会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 8. 发明公开
    • ENVIRONMENTAL SYSTEM INCLUDING VACCUM SCAVENGE FOR AN IMMERSION LITHOGRAPHY APPARATUS
    • 麻醉药物麻醉师EINER TRANSPORIONFÜREINE IMMERSIONSLITHOGRAFIEVORRICHTUNG
    • EP3062152A1
    • 2016-08-31
    • EP16151255.3
    • 2004-04-01
    • Nikon Corporation
    • Novak, Thomas, W.Hazelton, Andrew J.Watson, Douglas, C.
    • G03F7/20G03B27/32G03B27/42C23C16/44H01L21/67
    • G03F7/70866G03F7/70341G03F7/7095
    • An environmental system (26) for controlling an environment in a gap (246) between an optical assembly (16) and a device (30) includes a fluid barrier (254), an immersion fluid system (252), and a transport region (256). The fluid barrier (254) is positioned near the device (30) and maintains the transport region (256) near the gap (246). The immersion fluid system (252) delivers an immersion fluid (248) that fills the gap (246). The transport region (256) transports at least a portion of the immersion fluid (248) that is near the fluid barrier (254) and the device (30) away from the device (30). The immersion fluid system (252) can include a fluid removal system (282) that is in fluid communication with the transport region (256). The transport region (256) can be made of a porous material.
    • 用于控制光学组件(16)和设备(30)之间的间隙(246)中的环境的环境系统(26)包括流体屏障(254),浸没流体系统(252)和输送区域 256)。 流体屏障(254)位于装置(30)附近,并将输送区域(256)保持在间隙附近(246)。 浸没流体系统(252)输送填充间隙(246)的浸没流体(248)。 运输区域(256)将流体阻挡层(254)和装置(30)附近的浸没流体(248)的至少一部分输送离开装置(30)。 浸没流体系统(252)可以包括与输送区域(256)流体连通的流体移除系统(282)。 输送区域(256)可以由多孔材料制成。