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1. 发明公开

EP1469298A1 SPECTRAL MEASURING DEVICE 审中-公开
标题翻译： SPEKTRALMESSVORRICHTUNG
公开(公告)号：EP1469298A1
公开(公告)日：2004-10-20
申请号：EP02792020.6
申请日：2002-12-26
申请人： Tochigi Nikon Corporation , Nikon Corporation
发明人： USAMI, Mamoru, c/o Nikon Corporation , IWAMOTO, Toshiyuki, c/o NIKON CORPORATION
IPC分类号： G01N21/01 , G01N21/35
CPC分类号： G01N21/3581 , G01N21/03 , G01N2021/151
摘要： A holder (30) that holds a specimen (100) is disposed outside a vacuum chamber (50) with a light transmission window (52a). A light detection unit and a light radiation unit having a terahertz light generator (6) are fixed on a base (53) disposed inside the vacuum chamber. The light radiation unit irradiates terahertz pulse light onto the specimen (100) placed outside the vacuum chamber via the light transmission window (52a) and the resulting specimen light from the specimen (100) is received at the light detection unit via the light transmission window (52a). The base (53) in the vacuum chamber and the holder (30) disposed outside the vacuum chamber are connected via a connecting member (54a) passing displaceably through a barrier wall of a vacuum chamber (50) with airtight sealing so as to fix the relative position of the holder to the base.
摘要翻译：保持试样（100）的保持器（30）设置在具有透光窗（52a）的真空室（50）的外侧。具有太赫兹光发生器（6）的光检测单元和光辐射单元固定在设置在真空室内的基座（53）上。光辐射单元经由透光窗（52a）将太赫兹脉冲光照射到放置在真空室外部的样品（100）上，并且来自样品（100）的所得样本光经由透光窗被接收在光检测单元（52A）。真空室中的基座53和设置在真空室外的保持器30经由可气密地穿过真空室50的阻挡壁的连接构件54a连接，支架与基座的相对位置。

2. 发明公开

EP1970673A1 ENCODER 有权
标题翻译：编码器
公开(公告)号：EP1970673A1
公开(公告)日：2008-09-17
申请号：EP06843389.5
申请日：2006-12-27
申请人： NIKON CORPORATION , Sendai Nikon Corporation
发明人： MAKINOUCHI, Susumu c/o NIKON CORPORATION , IMAI, Toru c/o NIKON CORPORATION , WATANABE, Akihiro c/o NIKON CORPORATION
IPC分类号： G01D5/38 , G01D5/347 , G01D5/36
CPC分类号： G01D5/38 , G01D5/34784
摘要： A light via first and second index scales (20, 22) is split by a beam splitter (BS), and one of the split lights is received by a first light-receiving element (26) via a movable scale (24) and also the other of the split lights is received by a second light-receiving element (30) via a reference scale (28), and therefore by computing positional information of the movable scale using an output of the first light-receiving element (a first output) and an output of the second light-receiving element (a second output), movement information of the movable scale can be measured with high precision without being affected by drift of the modulation center (the oscillation center) of the beam.
摘要翻译：经由第一和第二分度标尺（20,22）的光被分束器（BS）分开，并且分离的光之一经由可动标尺（24）被第一光接收元件（26）接收，并且还另一个分离光由第二光接收元件（30）通过基准标尺（28）接收，并且因此通过使用第一光接收元件的输出（第一输出）计算可移动标尺的位置信息）和第二光接收元件（第二输出）的输出，可以高精度地测量活动标尺的运动信息，而不受波束的调制中心（振动中心）的漂移的影响。

3. 发明公开

EP1865292A1 Encoder 有权
标题翻译： Kodierer
公开(公告)号：EP1865292A1
公开(公告)日：2007-12-12
申请号：EP07108393.5
申请日：2007-05-16
申请人： NIKON CORPORATION , Sendai Nikon Corporation
发明人： Makinouchi, Susumu c/o Nikon Corporation , Imai, Toru c/o Nikon Corporation , Watanabe, Akihiro c/o Nikon Corporation
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： When an incident light is obliquely incident on index scale 20, the optical path length of light A becomes longer than the optical path length of light B and an optical path length difference occurs, which causes a phase difference in both of the diffracted lights incident on photodetection element 26. According to the phase difference, intensity of a photoelectric detection signal output from photodetection element 26 changes. That is, due to a periodic change in the incident angle of the incident light, the phase difference between light A and light B is modulated, and the interference signal becomes greatly modulated.
摘要翻译：当入射光倾斜入射到指纹标尺20上时，光A的光程长度比光B的光路长度长，并且发生光程长度差，这导致入射到的两个衍射光的相位差光检测元件26.根据相位差，从光检测元件26输出的光电检测信号的强度发生变化。也就是说，由于入射光的入射角度的周期性变化，光A和光B之间的相位差被调制，并且干扰信号变得很大地被调制。

4. 发明公开

EP1429431A1 TERAHERTZ LIGHT APPARATUS 审中-公开
标题翻译：太赫兹LICHTVORRICHTUNG
公开(公告)号：EP1429431A1
公开(公告)日：2004-06-16
申请号：EP02765611.5
申请日：2002-09-20
申请人： Nikon Corporation , Tochigi Nikon Corporation
发明人： USAMI, Mamoru
IPC分类号： H01S1/02 , G01N21/01 , G01N21/35
CPC分类号： H01S1/02 , G01N21/3581
摘要： A terahertz light generation element 8 emits terahertz light as excitation pulse light is emitted onto an area between electrically conductive films 32 and 33 formed on a substrate 31 while a bias voltage is applied between the electrically conductive films 32 and 33. A terahertz light detection unit 13 outputs an electrical signal corresponding to the intensity level of the electric field of the terahertz light entering the terahertz light detection unit. The polarity of the electric field of the terahertz light is modulated by inverting the polarity of the bias voltage applied between the pair of electrically conductive films. By using a reference signal synchronous with the polarity inversion of the bias voltage applied between the pair of electrically conductive films, the electrical signal provided by the terahertz light detection unit 13 is amplified at a lock-in amplifier 24.
摘要翻译：当在导电膜32和33之间施加偏置电压时，激发脉冲光发射到形成在基板31上的导电膜32和33之间的区域上，太赫兹光发生元件8发射太赫兹光。太赫兹光检测单元 13输出对应于进入太赫兹光检测单元的太赫兹光的电场的强度水平的电信号。通过使施加在一对导电膜之间的偏置电压的极性反转来调制太赫兹光的电场极性。通过使用与施加在一对导电膜之间的偏置电压的极性反转同步的参考信号，由太赫兹光检测单元13提供的电信号在锁定放大器24处被放大。

5. 发明公开

EP1826535A1 PHOTOELECTRIC ENCODER 有权
标题翻译： FOTOELEKTRISCHER KODIERER
公开(公告)号：EP1826535A1
公开(公告)日：2007-08-29
申请号：EP05816701.6
申请日：2005-12-13
申请人： NIKON CORPORATION , Sendai Nikon Corporation
发明人： IMAI, Toru, NIKON CORPORATION IP Dept.
IPC分类号： G01D5/36 , G01D5/38
CPC分类号： G01D5/38 , G01D5/2448 , G01D5/34746
摘要： A photoelectric encoder includes a light source (11) of an illumination light beam; a movable grating (15) which has grating lines and which is displaceable in a direction intersecting the grating lines; an index grating (13) which serves as a reference for displacement of the movable grating (15); a light-receiver (16) which receives the illumination light beam via the movable grating (15) and the index grating (13); a modulator (17) which periodically changes a light beam outgoing from the index grating (13); and a displacement detector (22, 23) which detects the displacement of the movable grating based on the illumination light beam received by the light-receiver (16). Accordingly, a signal representing the displacement of a movable body can be accurately generated even when the attitude of the grating occurs.
摘要翻译：光电编码器包括照明光束的光源（11）可移动光栅（15），其具有光栅线，并且可沿与光栅线相交的方向移位; 用作可移动光栅（15）的位移的参考的索引光栅（13）; 经由可移动光栅（15）和折射光栅（13）接收照明光束的光接收器（16）; 周期性地改变从折射光栅（13）射出的光束的调制器（17）; 以及基于由所述受光器（16）接收的照明光束来检测所述可动光栅的位移的位移检测器（22,23）。因此，即使当光栅的姿态出现时，也能够精确地生成表示移动体的位移的信号。

6. 发明授权

EP1826553B1 Method of measuring using terahertz light 有权
标题翻译：使用太赫兹光测定方法
公开(公告)号：EP1826553B1
公开(公告)日：2014-05-07
申请号：EP05805481.8
申请日：2005-11-01
申请人： Tochigi Nikon Corporation , NIKON CORPORATION
发明人： TSUMURA, Naoki , FUKUSHIMA, Kazushiro
IPC分类号： G01N21/35
CPC分类号： G01N21/3581
摘要： A measuring equipment utilizing terahertz pulse light, includes : a terahertz light generator that generates terahertz pulse light; a terahertz light detector that detects terahertz pulse light; a first condensing optical system that condenses the terahertz pulse light generated by the terahertz light generator; and a second condensing optical system that condenses the terahertz pulse light diverging after being condensed by the first condensing optical system, onto the terahertz light detector. A sample is arranged in a vicinity of a position of condensing the terahertz pulse light by the first condensing optical system; and at least one of the first and the second condensing optical systems includes at least one optical device having a positive or negative refractive power. The measuring equipment further includes: a position adjusting mechanism that adjusts a position of the at least one optical device on an optical axis when the terahertz light detector detects the terahertz pulse light having transmitted through the sample; and a controlling unit that controls the position adjusting mechanism.

7. 发明公开

EP2037487A1 APPARATUS WITH MOBILE BODY, EXPOSURE APPARATUS, EXPOSURE METHOD AND DEVICE MANUFACTURING METHOD 审中-公开
标题翻译： VORRICHTUNG MIT MOBILEM ELEMENT，BELICHTUNGSVORRICHTUNG，BELICHTUNGSVERFAHREN SOWIE HERSTELLUNGSVERFAHRENDAFÜR
公开(公告)号：EP2037487A1
公开(公告)日：2009-03-18
申请号：EP07815065.3
申请日：2007-06-11
申请人： Nikon Corporation , Sendai Nikon Corporation
发明人： MAKINOUCHI, Susumu , IMAI, Toru , WATANABE, Akihiro
IPC分类号： H01L21/027 , G01B11/00 , G01D5/38 , G03F7/20
CPC分类号： G01D5/38 , G01D5/266 , G03F7/70716 , G03F7/70775
摘要： A moving grating (30X) is arranged on a side of a wafer stage (WST), a light source (22) irradiates a light to the moving grating, diffracted lights generated from the moving grating are interfered by fixed scales (24A, 24B) and an index scale (26) of which positional relation with the light source is fixed, and a detection instrument (28) detects the interfered light. In this case, since the moving grating is arranged on a side of the wafer stage, upsizing of the entire wafer stage can be suppressed. Further, since interference occurs between a plurality of diffracted lights (e.g., the ±1st-order diffracted light) passing extremely close optical paths, influence caused by a fluctuation of ambient atmosphere becomes less in comparison to conventional interferometers, and thus, a high-precision measurement of positional information of the movable body is possible.
摘要翻译：移动光栅（30X）布置在晶片台（WST）的一侧，光源（22）向移动光栅照射光，由移动光栅产生的衍射光被固定刻度（24A，24B）干扰，和与光源的位置关系固定的指标（26），检测器（28）检测被干扰的光。在这种情况下，由于移动光栅布置在晶片台的一侧，因此可以抑制整个晶片台的大尺寸化。此外，由于在通过非常接近的光路的多个衍射光（例如±1级衍射光）之间发生干涉，所以与常规干涉仪相比，由环境大气的波动引起的影响变小，因此，移动体的位置信息的精度测量是可能的。

8. 发明公开

EP1398668A3 Reticle manipulators and related methods for conveying thin, circular reticles as used in charged-particle-beam microlithography 审中-公开
标题翻译：掩模操纵和用于输送薄和圆对应的方法，在所述带电粒子束微光刻掩模使用
公开(公告)号：EP1398668A3
公开(公告)日：2008-12-10
申请号：EP03017868.5
申请日：2003-08-05
申请人： NIKON CORPORATION , Sendai Nikon Corporation
发明人： Kikuchi, Hidekazu, C/O Nikon Corporation , Yamamoto, Akihiro, C/O Nikon Corporation
IPC分类号： G03F7/20 , H01L21/68
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , G03B27/62 , G03F7/70741 , H01L21/67766 , H01L21/68707 , Y10S414/135 , Y10S414/136 , Y10S414/14 , Y10S414/141
摘要： Robotic reticle manipulators are disclosed for use in holding and conveying, with good stability, thin, circular reticles as used in charged-particle-beam ( e.g. , electron-beam) microlithography. An embodiment of such a manipulator includes at least one arm configured for executing movements in the X-, Y-, and Z-directions. Connected to the distal end of the at least one arm is a U-shaped fork (as an exemplary reticle-support member) defining recessed surfaces and vacuum ports for holding the reticle at the reticle's narrow handling zone located along the periphery of the reticle. Each vacuum port includes an upwardly extending lip that defines, on its "upward"-facing surface, a respective reticle-contact surface. Three such vacuum ports are provided on the fork and are situated so as to be nearly equidistantly separated from one another. Thus, as the reticle is being held and conveyed by the manipulator, the reticle is securely held to prevent reticle damage.

9. 发明公开

EP1826553A1 MEASURING EQUIPMENT 有权
标题翻译： Messmethode unter Verwendung von Terahertz-Licht
公开(公告)号：EP1826553A1
公开(公告)日：2007-08-29
申请号：EP05805481.8
申请日：2005-11-01
申请人： Tochigi Nikon Corporation , NIKON CORPORATION
发明人： TSUMURA, Naoki, NIKON CORPORATION (Int.Prop.Dept.) , FUKUSHIMA, Kazushiro, NIKON CORPORATION (Int.P.D.)
IPC分类号： G01N21/35
CPC分类号： G01N21/3581
摘要： A measuring equipment utilizing terahertz pulse light, includes : a terahertz light generator that generates terahertz pulse light; a terahertz light detector that detects terahertz pulse light; a first condensing optical system that condenses the terahertz pulse light generated by the terahertz light generator; and a second condensing optical system that condenses the terahertz pulse light diverging after being condensed by the first condensing optical system, onto the terahertz light detector. A sample is arranged in a vicinity of a position of condensing the terahertz pulse light by the first condensing optical system; and at least one of the first and the second condensing optical systems includes at least one optical device having a positive or negative refractive power. The measuring equipment further includes: a position adjusting mechanism that adjusts a position of the at least one optical device on an optical axis when the terahertz light detector detects the terahertz pulse light having transmitted through the sample; and a controlling unit that controls the position adjusting mechanism.
摘要翻译：利用太赫兹脉冲光的测量设备包括：产生太赫兹脉冲光的太赫兹光发生器; 检测太赫兹脉冲光的太赫兹光检测器; 第一聚光光学系统，其冷凝由太赫兹光发生器产生的太赫脉冲光; 以及第二聚光光学系统，其将在被第一聚光光学系统聚集之后发散的太赫兹脉冲光聚光到太赫兹光检测器上。样品被布置在由第一聚光光学系统凝结太赫兹脉冲光的位置附近; 并且第一和第二聚光光学系统中的至少一个包括具有正或负屈光力的至少一个光学器件。测量设备还包括：位置调整机构，当太赫兹光检测器检测到透过样品的太赫兹脉冲光时，调节至少一个光学器件在光轴上的位置; 以及控制所述位置调整机构的控制单元。

10. 发明公开

EP1398668A2 Reticle manipulators and related methods for conveying thin, circular reticles as used in charged-particle-beam microlithography 审中-公开
标题翻译：掩模操纵和用于输送薄和圆对应的方法，在所述带电粒子束微光刻掩模使用
公开(公告)号：EP1398668A2
公开(公告)日：2004-03-17
申请号：EP03017868.5
申请日：2003-08-05
申请人： Nikon Corporation , Sendai Nikon Corporation
发明人： Kikuchi, Hidekazu, C/O Nikon Corporation , Yamamoto, Akihiro, C/O Nikon Corporation
IPC分类号： G03F7/20
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , G03B27/62 , G03F7/70741 , H01L21/67766 , H01L21/68707 , Y10S414/135 , Y10S414/136 , Y10S414/14 , Y10S414/141
摘要： Robotic reticle manipulators are disclosed for use in holding and conveying, with good stability, thin, circular reticles as used in charged-particle-beam ( e.g. , electron-beam) microlithography. An embodiment of such a manipulator includes at least one arm configured for executing movements in the X-, Y-, and Z-directions. Connected to the distal end of the at least one arm is a U-shaped fork (as an exemplary reticle-support member) defining recessed surfaces and vacuum ports for holding the reticle at the reticle's narrow handling zone located along the periphery of the reticle. Each vacuum port includes an upwardly extending lip that defines, on its "upward"-facing surface, a respective reticle-contact surface. Three such vacuum ports are provided on the fork and are situated so as to be nearly equidistantly separated from one another. Thus, as the reticle is being held and conveyed by the manipulator, the reticle is securely held to prevent reticle damage.
摘要翻译：机器人操纵器光罩游离缺失是使用光盘作为带电粒子束（例如，电子束）微光刻用于保持和输送，具有良好的稳定性，薄的，圆形的掩模版。求的操纵器的一个实施例包括至少一个臂被配置用于在X，Y执行的动作，和Z方向。连接到所述至少一个臂的远端是一个U形叉（如在示例性的掩模版支撑部件） - 定义凹陷表面和真空端口，用于在沿所述光罩的外周位于所述标线的狭窄处理区保持标线片。各个真空端口包括在向上延伸的唇缘做限定，在其“向上” -facing表面，respectivement光罩接触面。设置在叉三个搜索真空端口和位于以便几乎等距地彼此分开。因此，当标线片被保持并输送由机械手，所述掩模版被牢固地保持，以防止损坏掩模版。

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