会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 4. 发明授权
    • Cadmium/rare gas discharge lamp of the short arc type, as well as
projection exposure device using the same
    • 短弧型的镉/稀有气体放电灯,以及使用其的投影曝光装置
    • US5471278A
    • 1995-11-28
    • US154404
    • 1993-11-19
    • Yukio YasudaAkiyasu YamaguchiTatsushi IgarashiYasuo OonishiKenzo KaiMasanori SugiharaTakashi MoriAkira Miyaji
    • Yukio YasudaAkiyasu YamaguchiTatsushi IgarashiYasuo OonishiKenzo KaiMasanori SugiharaTakashi MoriAkira Miyaji
    • G03F7/20H01J61/16H01J61/18H01J61/86
    • G03F7/70016H01J61/18H01J61/86
    • A cadmium/inert gas discharge lamp of the short arc type, which suppresses an unnecessary emission upstream and downstream of the necessary emission spectra in a wavelength range of 210 to 230 nm, achieves a high efficiency of the emission spectra in the range 210 to 230 nm and can be used in very satisfactory manner for industrial applications. Also, a highly efficient projection exposure device through the incorporation of a cadmium/rare gas discharge lamp of the short arc type having good emission spectrum characteristics in the wavelength range 210 to 230 nm, which can transmit in projecting manner fine image patterns with a large depth of focus. The cadmium/rare gas discharge lamp of the short arc type is arranged within a temperature-regulated quartz bulb, and is provided with a pair of adjacently facing electrodes, together with inert gas selected from xenon, krypton, argon, neon or mixtures of them. Metal cadmium with a pressure of 14 to 200 kPa is encapsulated in the tube in a stationary lighting operation. The lamp is operated in such a way that J/P, i.e. the ratio between a discharge current in a stationary lighting operation J (A) and a cadmium pressure in a stationary lighting operation P (kPa) is in a range 0.13 to 15. Also, a projection exposure device, which has the above-described discharge lamp and a power supply for carrying out the lighting operation of the discharge lamp under the above-described condtions.
    • 短波型的镉/惰性气体放电灯在210〜230nm的波长范围内抑制必要的发射光谱的上游和下游的不必要的发光,实现了210〜230的发射光谱的高效率 nm,可以以非常满意的方式用于工业应用。 另外,通过并入具有210〜230nm的波长范围内的发射光谱特性良好的短弧型镉/稀有气体放电灯的高效投影曝光装置,能以突出的方式突出显示具有大的图像的精细图像图案 焦点深度。 短弧型的镉/稀有气体放电灯布置在温度调节的石英灯泡内,并且设置有一对相邻的电极以及选自氙气,氪气,氩气,氖气或它们的混合物的惰性气体 。 压力为14至200kPa的金属镉在静止照明操作中封装在管中。 灯的操作方式是J / P,即静止点亮操作J(A)中的放电电流与静止点亮操作P(k​​Pa)中的镉压力之比在0.13至15的范围内。 此外,具有上述放电灯的投影曝光装置和用于在上述条件下进行放电灯的点亮操作的电源。