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    • 2. 发明授权
    • Mercury lamp of the short arc type and method for operation thereof
    • 短弧型汞灯及其操作方法
    • US5920152A
    • 1999-07-06
    • US938749
    • 1997-09-26
    • Yukio YasudaMasanori SugiharaShouichi Mayama
    • Yukio YasudaMasanori SugiharaShouichi Mayama
    • H01J61/16G03F7/20H01J61/073H01J61/12H01J61/86H01J61/88H01J17/04
    • G03F7/70016H01J61/0732H01J61/12H01J61/86
    • A mercury lamp of the short arc type with high radiant efficiency which satisfies the demand for an increase of the radiation amount of the light source, by suppressing the motion of the bright spot in the vicinity of the cathode tip suppresses the flickering of the irradiance and thus increases the arc stability, is achieved in a mercury lamp of the short arc type in which within an arc tube mercury and at least one rare gas are encapsulated, by either at least Ar being filled as the rare gas at an filling pressure of from 1 to 8 atm, and by the current density in the tip area of the cathode being 10 to 250 A/mm.sup.2 or alternatively, at least Kr being filled as the rare gas at an filling pressure of from 1 to 8 atm, and the current density in the tip area of the cathode being 10 to 310 A/mm.sup.2 during operation of the lamp. By operation of the above described lamp in a vertical orientation with the anode positioned above the cathode a further contribution to the attainment of the noted advantages is achieved.
    • 通过抑制阴极尖端附近的亮点的运动,能够满足对光源的照射量的增加的要求的具有高辐射效率的短弧型的水银灯抑制辐照度的闪烁, 从而提高了电弧稳定性,在短弧型汞灯中,在电弧管汞管和至少一种稀有气体被封装的情况下,通过至少Ar以填充压力从而填充稀土气体来实现 1至8个大气压,并且阴极的尖端区域中的电流密度为10至250A / mm 2,或者至少Kr以1至8atm的填充压力填充为稀有气体,并且电流 在灯的操作期间,阴极的尖端区域的密度为10〜310A / mm2。 通过在阳极位于阴极上方的垂直方向上操作上述灯,实现了对所述优点的实现的进一步贡献。
    • 4. 发明授权
    • Cadmium/rare gas discharge lamp of the short arc type, as well as
projection exposure device using the same
    • 短弧型的镉/稀有气体放电灯,以及使用其的投影曝光装置
    • US5471278A
    • 1995-11-28
    • US154404
    • 1993-11-19
    • Yukio YasudaAkiyasu YamaguchiTatsushi IgarashiYasuo OonishiKenzo KaiMasanori SugiharaTakashi MoriAkira Miyaji
    • Yukio YasudaAkiyasu YamaguchiTatsushi IgarashiYasuo OonishiKenzo KaiMasanori SugiharaTakashi MoriAkira Miyaji
    • G03F7/20H01J61/16H01J61/18H01J61/86
    • G03F7/70016H01J61/18H01J61/86
    • A cadmium/inert gas discharge lamp of the short arc type, which suppresses an unnecessary emission upstream and downstream of the necessary emission spectra in a wavelength range of 210 to 230 nm, achieves a high efficiency of the emission spectra in the range 210 to 230 nm and can be used in very satisfactory manner for industrial applications. Also, a highly efficient projection exposure device through the incorporation of a cadmium/rare gas discharge lamp of the short arc type having good emission spectrum characteristics in the wavelength range 210 to 230 nm, which can transmit in projecting manner fine image patterns with a large depth of focus. The cadmium/rare gas discharge lamp of the short arc type is arranged within a temperature-regulated quartz bulb, and is provided with a pair of adjacently facing electrodes, together with inert gas selected from xenon, krypton, argon, neon or mixtures of them. Metal cadmium with a pressure of 14 to 200 kPa is encapsulated in the tube in a stationary lighting operation. The lamp is operated in such a way that J/P, i.e. the ratio between a discharge current in a stationary lighting operation J (A) and a cadmium pressure in a stationary lighting operation P (kPa) is in a range 0.13 to 15. Also, a projection exposure device, which has the above-described discharge lamp and a power supply for carrying out the lighting operation of the discharge lamp under the above-described condtions.
    • 短波型的镉/惰性气体放电灯在210〜230nm的波长范围内抑制必要的发射光谱的上游和下游的不必要的发光,实现了210〜230的发射光谱的高效率 nm,可以以非常满意的方式用于工业应用。 另外,通过并入具有210〜230nm的波长范围内的发射光谱特性良好的短弧型镉/稀有气体放电灯的高效投影曝光装置,能以突出的方式突出显示具有大的图像的精细图像图案 焦点深度。 短弧型的镉/稀有气体放电灯布置在温度调节的石英灯泡内,并且设置有一对相邻的电极以及选自氙气,氪气,氩气,氖气或它们的混合物的惰性气体 。 压力为14至200kPa的金属镉在静止照明操作中封装在管中。 灯的操作方式是J / P,即静止点亮操作J(A)中的放电电流与静止点亮操作P(k​​Pa)中的镉压力之比在0.13至15的范围内。 此外,具有上述放电灯的投影曝光装置和用于在上述条件下进行放电灯的点亮操作的电源。
    • 8. 发明申请
    • Discharge lamp
    • 放电灯
    • US20090039785A1
    • 2009-02-12
    • US12222197
    • 2008-08-05
    • Yukio YasudaTakehito Senga
    • Yukio YasudaTakehito Senga
    • H01J17/16
    • H01J61/86H01J61/20H01J61/36H01J61/366
    • A discharge lamp comprises a discharge container in which a sealing tube is connected to each end of an arc tube, electrodes arranged inside the arc tube, a glass member provided in the sealing tube, a metallic foil provided on an outer circumference face of the glass member, an external lead which is electrically connected to the metallic foil and which is inserted in a through hole of an external quartz tube, a low melting point glass which is formed in a gap between an inner circumference face of the through hole of the external quartz glass tube and an external circumference face of the external lead, wherein a concave portion is formed at an outer end of the through hole.
    • 放电灯包括放电容器,其中密封管连接到电弧管的每一端,设置在电弧管内的电极,设置在密封管中的玻璃构件,设置在玻璃的外周面上的金属箔 元件,与金属箔电连接并插入外部石英管的通孔中的外部引线,形成在外部通孔的内周面之间的间隙中的间隙中的低熔点玻璃 石英玻璃管和外部引线的外周面,其中在通孔的外端形成凹部。
    • 9. 发明授权
    • Speaker-use protection element and speaker device
    • 扬声器使用保护元件和扬声器设备
    • US06928177B2
    • 2005-08-09
    • US10257728
    • 2002-02-21
    • Ikuo ChataniYukio Yasuda
    • Ikuo ChataniYukio Yasuda
    • H01T4/08H04R3/00H04R25/00
    • H01T4/08H04R3/007
    • A loudspeaker protective unit for protecting a loudspeaker device against an excessive input current includes a lamp connected in series with the loudspeaker unit. The lamp is housed in a casing exhibiting light-sealing properties formed of an electrically conductive material, and is sealed with a sealant exhibiting a predetermined electrical conductivity. The spacing between lead lines of the lamp housed in the casing is of a preset value. An inert gas is sealed within a main lamp body unit and a preset voltage is applied to the main lamp body unit. When the voltage is applied across the lead lines, an electrical discharge is produced to interrupt the current flowing through the filament so as to prohibit a temperature rise in the lamp.
    • 用于保护扬声器装置免受过大输入电流的扬声器保护单元包括与扬声器单元串联连接的灯。 灯被容纳在显示由导电材料形成的光密封特性的壳体中,并且用表现出预定导电性的密封剂密封。 容纳在壳体中的灯的引线之间的间隔是预设值。 惰性气体被密封在主灯体单元内,并且将预设电压施加到主灯体单元。 当跨导线施加电压时,产生放电以中断流过灯丝的电流,以防止灯中的温度上升。
    • 10. 发明授权
    • IGBT, control circuit, and protection circuit on same substrate
    • IGBT,控制电路和保护电路在同一个基板上
    • US06441463B2
    • 2002-08-27
    • US09756190
    • 2001-01-09
    • Yukio Yasuda
    • Yukio Yasuda
    • H01L27082
    • H01L27/0255H01L27/0664H01L29/47H01L29/872H01L2924/0002Y10T307/865H01L2924/00
    • Latch-up of each of parasitic thyristors (T1-T4), which occurs when a circuit element (B1) is formed on a semiconductor substrate in which an IGBT (Z1) has been formed, is prevented by a circuit for preventing the latch-up using Schottky barrier diodes (D2, D3) formed on the semiconductor substrate. Each of the Schottky barrier diodes (D2, D3), which is composed of a junction between a diffused layer used for forming the circuit element and a metal wiring layer, is used in the circuit for preventing the latch-up action of each of the parasitic thyristors (T1-T4). Thereby, the area of the semiconductor device can be made smaller while the semiconductor device can have a higher protection effect.
    • 当在形成有IGBT(Z1)的半导体基板上形成电路元件(B1)时发生的每个寄生晶闸管(T1-T4)的锁存被防止锁存 - 使用形成在半导体衬底上的肖特基势垒二极管(D2,D3)。 在电路中使用由用于形成电路元件的扩散层与金属布线层之间的结构构成的肖特基势垒二极管(D2,D3),用于防止每一个的闩锁动作 寄生晶闸管(T1-T4)。 由此,可以使半导体器件的面积更小,同时半导体器件可以具有更高的保护效果。