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1. 发明公开

EP4289029A1 HOUSING AN ETALON IN A FREQUENCY REFERENCE SYSTEM 审中-实审
公开(公告)号：EP4289029A1
公开(公告)日：2023-12-13
申请号：EP21923644.5
申请日：2021-05-27
申请人： Quantum Valley Ideas Laboratories
发明人： ERSKINE, Jennifer Ann Joe , RAMIREZ-SERRANO, Jaime , KEAVENEY, James , LIU, Chang , AMARLOO, Hadi , GILLETT, Geoffrey Gordon , SHAFFER, James P.
IPC分类号： H01S3/137 , G01B9/02 , H01S5/0687

2. 发明授权

EP3949038B1 APPARATUS AND METHOD FOR MULTIPLE FREQUENCY COMB GENERATION AND APPLICATIONS THEREOF 有权
公开(公告)号：EP3949038B1
公开(公告)日：2023-07-26
申请号：EP19714579.0
申请日：2019-03-25
发明人： PRONIN, Oleg , KRAUSZ, Ferenc , MAK, Ka Fai , BRONS, Jonathan , IANDULSKII, Maksim
IPC分类号： H01S3/1112 , H01S3/00 , H01S3/13 , H01S3/137 , H01S3/131 , H01S3/094 , H01S3/16 , H01S3/081 , H01S3/06 , H01S3/23 , H01S3/139 , H01S3/11 , H01S3/105 , H01S3/082

3. 发明授权

EP2210318B1 CROSS MODULATION-BASED OPTO-ELECTRONIC OSCILLATOR WITH TUNABLE ELECTRO-OPTIC OPTICAL WHISPERING GALLERY MODE RESONATOR 有权
公开(公告)号：EP2210318B1
公开(公告)日：2020-01-01
申请号：EP08848683.2
申请日：2008-11-13
申请人： Oewaves, Inc.
发明人： MALEKI, Lutfollah , MATSKO, Andrey B. , SAVCHENKOV, Anatoliy , ILCHENKO, Vladimir
IPC分类号： H01S3/08 , H01S3/107 , H01S5/10 , G02B6/293 , H01S3/13 , H01S3/137 , H01S5/065 , H01S5/0687

4. 发明公开

EP3520182A1 SYSTEME LASER AVEC RETROACTION OPTIQUE 有权
公开(公告)号：EP3520182A1
公开(公告)日：2019-08-07
申请号：EP17784874.4
申请日：2017-09-27
申请人： Centre National de la Recherche Scientifique
发明人： KASSI, Samir
IPC分类号： H01S3/107 , G01N21/39 , H01S3/13 , H01S3/137 , H01S5/00 , H01S5/065 , H01S5/14

5. 发明公开

EP3262727A1 STABILISIEREN OPTISCHER FREQUENZKÄMME 审中-公开
标题翻译：稳定光学频率
公开(公告)号：EP3262727A1
公开(公告)日：2018-01-03
申请号：EP16707389.9
申请日：2016-02-26
申请人： Menlo Systems GmbH
发明人： FISCHER, Marc , HOLZWARTH, Ronald , MANDEL, Olaf
IPC分类号： H01S3/13 , H01S3/139 , H01S3/094 , H01S3/11 , H01S3/131 , H01S3/137 , H01S3/16
CPC分类号： H01S3/1307 , H01S3/094038 , H01S3/1106 , H01S3/1305 , H01S3/1312 , H01S3/137 , H01S3/139 , H01S3/1394 , H01S3/1625 , H01S3/1636
摘要： The invention relates to a method for operating a laser device (1), by means of which an optical frequency comb can be stabilized, wherein the frequencies of the modes thereof are describable by the formula f
m = m x f
rep + f
0 , where f
rep is a mode spacing, f0 is an offset frequency and m is a natural number. At least one signal (S1, S2, S3, S4) is determined, which correlates with an actual value of a degree of freedom (F), wherein the degree of freedom (F) is a linear combination of the offset frequency f
0 and the mode spacing f
rep of the frequency comb. The actual value of the degree of freedom (F) is set in a predetermined capture range (F) of a second control unit (40) using a first control unit (10) on the basis of the signal. As soon as the capture range (ΔF
capture ) of the second control unit (40) is reached, the second control unit (40) is activated and the actual value is regulated to an intended value (F
intended ) with the aid of the second control unit (40).

6. 发明公开

EP1909365A1 SEMICONDUCTOR LASER EXCITED SOLID-STATE LASER DEVICE 审中-公开
标题翻译： Durch Halbleiterlaser gepumpteFestkörperlaservorrichtung
公开(公告)号：EP1909365A1
公开(公告)日：2008-04-09
申请号：EP05767214.9
申请日：2005-07-26
申请人： Shimadzu Corporation
发明人： TOJO, Koji
IPC分类号： H01S3/137
CPC分类号： H01S3/0621 , H01S3/0604 , H01S3/08031 , H01S3/09415 , H01S3/1024 , H01S3/1028 , H01S3/1062 , H01S3/109 , H01S3/1312 , H01S3/1611 , H01S3/1643
摘要： Single mode oscillation at a wavelength of about 1064.4 nm is enabled with no use of an etalon installed in an optical resonator by providing one of two ends of a Nd: YAG element, which acts as one end of the optical resonator, with an HR coating arranged for the wavelength of about 1064.4 nm and determining the thickness along the direction of transmission of light of the Nd:YAG element so that the peak of reflection appears at the wavelength of about 1064.4 nm but not at a wavelength of about 1062.8 nm.
摘要翻译：在大约1064.4nm的波长下的单模振荡能够通过提供作为光谐振器的一端的Nd：YAG元件的两端之间的HR涂层中的一端，而不使用安装在光学谐振器中的标准具布置为约1064.4nm的波长并且确定沿着Nd：YAG元件的光的透射方向的厚度，使得反射峰出现在约1064.4nm的波长处但不是在约1062.8nm的波长处。

7. 发明公开

EP1696521A2 Tuning a laser 审中-公开
标题翻译： Laserdurchstimmung
公开(公告)号：EP1696521A2
公开(公告)日：2006-08-30
申请号：EP05009727.8
申请日：2005-05-03
申请人： Agilent Technologies Inc. (a Delaware Corporation)
发明人： Owen, Geranit , Trutna Jr., William R.
IPC分类号： H01S3/106 , H01S3/137 , H01S5/14
CPC分类号： H01S3/1068 , H01S3/137 , H01S5/14
摘要： A method for synchronously tuning a laser in a laser system (150) having a set of possible resonant frequencies including a resonating mode resonant frequency, an optical amplifier (14) with an optical gain and a mode filter having a pass band (36, 50) with a center frequency, includes the steps of determining the optical gain of the optical amplifier (14) and providing an optical gain signal representative of the optical gain. The center frequency of the pass band (36, 50) is adjusted in accordance with the optical gain signal to move the center frequency of the pass band (36, 50) toward the resonating mode resonant frequency (38, 52). An error signal is determined in accordance with the optical gain signal and the center frequency of the pass band (36, 50) is adjusted by a servo system in accordance with the error signal. The center frequency of the pass band (36, 50) is also adjusted in accordance with a signal representative of an acoustic frequency.
摘要翻译：一种用于在具有包括谐振模式谐振频率的一组可能谐振频率的激光系统（150）中同步调谐激光的方法，具有光学增益的光学放大器（14）和具有通带（36,50 ）包括确定光学放大器（14）的光学增益并提供表示光学增益的光学增益信号的步骤。根据光学增益信号调整通带（36,50）的中心频率，以使通带（36,50）的中心频率朝向谐振模式共振频率（38,52）移动。根据光学增益信号确定误差信号，并且通过伺服系统根据误差信号来调整通带（36,50）的中心频率。通带（36,50）的中心频率也根据表示声频的信号进行调整。

8. 发明授权

EP1158629B1 Laser control apparatus, exposure apparatus and semiconductor device manufacturing method 有权
标题翻译：激光控制装置，曝光装置和方法，用于制造半导体器件
公开(公告)号：EP1158629B1
公开(公告)日：2006-06-28
申请号：EP01303730.4
申请日：2001-04-24
申请人： CANON KABUSHIKI KAISHA
发明人： Nagai, Yoshiyuki, c/o Canon Kabushiki Kaisha , Sano, Naoto, c/o Canon Kabushiki Kaisha
IPC分类号： H01S3/10 , G03F7/20 , H01S3/137
CPC分类号： H01S3/225 , H01S3/104 , H01S3/1055 , H01S3/106

9. 发明公开

EP1378037A4 INJECTION SEEDED F2 LASER WITH LINE SELECTION AND DISCRIMINATION 审中-公开
标题翻译：与选线和歧视注入种子F2激光
公开(公告)号：EP1378037A4
公开(公告)日：2006-03-22
申请号：EP02756431
申请日：2002-04-03
申请人： CYMER INC
发明人： ONKELS ECKEHARD D , SANDSTROM RICHARD L , NESS RICHARD M , PARTLO WILLIAM N , ERSHOV ALEXANDER I , OH CHOONGHOON
IPC分类号： H01L21/027 , H01S3/10 , G03F7/20 , H01S3/03 , H01S3/036 , H01S3/038 , H01S3/041 , H01S3/08 , H01S3/0943 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/102 , H01S3/134 , H01S3/137 , H01S3/139 , H01S3/22 , H01S3/223 , H01S3/225 , H01S3/23
CPC分类号： G03F7/70575 , G03F7/70025 , G03F7/70041 , G03F7/70483 , H01S3/03 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/041 , H01S3/08004 , H01S3/08009 , H01S3/082 , H01S3/0835 , H01S3/0943 , H01S3/097 , H01S3/09702 , H01S3/09705 , H01S3/0971 , H01S3/10092 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2258 , H01S3/2325 , H01S3/2366
摘要： A narrow band F2 laser system having two laser subsystems. The first laser subsystem is a seed laser (100) and provides a very narrow band pulsed beam at a first narrow wavelength range corresponding to a first natural emission line of the F2 laser system. This beam is injected into the gain medium of the second laser subsystem (102) in a first direction where the beam is amplified to produce a narrow band pulsed output beam. The seed laser (100) also produces a second pulsed beam at a second wavelength range corresponding to a second natural emission line of the F2 laser. This line is injected into the gain medium of the second laser subsystem (102) in a second direction opposite said first direction. The second beam is amplified in the gain medium of the second laser subsystem of the second laser subsystem and depletes the gain medium of gain potential at the second wavelength range. Thus, the portion of light at the second wavelength range in the output beam (124) is greatly reduced.

10. 发明公开

EP1378038A4 INJECTION SEEDED F2 LASER WITH WAVELENGTH CONTROL 审中-公开
标题翻译： INJEKTIONSKEIM-F2-LASER MITWELLENLÄNGENSTEUERUNG
公开(公告)号：EP1378038A4
公开(公告)日：2006-03-15
申请号：EP02763871
申请日：2002-03-29
申请人： CYMER INC
发明人： SANDSTROM RICHARD L , NESS RICHARD M , PARTLO WILLIAM N , ERSHOV ALEXANDER I , ONKELS ECKEHARD D , OH CHOONGHOON
IPC分类号： H01S3/225 , G03F7/20 , H01S3/03 , H01S3/036 , H01S3/038 , H01S3/041 , H01S3/08 , H01S3/0943 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/10 , H01S3/102 , H01S3/104 , H01S3/105 , H01S3/11 , H01S3/13 , H01S3/137 , H01S3/139 , H01S3/22 , H01S3/223 , H01S3/23
CPC分类号： H01S3/105 , G03F7/70025 , G03F7/70041 , G03F7/70483 , G03F7/70575 , H01S3/02 , H01S3/03 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/041 , H01S3/08004 , H01S3/08009 , H01S3/08036 , H01S3/08063 , H01S3/08068 , H01S3/0943 , H01S3/097 , H01S3/09702 , H01S3/09705 , H01S3/0971 , H01S3/0975 , H01S3/10092 , H01S3/104 , H01S3/1305 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2325 , H01S3/2366
摘要： The present invention provides a narrow band laser system having two laser subsystems. The first laser subsystem (seed laser) provides a very narrow band pulsed output beam which is used to injection seed the second laser subsystem (slave osc. or power amp.) where the narrow band pulsed seed beam is amplified to produce a narrow band pulsed output beam. A pulse power supply (pulse power) precisely times the discharges in the two laser subsystems so that the discharges are properly synchronized. The laser gas comprises F2 at a partial pressure less than about 1 % with a buffer gas comprised of helium, neon, or a combination thereof. Control of the center wavelength of the output beam is provided by adjusting one or more of the following parameters in the first laser subsystem: the total laser gas pressure, the relative concentration of helium or neon, F2 partial pressure, laser gas temperature, discharge voltage and pulse energy.
摘要翻译：本发明提供一种具有两个激光子系统的窄带激光系统。第一激光子系统被配置为提供非常窄的带状脉冲输出光束，其用于向第二激光子系统注入种子，其中窄带脉冲种子光束被放大以产生窄带脉冲输出光束。提供脉冲电源，其特别配置为精确地对两个激光子系统中的放电进行时间放电，使得放电正确同步。激光气体包含分压小于约1％的F2，由氦或氖组成的缓冲气体或氦和氖的组合。通过调整第一激光器中的一个或多个以下参数来提供输出光束的中心波长的控制：总激光气体压力，氦或氖的相对浓度，F2分压，激光气体温度，放电电压和脉冲能源。

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