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1. 发明授权

EP3622592B1 EXTERNAL OPTICAL FEEDBACK ELEMENT FOR TUNING A MULTI-WAVELENGHT GAS LASER 有权
公开(公告)号：EP3622592B1
公开(公告)日：2023-11-29
申请号：EP18727560.7
申请日：2018-05-09
发明人： LITMANOVIC, Jacob , BETHEL, Jason , WHEELER, Ross , KOLSCH, Patrick
IPC分类号： H01S3/082 , H01S3/137 , H01S3/081 , H01S3/1055 , H01S3/106 , H01S3/223

2. 发明公开

EP4271536A1 LASER PROCESSING APPARATUS, METHODS OF OPERATING THE SAME, AND METHODS OF PROCESSING WORKPIECES USING THE SAME 审中-实审
公开(公告)号：EP4271536A1
公开(公告)日：2023-11-08
申请号：EP21916154.4
申请日：2021-11-23
申请人： Electro Scientific Industries, Inc.
发明人： KLEINERT, Jan , CHEN, Ruolin , BROOKHYSER, James , UNRATH, Mark , HU, Honghua
IPC分类号： B23K26/382 , B23K26/03 , H01S3/137 , B23K101/42

3. 发明公开

EP4005040A1 LASER WAVELENGTH STABILIZATION APPARATUS 审中-实审
公开(公告)号：EP4005040A1
公开(公告)日：2022-06-01
申请号：EP20750981.1
申请日：2020-07-14
申请人： Coherent, Inc.
发明人： SHU, Qize
IPC分类号： H01S5/00 , H01S3/13 , H01S5/065 , H01S5/0687 , H01S3/137 , H01S3/139 , H01S3/08

4. 发明授权

EP3520182B1 SYSTEME LASER AVEC RETROACTION OPTIQUE 有权
公开(公告)号：EP3520182B1
公开(公告)日：2021-10-20
申请号：EP17784874.4
申请日：2017-09-27
发明人： KASSI, Samir
IPC分类号： H01S3/107 , G01N21/39 , H01S3/13 , H01S3/137 , H01S5/00 , H01S5/065 , H01S5/14

5. 发明授权

EP1942566B1 Monitoring light pulses 有权
标题翻译：光脉冲监控
公开(公告)号：EP1942566B1
公开(公告)日：2016-05-18
申请号：EP07122228.5
申请日：2007-12-04
申请人： Palo Alto Research Center Incorporated
发明人： Kiesel, Peter , Schmidt, Oliver
IPC分类号： H01S3/137 , G01J3/02 , G01J3/26 , G01J9/02
CPC分类号： H01L31/02165 , G01J3/02 , G01J3/0259 , G01J3/26 , G01J9/0246 , H01S3/0014 , H01S3/1305

6. 发明公开

EP2752948A2 Tunable laser and photoacoustic device including the same 审中-公开
标题翻译：激光雕刻机和激光雕刻机
公开(公告)号：EP2752948A2
公开(公告)日：2014-07-09
申请号：EP14150029.8
申请日：2014-01-02
申请人： Canon Kabushiki Kaisha
发明人： Iwase, Hideo
IPC分类号： H01S3/137
CPC分类号： H01S3/1062 , A61B5/0095 , H01S3/08027 , H01S3/08036 , H01S3/137 , H01S3/1623 , H01S3/1635
摘要： A tunable laser includes a resonator including a highly reflecting mirror (104) and a partially reflecting mirror (105); a gain medium (109) disposed in the resonator; a birefringence filter (101) disposed in the resonator; and an excitation device (110) that excites the gain medium (109). In the tunable laser, light that passes through the birefringence filter (101) oscillates between the highly reflecting mirror (104) and the partially reflecting mirror (105). An oscillation wavelength is switched by rotating the birefringence filter (101). The birefringence filter (101) includes a first birefringent plate (1021) and a second birefringent plate (1022), which have principal dielectric axes parallel to optical surfaces thereof. An absolute value of an angle formed by the principal dielectric axis of the first birefringent plate (1021) and the principal dielectric axis of the second birefringent plate (1022) is larger than zero.
摘要翻译：可调激光器包括包括高反射镜（104）和部分反射镜（105）的谐振器; 设置在所述谐振器中的增益介质（109）设置在谐振器中的双折射滤波器（101）以及激励所述增益介质（109）的激励装置（110）。在可调激光器中，穿过双折射滤光器（101）的光在高反射镜（104）和部分反射镜（105）之间振荡。通过旋转双折射滤光器（101）来切换振荡波长。双折射滤光器（101）包括具有平行于其光学表面的主介电轴的第一双折射板（1021）和第二双折射板（1022）。由第一双折射板（1021）的主介质轴与第二双折射板（1022）的主介质轴形成的角度的绝对值大于零。

7. 发明公开

EP2564236A1 ATMOSPHERIC HUMIDITY OR TEMPERATURE OR CLOUD HEIGHT MEASURING METHOD AND APPARATUS 有权
标题翻译：的方法和用于测量湿度或温度和云的高度
公开(公告)号：EP2564236A1
公开(公告)日：2013-03-06
申请号：EP11774484.7
申请日：2011-04-28
申请人： VAISALA OYJ
发明人： KALLIO, Jukka
IPC分类号： G01S17/95 , G01W1/02 , H01S5/14 , H01S3/137 , G02B5/28
CPC分类号： G01S17/95 , G01K2213/00 , G01S7/4814 , G01S7/4815 , G01W1/00 , G02B5/28 , G02B26/001 , H01S5/4062 , Y02A90/19
摘要： An atmospheric cloud height, humidity profile, or temperature measuring method and arrangement are provided. In the method, pulsed laser signals (14) are transmitted through transmission optics (2, 3, 4, 5, 6) to the atmosphere and the signal (15) reflected or scattered back from there is detected. An interference filter (3) is used in the optics, in order to stabilize the transmitted optical power to the center wavelength of the interference filter (3).

8. 发明公开

EP1898504A1 LIGHT SOURCE 审中-公开
标题翻译：光源
公开(公告)号：EP1898504A1
公开(公告)日：2008-03-12
申请号：EP06766474.8
申请日：2006-06-07
申请人： The Furukawa Electric Co., Ltd. , TOTOKU ELECTRIC CO., LTD.
发明人： WAKO, Sugio, TOTOKU ELECTRIC CO., LTD. , KOYAMA, Atsushi, TOTOKU ELECTRIC CO., LTD. , ZHANG, Xiongfei, TOTOKU ELECTRIC CO., LTD. , MATSUURA, Hiroshi, THE FURUKAWA ELECTRIC CO., LTD. , ABE, Satoru, THE FURUKAWA ELECTRIC CO., LTD. , TAKAGI, Takeshi, THE FURUKAWA ELECTRIC CO., LTD.
IPC分类号： H01S3/06 , H01S3/094 , H01S3/137
CPC分类号： H01S3/09415 , G01N2201/06113 , G02B6/29317 , G02B6/29358 , H01S3/06708 , H01S3/0675 , H01S3/08036 , H01S3/1062 , H01S3/1618
摘要： A light source includes a semiconductor pumping laser, a pumping-light waveguide that guides a pumping laser light output from the semiconductor pumping laser, an amplified-light waveguide that is connected to the pumping-light waveguide, the amplified-light waveguide being doped with an amplification medium that is pumped by the pumping laser light output from the pumping-light waveguide to generate a spontaneous emission light in a predetermined wavelength band, an output-light waveguide that guides the spontaneous emission light output from the amplified-light waveguide, a spatial coupling unit provided between the amplified-light waveguide and the output-light waveguide, which includes a wavelength selecting element that selectively transmits a light having a desired wavelength band out of the spontaneous emission light, and a lens unit that couples the spontaneous emission light to the wavelength selecting unit, an input-side light reflecting unit that is provided between the semiconductor pumping laser and the amplified-light waveguide, and an output-side light reflecting unit that is formed on an output side of the spatial coupling unit. By forming a laser resonator that includes the amplified-light waveguide and the spatial coupling unit by the input-side light reflecting unit and the output-side light reflecting unit, a light source with a stable light output is provided.
摘要翻译：光源包括半导体泵浦激光器，引导从半导体泵浦激光器输出的泵浦激光的泵浦光波导，连接到泵浦光波导的放大光波导，掺杂有放大光波导由泵浦光波导输出的泵浦激光泵浦以产生预定波段中的自发发射光的放大介质，引导从放大光波导输出的自发发射光的输出光波导，设置在所述放大光波导和所述输出光波导之间的空间耦合单元，所述空间耦合单元包括波长选择元件和透镜单元，所述波长选择元件选择性地透射所述自发发射光中具有期望波长带的光，向波长选择单元提供输入侧光反射单元，该输入侧光反射单元设置在半波长选择单元之间导体泵浦激光器和放大光波导，以及形成在空间耦合单元的输出侧上的输出侧光反射单元。通过由输入侧光反射单元和输出侧光反射单元形成包括放大光波导和空间耦合单元的激光谐振器，提供具有稳定光输出的光源。

9. 发明公开

EP1310022A4 LASER WAVELENGTH CONTROL UNIT WITH PIEZOELECTRIC DRIVER 有权
标题翻译：带压电驱动器激光波长控制单元
公开(公告)号：EP1310022A4
公开(公告)日：2007-07-04
申请号：EP01954584
申请日：2001-04-30
申请人： CYMER INC
发明人： SPANGLER RONALD L , JACQUES ROBERT N , EVERAGE GEORGE J , ANDERSON STUART L , PALENSCHAT FREDERICK A , FOMENKOV IGOR V , SANDSTROM RICHARD L , PARTLO WILLIAM N , ALGOTS JOHN M , BROWN DANIEL J W
IPC分类号： H01S3/137 , G03F7/20 , H01S3/036 , H01S3/038 , H01S3/04 , H01S3/041 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/11 , H01S3/13 , H01S3/131 , H01S3/134 , H01S3/22 , H01S3/225
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70333 , G03F7/70575 , G03F7/70933 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/08036 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/1305 , H01S3/1312 , H01S3/134 , H01S3/137 , H01S3/22 , H01S3/2207 , H01S3/225
摘要： Fast wavelenght correction equipment for an electric discharge laser includes at least one piezoelectic drive (80) and a fast wavelength measurement system and a fast feedback response time. In a preferred embodiment equipment is provided to control wavelength on a slow, intermediate amd fast time scales, which vary in range from several milliseconds to a few microseconds respectively. Techniques include a combination of a relatively slow stepper motor (82) and a very fast piezoelectric drive (80) for tuning the laser wavelength using a tuning mirror (14).

10. 发明公开

EP1386376A4 LASER SPECTRAL ENGINEERING FOR LITHOGRAPHIC PROCESS 有权
标题翻译： LASERSPEKTRALTECHNIK用于光刻工艺
公开(公告)号：EP1386376A4
公开(公告)日：2006-06-28
申请号：EP02731433
申请日：2002-04-19
申请人： CYMER INC
发明人： KROYAN ARMEN , LALOVIC IVAN , FOMENKOV IGOR , DAS PALASH P , SANDSTROM RICHARD L , ALGOTS JOHN M , AHMED KHURSHID
IPC分类号： G03F7/207 , G03F7/20 , H01L21/027 , H01S3/036 , H01S3/038 , H01S3/04 , H01S3/041 , H01S3/08 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/102 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/11 , H01S3/13 , H01S3/134 , H01S3/137 , H01S3/139 , H01S3/22 , H01S3/223 , H01S3/225 , H01S3/10
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70333 , G03F7/70575 , G03F7/70933 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/08009 , H01S3/08036 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/1024 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/13 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2308
摘要： An integrated circuit lithograohy technique (pectral engineering) for bandwidth control of an electric discharge laser. A computer models lithographic parameters to determine a desired laser spectrum needed to produce a desired lithographic result. A fast responding tuning mechanism (104) adjusts the center wavelength of laser pulses in a burst of pulses to achieve an integrated spectrum approximating the desired laser spectrum. The laser beam bandwidth is controlled to produce an effective beam spectrum having at least two spectral peaks to produce improved pattern resolution in photo resits film. Line narrowing equipment (106) is provided having at least one piezoelectric drive and a fast banwidth detection control system having a time response of less than about 2.0 millisecond. A wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second in phase with the repetition rate of the laser.

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