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    • 1. 发明授权
    • Cadmium/rare gas discharge lamp of the short arc type, as well as
projection exposure device using the same
    • 短弧型的镉/稀有气体放电灯,以及使用其的投影曝光装置
    • US5471278A
    • 1995-11-28
    • US154404
    • 1993-11-19
    • Yukio YasudaAkiyasu YamaguchiTatsushi IgarashiYasuo OonishiKenzo KaiMasanori SugiharaTakashi MoriAkira Miyaji
    • Yukio YasudaAkiyasu YamaguchiTatsushi IgarashiYasuo OonishiKenzo KaiMasanori SugiharaTakashi MoriAkira Miyaji
    • G03F7/20H01J61/16H01J61/18H01J61/86
    • G03F7/70016H01J61/18H01J61/86
    • A cadmium/inert gas discharge lamp of the short arc type, which suppresses an unnecessary emission upstream and downstream of the necessary emission spectra in a wavelength range of 210 to 230 nm, achieves a high efficiency of the emission spectra in the range 210 to 230 nm and can be used in very satisfactory manner for industrial applications. Also, a highly efficient projection exposure device through the incorporation of a cadmium/rare gas discharge lamp of the short arc type having good emission spectrum characteristics in the wavelength range 210 to 230 nm, which can transmit in projecting manner fine image patterns with a large depth of focus. The cadmium/rare gas discharge lamp of the short arc type is arranged within a temperature-regulated quartz bulb, and is provided with a pair of adjacently facing electrodes, together with inert gas selected from xenon, krypton, argon, neon or mixtures of them. Metal cadmium with a pressure of 14 to 200 kPa is encapsulated in the tube in a stationary lighting operation. The lamp is operated in such a way that J/P, i.e. the ratio between a discharge current in a stationary lighting operation J (A) and a cadmium pressure in a stationary lighting operation P (kPa) is in a range 0.13 to 15. Also, a projection exposure device, which has the above-described discharge lamp and a power supply for carrying out the lighting operation of the discharge lamp under the above-described condtions.
    • 短波型的镉/惰性气体放电灯在210〜230nm的波长范围内抑制必要的发射光谱的上游和下游的不必要的发光,实现了210〜230的发射光谱的高效率 nm,可以以非常满意的方式用于工业应用。 另外,通过并入具有210〜230nm的波长范围内的发射光谱特性良好的短弧型镉/稀有气体放电灯的高效投影曝光装置,能以突出的方式突出显示具有大的图像的精细图像图案 焦点深度。 短弧型的镉/稀有气体放电灯布置在温度调节的石英灯泡内,并且设置有一对相邻的电极以及选自氙气,氪气,氩气,氖气或它们的混合物的惰性气体 。 压力为14至200kPa的金属镉在静止照明操作中封装在管中。 灯的操作方式是J / P,即静止点亮操作J(A)中的放电电流与静止点亮操作P(k​​Pa)中的镉压力之比在0.13至15的范围内。 此外,具有上述放电灯的投影曝光装置和用于在上述条件下进行放电灯的点亮操作的电源。
    • 3. 发明授权
    • Mercury lamp of the short arc type and method for operation thereof
    • 短弧型汞灯及其操作方法
    • US5920152A
    • 1999-07-06
    • US938749
    • 1997-09-26
    • Yukio YasudaMasanori SugiharaShouichi Mayama
    • Yukio YasudaMasanori SugiharaShouichi Mayama
    • H01J61/16G03F7/20H01J61/073H01J61/12H01J61/86H01J61/88H01J17/04
    • G03F7/70016H01J61/0732H01J61/12H01J61/86
    • A mercury lamp of the short arc type with high radiant efficiency which satisfies the demand for an increase of the radiation amount of the light source, by suppressing the motion of the bright spot in the vicinity of the cathode tip suppresses the flickering of the irradiance and thus increases the arc stability, is achieved in a mercury lamp of the short arc type in which within an arc tube mercury and at least one rare gas are encapsulated, by either at least Ar being filled as the rare gas at an filling pressure of from 1 to 8 atm, and by the current density in the tip area of the cathode being 10 to 250 A/mm.sup.2 or alternatively, at least Kr being filled as the rare gas at an filling pressure of from 1 to 8 atm, and the current density in the tip area of the cathode being 10 to 310 A/mm.sup.2 during operation of the lamp. By operation of the above described lamp in a vertical orientation with the anode positioned above the cathode a further contribution to the attainment of the noted advantages is achieved.
    • 通过抑制阴极尖端附近的亮点的运动,能够满足对光源的照射量的增加的要求的具有高辐射效率的短弧型的水银灯抑制辐照度的闪烁, 从而提高了电弧稳定性,在短弧型汞灯中,在电弧管汞管和至少一种稀有气体被封装的情况下,通过至少Ar以填充压力从而填充稀土气体来实现 1至8个大气压,并且阴极的尖端区域中的电流密度为10至250A / mm 2,或者至少Kr以1至8atm的填充压力填充为稀有气体,并且电流 在灯的操作期间,阴极的尖端区域的密度为10〜310A / mm2。 通过在阳极位于阴极上方的垂直方向上操作上述灯,实现了对所述优点的实现的进一步贡献。
    • 6. 发明授权
    • Disc guide mechanism for automotive disc player
    • 汽车碟片碟机导轨机构
    • US5010484A
    • 1991-04-23
    • US501823
    • 1990-03-30
    • Kazuo KobayashiKiyoshi MorikawaYoshinori YamadaMasakazu KurumadaMasanori Sugihara
    • Kazuo KobayashiKiyoshi MorikawaYoshinori YamadaMasakazu KurumadaMasanori Sugihara
    • G11B17/028G11B17/035G11B17/04G11B17/051
    • G11B17/0515G11B17/035
    • A disc reproducing apparatus is disclosed in which a large or small disc inserted through a disc inserting opening is transferred to a predetermined position within a player, a clamper arm extending over a turntable on which the disc is placed is operated to fix the disc onto the turntable, and information recorded in the disc is reproduced by rotating the turntable. A disc guide plate for guiding the small-diameter disc to a clamp position is pivotally mounted to the clamper arm. A disc guiding recess is provided into which the small disc can slip and which has a sufficiently wide opening. A restraining member blocks the advancement of only the large disc into the disc guiding recess. When the small disc is inserted through the disc inserting opening, the small-diameter disc is advanced into the disc guiding recess to be positioned at the clamp position. When the large-diameter disc is inserted through the disc inserting opening, the large-diameter disc is guided by the restraining member to the outside of the disc guiding recess, pushes away the disc guide plate, and is guided to the clamp position on the turntable.
    • 公开了一种盘再现装置,其中通过盘插入口插入的大或小盘被传送到播放器内的预定位置,在盘上放置盘的转台上延伸的夹持器臂被操作以将盘固定到 旋转盘,记录在盘中的信息通过旋转转盘进行再现。 用于将小直径盘引导到夹紧位置的盘导向盘枢转地安装到夹持臂。 提供了一个盘引导凹槽,小盘可以滑入其中,并具有足够宽的开口。 限制构件阻止只有大盘进入盘导向凹槽。 当小盘被插入通过盘插入口时,小直径盘推进到盘引导凹槽中以定位在夹紧位置。 当大直径盘插入通过盘插入口时,大直径盘被限制构件引导到盘引导凹槽的外侧,推动盘导向板,并被引导到夹持位置 转盘
    • 7. 发明授权
    • Short-arc discharge lamp
    • 短弧放电灯
    • US06825614B2
    • 2004-11-30
    • US09956553
    • 2001-09-20
    • Naohisa IkedaMasanori Sugihara
    • Naohisa IkedaMasanori Sugihara
    • H01J1718
    • G03F7/70016H01J61/368
    • Short-arc discharge lamp designed to minimize the phenomenon of foil floating between the metal foil located in the foil sealing area and the sealing quartz component that is in contact with the inside of the metal foil so as to prevent cracks from forming in the foil sealing area, gas leakage from the lamp, and premature breaking of the lamp. The short-arc discharge lamp includes electrodes which are located in an emission space, a metal foil electrically connected to the electrodes, a quartz tube part which surrounds the metal foil, a sealing quartz component in contact with the inside of the metal foil, and a metallic component inserted into the sealing quartz component and electrically connected to the metal foil. The foil sealing area is formed from the metal foil, the quartz tube, and the sealing quartz component, which are sealed against one another. By the sealing action of the foil sealing area, sealing of the emission space is ensured. The short-arc discharge lamp has an electrical input power rating of greater than or equal to 4 kW and an operating pressure during luminous operation of greater than or equal to 2×106 Pa, and is operated using direct current. The above-mentioned characteristics are achieved in that the length of the area of a metallic component inserted into the sealing quartz component is greater than or equal to roughly 40% of the total length of the sealing quartz component.
    • 短弧放电灯被设计成最小化位于箔密封区域中的金属箔和与金属箔内部接触的密封石英部件之间的箔浮现现象,以防止在箔密封中形成裂纹 区域,灯的气体泄漏以及灯的过早断裂。 短弧放电灯包括位于发射空间中的电极,与电极电连接的金属箔,围绕金属箔的石英管部分,与金属箔的内部接触的密封石英部件,以及 插入到密封石英部件中并电连接到金属箔的金属部件。 箔密封区域由彼此密封的金属箔,石英管和密封石英部件形成。 通过箔密封区的密封作用,确保了发射空间的密封。 短弧放电灯具有大于或等于4kW的电输入额定功率和大于或等于2×10 -6 Pa的发光操作期间的工作压力,并且使用直流电流进行操作。 上述特征的实现是,插入到密封石英部件中的金属部件的面积的长度大于或等于密封石英部件的总长度的大约40%。
    • 8. 发明授权
    • Short-arc discharge lamp
    • 短弧放电灯
    • US06437508B1
    • 2002-08-20
    • US09551351
    • 2000-04-18
    • Masanori SugiharaNaohisa Ikeda
    • Masanori SugiharaNaohisa Ikeda
    • H01J114
    • H01J61/073H01J61/526H01J61/822H01J61/86
    • A short-arc discharge lamp (10) including a light-emitting tube (1) having at least 15 mg/cc of mercury sealed therein, an anode (2) and cathode (3) facing each other and disposed within the light-emitting tube (1), and a heat-release layer (6) covering a substantial portion of an outer surface of the cathode (3) so that when the short-arc discharge lamp (10) is provided with electricity having a current value of at least 50 A, an inter-electrode power value defined by a ratio Y/X is at least 500 W/mm, X being defined as a distance in millimeters between the anode (2) and the cathode (3), and Y being defined as an input power in Watts provided to the short-arc discharge lamp (10).
    • 一种包括密封在其中具有至少15mg / cc的汞的发光管(1)的短弧放电灯(10),阳极(2)和阴极(3),彼此面对并设置在发光 管(1)和覆盖阴极(3)的外表面的大部分的散热层(6),使得当短弧放电灯(10)具有电流值为at 至少50A,由比率Y / X定义的电极间功率值为至少500W / mm,X定义为阳极(2)和阴极(3)之间的距离(以毫米计),Y定义为 作为提供给短弧放电灯(10)的输入功率(瓦特)。
    • 9. 发明授权
    • Centering mechanism for automotive disc player
    • 汽车碟片播放机的定中心机制
    • US5031171A
    • 1991-07-09
    • US499754
    • 1990-03-27
    • Masakazu KurumadaKiyoshi MorikawaKazuo KobayashiYoshinori YamadaMasanori Sugihara
    • Masakazu KurumadaKiyoshi MorikawaKazuo KobayashiYoshinori YamadaMasanori Sugihara
    • G11B17/028G11B17/04
    • G11B17/0515G11B17/0286G11B17/0288
    • A disc reproducing apparatus is disclosed in which a large- or small-diameter disc inserted through a disc inserting opening is transferred to a predetermined position within a player, a clamper arm extending over a turntable on which the disc is placed is operated to fix the disc onto the turntable, and information recorded in the disc is reproduced by rotating the turntable. A pair of stopper arms are disposed on the clamper arm, each of which having an abutment which abuts the periphery of the disc. The pair of stopper arms are disposed such that when the small-diameter disc arrives at the predetermined position on the turntable, the angle made by the longitudinal axis of the respective stopper arms is smaller than the angle made by the radial lines connecting each stopper and the center of the small-diameter disc, but greater than the angle made by the radial lines connecting each stopper and the center of the large-diameter disc when the large-diameter disc is place.
    • 公开了一种盘再现装置,其中通过盘插入口插入的大直径或小直径的盘被转移到播放器内的预定位置,操作在其上放置盘的转台上延伸的夹持臂固定 转盘转盘,通过旋转转台再现记录在盘中的信息。 一对止动臂设置在夹持臂上,每个止动臂具有邻接盘的周边的抵接部。 一对止动臂设置成使得当小直径盘到达转台上的预定位置时,由止动臂的纵向轴线形成的角度小于由连接每个止动器和 小直径盘的中心,但大于当大直径盘放置时连接每个止动件和大直径盘的中心的径向线所产生的角度。