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1. 发明授权

US6134807A Drying processing method and apparatus using same 失效
标题翻译：干燥处理方法及其使用方法
公开(公告)号：US6134807A
公开(公告)日：2000-10-24
申请号：US79768
申请日：1998-05-15
申请人： Mitsuaki Komino , Osamu Uchisawa
发明人： Mitsuaki Komino , Osamu Uchisawa
IPC分类号： H01L21/304 , H01L21/00 , H01L21/08 , F26B7/00
CPC分类号： H01L21/67034
摘要： A drying processing apparatus for supplying a dry gas to a processing chamber 35, which houses therein semiconductor wafers W, to dry the semiconductor wafers W, including a heater 32 for heating N.sub.2 gas serving as a carrier gas; a vapor generator 34 for making IPA misty by using the N.sub.2 gas heated by the heater 32 and for heating the IPA to produce the dry gas; and a flow control element 36 for supplying a predetermined rate of N.sub.2 gas to the processing chamber 35. Thus, it is possible to improve the efficiency of heat transfer of N.sub.2 gas, and it is possible to increase the amount of produced IPA gas and decrease the time to produce IPA gas. In addition, it is possible to prevent the turbulence of atmosphere in the processing chamber 35 after the drying processing is completed.
摘要翻译：一种用于将干燥气体供给到容纳半导体晶片W的处理室35以干燥半导体晶片W的干燥处理设备，该半导体晶片W包括用于加热作为载气的N 2气体的加热器32; 蒸汽发生器34，用于通过使用由加热器32加热的N 2气体使IPA发生雾化，并加热IPA以产生干燥气体; 以及用于向处理室35提供预定速率的N 2气体的流量控制元件36.因此，可以提高N 2气体的传热效率，并且可以增加产生的IPA气体的量并减少产生“近期行动计划”气体的时间。此外，干燥处理完成后，可以防止处理室35内的气氛紊乱。

2. 发明授权

US5172722A Stop valve for a vacuum apparatus 失效
标题翻译：用于真空装置的截止阀
公开(公告)号：US5172722A
公开(公告)日：1992-12-22
申请号：US758666
申请日：1991-09-12
申请人： Koichi Nishimura
发明人： Koichi Nishimura
IPC分类号： F16K39/02 , F16K51/02
CPC分类号： F16K39/024 , F16K51/02 , Y10T137/86944 , Y10T137/87378 , Y10T137/87499
摘要： A stop valve for a vacuum apparatus comprises a valve casing having an inlet port and an outlet port, a main valve element housed in the valve casing for selectively opening and closing a flow passageway for causing the inlet port to comunicate with the outlet port, an auxiliary valve element for selectively opening and closing an orifice formed in the main valve element and capable of opening the flow passageway by opening the orifice when the main valve element is closed, a valve shaft for driving the main valve element and the auxiliary element, and a control mechanism for controlling the operation of the valve shaft and opening the main valve element after the auxiliary valve element has been opened.
摘要翻译：用于真空装置的截止阀包括具有入口和出口的阀壳体，容纳在阀壳体中的主阀元件，用于选择性地打开和关闭用于使入口与出口端口相通的流动通道，辅助阀元件，用于选择性地打开和关闭形成在主阀元件中的孔口，并且当主阀元件关闭时能够通过打开孔口来打开流动通道，用于驱动主阀元件和辅助元件的阀轴，以及用于在辅助阀元件打开之后控制阀轴的操作和打开主阀元件的控制机构。

3. 发明授权

US6131307A Method and device for controlling pressure and flow rate 有权
标题翻译：用于控制压力和流量的方法和装置
公开(公告)号：US6131307A
公开(公告)日：2000-10-17
申请号：US129760
申请日：1998-08-05
申请人： Mitsuaki Komino , Osamu Uchisawa , Yasuhiro Chiba
发明人： Mitsuaki Komino , Osamu Uchisawa , Yasuhiro Chiba
IPC分类号： H01L21/304 , F26B21/10 , F26B21/12 , G05B11/36 , G05D7/06 , G05D16/06 , G05D16/20 , F26B3/00
CPC分类号： F26B21/10 , F26B21/12
摘要： A pressure and flow rate of a gas flowing into or out of a processing chamber are controlled, so as to decrease or increase an atmosphere in the processing chamber higher or lower than a target pressure to obtain a target pressure. During a first period, an opening speed of an opening degree adjusting device provided in an inlet pipe communicating to the processing chamber is controlled to a first target value toward a first predetermined functional approximation line (for example a function of second degree) as ideal value. During the rest of periods other than the first period, the opening speed is controlled stepwise to two or more predetermined target values so that the processing chamber reaches the target pressure. During a period before the first period, the opening speed may be controlled to a second target value among the two or more target values, based on a control amount for the opening degree adjusting device. During another period after the first period, the opening speed may be controlled toward a second predetermined functional approximation line (e.g., linear) as ideal value, which has a larger change than the first functional approximation line, until the second target value reaches the target pressure.
摘要翻译：控制流入或流出处理室的气体的压力和流量，以便降低或增加处理室中的气氛高于或低于目标压力以获得目标压力。在第一时段期间，设置在与处理室连通的入口管中的开度调节装置的打开速度被控制为朝向第一预定功能近似线（例如第二度的函数）的第一目标值作为理想值。在除了第一时段之外的其余时段中，打开速度被逐步地控制到两个或更多个预定目标值，使得处理室达到目标压力。在第一期间之前的期间，基于开度调节装置的控制量，可以将打开速度控制在两个以上目标值中的第二目标值。在第一时段之后的另一时段期间，打开速度可以被控制为第二预定功能近似线（例如，线性）作为理想值，其具有比第一功能近似线更大的变化，直到第二目标值达到目标压力。

4. 发明授权

US4953826A Metal diaphragm valve 失效
标题翻译：金属隔膜阀
公开(公告)号：US4953826A
公开(公告)日：1990-09-04
申请号：US389704
申请日：1989-08-04
申请人： Tadahiro Ohmi , Yohichi Kanno , Kazuhiko Satoh , Tadahiro Hatayama
发明人： Tadahiro Ohmi , Yohichi Kanno , Kazuhiko Satoh , Tadahiro Hatayama
IPC分类号： F16K7/16
CPC分类号： F16K7/16 , Y10T137/8122
摘要： A metal diaphragm valve comprises a valve cage, a metallic valve seat integral with the valve cage, a metal diaphragm having a peripheral edge portion supported in a liquid-tight manner by the valve cage and a central portion facing the valve to touch and leave the seat, a drive member for opening and closing the metal diaphragm, and a diaphragm pressing member interposed between the drive member and the metal diaphragm and adapted to press the diaphragm against the valve seat at a uniform sealing pressure.
摘要翻译：金属隔膜阀包括阀笼，与阀保持架一体的金属阀座，金属隔膜，其具有由阀笼以液密方式支撑的周边边缘部分和面向阀的中心部分以接触和离开阀座，用于打开和关闭金属隔膜的驱动构件，以及插入在驱动构件和金属隔膜之间并且以均匀的密封压力将隔膜压靠在阀座上的隔膜推压构件。

5. 发明授权

US06157774A Vapor generating method and apparatus using same 失效
标题翻译：蒸汽发生方法及其使用方法
公开(公告)号：US06157774A
公开(公告)日：2000-12-05
申请号：US79767
申请日：1998-05-15
申请人： Mitsuaki Komino , Osamu Uchisawa
发明人： Mitsuaki Komino , Osamu Uchisawa
IPC分类号： B01F3/04 , B01F5/04 , B01F15/00 , B01F15/06 , C23C16/448 , H01L21/00 , A01G13/06 , F23D11/10
CPC分类号： H01L21/67017 , B01F15/065 , B01F15/066 , B01F3/04049 , B01F5/0415 , B01F5/0416 , B01F5/0426 , B01F5/0428 , B01F5/0471 , C23C16/4481 , C23C16/4486 , B01F15/00123 , B01F2015/062
摘要： A vapor generating apparatus comprises: a convergent-divergent nozzle 50 having an inlet port 50a and an outlet port 50a for a gas for a vapor medium, the convergent-divergent nozzle 50 comprising a convergent nozzle portion 51a, which is formed so as to be tapered and narrowed from the inlet port 50a toward the outlet port 50b, and a divergent nozzle portion 51c, which is formed so as to be expanded from the convergent nozzle portion 51a toward the outlet port 50b; and a supply port 54 for a liquid to be evaporated, the supply port 54 being open to the divergent nozzle portion 51c of the convergent-divergent nozzle 50. Thus, it is possible to easily produce a gas using a smaller number of control factors, and it is possible to increase the amount of produced gas and decrease the vapor generating time.
摘要翻译：蒸汽发生装置包括：会聚扩散喷嘴50，其具有用于蒸气介质的气体的入口端口50a和出口端口50a，收敛扩散喷嘴50包括会聚喷嘴部分51a，其形成为从入口端口50a朝向出口端口50b呈锥形和变窄;以及扩散喷嘴部分51c，其形成为从会聚喷嘴部分51a朝向出口端口50b扩展; 以及用于待蒸发的液体的供给口54，供给口54对会聚扩散喷嘴50的扩散喷嘴部51c开口。因此，可以容易地使用较少数量的控制因素产生气体，并且可以增加产生的气体量并降低蒸气产生时间。

6. 再颁专利

USRE34303E Metal diaphragm valve 失效
公开(公告)号：USRE34303E
公开(公告)日：1993-07-06
申请号：US848796
申请日：1992-03-10
申请人： Tadahiro Ohmi , Yohichi Kanno , Kazuhiko Satoh , Tadahiro Hatayama
发明人： Tadahiro Ohmi , Yohichi Kanno , Kazuhiko Satoh , Tadahiro Hatayama
IPC分类号： F16K7/16
CPC分类号： F16K7/16 , Y10T137/8122
摘要： A metal diaphragm valve comprises a valve cage, a metallic valve seat integral with the valve cage, a metal diaphragm having a peripheral edge portion supported in a .[.liquid-tight.]. .Iadd.fluid-tight .Iaddend.manner by the valve cage and a central portion facing the valve to touch and leave the seat, a drive member for opening and closing the metal diaphragm, and a diaphragm pressing member interposed between the drive member and the metal diaphragm and adapted to press the diaphragm against the valve seat at a uniform sealing pressure.

7. 发明授权

US4828219A Metal diaphragm valve 失效
标题翻译：金属隔膜阀
公开(公告)号：US4828219A
公开(公告)日：1989-05-09
申请号：US114162
申请日：1987-10-27
申请人： Tadahiro Ohmi , Yohichi Kanno , Osamu Uchisawa , Kazuhiko Sato
发明人： Tadahiro Ohmi , Yohichi Kanno , Osamu Uchisawa , Kazuhiko Sato
IPC分类号： F16K7/12 , F16K7/14 , F16K7/16 , F16K41/12
CPC分类号： F16K7/14 , F16K41/12
摘要： A metal diaphragm valve in which the interior of a valve casing is divided, by means of a metal diaphragm, thereby defining a valve chamber. Inlet hole and outlet hole are connected to the valve chamber. A valve seat is provided between the inlet and outlet holes, inside the valve chamber. A valve disk adapted to rest on the valve seat, is formed integrally with the diaphragm. The valve disk is driven by a drive unit disposed outside of the valve chamber, to open or close the valve.
摘要翻译：一种金属隔膜阀，其中通过金属隔膜将阀壳体的内部分隔开，由此限定阀室。入口孔和出口孔连接到阀室。在阀室内部的入口孔和出口孔之间设有阀座。适于搁置在阀座上的阀盘与隔膜一体形成。阀盘由设置在阀室外部的驱动单元驱动，以打开或关闭阀。

8. 发明专利

JP2005003170A Float type steam trap 有权
标题翻译：浮标式蒸汽夹
公开(公告)号：JP2005003170A
公开(公告)日：2005-01-06
申请号：JP2003170029
申请日：2003-06-13
申请人： Motoyama Eng Works Ltd , 株式会社本山製作所
发明人： AOKI TAKEHIKO , SANAI JIRO
IPC分类号： F16T1/24 , F16K31/24 , F16T1/20
摘要： PROBLEM TO BE SOLVED: To provide a float type steam trap which can furthermore improve the valve closing ability, in the float type steam traps which can make an apparatus compact, and can improve the water discharging ability, and can improve the valve closing ability, and can prevent occurrence of the water hammering.
SOLUTION: A body 1 has a float chamber 1c, an inlet port 1d, and an outlet port 1e. A holder 3 has a passage 3a communicating with the outlet port 1e therein, and is fixed to the body 1 inside the float chamber 1c. A valve seat 5 is provided so as to communicate with the outlet port 1e. A float 4 has a floating ball 4a, and a lever 4b. The float 4 is provided in the float chamber 1c so as to vertically move. A valve body 6 is provided in the lever 4b. The lever 4b is fixed to the floating ball 4a at one end thereof, and is rotatably connected to the holder 3 at the other end thereof. The valve body 6 slides with respect to the valve seat 5 to open and close the valve seat 5 in cooperation with the vertical movement of the floating ball 4a. The valve seat 5 and the valve body 6 are made of materials having different wear resistance respectively. The cross section of the edge of the sealing surface of the valve seat has the shape making a right angle or an acute angle.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了提供一种可以进一步提高阀关闭能力的浮球式疏水阀，在可使设备紧凑的浮子式蒸汽疏水阀中，可以提高排水能力，并且可以改善阀门关闭能力强，可防止水锤发生。解决方案：主体1具有浮子室1c，入口端口1d和出口端口1e。保持器3具有与其中的出口1e连通的通道3a，并且固定到浮子室1c内部的主体1。阀座5设置成与出口1e连通。浮子4具有浮球4a和杆4b。浮子4设置在浮子室1c中以便垂直移动。阀体6设置在杆4b中。杠杆4b在其一端固定在浮球4a上，并在其另一端可转动地连接到支架3上。阀体6相对于阀座5滑动，与浮球4a的垂直运动协同地打开和关闭阀座5。阀座5和阀体6分别由具有不同耐磨性的材料制成。阀座的密封面的边缘的横截面具有形成直角或锐角的形状。版权所有（C）2005，JPO＆NCIPI

9. 发明专利

JP2002174400A INTEGRATED UNIT 失效
公开(公告)号：JP2002174400A
公开(公告)日：2002-06-21
申请号：JP2000372055
申请日：2000-12-06
申请人： MOTOYAMA ENG WORKS LTD
发明人： UCHISAWA OSAMU , CHIBA YASUHIRO
IPC分类号： F16J15/06 , F16K27/00 , F17D1/02 , F17D1/04
摘要： PROBLEM TO BE SOLVED: To provide an integrated unit more reliable than in the past by eliminating the mutual participation of fastening failures to make the reliability depend on independent individual seal parts. SOLUTION: This integrated unit comprises a plurality of control apparatuses 10a and 10b integrated together, and the passage of one control apparatus 10a is connected to the passage of the other control apparatus 10b. One retaining member 11a is arranged corresponding to one passage of the control apparatus 10a, and the retaining member 11a is fixed only to the corresponding control apparatus 10a but not fixed to the other control apparatus 10b. The retaining member for integrated unit comprises a beam and a boss part, and the inner part thereof is hollowed.

10. 发明专利

JP2002089744A WORK EXECUTION METHOD OF PREFABRICATED PIPING 失效
公开(公告)号：JP2002089744A
公开(公告)日：2002-03-27
申请号：JP2000281618
申请日：2000-09-18
申请人： MOTOYAMA ENG WORKS LTD
发明人： UCHISAWA OSAMU , YAMAMOTO KOHEI
IPC分类号： F16L1/00
摘要： PROBLEM TO BE SOLVED: To provide a building method of prefabricated piping capable of dispensing with the cutting and welding of a mother pipe. SOLUTION: In the building method of prefabricated piping, a branched pipe for branching a bulk gas is connected to a mother pipe 1 for flowing the bulk gas used in a clean room through a branch valve 2. The construction method includes a step that a connection hole 1A for inserting a branched pipe connection part 2A of the branch valve 2 is provided; a step that the branched pipe connection part 2A is inserted into the connection hole 1A; and a step that the branched pipe connection part 2A inserted into the connection hole 1A is welded to the branched pipe.

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