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1. 发明申请

US20110317972A1 Optical device, optical arrangement and optical element holder 审中-公开
标题翻译：光学装置，光学装置和光学元件支架
公开(公告)号：US20110317972A1
公开(公告)日：2011-12-29
申请号：US13135064
申请日：2011-06-24
申请人： Qingxin Zhang , Chee Wei TAN , Yu DU , Guo Qiang Patrick Lo
发明人： Qingxin Zhang , Chee Wei TAN , Yu DU , Guo Qiang Patrick Lo
IPC分类号： G02B6/00 , C23F1/00
CPC分类号： G02B6/4225 , G02B6/4221 , G02B6/4231 , G02B6/424 , G02B6/4244 , G02B6/4245 , G02B6/4257
摘要： Embodiments provide an optical device including a carrier; a light source; a receiving chamber in or on the carrier wherein the receiving chamber is configured to receive an optical element; the optical element received in the receiving chamber; a plurality of actuators; and a waveguide arranged to receive light transmitted from the light source through the optical element. At least one of the receiving chamber and the actuators is arranged and configured to adjust the position of the optical element in the receiving chamber in a first direction perpendicular to the main surface of the carrier and in a second direction in-plane with the main surface of the carrier.
摘要翻译：实施例提供一种包括载体的光学装置; 光源; 在所述载体中或载体上的接收室，其中所述接收室被配置为接收光学元件; 所述光学元件容纳在所述接收室中; 多个致动器; 以及布置成接收从光源透过光学元件的光的波导管。接收室和致动器中的至少一个被布置和构造成沿着垂直于载体的主表面的第一方向和与主表面的第二方向平行地调节接收室中的光学元件的位置的承运人。

2. 发明授权

US08755106B2 Microelectromechanical system (MEMS) device, method of operating the same, and method of forming the same 有权
标题翻译：微机电系统（MEMS）装置，其操作方法及其形成方法
公开(公告)号：US08755106B2
公开(公告)日：2014-06-17
申请号：US13377030
申请日：2009-06-11
申请人： Qingxin Zhang , Yu Du , Chee Wei Tan
发明人： Qingxin Zhang , Yu Du , Chee Wei Tan
IPC分类号： G02B26/00 , H01H71/00 , H01H61/00 , H01H51/00
CPC分类号： B81B3/0054 , B81B2201/033 , B81B2201/047 , G02B6/4204 , G02B6/4226 , G02B6/4236 , G02B26/0833 , G02B26/0866
摘要： A microelectromechanical system (MEMS) device, method of operating the MEMS device, and a method of forming the MEMS device are provided. The MEMS device includes a positioning mechanism and a locking mechanism. The positioning mechanism includes a first arm structure having a first surface and a second surface; a second arm structure having a first surface and a second surface; wherein the first surface of the first arm structure faces the first surface of the second arm structure. The positioning mechanism also includes a first actuator disposed adjacent to the second surface of the first arm structure facing away from the second arm structure; and a second actuator disposed adjacent to the second surface of the second arm structure facing away from the first arm structure. The locking mechanism includes a first pair of locking elements arranged such that each locking element is disposed at two opposite side surfaces of the first arm structure between the first and second surfaces of the first arm structure; and a second pair of locking elements arranged such that each locking element is disposed at two opposite side surfaces of the second arm structure between the first and second surfaces of the second arm structure. The first and second pairs of locking elements are configured to engage with and disengage from the first and second arm structures respectively.
摘要翻译：提供了微机电系统（MEMS）装置，操作MEMS装置的方法以及形成MEMS器件的方法。 MEMS装置包括定位机构和锁定机构。定位机构包括具有第一表面和第二表面的第一臂结构; 具有第一表面和第二表面的第二臂结构; 其中第一臂结构的第一表面面向第二臂结构的第一表面。所述定位机构还包括第一致动器，所述第一致动器邻近所述第一臂结构的所述第二表面邻近所述第二臂结构设置; 以及第二致动器，其邻近所述第二臂结构的所述第二表面邻近所述第一臂结构设置。锁定机构包括第一对锁定元件，其布置成使得每个锁定元件设置在第一臂结构的第一和第二表面之间的第二臂结构的两个相对的侧表面处; 以及第二对锁定元件，其布置成使得每个锁定元件设置在第二臂结构的第二和第二表面之间的第二臂结构的两个相对的侧表面处。第一和第二对锁定元件构造成分别与第一和第二臂结构接合和分离。

3. 发明申请

US20120182594A1 Microelectromechanical System (MEMS) Device, Method of Operating The Same, and Method of Forming the Same 有权
标题翻译：微机电系统（MEMS）装置，其操作方法及其形成方法
公开(公告)号：US20120182594A1
公开(公告)日：2012-07-19
申请号：US13377030
申请日：2009-06-11
申请人： Qingxin Zhang , Yu Du , Chee Wei Tan
发明人： Qingxin Zhang , Yu Du , Chee Wei Tan
IPC分类号： G02B26/00 , H01L29/84
CPC分类号： B81B3/0054 , B81B2201/033 , B81B2201/047 , G02B6/4204 , G02B6/4226 , G02B6/4236 , G02B26/0833 , G02B26/0866
摘要： A microelectromechanical system (MEMS) device, method of operating the MEMS device, and a method of forming the MEMS device are provided. The MEMS device includes a positioning mechanism and a locking mechanism. The positioning mechanism includes a first arm structure having a first surface and a second surface; a second arm structure having a first surface and a second surface; wherein the first surface of the first arm structure faces the first surface of the second arm structure. The positioning mechanism also includes a first actuator disposed adjacent to the second surface of the first arm structure facing away from the second arm structure; and a second actuator disposed adjacent to the second surface of the second arm structure facing away from the first arm structure. The locking mechanism includes a first pair of locking elements arranged such that each locking element is disposed at two opposite side surfaces of the first arm structure between the first and second surfaces of the first arm structure; and a second pair of locking elements arranged such that each locking element is disposed at two opposite side surfaces of the second arm structure between the first and second surfaces of the second arm structure. The first and second pairs of locking elements are configured to engage with and disengage from the first and second arm structures respectively.
摘要翻译：提供了微机电系统（MEMS）装置，操作MEMS装置的方法以及形成MEMS器件的方法。 MEMS装置包括定位机构和锁定机构。定位机构包括具有第一表面和第二表面的第一臂结构; 具有第一表面和第二表面的第二臂结构; 其中第一臂结构的第一表面面向第二臂结构的第一表面。所述定位机构还包括第一致动器，所述第一致动器邻近所述第一臂结构的所述第二表面邻近所述第二臂结构设置; 以及第二致动器，其邻近所述第二臂结构的所述第二表面邻近所述第一臂结构设置。锁定机构包括第一对锁定元件，其布置成使得每个锁定元件设置在第一臂结构的第一和第二表面之间的第二臂结构的两个相对的侧表面处; 以及第二对锁定元件，其布置成使得每个锁定元件设置在第二臂结构的第二和第二表面之间的第二臂结构的两个相对的侧表面处。第一和第二对锁定元件构造成分别与第一和第二臂结构接合和分离。

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