显示图像源的LCD显示器（15），LCD显示器（15）上方的光源装置（4）和透镜（5）位于LCD显示器（15）下方。 LCD显示器（15）的显示表面向下嵌入到水平安装在底板（1）上的固定板（3）中。光源装置（4）安装在固定板（3）上。透镜（5）嵌入在透镜固定板（10）中。透镜固定板（10）通过滑动装置安装在基板（1）上。本发明还提供了一种数字立体声投影方法，由LCD显示器（15）作为显示装置，通过数字装置获得的图像源可以被处理为立体图像，因此具有高的致敏精度。根据本发明的透镜（5）的焦点可以通过轨道（9）在垂直方向上调整，以便改变图像尺寸，并增加立体图像的图像效果和尺寸。

96. 发明公开

EP2061662A4 METHOD OF PERSONALIZING OR CUSTOMIZING A CONTAINER OR DISPENSER 审中-公开
标题翻译：方法的个性化或改编容器或施主
公开(公告)号：EP2061662A4
公开(公告)日：2011-09-14
申请号：EP07826067
申请日：2007-08-20
申请人： KIMBERLY CLARK CO
发明人： MCDONALD DUANE LYLE , PITSCH RAYMOND PAUL , SCOTTI SHIVA NICOLE , HENDERSON CYNTHIA WATTS , MARQUARDT ALLEN JERRY , BAKKEN ANDREW PETER , SHANNON THOMAS GERARD , CLARE TIMOTHY PATRICK
IPC分类号： G06Q30/00 , G03B27/32 , G09C1/00
CPC分类号： B65D25/205 , B65D25/36 , B65D2203/00

97. 发明公开

EP2116901A1 Hochauflösendes Fotoplottverfahren und Anordnung zur hochauflösenden Aufzeichnung eines computergespeicherten Rasterbildes auf einen ebenen lichtempfindlichen Aufzeichnungsträger 有权转让
标题翻译：高分辨率Fotoplottverfahren和布置用于高分辨率-记录一个计算机存储的光栅图像到平坦感光载体
公开(公告)号：EP2116901A1
公开(公告)日：2009-11-11
申请号：EP09005359.6
申请日：2009-04-15
申请人： MIVA Technologies GmbH
发明人： Pagan, Robin
IPC分类号： G03F7/20 , G03B27/32 , H04N1/195
CPC分类号： G03F7/70791 , G03B27/32 , G03F7/70291 , G03F7/70308 , H04N1/19505
摘要： Das aufzuzeichnende Rasterbild T (Gesamtbild) wird computerprogrammgesteuert bildpunktweise als Folge von Teilbildern (T1, T2, T3, T4,...) aufgezeichnet auf einen sich in Richtung v durch eine Belichtungsstation hindurchbewegenden Aufzeichnungsträger (1).
Alle Bildpunkte eines Teilbildes werden gleichzeitig aufgezeichnet.
Die Teilbilder werden zu Blitzzeitpunkten (t1, t2, t3, t4 ...) aufgezeichnet, zu denen sich der Aufzeichnungsträger (1) in y-Richtung um jeweils eine äquidistante y-Verschiebe-Strecke weiterbewegt hat. Die Länge der y-Verschiebestrecke schließt immer einen Bruchteil der Länge einer Bildpunktseite ein. Sie ist kleiner oder größer als die Seitenlänge eines Bildpunktes.
In einem Teilbild werden bestimmte Bildpunkte in x - Richtung optisch versetzt - bezogen auf gedachte unversetzt aufgezeichnete Bildpunkte- aufgezeichnet , wobei der x-Versatz eines Bildpunktes kleiner ist als die Seitenlänge eines Bildpunktes.
Die Bildaufzeichnung erfolgt mittels einer Licht-Steuer-Einheit , vorzugsweise einem Kippspiegel-Elemente-Halbleiter-Chip, mit matrixartig angeordneten Licht-Steuer-Elementen. Die Lichtsteuer-Einheit wird für die Aufzeichnung jedes Teilbildes computerprogrammgesteuert mit einem entsprechenden Steuermuster geladen. Bei Belichtung der Licht-Steuer-Einheit bewirken - entsprechend dem Steuermuster in Verbindung mit einer optischen Ablenkeinheit - die von den Licht-SteuerElementen ausgehenden Lichtstrahlen eine unversetzte oder in x-Richtung versetzte Aufzeichnung von Lichtpunkten. Durch Überlagerung eiander überlappender Bildpunkte ergeben sich kleine Bildelemente, (kleiner als Bildpunkte), aus denen das Rasterbild zusammengesetzt scheint. Daraus resultiert eine höhere Auflösung des aufgezeichneten Rasterbildes.
Die Erfindung dient insbesondere der Erstellung fotographischer Vorlagen mit höchster Auflösung für gedruckte Leiterplatten, der Direktbelichtung von Leiterplattenmaterial u.ä. und der Erstellung dreidimensionaler Strukturen für optische Elemente.
摘要翻译：该方法包括在x产生具有图像点的栅格图案或y通过照射与计算机程序的控制图案撞击的光控制单元的坐标对齐。一种记录介质（1）的相对的在等距ý周围移位到光控制单元在y方向上为每个照明点滑动部。滑动部包括：图像点的边的长度的一小部分。一个独立的claimsoft被包括在安排上记录的计算机存储的帧，即使光敏感记录载体如在x或y中的像素坐标调整。

98. 发明公开

EP2102707A1 FILM PRINTING SYSTEM AND METHOD UTILIZING A DIGITAL LIGHT PROCESSING IMAGER OR ORGANIC LIGHT EMITTING DIODE 审中-公开
标题翻译：油膜压力系统和方法数字光处理图像传感器或有机发光二极管
公开(公告)号：EP2102707A1
公开(公告)日：2009-09-23
申请号：EP07716402.8
申请日：2007-01-09
申请人： Thomson Licensing
发明人： YOON, Youngshik , DERRENBERGER, Mike, Arthur , VIZIREANU, Ion , HAAS, Gunther, Karl
IPC分类号： G03B21/00 , G03B27/32 , G03B21/14
CPC分类号： G03B27/521 , G03B27/02 , G03B27/323 , G03B27/475
摘要： A motion picture printing system having a digital micromirror device for manipulating light used to expose a film negative is disclosed. A motion picture printing system having an organic light emitting diode for emitting light to expose a film negative is disclosed.

99. 发明公开

EP1969422A4 PROJECTION SYSTEM WITH BEAM HOMOGENIZER 审中-公开
标题翻译： WITH光束均化投影系统
公开(公告)号：EP1969422A4
公开(公告)日：2009-09-09
申请号：EP06848128
申请日：2006-12-27
申请人： 3M INNOVATIVE PROPERTIES CO
发明人： DESTAIN PATRICK R
IPC分类号： G03B21/00 , G03B27/32 , H04N5/74
CPC分类号： G02B19/0066 , G02B19/0014
摘要： A projection system having a prescribed relationship between the condenser and the projection lens is disclosed, where an imager gate normally coinciding with a projection object plane is between and spaced away from a condenser back focal plane and a condenser image plane. The condenser images an extended source onto the condenser image plane, preferably with sufficient field curvature to produce a curved image of the source. A pixilated panel or film defining a graphic image is located at the imager gate. The magnification of the condenser is chosen so the image of the source is essentially the same size as the pixilated panel. Positioning the imager gate away from the condenser image plane provides blurring of any brightness non-uniformities across the area of the source, providing a relatively uniform illumination pattern whose outer shape matches the shape of the imager gate.

100. 发明公开

EP1114802A4 QUARTZ GLASS MEMBER, PRODUCTION METHOD THEREFOR, AND PROJECTION ALIGNER USING IT 审中-公开
标题翻译：石英玻璃元件及其制造方法PROJEKTIONSAUSRICHTEINRICHTUNG这是用来
公开(公告)号：EP1114802A4
公开(公告)日：2008-12-31
申请号：EP00917420
申请日：2000-04-21
申请人： NIPPON KOGAKU KK
发明人： HIRAIWA HIROYUKI
IPC分类号： C03B19/14 , C03C3/06 , C03C4/00 , G03F7/20 , C03B20/00 , G03B27/32 , H01L21/027
CPC分类号： G03F7/70058 , C03B19/14 , C03B19/1415 , C03B19/1453 , C03B2201/23 , C03B2203/22 , C03C3/06 , C03C4/0085 , C03C2201/23 , C03C2203/00 , C03C2203/40 , C03C2203/52 , G03F7/70216 , G03F7/70958 , G03F7/70966 , Y10S65/90 , Y10S501/905
摘要： A silica glass member for use with a light having a specific wavelength of 250 nm or shorter, in which the difference in the maximum and the minimum values of hydroxyl group concentration as measured in a plurality of points within a plane vertical to an optical axis whose center is the crossing point of its optical axis with the optical axis of the silica glass member is 50 ppm or lower; and in which the plurality of signed birefringence values obtained based on the birefringence values measured on several points within a plane vertical to an optical axis whose center is the crossing point of its optical axis with the optical axis of the silica glass member and the direction of the fast axis fall within a range of from -2.0 to +2.0 nm/cm. Thus, a silica glass member having high optical transmittance and a high resistance against ultraviolet radiations is provided.

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