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1. 发明授权

US6131307A Method and device for controlling pressure and flow rate 有权
标题翻译：用于控制压力和流量的方法和装置
公开(公告)号：US6131307A
公开(公告)日：2000-10-17
申请号：US129760
申请日：1998-08-05
申请人： Mitsuaki Komino , Osamu Uchisawa , Yasuhiro Chiba
发明人： Mitsuaki Komino , Osamu Uchisawa , Yasuhiro Chiba
IPC分类号： H01L21/304 , F26B21/10 , F26B21/12 , G05B11/36 , G05D7/06 , G05D16/06 , G05D16/20 , F26B3/00
CPC分类号： F26B21/10 , F26B21/12
摘要： A pressure and flow rate of a gas flowing into or out of a processing chamber are controlled, so as to decrease or increase an atmosphere in the processing chamber higher or lower than a target pressure to obtain a target pressure. During a first period, an opening speed of an opening degree adjusting device provided in an inlet pipe communicating to the processing chamber is controlled to a first target value toward a first predetermined functional approximation line (for example a function of second degree) as ideal value. During the rest of periods other than the first period, the opening speed is controlled stepwise to two or more predetermined target values so that the processing chamber reaches the target pressure. During a period before the first period, the opening speed may be controlled to a second target value among the two or more target values, based on a control amount for the opening degree adjusting device. During another period after the first period, the opening speed may be controlled toward a second predetermined functional approximation line (e.g., linear) as ideal value, which has a larger change than the first functional approximation line, until the second target value reaches the target pressure.
摘要翻译：控制流入或流出处理室的气体的压力和流量，以便降低或增加处理室中的气氛高于或低于目标压力以获得目标压力。在第一时段期间，设置在与处理室连通的入口管中的开度调节装置的打开速度被控制为朝向第一预定功能近似线（例如第二度的函数）的第一目标值作为理想值。在除了第一时段之外的其余时段中，打开速度被逐步地控制到两个或更多个预定目标值，使得处理室达到目标压力。在第一期间之前的期间，基于开度调节装置的控制量，可以将打开速度控制在两个以上目标值中的第二目标值。在第一时段之后的另一时段期间，打开速度可以被控制为第二预定功能近似线（例如，线性）作为理想值，其具有比第一功能近似线更大的变化，直到第二目标值达到目标压力。

2. 发明授权

US6167323A Method and system for controlling gas system 失效
标题翻译：控制气体系统的方法和系统
公开(公告)号：US6167323A
公开(公告)日：2000-12-26
申请号：US130668
申请日：1998-08-07
申请人： Mitsuaki Komino , Osamu Uchisawa , Yasuhiro Chiba
发明人： Mitsuaki Komino , Osamu Uchisawa , Yasuhiro Chiba
IPC分类号： C23C16/455 , C23C16/52 , H01L21/00 , G05D23/00
CPC分类号： H01L21/67248 , C23C16/455 , C23C16/45561 , C23C16/52 , H01L21/67017
摘要： Flow sensors 41 and 42 for detecting a flow load including the presence of a flow of gas are provided in supply lines 2a through 2d for supplying a given gas into a treatment chamber 6. A CPU 40 is provided for previously storing control parameters corresponding to the presence of a flow of gas. The presence of a flow of gas or a flow of IPA is detected by the flow sensors 41, 42 or an IPA supply pump 43, and detected signals are transmitted to the CPU 40. On the basis of a control signal outputted from the CPU 40, a cartridge heater 14, inner and outer tube heaters 25 and 26 and an insulation heater 52 are controlled. Thus, a control parameter adopted in accordance with the presence of a flow of gas to be used is determined, so that the control parameter previously stored in a data table 100 is selected in accordance with a control mode to control the temperature or pressure of the gas.
摘要翻译：用于检测包括气流存在的流量负载的流量传感器41和42设置在用于将给定气体供应到处理室6中的供应管线2a至2d中。CPU 40用于预先存储对应于存在气体流。通过流量传感器41,42或IPA供给泵43检测气体流动或IPA流的存在，并且将检测信号传送到CPU 40.基于从CPU 40输出的控制信号，盒式加热器14，内管加热器25和外管加热器26以及绝缘加热器52被控制。因此，确定根据所使用的气体流的存在而采用的控制参数，使得根据控制模式选择先前存储在数据表100中的控制参数，以控制温度或压力加油站。

3. 发明申请

US20120001102A1 HIGHLY CLEAN AND HOT VALVE 审中-公开
标题翻译：高清洁和高温阀
公开(公告)号：US20120001102A1
公开(公告)日：2012-01-05
申请号：US12864382
申请日：2009-01-21
申请人： Yasuhiro Chiba , Kohei Yamamoto , Hiroshi Takada , Kota Koizumi , Yasushi Yagi , Shingo Watanabe , Yuji Ono , Hiroshi Kaneko , Koyu Hasegawa
发明人： Yasuhiro Chiba , Kohei Yamamoto , Hiroshi Takada , Kota Koizumi , Yasushi Yagi , Shingo Watanabe , Yuji Ono , Hiroshi Kaneko , Koyu Hasegawa
IPC分类号： F16K31/122
CPC分类号： F16K41/10 , F16K31/126 , F16K31/1268
摘要： A highly clean and high temperature valve apparatus includes a valve driving unit and a valve casing connected to a bonnet supporting a valve stem slidably. A stem portion has one end positioned in a circumferential wall closed at its two ends by upper and lower covers, and supports one end of the valve stem with its other end extending through the lower cover. The stem portion has its ends supported respectively by first and second bellows for closing an axial through hole of the lower cover tightly. A first pipe communicates with a first space isolated by the first bellows, and a second pipe communicates with a second space isolated by the first bellows. The fluid quantities in the first and second spaces are increased or decreased relative to each other, thereby to drive the stem portion supported in a floating state by the first and second bellows.
摘要翻译：高度清洁和高温的阀门装置包括阀驱动单元和阀壳，其可滑动地连接到支撑阀杆的阀盖。杆部分具有位于周向壁的一端，其两端通过上盖和下盖封闭，并且支撑阀杆的一端，其另一端延伸穿过下盖。杆部分的端部分别由第一和第二波纹管支撑，用于紧密地封闭下盖的轴向通孔。第一管与由第一波纹管隔离的第一空间连通，第二管与由第一波纹管隔离的第二空间连通。第一和第二空间中的流体量相对于彼此增加或减小，从而驱动由第一和第二波纹管以浮动状态支撑的杆部。

4. 发明申请

US20050151468A1 Organic electroluminescent device 有权
标题翻译：有机电致发光器件
公开(公告)号：US20050151468A1
公开(公告)日：2005-07-14
申请号：US10992367
申请日：2004-11-19
申请人： Jin-Woo Park , Seoung-Yoon Ryu , Hun Kim , Yasuhiro Chiba
发明人： Jin-Woo Park , Seoung-Yoon Ryu , Hun Kim , Yasuhiro Chiba
IPC分类号： H05B33/22 , H01L51/50 , H01L51/52 , H05B33/02 , H05B33/12 , H05B33/14 , H05B33/26 , H05B33/28
CPC分类号： H01L51/5234 , H01L2251/5315 , Y10T428/24802 , Y10T428/24917 , Y10T428/26
摘要： An organic electroluminescent device, including a substrate, a first electrode layer formed on the substrate, and a second electrode layer formed on the first electrode layer. An organic layer, having a light-emitting layer, is interposed between the first electrode layer and the second electrode layer, and a transparent layer is formed on the second electrode layer. Damage to the organic layer may be prevented while maintaining a transmittance of the second electrode layer.
摘要翻译：一种有机电致发光器件，包括衬底，形成在衬底上的第一电极层和形成在第一电极层上的第二电极层。具有发光层的有机层介于第一电极层和第二电极层之间，在第二电极层上形成透明层。可以防止对有机层的损伤，同时保持第二电极层的透射率。

5. 发明授权

US06768257B1 Display apparatus with ribs having conductive material 有权
标题翻译：具有导电材料的肋的显示装置
公开(公告)号：US06768257B1
公开(公告)日：2004-07-27
申请号：US09698989
申请日：2000-10-27
申请人： Jiro Yamada , Tasuya Sasaoka , Mitsunobu Sekiya , Naoki Sano , Yasuhiro Chiba , Takashi Hirano , Yuichi Iwase
发明人： Jiro Yamada , Tasuya Sasaoka , Mitsunobu Sekiya , Naoki Sano , Yasuhiro Chiba , Takashi Hirano , Yuichi Iwase
IPC分类号： H01J162
CPC分类号： H01L27/1214 , H01L27/3246 , H01L51/0011 , H01L51/5203 , H01L51/5212 , H01L51/5228 , H01L2251/5315
摘要： An active-matrix-type display apparatus ensuring sufficient luminous intensity of display devices within a display plane and allowing improved display properties is provided. Such display apparatus having of a plurality of pixels comprises a lower electrode formed on a substrate; organic layers formed on the lower electrode; and an upper common electrode formed on the organic layers; in which a plurality of the pixels are partitioned by a rib larger in the thickness than the organic layers and having at least a conductive material layer; and the conductive material layer is electrically connected to the upper common electrode.
摘要翻译：提供一种有源矩阵型显示装置，其确保显示平面内的显示装置的足够的发光强度并且允许改进的显示特性。具有多个像素的这种显示装置包括形成在基板上的下电极; 形成在下电极上的有机层; 和形成在有机层上的上部公共电极; 其中多个像素被厚度大于有机层的肋分隔，并且至少具有导电材料层; 并且导电材料层电连接到上部公共电极。

6. 发明授权

US07541735B2 Organic electroluminescent device having a transparent layer 有权
标题翻译：具有透明层的有机电致发光器件
公开(公告)号：US07541735B2
公开(公告)日：2009-06-02
申请号：US10992367
申请日：2004-11-19
申请人： Jin-Woo Park , Seoung-Yoon Ryu , Hun Kim , Yasuhiro Chiba
发明人： Jin-Woo Park , Seoung-Yoon Ryu , Hun Kim , Yasuhiro Chiba
IPC分类号： H05B33/00
CPC分类号： H01L51/5234 , H01L2251/5315 , Y10T428/24802 , Y10T428/24917 , Y10T428/26
摘要： An organic electroluminescent device, including a substrate, a first electrode layer formed on the substrate, and a second electrode layer formed on the first electrode layer. An organic layer, having a light-emitting layer, is interposed between the first electrode layer and the second electrode layer, and a transparent layer is formed on the second electrode layer. Damage to the organic layer may be prevented while maintaining a transmittance of the second electrode layer.
摘要翻译：一种有机电致发光器件，包括衬底，形成在衬底上的第一电极层和形成在第一电极层上的第二电极层。具有发光层的有机层介于第一电极层和第二电极层之间，在第二电极层上形成透明层。可以防止对有机层的损伤，同时保持第二电极层的透射率。

7. 发明授权

US06991506B2 Display apparatus and method for fabricating the same 失效
公开(公告)号：US06991506B2
公开(公告)日：2006-01-31
申请号：US10328630
申请日：2002-12-23
申请人： Jiro Yamada , Tatsuya Sasaoka , Mitsunobu Sekiya , Naoki Sano , Yasuhiro Chiba , Takashi Hirano , Yuichi Iwase
发明人： Jiro Yamada , Tatsuya Sasaoka , Mitsunobu Sekiya , Naoki Sano , Yasuhiro Chiba , Takashi Hirano , Yuichi Iwase
IPC分类号： H01J9/00
CPC分类号： H01L27/1214 , H01L27/3246 , H01L51/0011 , H01L51/5203 , H01L51/5212 , H01L51/5228 , H01L2251/5315
摘要： An active-matrix-type display apparatus ensuring sufficient luminous intensity of display devices within a display plane and allowing improved display properties is provided. Such display apparatus having of a plurality of pixels comprises a lower electrode formed on a substrate; organic layers formed on the lower electrode; and an upper common electrode formed on the organic layers; in which a plurality of the pixels are partitioned by a rib larger in the thickness than the organic layers and having at least a conductive material layer; and the conductive material layer is electrically connected to the upper common electrode.

8. 发明申请

US20050269545A1 Eccentric type rotary valve 审中-公开
标题翻译：偏心式旋转阀
公开(公告)号：US20050269545A1
公开(公告)日：2005-12-08
申请号：US11116351
申请日：2005-04-28
申请人： Yasuhiro Chiba , Yoichi Kanno , Satoshi Mizogami
发明人： Yasuhiro Chiba , Yoichi Kanno , Satoshi Mizogami
IPC分类号： F16K1/20 , F16K1/36 , F16K1/42 , F16K3/22 , F16K3/28 , F16K5/00 , F16K5/06 , F16K11/076
CPC分类号： F16K5/0621
摘要： Valve capacity Cv value is increased and valve performance is further improved. A valve body 11 has a valve chamber 19 and a flow passage 20 passing through this valve chamber 19 inside. A valve shaft 12 is extended in the direction crossing the flow passage 20 and penetrates the valve body 11. One end of the valve shaft 12 is arranged in the valve chamber 19. A valve seat 13 with a valve hole is provided in the inlet of the valve chamber of the flow passage 20. A valve plug 15 is mounted to one end of the valve shaft 12 in the cantilever state. The valve plug 15 is provided in the valve chamber 19 capable of opening/closing the valve hole by the rotation of the valve shaft 12. The valve seat 13 is provided in the valve body 11 through a bellows 40.
摘要翻译：阀门容量Cv值增加，阀门性能进一步提高。阀体11具有阀室19和流过该阀室19的流路20。阀轴12在与流路20相交的方向上延伸并穿过阀体11.阀轴12的一端设置在阀室19中。具有阀孔的阀座13设置在流路20的阀室。阀塞15以悬臂状态安装在阀轴12的一端。阀塞15设置在能够通过阀轴12的旋转而打开/关闭阀孔的阀室19.阀座13通过波纹管40设置在阀体11中。

9. 发明授权

US06831408B2 Organic electroluminescence device and display device 有权
标题翻译：有机电致发光器件和显示器件
公开(公告)号：US06831408B2
公开(公告)日：2004-12-14
申请号：US10395550
申请日：2003-03-24
申请人： Takashi Hirano , Jiro Yamada , Yasuhiro Chiba , Mitsuru Asano
发明人： Takashi Hirano , Jiro Yamada , Yasuhiro Chiba , Mitsuru Asano
IPC分类号： H05B3326
CPC分类号： H01L51/5218 , G09G3/3233 , G09G2300/0842 , H01L27/3244 , H01L2251/5315
摘要： An organic electroluminescence device having an anode structure on the lower surface which is effective for taking out light efficiently from the cathode on the upper surface in which the organic electroluminescence device comprises an anode, a cathode and an organic layer put between both of them. The organic layer contains an organic light emitting layer that emits light by re-combination of holes supplied from the cathode A and electrons supplied from the cathode. The cathode comprises a laminate structure of an electron injecting metal layer, and a transparent conductive layer ultra thin film which is basically light permeable. The anode contains a metal belonging to the group V or group VI of the periodical table to at least a portion in contact with the organic layer and is basically light reflective. The anode metal is selected from chromium, molybdenum, tungsten, tantalum and niobium. The anode metal has a work function of 4.8 eV or lower.
摘要翻译：一种在下表面具有阳极结构的有机电致发光器件，其有效地从有机电致发光器件包括阳极，阴极和两者之间的有机层的上表面上的阴极有效地取出光。有机层包含通过从阴极A提供的空穴和从阴极供给的电子的重新组合而发光的有机发光层。阴极包括电子注入金属层和基本上是透光的透明导电层超薄膜的叠层结构。阳极含有属于周期表第V族或第VI族的金属，至少部分与有机层接触，并且基本上是光反射性的。阳极金属选自铬，钼，钨，钽和铌。阳极金属具有4.8eV或更低的功函数。

10. 发明授权

US06361662B1 Method for fabricating a semiconductor device in a magnetron sputtering system 失效
标题翻译：在磁控溅射系统中制造半导体器件的方法
公开(公告)号：US06361662B1
公开(公告)日：2002-03-26
申请号：US08996321
申请日：1997-12-22
申请人： Yasuhiro Chiba , Keiichi Maeda , Mitsuru Taguchi
发明人： Yasuhiro Chiba , Keiichi Maeda , Mitsuru Taguchi
IPC分类号： C23C1434
CPC分类号： H01L29/665 , C23C14/165 , C23C14/35 , H01J37/3405 , H01J37/3426 , H01L21/28052 , H01L21/28518 , H01L21/2855
摘要： Disclosed is a magnetron sputtering system enabling formation of a film of a ferroelectric substance by suppressing occurrence of a magnetic field due to an eddy current. The magnetron sputtering system includes a flat target; magnetic field applying means (magnets), provided in the vicinity of a back surface of the target, for applying a magnetic field to a front surface of the target; and magnetic field rotating means (motor) for rotating the magnetic field applying means so as to rotate the magnetic field applied to the front surface of the target. The magnetic field rotating means is provided with rotational speed varying means (speed controller) for varying the rotational speed of the magnetic field applied by the magnetic field rotating means.
摘要翻译：公开了一种磁控管溅射系统，其能够通过抑制由涡流引起的磁场的产生而形成铁电体的膜。磁控溅射系统包括平板靶; 设置在所述靶的背面附近的磁场施加装置（磁体），用于向所述目标的前表面施加磁场; 以及用于旋转磁场施加装置的磁场旋转装置（马达），以便旋转施加到目标的前表面的磁场。磁场旋转装置设置有用于改变由磁场旋转装置施加的磁场的转速的转速改变装置（速度控制器）。

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