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    • 1. 发明授权
    • Diaphragm-type flow control valve and manual control valve apparatus
    • 隔膜式流量控制阀和手动控制阀装置
    • US5551477A
    • 1996-09-03
    • US273052
    • 1994-07-08
    • Yohichi KannoOsamu UchisawaSigekazu Yamazaki
    • Yohichi KannoOsamu UchisawaSigekazu Yamazaki
    • F16K31/524F16K31/60F16K37/00F16K1/32
    • F16K31/60F16K31/52491F16K37/0058Y10T137/8225
    • A manual control valve apparatus having a structure which is provided with, as a conversion mechanism, a diaphragm compressor which is held between a valve casing and a guide member, arcuate engaging grooves formed in a surface of the diaphragm presser opposite to the valve stem, and rolling elements which engage in a freely rolling manner in the engaging grooves and are supported by the lead end part of the valve stem. The bottom surfaces of the engaging grooves are made cam surfaces for causing reciprocating motion in the axial direction of the valve stem. An indicator possessing opening indicating portions indicating the rotational position of the valve stem is attached to the opposite end of the guide member from the valve casing, and furthermore, windows exposing the opening support portions are provided in an area from the circumferential wall of the handle to the end wall thereof. Using this structure, it is possible to compactly incorporate an indicator indicating a degree of valve opening around the handle. Furthermore, the structure of the conversion mechanism is simplified and can be miniaturized, so that it is possible to incorporate the conversion mechanism within the guide member.
    • 一种手动控制阀装置,其具有设置有作为转换机构的隔膜压缩机的结构,所述隔膜压缩机保持在阀壳体和引导构件之间,形成在与阀杆相对的隔膜推压器的表面中的弓形接合槽, 以及滚动元件,其在接合槽中以自由滚动的方式接合并且由阀杆的引导端部支撑。 接合槽的底面形成凸轮表面,用于在阀杆的轴向方向上进行往复运动。 具有表示阀杆的旋转位置的开口指示部的指示器从阀壳体附接到引导构件的相对端,此外,露出开口支撑部的窗口设置在从手柄的周壁的区域中 到其端壁。 使用这种结构,可以紧凑地结合指示手柄周围的阀门开度的指示器。 此外,转换机构的结构简化并且可以小型化,从而可以将转换机构结合在引导构件内。
    • 7. 发明授权
    • Method and system for measuring external leakage
    • 测量外部泄漏的方法和系统
    • US5827949A
    • 1998-10-27
    • US894504
    • 1997-11-17
    • Tadihiro OhmiAtsushi OhkiYohichi Kanno
    • Tadihiro OhmiAtsushi OhkiYohichi Kanno
    • G01M3/20G01M3/22G01M3/04G01N7/00
    • G01M3/222G01M3/202
    • A method of measuring external leakage, which comprises the steps of introducing a first gas different from main component gasses of an external atmosphere into a pipe having a leak, adding H.sub.2 gas (or H.sub.2 -containing gas) to the first has at a down-stream point, and measuring gas components entering from the external atmosphere of the leak by an atmospheric ionization mass spectrometer (atmospheric pressure ionization mass spectrometer) at a further downstream point (for example, N.sub.2 H.sup.+ is detected when the external atmosphere is the N.sub.2 gas). A method of measuring the external leakage of a gas supply piping line having a plurality of branch piping lines comprises the steps of introducing H.sub.2 gas (or a H.sub.2 -containing gas) into at least one of the branch piping lines, introducing a first gas different from main component gases of an external atmosphere into the rest of the branch piping lines, and measuring gas components entering from the external atmosphere by the atmospheric pressure ionization mass spectrometer at a downstream point of the branch portion. The present invention can measure the external leakage very simply and with high levels of sensitivity and accuracy. Particularly, the present invention can be suitable applied to the cases where an inspection portion is elongated or branched such as feed pipe of a semiconductor plant.
    • PCT No.PCT / JP95 / 00284 Sec。 371日期:1997年11月17日 102(e)日期1997年11月17日PCT提交1995年2月24日PCT公布。 公开号WO96 / 26426 日期1996年8月29日一种测量外部泄漏的方法,包括以下步骤:将不同于外部气氛的主要组分气体的第一气体引入到具有泄漏的管道中,将第二气体(或含H2气体) 具有下游点,并通过大气电离质谱仪(大气压电离质谱仪)在另外的下游点(例如,当外部气氛为...时检测到N2H +)测量从泄漏的外部大气进入的气体成分 N2气)。 一种测量具有多个分支管道管道的气体供应管线的外部泄漏的方法包括以下步骤:将H2气(或含H2气体)引入到至少一个分支管道中,引入不同的第一气体 从外部气氛的主要成分气体进入分支管道的其余部分,并且在分支部分的下游点测量由大气压电离质谱仪从外部气氛进入的气体成分。 本发明可以非常简单地以高灵敏度和精确度测量外部泄漏。 特别地,本发明适用于半导体装置的供给管等检查部是细长的或分支的情况。