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1. 发明授权

US6107741A Cathode structure for short arc type discharge lamp 失效
标题翻译：短弧型放电灯的阴极结构
公开(公告)号：US6107741A
公开(公告)日：2000-08-22
申请号：US040411
申请日：1998-03-18
申请人： Akiyasu Yamaguchi , Shinkichi Morimoto , Masanori Sugihara
发明人： Akiyasu Yamaguchi , Shinkichi Morimoto , Masanori Sugihara
IPC分类号： G03F7/20 , H01J61/073 , H01J61/86 , H01J17/04
CPC分类号： G03F7/70016 , H01J61/0732 , H01J61/86
摘要： A discharge lamp of the short arc type with good light intensity stability in which arc fluctuation is suppressed is achieved, according to the invention by providing a discharge lamp of the short arc type which has an arc tube which surrounds the discharge space, hermetically sealed portions on the two ends of the arc tube, a cathode and an anode which are arranged opposite one another in the arc tube and which is operated such that the cathode is pointed upward, in by the cathode being supported by an inner lead which is held securely by the hermetically sealed portion, the outside diameter of the cathode being greater than the outside diameter of the inner lead, and by the relationship L.gtoreq.2.5D being satisfied, where D is the outside diameter of the cathode (mm) and L is the axial length of the cathode (mm).
摘要翻译：根据本发明，通过提供一种具有围绕放电空间的电弧管的短弧型放电灯，气密密封部分实现短弧型放电灯，其具有良好的光强度稳定性，其中电弧波动被抑制在电弧管的两端，阴极和阳极在电弧管中彼此相对布置并且被操作以使得阴极被向上指向，阴极由被保持牢固的内部引线支撑通过密封部分，阴极的外径大于内引线的外径，并且满足L> / = 2.5D的关系，其中D是阴极的外径（mm），L 是阴极的轴向长度（mm）。

2. 发明授权

US5471278A Cadmium/rare gas discharge lamp of the short arc type, as well as projection exposure device using the same 失效
标题翻译：短弧型的镉/稀有气体放电灯，以及使用其的投影曝光装置
公开(公告)号：US5471278A
公开(公告)日：1995-11-28
申请号：US154404
申请日：1993-11-19
申请人： Yukio Yasuda , Akiyasu Yamaguchi , Tatsushi Igarashi , Yasuo Oonishi , Kenzo Kai , Masanori Sugihara , Takashi Mori , Akira Miyaji
发明人： Yukio Yasuda , Akiyasu Yamaguchi , Tatsushi Igarashi , Yasuo Oonishi , Kenzo Kai , Masanori Sugihara , Takashi Mori , Akira Miyaji
IPC分类号： G03F7/20 , H01J61/16 , H01J61/18 , H01J61/86
CPC分类号： G03F7/70016 , H01J61/18 , H01J61/86
摘要： A cadmium/inert gas discharge lamp of the short arc type, which suppresses an unnecessary emission upstream and downstream of the necessary emission spectra in a wavelength range of 210 to 230 nm, achieves a high efficiency of the emission spectra in the range 210 to 230 nm and can be used in very satisfactory manner for industrial applications. Also, a highly efficient projection exposure device through the incorporation of a cadmium/rare gas discharge lamp of the short arc type having good emission spectrum characteristics in the wavelength range 210 to 230 nm, which can transmit in projecting manner fine image patterns with a large depth of focus. The cadmium/rare gas discharge lamp of the short arc type is arranged within a temperature-regulated quartz bulb, and is provided with a pair of adjacently facing electrodes, together with inert gas selected from xenon, krypton, argon, neon or mixtures of them. Metal cadmium with a pressure of 14 to 200 kPa is encapsulated in the tube in a stationary lighting operation. The lamp is operated in such a way that J/P, i.e. the ratio between a discharge current in a stationary lighting operation J (A) and a cadmium pressure in a stationary lighting operation P (kPa) is in a range 0.13 to 15. Also, a projection exposure device, which has the above-described discharge lamp and a power supply for carrying out the lighting operation of the discharge lamp under the above-described condtions.
摘要翻译：短波型的镉/惰性气体放电灯在210〜230nm的波长范围内抑制必要的发射光谱的上游和下游的不必要的发光，实现了210〜230的发射光谱的高效率 nm，可以以非常满意的方式用于工业应用。另外，通过并入具有210〜230nm的波长范围内的发射光谱特性良好的短弧型镉/稀有气体放电灯的高效投影曝光装置，能以突出的方式突出显示具有大的图像的精细图像图案焦点深度。短弧型的镉/稀有气体放电灯布置在温度调节的石英灯泡内，并且设置有一对相邻的电极以及选自氙气，氪气，氩气，氖气或它们的混合物的惰性气体。压力为14至200kPa的金属镉在静止照明操作中封装在管中。灯的操作方式是J / P，即静止点亮操作J（A）中的放电电流与静止点亮操作P（kPa）中的镉压力之比在0.13至15的范围内。此外，具有上述放电灯的投影曝光装置和用于在上述条件下进行放电灯的点亮操作的电源。

3. 发明授权

US5864388A Surface activating process, and device and lamp for performing said process 失效
标题翻译：表面激活过程，以及用于执行所述过程的设备和灯
公开(公告)号：US5864388A
公开(公告)日：1999-01-26
申请号：US680317
申请日：1996-07-11
申请人： Toshiyuki Shima , Akiyasu Yamaguchi , Shinji Suzuki
发明人： Toshiyuki Shima , Akiyasu Yamaguchi , Shinji Suzuki
IPC分类号： G02F1/1337 , G03F7/20 , G03B27/42 , G03B27/52 , G03B27/54
CPC分类号： G03F7/7035 , G03F7/2004 , G03F7/70866 , G02F1/133788
摘要： A surface activating process in which treatment can be performed within a short time and in which activation of undesired areas does not occur is achieved by concentrating ultraviolet light with wavelengths from 200 nm to 300 nm by means of an oval focussing mirror. The ultraviolet light is incident in parallel on a mask via a first reflector, an integrator lens, a shutter, a second reflector, and a collimator, and is radiated through the mask onto a workpiece to activation a surface area of the workpiece. The arc length of the lamp is selected to be within a range from 7.5 to 29 mm to obtain a radiation intensity which is sufficient for surface activation. Furthermore, the relationship .alpha.>1.5.degree. and the relationship d.times.tan .alpha..ltoreq.0.1 W are satisfied at the same time, where .alpha. is the visual angle of the ultraviolet light, d is the thickness of an oxygencontaining gas layer which is formed between the mask and the workpiece, and W is the width of a minimum unit of the surface areas of the workpiece to be activated. In this way entry of adverse light can be prevented.
摘要翻译：通过椭圆形聚焦镜将浓度为200nm至300nm的波长的紫外光聚焦，可以在短时间内进行处理并且不发生不想要的区域的激活的表面活化过程。紫外光通过第一反射器，积分透镜，快门，第二反射器和准直器平行地入射到掩模上，并通过掩模辐射到工件上以激活工件的表面区域。灯的弧长选择在7.5至29mm的范围内，以获得足以用于表面活化的辐射强度。此外，同时满足α> 1.5°和关系dxtanα<= = 0.1W的关系，其中α是紫外光的视角，d是形成在所述紫外线之间的含氧气体层的厚度掩模和工件，W是要被激活的工件的表面积的最小单位的宽度。以这种方式可以防止不利光的进入。

4. 发明授权

US5589735A Emission device with a cadmium lamp 失效
标题翻译：带镉灯的排放装置
公开(公告)号：US5589735A
公开(公告)日：1996-12-31
申请号：US506829
申请日：1995-07-25
申请人： Akiyasu Yamaguchi , Yukio Yasuda , Tsuneo Okanuma , Tatsushi Igarashi , Hiromitsu Matsuno , Tatsumi Hiramoto
发明人： Akiyasu Yamaguchi , Yukio Yasuda , Tsuneo Okanuma , Tatsushi Igarashi , Hiromitsu Matsuno , Tatsumi Hiramoto
IPC分类号： H01J61/86 , G03F7/20 , H01J61/30 , H01J61/74 , H01J7/08 , H01J61/18
CPC分类号： G03F7/70016 , H01J61/30 , H01J61/74
摘要： An emission device which operates a cadmium lamp with a light intensity sufficient for used in industrial applications is achieved by an emission device having a cadmium lamp with a fluorescent tube within which a cathode and an anode are space a small distance apart and a buffer gas for easier initiation of luminous operation and metallic cadmium in an amount per unit volume of the fluorescent tube of 1.times.10.sup.-4 g/cm.sup.3 to 3.times.10.sup.-3 g/cm.sup.3 are encapsulated, and a power source device for supplying an electrical input between the cathode and the anode in an electrical input range from 0.5 kW to 5.0 kW with the condition:6.03+2.79 W.ltoreq.r.ltoreq.40being satisfied, where the electrical input of the power source device into the cadmium lamp in steady-state luminous operation is W (kW) and the maximum inside radius of the fluorescent tube is r (mm).
摘要翻译：操作具有足以用于工业应用的光强度的镉灯的发射装置通过具有镉灯的发射装置来实现，所述镉灯具有荧光管，阴极和阳极间隔开小间隔，并且缓冲气体用于封装了1×10 -4 g / cm 3〜3×10 -3 g / cm 3的荧光灯的单位体积的发光操作的更容易的起始和金属镉，以及用于在阴极和阴极之间提供电输入的电源装置在0.5kW至5.0kW的电输入范围内的阳极，条件为：6.03 + 2.79W

5. 发明授权

US5541481A Cadmium ARC lamp with improved UV emission 失效
标题翻译：镉ARC灯具有改善的紫外线发射
公开(公告)号：US5541481A
公开(公告)日：1996-07-30
申请号：US282267
申请日：1994-07-29
申请人： Akiyasu Yamaguchi , Yukio Yasuda , Hiromitsu Matsuno , Tatsushi Igarashi
发明人： Akiyasu Yamaguchi , Yukio Yasuda , Hiromitsu Matsuno , Tatsushi Igarashi
IPC分类号： H01J61/12 , H01J61/18 , H01J61/30 , H01J61/86
CPC分类号： H01J61/86 , H01J61/12 , H01J61/18 , H01J61/302
摘要： A cadmium rare gas discharge lamp of the short arc type that has a high power of the spectra in a wavelength range of 210 nm to 230 nm and a stable lamp voltage in lighting operation for a long period. An arc tube 1 is provided within which are disposed opposed, spaced apart electrodes 2, 3 and thermal insulation films 6, 7. A rare gas is encapsulated together with metal cadmium and a quartz glass is used for the material of the arc tube whose OH radical has a weight content of no more than 200 ppm. Electrodes 4 and 5 are spaced apart no more than 10 mm, so that with a lamp current at least 20 amperes, an arc of the electrode-stable type is formed and radiant light of Cd ions obtained. For the encapsulated rare gas, in one embodiment at least one of the rare gases neon, argon or krypton, are used and are encapsulated at a gas pressure of 35 kPa to 2.5 MPa at a standard temperature of 25.degree. C. The arc tube 1 is formed of quartz glass, electrodes 2 and 3 are placed opposite one another. In another embodiment, a halogen gas is encapsulated in the arc to in an amount from 4.5.times.10.sup.-10 mol/cm.sup.3 of arc tube volume to 2.1.times.10.sup.-7 mol/cm.sup.3 of are tube volume.
摘要翻译：一种短弧型的镉稀释气体放电灯，其在210nm至230nm的波长范围内具有高功率的光谱，并且在长时间的照明操作中具有稳定的灯电压。设置有电弧管1，其中设置相对的间隔开的电极2,3和绝热膜6,7，稀有气体与金属镉一起被密封，并且石英玻璃用于电弧管的材料，其OH 自由基的重量含量不超过200ppm。电极4和5的间隔不超过10毫米，使得灯电流至少为20安培，形成电极稳定型弧，并获得Cd离子的辐射光。对于包封的稀有气体，在一个实施方案中，使用至少一种稀有气体氖，氩或氪，并在25℃的标准温度下以35kPa至2.5MPa的气体压力包封。电弧管1 由石英玻璃形成，电极2和3彼此相对放置。在另一个实施方案中，将卤素气体以弧形管体积的4.5×10 -10 mol / cm 3封装到管体积的2.1×10 -7 mol / cm 3的量。

6. 发明授权

US5481159A Metal vapor discharge lamp 失效
标题翻译：金属蒸汽放电灯
公开(公告)号：US5481159A
公开(公告)日：1996-01-02
申请号：US237906
申请日：1994-05-04
申请人： Tatsumi Hiramoto , Tatsushi Igarashi , Hiromitsu Matsuno , Yukio Yasuda , Akiyasu Yamaguchi
发明人： Tatsumi Hiramoto , Tatsushi Igarashi , Hiromitsu Matsuno , Yukio Yasuda , Akiyasu Yamaguchi
IPC分类号： G03F7/20 , H01J61/18 , H01J61/82 , H01J61/86 , H01J61/12
CPC分类号： G03F7/70016 , H01J61/18 , H01J61/82 , H01J61/86
摘要： A discharge lamp uses resonance lines which are emitted by ions in an excitation state and has a high short wave ultraviolet ray output. The lamp is provided with a pair of electrodes, having a reciprocal spacing of equal to or smaller than 12 mm, and is of the electrode-stable type. As the major emission material, cadmium is encapsulated in a quantity permitting a partial pressure P in operation of 3.times.10.sup.3 Pa to 1.3.times.10.sup.5 Pa. The lighting operation is performed in a state in which a lamp current J.sub.L fulfills the following condition (a):0.7
摘要翻译：放电灯使用由激发状态的离子发射并具有高短波紫外线输出的谐振线。该灯具有一对电极，具有等于或小于12mm的往复间隔，并且是电极稳定型的。作为主要的发光材料，镉以3×10 3 Pa〜1.3×10 5 Pa的运转状态下的分压P被包封，在灯电流JL满足以下条件（a）的状态下进行点亮操作：0.7

7. 发明授权

US5739636A Cadmium discharge lamp of the short arc type and method of producing UV light therewith 失效
标题翻译：短弧型镉放电灯及其制造方法
公开(公告)号：US5739636A
公开(公告)日：1998-04-14
申请号：US589703
申请日：1996-01-22
申请人： Akiyasu Yamaguchi , Yukio Yasuda , Hiromitsu Matsuno , Tatsushi Igarashi
发明人： Akiyasu Yamaguchi , Yukio Yasuda , Hiromitsu Matsuno , Tatsushi Igarashi
IPC分类号： G02B21/16 , G03F7/20 , H01J61/16 , H01J61/18 , H01J61/35 , H01J61/52 , H01J61/86 , H01J61/12
CPC分类号： G03F7/70016 , H01J61/18 , H01J61/35 , H01J61/52 , H01J61/86
摘要： A cadmium discharge lamp which can emit line spectra with wavelengths of 214.+-.2 nm with high power is achieved by encapsulating metallic cadmium, in an amount producing a pressure in stationary lighting operation in the range from 2 kPa to 13.7 kPa, together with at least one of the rare gases xenon, krypton, argon and neon, in a temperature-controlled arc tube which is provided with electrodes located adjacently opposite one another, and by operating the lamp such that J/P is in the range from 1.4 to 75, where J is the discharge current in stationary lighting operation in amperes and the P is the cadmium pressure in stationary lighting operation.
摘要翻译：可以通过在2kPa至13.7kPa的范围内将固定照明操作中产生压力的金属镉密封在一起，可以发射波长为214 +/- 2nm的线光谱的镉放电灯，至少有一种稀有气体氙气，氪气，氩气和氖气在一个温度控制的电弧管中，其中设置有彼此相邻的电极，并通过操作灯使得J / P在1.4〜 75，其中J是静止照明中的放电电流，以安培为单位，P是静止照明操作中的镉压力。

8. 发明授权

US5107178A Metal vapor discharge lamp filled with bismuth, mercury, a rare gas, iron and a halogen 失效
标题翻译：金属蒸气放电灯与BISMUTH，MERCURY，稀有气体，铁和卤素
公开(公告)号：US5107178A
公开(公告)日：1992-04-21
申请号：US636587
申请日：1991-01-02
申请人： Masachika Ohyama , Tetsuo Fuse , Akiyasu Yamaguchi
发明人： Masachika Ohyama , Tetsuo Fuse , Akiyasu Yamaguchi
IPC分类号： H01J61/12
CPC分类号： H01J61/12
摘要： A metal vapor discharge lamp comprises a light-emitting tube filled with bismuth together with mercury, a rare gas, iron and a halogen in the range of 1/20-6/1 in terms of the gram atom ratio of bismuth to iron (Bi/Fe). A metal vapor discharge lamp also comprises a long light-emitting tube having an inner diameter D of 18-35 mm, equipped with a pair of electrodes and having an electrode interval L of 750 mm or greater, filled with bismuth together with mercury in a sealed amount of 0.6-2.0 mg per cc of the internal volume of the light-emitting tube, a rare gas, iron and a halogen in the range of 1/20-6/1 in terms of the gram atom ratio of bismuth to iron (Bi/Fe).

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