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    • 3. 发明授权
    • Method and system for controlling gas system
    • 控制气体系统的方法和系统
    • US6167323A
    • 2000-12-26
    • US130668
    • 1998-08-07
    • Mitsuaki KominoOsamu UchisawaYasuhiro Chiba
    • Mitsuaki KominoOsamu UchisawaYasuhiro Chiba
    • C23C16/455C23C16/52H01L21/00G05D23/00
    • H01L21/67248C23C16/455C23C16/45561C23C16/52H01L21/67017
    • Flow sensors 41 and 42 for detecting a flow load including the presence of a flow of gas are provided in supply lines 2a through 2d for supplying a given gas into a treatment chamber 6. A CPU 40 is provided for previously storing control parameters corresponding to the presence of a flow of gas. The presence of a flow of gas or a flow of IPA is detected by the flow sensors 41, 42 or an IPA supply pump 43, and detected signals are transmitted to the CPU 40. On the basis of a control signal outputted from the CPU 40, a cartridge heater 14, inner and outer tube heaters 25 and 26 and an insulation heater 52 are controlled. Thus, a control parameter adopted in accordance with the presence of a flow of gas to be used is determined, so that the control parameter previously stored in a data table 100 is selected in accordance with a control mode to control the temperature or pressure of the gas.
    • 用于检测包括气流存在的流量负载的流量传感器41和42设置在用于将给定气体供应到处理室6中的供应管线2a至2d中。CPU 40用于预先存储对应于 存在气体流。 通过流量传感器41,42或IPA供给泵43检测气体流动或IPA流的存在,并且将检测信号传送到CPU 40.基于从CPU 40输出的控制信号 ,盒式加热器14,内管加热器25和外管加热器26以及绝缘加热器52被控制。 因此,确定根据所使用的气体流的存在而采用的控制参数,使得根据控制模式选择先前存储在数据表100中的控制参数,以控制温度或压力 加油站。
    • 9. 发明授权
    • Organic electroluminescence device and display device
    • 有机电致发光器件和显示器件
    • US06831408B2
    • 2004-12-14
    • US10395550
    • 2003-03-24
    • Takashi HiranoJiro YamadaYasuhiro ChibaMitsuru Asano
    • Takashi HiranoJiro YamadaYasuhiro ChibaMitsuru Asano
    • H05B3326
    • H01L51/5218G09G3/3233G09G2300/0842H01L27/3244H01L2251/5315
    • An organic electroluminescence device having an anode structure on the lower surface which is effective for taking out light efficiently from the cathode on the upper surface in which the organic electroluminescence device comprises an anode, a cathode and an organic layer put between both of them. The organic layer contains an organic light emitting layer that emits light by re-combination of holes supplied from the cathode A and electrons supplied from the cathode. The cathode comprises a laminate structure of an electron injecting metal layer, and a transparent conductive layer ultra thin film which is basically light permeable. The anode contains a metal belonging to the group V or group VI of the periodical table to at least a portion in contact with the organic layer and is basically light reflective. The anode metal is selected from chromium, molybdenum, tungsten, tantalum and niobium. The anode metal has a work function of 4.8 eV or lower.
    • 一种在下表面具有阳极结构的有机电致发光器件,其有效地从有机电致发光器件包括阳极,阴极和两者之间的有机层的上表面上的阴极有效地取出光。 有机层包含通过从阴极A提供的空穴和从阴极供给的电子的重新组合而发光的有机发光层。 阴极包括电子注入金属层和基本上是透光的透明导电层超薄膜的叠层结构。 阳极含有属于周期表第V族或第VI族的金属,至少部分与有机层接触,并且基本上是光反射性的。 阳极金属选自铬,钼,钨,钽和铌。 阳极金属具有4.8eV或更低的功函数。