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91. 发明授权

EP1452620B1 Mask used for layer formation and process of making the mask 有权
标题翻译：面膜生产层，使面膜的方法。
公开(公告)号：EP1452620B1
公开(公告)日：2006-03-08
申请号：EP03028254.5
申请日：2003-12-09
申请人： Pioneer Corporation
发明人： Chuman, Takashi, Corporate Res. & Development Lab. , Uchida, Yoshihiko, Corp. Res. & Development Lab. , Satoh, Hideo, Corporate Res. & Development Lab. , Hata, Takuya, Corporate Res. & Development Lab. , Yoshizawa, Atsushi, Corp. Res. & Development Lab.
IPC分类号： C23C14/04 , C23C16/04
CPC分类号： G03F1/20 , C23C14/042 , G03F7/12

92. 发明公开

EP1553579A1 METHOD OF DELIVERING SUBSTRATE TO FILM FORMING DEVICE FOR DISK-LIKE SUBSTRATE, MECHANISM FOR DELIVERING SUBSTRATE USED FOR THE METHOD, SUBSTRATE HOLDER, AND METHOD OF MANUFACTURING DISK-LIKE RECORDING MEDIUM USING THE METHOD 审中-公开
标题翻译： METHOD FOR递送衬底进行成膜装置用于盘-RMIGES基板用机构，用于输送基板的方法中，衬底保持器，并产生盘形记录介质与该过程的方法
公开(公告)号：EP1553579A1
公开(公告)日：2005-07-13
申请号：EP03733431.5
申请日：2003-06-16
申请人： TDK Corporation
发明人： KOSHIKAWA, Masato, TDK Corporation , WATANABE, Hideaki,2TDK Corporation
IPC分类号： G11B7/26 , C23C14/04 , C23C14/50
CPC分类号： G11B7/266 , C23C14/042 , C23C14/50 , G11B7/265
摘要： A substrate delivering method is provided, with which a disk-shaped substrate or the like with no center hole provided can be held in the atmosphere for easy transfer to a sputtering device. A projection portion is provided at a central portion of either side of a disk-shaped substrate, and transport etc of the substrate is performed with the substrate being integrated with an outer mask and an inner mask that cover outer peripheral end and central portions of the substrate. A delivering mechanism holds the inner mask and the outer mask by a magnetic force, and holding of the inner mask and the outer mask by a magnetic force is simultaneously effected on the substrate holder side to which the substrate is to be delivered, with the magnetic force on the delivering mechanism side being reduced during delivery of the substrate.
摘要翻译：本发明提供一种基板传送方法，利用该盘形基板等不设置中心孔可以在大气中容易转移到溅射装置进行。的突出部是在盘形基板的任一侧的中央部提供，并且基片的传输等进行与基片带被集成在外部掩模和内部掩模并覆盖外周端和中心部基板。甲输送机构保持面罩内层和通过磁力外面具，面罩内层和通过磁力外掩模的保持被同时进行在基板保持器侧以使所述基板是被输送，与磁性在输送机构侧力输送的基板的过程中被还原。

93. 发明公开

EP1548147A1 Thin film formation method 审中-公开
标题翻译： Verfahren zur Herstellung vondünnenSchichten
公开(公告)号：EP1548147A1
公开(公告)日：2005-06-29
申请号：EP04030291.1
申请日：2004-12-21
申请人： SEIKO EPSON CORPORATION
发明人： Yotsuya, Shinichi
IPC分类号： C23C14/04 , C23C4/12
CPC分类号： C23C4/12 , C23C4/01 , C23C14/042
摘要： The invention relates to providing a thin film formation method which can carry out various kinds of patterning deposition such as a mask vapor deposition with high precision and correctly, and a thin film formation equipment, and furthermore, to provide a method of manufacturing an organic electroluminescence device using the thin film formation method, an organic electroluminescence device, and an electronic apparatus having the organic electroluminescence device. A thin film formation method that arranges a mask M between a substrate G and a material source 1 and forms the material of the material source 1 as thin film in the substrate G, comprises: a substrate contacting process to contact the mask M and the substrate G; a gap measurement process to measure a gap between the mask M and the substrate G; and a thin film formation process to form the thin film according to the measurement result in the gap measurement process.
摘要翻译：本发明涉及提供一种可以高精度地正确地进行诸如掩模气相沉积的各种图案形成沉积的薄膜形成方法以及薄膜形成设备，此外，提供一种制造有机电致发光使用薄膜形成方法的器件，有机电致发光器件和具有有机电致发光器件的电子设备。在衬底G和材料源1之间布置掩模M并在衬底G中形成作为薄膜的材料源1的材料的薄膜形成方法包括：与掩模M和衬底接触的衬底接触工艺 G; 用于测量掩模M和基板G之间的间隙的间隙测量处理; 以及根据测量结果在间隙测量过程中形成薄膜的薄膜形成工艺。

94. 发明公开

EP1510593A1 Process for coating a component, component and powder 审中-公开
标题翻译：维尔法赫尔·祖尔·贝斯基通特（Baelil），鲍特里（Bauteil und Pulver）
公开(公告)号：EP1510593A1
公开(公告)日：2005-03-02
申请号：EP04017779.2
申请日：2004-07-27
申请人： Siemens Aktiengesellschaft , Sindlhauser Materials GmbH
发明人： Berndt, Thomas , Cox, Nigel-Philipp , Griep, Andreas , Kern, Guido , Reich, Gerhard , Sindlhauser, Peter
IPC分类号： C23C4/00 , C23C8/04 , C23C10/04 , C23C14/04 , C23C16/04 , B05B15/04
CPC分类号： C23C16/042 , C23C4/01 , C23C8/04 , C23C10/04 , C23C14/042
摘要： Coatings which are applied to a component have to be removed again in a complex way in certain regions, since a coating was not desired to be present in those regions. The subsequent removal of this layer adversely affects the component, for example its geometry.
The process according to the invention for coating a component (1) includes a masking (7) which at least partially comprises a ceramic powder and can therefore easily be removed after the component (1) has been coated.
摘要翻译：由于不希望在这些区域中存在涂层，因此在某些区域中必须以复杂的方式再次去除涂覆在组分上的涂层。该层的随后的去除对组件有不利影响，例如其几何形状。根据本发明的用于涂覆组分（1）的方法包括至少部分地包含陶瓷粉末的掩模（7），并且因此可以在涂覆组分（1）之后容易地除去。

95. 发明公开

EP1507025A1 DEVICE AND METHOD FOR FORMING THIN-FILM, AND METHOD OF MANUFACTURING ELECTRONIC COMPONENT USING THE DEVICE 审中-公开
标题翻译：装置及其制造薄膜方法生产电子部件使用的设备
公开(公告)号：EP1507025A1
公开(公告)日：2005-02-16
申请号：EP03715705.4
申请日：2003-04-01
申请人： TDK Corporation
发明人： KOSHIKAWA, Masato, c/o TDK Corporation , MATSUI, Satoshi, c/o TDK Corporation
IPC分类号： C23C14/56 , G11B7/26 , H01L21/68
CPC分类号： H01L21/67745 , C23C14/042 , C23C14/505 , C23C14/568 , G11B7/266 , H01L21/6719 , H01L21/67196 , H01L21/67751
摘要： A film formation apparatus is structured such that vacuum chambers each having a plurality of film forming chambers are arranged in planes different from each other and allowed to communicate with each other through a delivery chamber with the vacuum chamber kept in vacuum, and a substrate is transferred between the vacuum chambers by a substrate delivery mechanism arranged in the delivery chambers. The structure is thus adopted, whereby the number of chambers in the film formation apparatus can be easily increased, an installation space can be reduced, and a production efficiency can be increased.
摘要翻译：一种薄膜形成装置的结构的搜索没有真空室各自具有的成膜室的多元性被布置在从海誓山盟不同的平面，并使其通过输送腔室与所述真空腔室相互连通保持在真空中，并且基片被转移通过在传送腔室布置在输送机构的基板在真空室之间。该结构由此通过，由此可以容易地提高在成膜装置室的数量，其中的安装空间可被减小，并且生产效率可以提高。

96. 发明公开

EP1496135A1 SPATTERING DEVICE, METHOD OF FORMING THIN FILM BY SPATTERING, AND METHOD OF MANUFACTURING DISK-LIKE RECORDING MEDIUM USING THE DEVICE 审中-公开
标题翻译： SPATTERVORRICHTUNG，用于生产薄膜通过一种用于制造盘式记录媒体使用的设备的喷涂和工艺
公开(公告)号：EP1496135A1
公开(公告)日：2005-01-12
申请号：EP03715704.7
申请日：2003-04-01
申请人： TDK Corporation
发明人： KOSHIKAWA, Masato, c/o TDK Corporation , ISHIZAKI, Hideki, c/o TDK Corporation , WATANABE, Hideaki, c/o TDK Corporation , MATSUI, Satoshi, c/o TDK Corporation
IPC分类号： C23C14/34 , G11B7/26
CPC分类号： C23C14/042 , G11B7/266 , G11B11/10582
摘要： In a sputtering apparatus, an inner mask covering the central portion of a substrate is supported by a bearing provided on a backing plate on the back surface of a target, and further this inner mask abuts against the substrate with a predetermined load by a spring. By this construction, when the depositing of thin film is effected, it becomes possible for the inner mask abutting against the substrate to be rotated together with the substrate, and the non-film formed area of the central portion of the substrate is reliably formed and also, an improvement in film thickness, etc. in a film formed area is achieved.
摘要翻译：在溅射装置中，以内部掩模覆盖衬底的中心部分被设置在背板的目标的背面上的轴承支撑，并且进一步该内罩抵靠通过弹簧预定负载的底物。通过这种结构，当薄膜的沉积被实现，它能够用于内掩模抵靠衬底要与基板一起旋转，并且基片的中央部的非成膜区域被可靠地形成和所以，为了在膜厚度等在膜中形成区域的改善得以实现。

97. 发明授权

EP0880077B1 Method and apparatus for making a micro device 失效
标题翻译： Verfahren und Apparat zur Herstellung einer Mikroanordnung
公开(公告)号：EP0880077B1
公开(公告)日：2005-01-05
申请号：EP98303499.2
申请日：1998-05-05
申请人： LUCENT TECHNOLOGIES INC.
发明人： Aksyuk, Vladimir A. , Gammel, Peter L. , Bishop, David J.
IPC分类号： G03F9/00 , G03F1/14
CPC分类号： G03F9/00 , C23C14/042

98. 发明公开

EP1426462A2 Mask vapor deposition method and apparatus, mask, process for manufacturing display panel, display panel and electronic device 审中-公开
标题翻译：掩模蒸镀方法及装置，掩模，显示面板的制造方法，显示面板及电子设备
公开(公告)号：EP1426462A2
公开(公告)日：2004-06-09
申请号：EP03027352.8
申请日：2003-11-27
申请人： SEIKO EPSON CORPORATION
发明人： Atobe, Mitsuro , Yotsuya, Shinichi
IPC分类号： C23C14/24 , C23C14/04
CPC分类号： C23C14/24 , C23C14/042 , G03F9/00 , Y10T428/10
摘要： A method includes a step of attracting a glass substrate 20 that is a subject for deposition using the electrostatic attraction of a stage 1, a step of aligning the attracted glass substrate with a deposition mask 2, and a step of evaporating an organic compound that is a deposition material, used for forming electroluminescent elements so as to deposit the compound on the glass substrate 20. An electrostatic chucking function is provided to the deposition mask according to needs, whereby the adhesion is enhanced.
摘要翻译：该方法包括利用台1的静电引力来吸引作为沉积对象的玻璃基板20的步骤，将吸引的玻璃基板与沉积掩模2对准的步骤，以及蒸发有机化合物的步骤，沉积材料，用于形成电致发光元件以便将化合物沉积在玻璃基板20上。根据需要向沉积掩模提供静电夹持功能，由此增强了粘附。

99. 发明公开

EP1399967A1 METHOD OF MAKING FULL COLOR DISPLAY PANELS 有权
标题翻译：用于生产全彩色的记分板
公开(公告)号：EP1399967A1
公开(公告)日：2004-03-24
申请号：EP02733941.5
申请日：2002-04-05
申请人： 3M Innovative Properties Company
发明人： HAASE, Michael, A. , BAUDE, Paul, F. , WILLIAMS, Robert, C.
IPC分类号： H01L27/00 , H01L51/40
CPC分类号： H01L51/0011 , C23C14/042 , C23C14/12 , C23C14/225 , H01L27/3211 , H01L27/3295 , H01L51/001 , H01L51/5036 , H01L51/56
摘要： A method for making full color display panel pixels is described. One aspect of the method relates to simultaneously depositing red, green, and blue dopants such that the blue dopant is dispersed in at least one non-blue subpixel. Another aspect of the method relates to using an integrated or removable mask to deposit components. In an angled evaporation method, the mask can correct for parallax.

100. 发明公开

EP1229144A3 Integrated mask and method and apparatus for manufacturing organic el device using the same 审中-公开
标题翻译：集成掩模以及植物及其制备方法使用其的有机电致发光器件
公开(公告)号：EP1229144A3
公开(公告)日：2004-03-17
申请号：EP02002169.7
申请日：2002-01-29
申请人： TORAY INDUSTRIES, INC.
发明人： Fujimori, Shigeo , Kitamura, Yoshiyuki , Kanamori, Hiromitsu , Ikeda, Takeshi , Oka, Tetsuo
IPC分类号： C23C14/04 , H05B33/10
CPC分类号： H01L51/0011 , C23C14/042 , H01L27/32
摘要： An integrated mask (1) including a plurality of deposition masks (20), each deposition mask having an array of deposition apertures (32) formed in accordance with a deposition pattern; and a base plate (2) having a plurality of openings (10) on which the deposition masks are arranged is provided. The deposition masks are retained to the base plate by engaging units (40) in a disengageable manner, and alignment marks (6) used for positioning the deposition masks on the base plate are formed on the base plate. In addition, a method and apparatus for fabricating the integrated mask, a method and apparatus for manufacturing an organic EL device using the integrated mask, and an organic EL device are provided.
摘要翻译：一个集成的掩模（1）包括沉积掩模的多个（20），具有在沉积的阵列，每个沉积掩模的孔（32）形成为与一个沉积图案雅舞蹈; 并且具有开口在其上沉积掩模被布置被提供（10）的多个A基板（2）。沉积掩模由可脱离地卡合部（40），以及用于定位在所述基板上的沉积掩模形成在基板对准标记（6）保持在所述底板上。此外，提供了用于使用集成掩模制造集成掩模，一种方法和装置，用于制造有机EL器件的方法和装置，和有机EL器件的。

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