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1. 发明申请

US20050118822A1 Apparatus and process for bulk wet etch with leakage protection 审中-公开
标题翻译：用于具有漏电保护的散装湿蚀刻的装置和工艺
公开(公告)号：US20050118822A1
公开(公告)日：2005-06-02
申请号：US11032800
申请日：2005-01-11
申请人： Zhe Wang , Qingxin Zhang , Pang Foo , Han Feng
发明人： Zhe Wang , Qingxin Zhang , Pang Foo , Han Feng
IPC分类号： H01L21/00 , H01L21/306 , H01L21/302 , H01L21/461
CPC分类号： H01L21/67086 , H01L21/30608 , H01L21/6708
摘要： When using hot alkaline etchants such as KOH, the wafer front side, where various devices and/or circuits are located, must be isolated from any contact with the etchant. This has been achieved by using two chambers that are separated from each other by the wafer that is to be etched. Etching solution in one chamber is in contact with the wafer's back surface while deionized water in the other chamber contacts the front surface. The relative liquid pressures in the chambers is arranged to be slightly higher in the chamber of the front surface so that leakage of etchant through a pin hole from back surface to front surface does not occur. As a further precaution, a monitor to detect the etchant is located in the DI water so that, if need be, etching can be terminated before irreparable damage is done.
摘要翻译：当使用诸如KOH的热碱性蚀刻剂时，其中各种装置和/或电路所在的晶片正面必须与与蚀刻剂的任何接触隔离。这是通过使用被待蚀刻的晶片彼此分离的两个室来实现的。一个室中的蚀刻溶液与晶片的背面接触，而另一个室中的去离子水接触前表面。腔室中的相对液体压力被布置为在前表面的腔室中略高，使得蚀刻剂不会通过针孔从背表面泄漏到前表面。作为进一步的预防措施，用于检测蚀刻剂的监测器位于去离子水中，使得如果需要，可以在不可修复的损伤完成之前终止蚀刻。

2. 发明授权

US07793900B2 Magnetic clamp holder 有权
标题翻译：磁夹夹
公开(公告)号：US07793900B2
公开(公告)日：2010-09-14
申请号：US11946852
申请日：2007-11-29
申请人： Han Feng , Chun Li , Xiao-Yu Ma
发明人： Han Feng , Chun Li , Xiao-Yu Ma
IPC分类号： A47G1/17
CPC分类号： B25J15/0608
摘要： An exemplary magnetic clamp holder used for a mechanical arm, includes a housing (21), a magnetic structure (22), and two positioning pins (25). The housing includes an attaching portion (211), and a joining portion (213) fixed to the attaching portion, the attaching portion and the joining portion cooperatively defining a receiving cavity (218). The positioning pins are disposed on the attaching portion of the housing. The magnetic structure is received in the receiving cavity. The magnetic structure includes a permanent magnetic module (223), an electro-magnetic module (225), and a magnetic shield plate (227) disposed between the permanent magnetic module and the electro-magnetic module. The electro-magnetic module is able to create a magnetic field for neutralizing a magnetic field created by the permanent magnetic module.
摘要翻译：用于机械臂的示例性磁夹夹具包括壳体（21），磁结构（22）和两个定位销（25）。所述壳体包括安装部分（211）和固定到所述安装部分的接合部分（213），所述连接部分和所述接合部分协作地限定接收腔（218）。定位销设置在壳体的附接部分上。磁结构被容纳在接收腔中。磁性结构包括设置在永久磁性模块和电磁模块之间的永磁模块（223），电磁模块（225）和磁屏蔽板（227）。电磁模块能够产生用于中和永磁模块产生的磁场的磁场。

3. 外观设计

USD466337S1 Side table 失效
标题翻译：茶几
公开(公告)号：USD466337S1
公开(公告)日：2002-12-03
申请号：US29148821
申请日：2001-09-27
申请人： Han Feng
设计人： Han Feng

4. 外观设计

USD488005S1 Set of interfitting tables 失效
标题翻译：一套配套表
公开(公告)号：USD488005S1
公开(公告)日：2004-04-06
申请号：US29148818
申请日：2001-09-27
申请人： Han Feng
设计人： Han Feng

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