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1. 发明授权

US06667189B1 High performance silicon condenser microphone with perforated single crystal silicon backplate 失效
标题翻译：高性能硅电容式麦克风，带有单孔硅衬底
公开(公告)号：US06667189B1
公开(公告)日：2003-12-23
申请号：US10243906
申请日：2002-09-13
申请人： Zhe Wang , Qingxin Zhang , Hanhua Feng
发明人： Zhe Wang , Qingxin Zhang , Hanhua Feng
IPC分类号： H01L2100
CPC分类号： H04R19/005 , Y10T29/49005
摘要： A silicon condenser microphone is described. The silicon condenser microphone of the present invention comprises a perforated backplate comprising a portion of a single crystal silicon substrate, a support structure formed on the single crystal silicon substrate, and a floating silicon diaphragm supported at its edge by the support structure and lying parallel to the perforated backplate and separated from the perforated backplate by an air gap.
摘要翻译：描述了硅电容麦克风。本发明的硅电容麦克风包括一个多孔背板，它包括单晶硅衬底的一部分，形成在单晶硅衬底上的一个支撑结构，以及一个浮动硅隔膜，其支撑结构在其边缘平行于穿孔背板并通过气隙与多孔背板隔开。

2. 发明授权

US07132307B2 High performance silicon condenser microphone with perforated single crystal silicon backplate 失效
公开(公告)号：US07132307B2
公开(公告)日：2006-11-07
申请号：US10736377
申请日：2003-12-15
申请人： Zhe Wang , Qingxin Zhang , Hanhua Feng
发明人： Zhe Wang , Qingxin Zhang , Hanhua Feng
IPC分类号： H01L21/00 , H04R25/00
CPC分类号： H04R19/005 , Y10T29/49005
摘要： A silicon condenser microphone is described. The silicon condenser microphone of the present invention comprises a perforated backplate comprising a portion of a single crystal silicon substrate, a support structure formed on the single crystal silicon substrate, and a floating silicon diaphragm supported at its edge by the support structure and lying parallel to the perforated backplate and separated from the perforated backplate by an air gap.

3. 发明授权

US06855640B2 Apparatus and process for bulk wet etch with leakage protection 失效
公开(公告)号：US06855640B2
公开(公告)日：2005-02-15
申请号：US10083990
申请日：2002-02-26
申请人： Zhe Wang , Qingxin Zhang , Pang Dow Foo , Hanhua Feng
发明人： Zhe Wang , Qingxin Zhang , Pang Dow Foo , Hanhua Feng
IPC分类号： H01L21/00 , H01L21/306 , H01L21/302
CPC分类号： H01L21/67086 , H01L21/30608 , H01L21/6708
摘要： When using hot alkaline etchants such as KOH, the wafer front side, where various devices and/or circuits are located, must be isolated from any contact with the etchant. This has been achieved by using two chambers that are separated from each other by the wafer that is to be etched. Etching solution in one chamber is in contact with the wafer's back surface while deionized water in the other chamber contacts the front surface. The relative liquid pressures in the chambers is arranged to be slightly higher in the chamber of the front surface so that leakage of etchant through a pin hole from back surface to front surface does not occur. As a further precaution, a monitor to detect the etchant is located in the DI water so that, if need be, etching can be terminated before irreparable damage is done.

4. 发明申请

US20050005421A1 High performance silicon condenser microphone with perforated single crystal silicon backplate 审中-公开
标题翻译：高性能硅电容式麦克风，带有单孔硅衬底
公开(公告)号：US20050005421A1
公开(公告)日：2005-01-13
申请号：US10916196
申请日：2004-08-11
申请人： Zhe Wang , Qingxin Zhang
发明人： Zhe Wang , Qingxin Zhang
IPC分类号： H04R19/00 , H04R25/00
CPC分类号： H04R19/005 , Y10T29/49005
摘要： A silicon condenser microphone is described. The silicon condenser microphone of the present invention comprises a perforated backplate comprising a portion of a single crystal silicon substrate, a support structure formed on the single crystal silicon substrate, and a floating silicon diaphragm supported at its edge by the support structure and lying parallel to the perforated backplate and separated from the perforated backplate by an air gap.
摘要翻译：描述了硅电容麦克风。本发明的硅电容麦克风包括一个多孔背板，它包括单晶硅衬底的一部分，形成在单晶硅衬底上的一个支撑结构，以及一个浮动硅隔膜，其支撑结构在其边缘平行于穿孔背板并通过气隙与多孔背板隔开。

5. 发明申请

US20050118822A1 Apparatus and process for bulk wet etch with leakage protection 审中-公开
标题翻译：用于具有漏电保护的散装湿蚀刻的装置和工艺
公开(公告)号：US20050118822A1
公开(公告)日：2005-06-02
申请号：US11032800
申请日：2005-01-11
申请人： Zhe Wang , Qingxin Zhang , Pang Foo , Han Feng
发明人： Zhe Wang , Qingxin Zhang , Pang Foo , Han Feng
IPC分类号： H01L21/00 , H01L21/306 , H01L21/302 , H01L21/461
CPC分类号： H01L21/67086 , H01L21/30608 , H01L21/6708
摘要： When using hot alkaline etchants such as KOH, the wafer front side, where various devices and/or circuits are located, must be isolated from any contact with the etchant. This has been achieved by using two chambers that are separated from each other by the wafer that is to be etched. Etching solution in one chamber is in contact with the wafer's back surface while deionized water in the other chamber contacts the front surface. The relative liquid pressures in the chambers is arranged to be slightly higher in the chamber of the front surface so that leakage of etchant through a pin hole from back surface to front surface does not occur. As a further precaution, a monitor to detect the etchant is located in the DI water so that, if need be, etching can be terminated before irreparable damage is done.
摘要翻译：当使用诸如KOH的热碱性蚀刻剂时，其中各种装置和/或电路所在的晶片正面必须与与蚀刻剂的任何接触隔离。这是通过使用被待蚀刻的晶片彼此分离的两个室来实现的。一个室中的蚀刻溶液与晶片的背面接触，而另一个室中的去离子水接触前表面。腔室中的相对液体压力被布置为在前表面的腔室中略高，使得蚀刻剂不会通过针孔从背表面泄漏到前表面。作为进一步的预防措施，用于检测蚀刻剂的监测器位于去离子水中，使得如果需要，可以在不可修复的损伤完成之前终止蚀刻。

6. 发明授权

US08755106B2 Microelectromechanical system (MEMS) device, method of operating the same, and method of forming the same 有权
标题翻译：微机电系统（MEMS）装置，其操作方法及其形成方法
公开(公告)号：US08755106B2
公开(公告)日：2014-06-17
申请号：US13377030
申请日：2009-06-11
申请人： Qingxin Zhang , Yu Du , Chee Wei Tan
发明人： Qingxin Zhang , Yu Du , Chee Wei Tan
IPC分类号： G02B26/00 , H01H71/00 , H01H61/00 , H01H51/00
CPC分类号： B81B3/0054 , B81B2201/033 , B81B2201/047 , G02B6/4204 , G02B6/4226 , G02B6/4236 , G02B26/0833 , G02B26/0866
摘要： A microelectromechanical system (MEMS) device, method of operating the MEMS device, and a method of forming the MEMS device are provided. The MEMS device includes a positioning mechanism and a locking mechanism. The positioning mechanism includes a first arm structure having a first surface and a second surface; a second arm structure having a first surface and a second surface; wherein the first surface of the first arm structure faces the first surface of the second arm structure. The positioning mechanism also includes a first actuator disposed adjacent to the second surface of the first arm structure facing away from the second arm structure; and a second actuator disposed adjacent to the second surface of the second arm structure facing away from the first arm structure. The locking mechanism includes a first pair of locking elements arranged such that each locking element is disposed at two opposite side surfaces of the first arm structure between the first and second surfaces of the first arm structure; and a second pair of locking elements arranged such that each locking element is disposed at two opposite side surfaces of the second arm structure between the first and second surfaces of the second arm structure. The first and second pairs of locking elements are configured to engage with and disengage from the first and second arm structures respectively.
摘要翻译：提供了微机电系统（MEMS）装置，操作MEMS装置的方法以及形成MEMS器件的方法。 MEMS装置包括定位机构和锁定机构。定位机构包括具有第一表面和第二表面的第一臂结构; 具有第一表面和第二表面的第二臂结构; 其中第一臂结构的第一表面面向第二臂结构的第一表面。所述定位机构还包括第一致动器，所述第一致动器邻近所述第一臂结构的所述第二表面邻近所述第二臂结构设置; 以及第二致动器，其邻近所述第二臂结构的所述第二表面邻近所述第一臂结构设置。锁定机构包括第一对锁定元件，其布置成使得每个锁定元件设置在第一臂结构的第一和第二表面之间的第二臂结构的两个相对的侧表面处; 以及第二对锁定元件，其布置成使得每个锁定元件设置在第二臂结构的第二和第二表面之间的第二臂结构的两个相对的侧表面处。第一和第二对锁定元件构造成分别与第一和第二臂结构接合和分离。

7. 发明申请

US20130298731A1 METHOD FOR EFFICIENT EXTRACTION OF GOLD FROM GOLD ORES UTILIZING MACRO QUANTUM RESONANCE EFFECT 审中-公开
标题翻译：使用大量量子共振效应从金矿高效提取金的方法
公开(公告)号：US20130298731A1
公开(公告)日：2013-11-14
申请号：US13466438
申请日：2012-05-08
申请人： Qingwen Zhang , Jingying Li , Qingxin Zhang , Yi Zhang , Guangyao Zhang , Tao Liu , Ming Bai
发明人： Qingwen Zhang , Jingying Li , Qingxin Zhang , Yi Zhang , Guangyao Zhang , Tao Liu , Ming Bai
IPC分类号： B22F9/04 , H01F5/00 , B82Y99/00
CPC分类号： B22F9/04 , B22F2202/05 , H01F5/00
摘要： Gold ores are processed to obtain a mixture comprising gold particles and other particles, such as quartz particles. The mixture then passes through a location near a quantum resonance driver. The quantum resonance driver generates a macro quantum resonance effect that causes the gold particles to move away from the driver so that gold particles are separated from the mixture.
摘要翻译：处理金矿以获得包含金颗粒和诸如石英颗粒的其它颗粒的混合物。然后混合物通过量子共振驱动器附近的位置。量子共振驱动器产生宏观量子共振效应，其使金颗粒远离驱动器移动，使得金颗粒与混合物分离。

8. 发明授权

US08319302B2 Wafer arrangement and a method for manufacturing the wafer arrangement 有权
标题翻译：晶片布置和晶片布置的制造方法
公开(公告)号：US08319302B2
公开(公告)日：2012-11-27
申请号：US12665876
申请日：2007-08-08
申请人： Qingxin Zhang , Guo-Qiang Patrick Lo , Mingbin Yu , Dim-Lee Kwong
发明人： Qingxin Zhang , Guo-Qiang Patrick Lo , Mingbin Yu , Dim-Lee Kwong
IPC分类号： H01L31/02
CPC分类号： B81C3/002 , B81C2203/051
摘要： The wafer arrangement (100) provided comprises a first wafer (101), which comprises an integrated circuit and a recess (105). The wafer arrangement further comprises a portion of a second wafer (103), which comprises a carrier portion and a protrusion (107), the protrusion comprising an active component or actively controlled component (109) such as a MEMS component, wherein the portion of the second wafer (103) is coupled to the first wafer (101) such that the protrusion (107) is received in the recess (105). The invention provides a mechanism for accurately aligning an active component (109) on the second wafer (103) with components on the first wafer (101), such as photonic, electronic or optical components.
摘要翻译：提供的晶片布置（100）包括第一晶片（101），其包括集成电路和凹部（105）。晶片装置还包括第二晶片（103）的一部分，其包括载体部分和突起（107），所述突起包括有源部件或诸如MEMS部件的主动控制部件（109），其中，部分第二晶片（103）被耦合到第一晶片（101），使得突起（107）被容纳在凹部（105）中。本发明提供了一种用于将第二晶片（103）上的有源元件（109）与第一晶片（101）上的元件（例如光子，电子或光学元件）精确对准的机构。

9. 发明申请

US20120182594A1 Microelectromechanical System (MEMS) Device, Method of Operating The Same, and Method of Forming the Same 有权
标题翻译：微机电系统（MEMS）装置，其操作方法及其形成方法
公开(公告)号：US20120182594A1
公开(公告)日：2012-07-19
申请号：US13377030
申请日：2009-06-11
申请人： Qingxin Zhang , Yu Du , Chee Wei Tan
发明人： Qingxin Zhang , Yu Du , Chee Wei Tan
IPC分类号： G02B26/00 , H01L29/84
CPC分类号： B81B3/0054 , B81B2201/033 , B81B2201/047 , G02B6/4204 , G02B6/4226 , G02B6/4236 , G02B26/0833 , G02B26/0866
摘要： A microelectromechanical system (MEMS) device, method of operating the MEMS device, and a method of forming the MEMS device are provided. The MEMS device includes a positioning mechanism and a locking mechanism. The positioning mechanism includes a first arm structure having a first surface and a second surface; a second arm structure having a first surface and a second surface; wherein the first surface of the first arm structure faces the first surface of the second arm structure. The positioning mechanism also includes a first actuator disposed adjacent to the second surface of the first arm structure facing away from the second arm structure; and a second actuator disposed adjacent to the second surface of the second arm structure facing away from the first arm structure. The locking mechanism includes a first pair of locking elements arranged such that each locking element is disposed at two opposite side surfaces of the first arm structure between the first and second surfaces of the first arm structure; and a second pair of locking elements arranged such that each locking element is disposed at two opposite side surfaces of the second arm structure between the first and second surfaces of the second arm structure. The first and second pairs of locking elements are configured to engage with and disengage from the first and second arm structures respectively.
摘要翻译：提供了微机电系统（MEMS）装置，操作MEMS装置的方法以及形成MEMS器件的方法。 MEMS装置包括定位机构和锁定机构。定位机构包括具有第一表面和第二表面的第一臂结构; 具有第一表面和第二表面的第二臂结构; 其中第一臂结构的第一表面面向第二臂结构的第一表面。所述定位机构还包括第一致动器，所述第一致动器邻近所述第一臂结构的所述第二表面邻近所述第二臂结构设置; 以及第二致动器，其邻近所述第二臂结构的所述第二表面邻近所述第一臂结构设置。锁定机构包括第一对锁定元件，其布置成使得每个锁定元件设置在第一臂结构的第一和第二表面之间的第二臂结构的两个相对的侧表面处; 以及第二对锁定元件，其布置成使得每个锁定元件设置在第二臂结构的第二和第二表面之间的第二臂结构的两个相对的侧表面处。第一和第二对锁定元件构造成分别与第一和第二臂结构接合和分离。

10. 发明申请

US20110317972A1 Optical device, optical arrangement and optical element holder 审中-公开
标题翻译：光学装置，光学装置和光学元件支架
公开(公告)号：US20110317972A1
公开(公告)日：2011-12-29
申请号：US13135064
申请日：2011-06-24
申请人： Qingxin Zhang , Chee Wei TAN , Yu DU , Guo Qiang Patrick Lo
发明人： Qingxin Zhang , Chee Wei TAN , Yu DU , Guo Qiang Patrick Lo
IPC分类号： G02B6/00 , C23F1/00
CPC分类号： G02B6/4225 , G02B6/4221 , G02B6/4231 , G02B6/424 , G02B6/4244 , G02B6/4245 , G02B6/4257
摘要： Embodiments provide an optical device including a carrier; a light source; a receiving chamber in or on the carrier wherein the receiving chamber is configured to receive an optical element; the optical element received in the receiving chamber; a plurality of actuators; and a waveguide arranged to receive light transmitted from the light source through the optical element. At least one of the receiving chamber and the actuators is arranged and configured to adjust the position of the optical element in the receiving chamber in a first direction perpendicular to the main surface of the carrier and in a second direction in-plane with the main surface of the carrier.
摘要翻译：实施例提供一种包括载体的光学装置; 光源; 在所述载体中或载体上的接收室，其中所述接收室被配置为接收光学元件; 所述光学元件容纳在所述接收室中; 多个致动器; 以及布置成接收从光源透过光学元件的光的波导管。接收室和致动器中的至少一个被布置和构造成沿着垂直于载体的主表面的第一方向和与主表面的第二方向平行地调节接收室中的光学元件的位置的承运人。

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