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    • 7. 发明授权
    • Non-volatile memory cells with selectively formed floating gate
    • 具有选择性形成的浮动栅极的非易失性存储单元
    • US06777741B2
    • 2004-08-17
    • US10393603
    • 2003-03-19
    • Peter RabkinHsingya Arthur WangKai-Cheng Chou
    • Peter RabkinHsingya Arthur WangKai-Cheng Chou
    • H01L29788
    • H01L27/11521H01L27/115
    • Non-volatile memory transistors are provided that include a floating gate formed from first and second layers of material such as polysilicon. The second floating gate layer is selectively grown or deposited on top of the first gate layer, eliminating the need to mask for positioning of the second floating gate layer. The memory transistors are separated by isolation regions. The second floating gate layer overlaps portions of the isolation regions to provide a high control gate-to-floating gate coupling ratio. The process enables smaller memory transistors. Floating gate to isolation overlap, and therefore floating gate to floating gate spacing, is controlled by selective deposition or selective epitaxial growth of the second polysilicon layer.
    • 提供了非易失性存储晶体管,其包括由第一和第二层材料(例如多晶硅)形成的浮置栅极。 第二浮栅层选择性地生长或沉积在第一栅极层的顶部上,消除了对第二浮栅层定位的掩模的需要。 存储晶体管由隔离区域分隔开。 第二浮栅层与隔离区域的一部分重叠以提供高控制栅 - 浮栅耦合比。 该过程使更小的存储晶体管。 浮栅为隔离重叠,因此浮栅为浮栅间隔,通过第二多晶硅层的选择性沉积或选择性外延生长来控制。
    • 9. 发明授权
    • Method of forming a silicon gate to produce silicon devices with
improved performance
    • 形成硅栅极以产生具有改进性能的硅器件的方法
    • US5981364A
    • 1999-11-09
    • US568195
    • 1995-12-06
    • Mark T. RamsbeyHsingya Arthur WangYu Sun
    • Mark T. RamsbeyHsingya Arthur WangYu Sun
    • H01L21/28H01L29/49
    • H01L21/28035H01L29/4925
    • Disclosed herein is a method of forming a silicon gate stack onto a silicon substrate for a silicon device. The method of forming the silicon gate stack comprises the steps of growing an oxide layer onto the silicon substrate, depositing a thin layer of silicon to form a thin layer of silicon over the oxide layer, depositing a thick layer of silicon over the thin layer of silicon, and introducing impurities into only the thick layer of silicon to form a silicon gate whereby the silicon gate includes the thin layer of silicon and the thick layer of silicon having the impurities. The impurities being introduced with a concentration, the impurities concentration and the thick layer thickness impeding an encroachment by the oxide layer into the silicon gate during application of a protective screen oxide layer around the silicon gate stack.
    • 本文公开了一种在硅器件的硅衬底上形成硅栅叠层的方法。 形成硅栅极堆叠的方法包括以下步骤:在硅衬底上生长氧化物层,沉积薄层的硅以在氧化物层上形成薄的硅层,在薄层上沉积厚的硅层 硅,并且将杂质引入仅硅的厚层中以形成硅栅极,由此硅栅极包括硅的薄层和具有杂质的厚的硅层。 引入浓度的杂质,杂质浓度和厚层厚度在施加硅栅堆叠周围的保护性屏蔽氧化物层时阻碍氧化层侵入硅栅中。