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1. 发明专利

JP2002089744A WORK EXECUTION METHOD OF PREFABRICATED PIPING 失效
公开(公告)号：JP2002089744A
公开(公告)日：2002-03-27
申请号：JP2000281618
申请日：2000-09-18
申请人： MOTOYAMA ENG WORKS LTD
发明人： UCHISAWA OSAMU , YAMAMOTO KOHEI
IPC分类号： F16L1/00
摘要： PROBLEM TO BE SOLVED: To provide a building method of prefabricated piping capable of dispensing with the cutting and welding of a mother pipe. SOLUTION: In the building method of prefabricated piping, a branched pipe for branching a bulk gas is connected to a mother pipe 1 for flowing the bulk gas used in a clean room through a branch valve 2. The construction method includes a step that a connection hole 1A for inserting a branched pipe connection part 2A of the branch valve 2 is provided; a step that the branched pipe connection part 2A is inserted into the connection hole 1A; and a step that the branched pipe connection part 2A inserted into the connection hole 1A is welded to the branched pipe.

2. 发明专利

JP2000216150A MOCVD VAPORIZER AND VAPORIZING METHOD OF MATERIAL SOLUTION 失效
公开(公告)号：JP2000216150A
公开(公告)日：2000-08-04
申请号：JP1497099
申请日：1999-01-22
申请人： WATANABE M & CO LTD , TSUDA MASAYUKI , MOTOYAMA ENG WORKS LTD
发明人： TSUDA MASAYUKI , KUSUHARA MASAKI , DOI MIKIO , UMEDA MASARU , FUKAGAWA MITSURU , SUGANO YOICHI , UCHISAWA OSAMU , YAMAMOTO KOHEI , MEGURO TOSHIKATSU
IPC分类号： H01L21/31 , C23C16/40 , C23C16/448 , H01L21/8242 , H01L27/108
摘要： PROBLEM TO BE SOLVED: To provide a vaporizer which is continuously used for a long term without being clogged and capable of stably feeding material to a reaction section by a method wherein carrier gas that contains a material solution sent from a dispersion section is vaporized by heating. SOLUTION: A gas inlet 4 through which a compressed carrier gas 3 is introduced into a gas path formed inside a dispersion section body 1 comprised in a dispersion section 8 is provided in the dispersion section 8, a material feed orifice 6 through which a material solution 5 is fed to the carrier gas that passes through the gas path is provided, a gas outlet 7 through which the carrier gas containing the dispersed material solution 5 is sent to a vaporizing section 12 is provided, and furthermore a cooling water 18 is provided so as to cool down carrier gas that flows through the gas path. Furthermore, a vaporizing tube 20 whose one end is connected to the reaction tube of an MOCVD device and other end is connected to the gas outlet 7 of the dispersion section 12 and a vaporizing section 22 which vaporizes the carrier gas that contains the dispersed material solution and is sent from the dispersion section 8 are provided.

3. 发明专利

JP2005133565A Vacuum exhaust device 有权
标题翻译：真空排气装置
公开(公告)号：JP2005133565A
公开(公告)日：2005-05-26
申请号：JP2003367451
申请日：2003-10-28
申请人： Access:Kk , Motoyama Eng Works Ltd , 有限会社アクセス , 株式会社本山製作所
发明人： YAMAMOTO KOHEI , KAWABATA MAKOTO , URAKAWA TAKAYUKI
IPC分类号： F04B37/16
摘要： PROBLEM TO BE SOLVED: To provide a vacuum exhaust device capable of facilitating arrangement and design of a cylinder cabinet, reducing man-hour for pipe welding, assembly, and inspection greatly, and optimizing flow rate and concentration of exhausted gas and being usable even in flammable, toxic, and corrosive fluid.
SOLUTION: This vacuum exhaust device 10 having a vacuum generation part 15 in a flow passage 23 for purge gas and capable of evacuating from a pipe 16 connected to the vacuum generation part 15 has a body 11, a check valve 12, a shutting-off valve 13, and a nozzle 14 for evacuation. The body 11 has the flow passage 23 having an inlet 21 and an outlet 22 in the same direction. The check valve 12 is provided at the inlet 21 of the flow passage 23 to prevent back flow from the downstream side to the upstream side. The shutting-off valve 13 has an operation part for shutting off the flow passage 23 on the downstream side of the check valve 12 and communicating the flow passage 23 in accordance with operation and an orifice 41 for purging the upstream and downstream sides from the operation part of the flow passage 23 always. The nozzle 14 for evacuation is provided at the outlet 22 of the flow passage 23 to generate negative pressure in the vacuum generation part 15 by fluid flowing in the flow passage 23 when the shutting-off valve 13 communicates the flow passage 23.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够促进气缸柜的布置和设计的真空排气装置，大大减少管道焊接，组装和检查的工时，优化排气的流量和浓度，并且即使在易燃，有毒和腐蚀性液体中也是如此。解决方案：在用于吹扫气体的流路23中具有真空产生部分15并且能够从连接到真空产生部分15的管16排出的真空排气装置10具有主体11，止回阀12，关闭阀13和用于排空的喷嘴14。主体11具有沿相同方向具有入口21和出口22的流动通道23。止回阀12设置在流路23的入口21处，以防止从下游侧向上游侧的反向流动。关闭阀13具有用于切断止回阀12的下游侧的流路23的操作部，并且根据操作连通流路23，以及用于将上游侧和下游侧从操作中清除的孔41 一直是流路23的一部分。用于排气的喷嘴14设置在流路23的出口22处，以在关闭阀13连通流路23时通过在流路23中流动的流体在真空产生部15中产生负压。版权所有（C）2005，JPO＆NCIPI

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