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1. 发明授权

US07019824B2 Moire method and measuring system for measuring the distortion of an optical imaging system 有权
标题翻译：用于测量光学成像系统失真的莫尔法和测量系统
公开(公告)号：US07019824B2
公开(公告)日：2006-03-28
申请号：US10935320
申请日：2004-09-08
申请人： Ulrich Wegmann , Uwe Schellhorn , Ralph Klaesges , Joachim Stuehler
发明人： Ulrich Wegmann , Uwe Schellhorn , Ralph Klaesges , Joachim Stuehler
IPC分类号： G01B9/00
CPC分类号： G03F7/706
摘要： In the case of a method and a measuring system for measuring the distortion of an optical imaging system with the aid of moiré patterns, an object grating with an object pattern is arranged in the object plane of the imaging system, and an image grating with an image pattern is arranged in the image plane of the imaging system. Both the object pattern and the image pattern in each case have a multiplicity of cells with sub-gratings of different grating properties, it being possible, in particular, for the sub-gratings to have different directions of periodicity and different phase angles. The object pattern and the image pattern are coordinated with one another in such a way that, when the object pattern is projected onto the image pattern with the aid of the imaging system, images of the sub-gratings of the object pattern superimpose in each case with assigned sub-gratings of the image pattern, accompanied by the generation of moiré sub-patterns, which are likewise present in the form of cells situated next to one another. As a result, it is possible simultaneously to determine distortion components for a plurality of image directions aligned transverse to one another. It is preferred to use phase-shift methods in order to evaluate the moiré sub-pattern.
摘要翻译：在用于通过莫尔图案测量光学成像系统的失真的方法和测量系统的情况下，具有对象图案的物体光栅被布置在成像系统的物平面中，并且具有图像图案被布置在成像系统的图像平面中。在每种情况下，对象图案和图像图案都具有具有不同光栅特性的子光栅的多个单元格，特别是对于子光栅具有不同的周期性方向和不同的相位角度是可能的。对象图案和图像图案彼此协调，使得当借助于成像系统将对象图案投影到图像图案上时，对象图案的子光栅的图像在每种情况下叠加具有分配的图像图案的子光栅，伴随着产生莫尔子图案，其同样以彼此相邻的单元格的形式存在。结果，可以同时确定用于彼此横向排列的多个图像方向的失真分量。优选使用相移方法来评估莫尔子图案。

2. 发明申请

US20050122506A1 Moire method and measuring system for measuring the distortion of an optical imaging system 有权
标题翻译：用于测量光学成像系统失真的莫尔法和测量系统
公开(公告)号：US20050122506A1
公开(公告)日：2005-06-09
申请号：US10935320
申请日：2004-09-08
申请人： Ulrich Wegmann , Uwe Schellhorn , Ralph Klaesges , Joachim Stuehler
发明人： Ulrich Wegmann , Uwe Schellhorn , Ralph Klaesges , Joachim Stuehler
IPC分类号： G01M11/02 , G01B11/14 , G01M11/00 , G03F7/20 , H01L21/027
CPC分类号： G03F7/706
摘要： In the case of a method and a measuring system for measuring the distortion of an optical imaging system with the aid of moiré patterns, an object grating with an object pattern is arranged in the object plane of the imaging system, and an image grating with an image pattern is arranged in the image plane of the imaging system. Both the object pattern and the image pattern in each case have a multiplicity of cells with sub-gratings of different grating properties, it being possible, in particular, for the sub-gratings to have different directions of periodicity and different phase angles. The object pattern and the image pattern are coordinated with one another in such a way that, when the object pattern is projected onto the image pattern with the aid of the imaging system, images of the sub-gratings of the object pattern superimpose in each case with assigned sub-gratings of the image pattern, accompanied by the generation of moiré sub-patterns, which are likewise present in the form of cells situated next to one another. As a result, it is possible simultaneously to determine distortion components for a plurality of image directions aligned transverse to one another. It is preferred to use phase-shift methods in order to evaluate the moiré sub-pattern.
摘要翻译：在用于通过莫尔图案测量光学成像系统的失真的方法和测量系统的情况下，具有对象图案的物体光栅被布置在成像系统的物平面中，并且具有图像图案被布置在成像系统的图像平面中。在每种情况下，对象图案和图像图案都具有具有不同光栅特性的子光栅的多个单元格，特别是对于子光栅具有不同的周期性方向和不同的相位角度是可能的。对象图案和图像图案彼此协调，使得当借助于成像系统将对象图案投影到图像图案上时，对象图案的子光栅的图像在每种情况下叠加具有分配的图像图案的子光栅，伴随着产生莫尔子图案，其同样以彼此相邻的单元格的形式存在。结果，可以同时确定用于彼此横向排列的多个图像方向的失真分量。优选使用相移方法来评估莫尔子图案。

3. 发明申请

US20050243328A1 Device and method for the optical measurement of an optical system, a container therefor, and a microlithography projection exposure machine 有权
标题翻译：用于光学系统的光学测量的装置和方法，其容器以及微光刻投影曝光机
公开(公告)号：US20050243328A1
公开(公告)日：2005-11-03
申请号：US11080525
申请日：2005-03-16
申请人： Ulrich Wegmann , Uwe Schellhorn , Joachim Stuehler , Helmut Haidner , Albrecht Ehrmann , Martin Schriever , Markus Gobppert
发明人： Ulrich Wegmann , Uwe Schellhorn , Joachim Stuehler , Helmut Haidner , Albrecht Ehrmann , Martin Schriever , Markus Gobppert
IPC分类号： G03F7/20 , G01B9/02
CPC分类号： G03F7/2041 , G03F7/70341 , G03F7/706
摘要： A device and a method for the optical measurement of an optical system (1), in particular an optical imaging system. The device includes one or more object-side test optics components (2a, 2b) arranged in front of the optical system to be measured, and/or one or more image-side test optics components (3, 4, 5) arranged behind the optical system to be measured. A container for use in such a device, a microlithography projection exposure machine equipped with such a device, and a method which can be carried out with the aid of this device are also disclosed. An immersion fluid is introduced adjacent to at least one of the one or more object-side test optics components and/or image-side test optics components. Such device and method provide for optical measurement by microlithography projection objectives of high numerical aperture using wavefront detection with shearing or point diffraction interferometry or a Moiré measuring technique.
摘要翻译：一种用于光学系统（1）的光学测量的装置和方法，特别是光学成像系统。该装置包括布置在待测量的光学系统前面的一个或多个物体侧测试光学部件（2a，2b）和/或一个或多个图像侧测试光学部件（3,4,5）在要测量的光学系统后面。还公开了一种用于这种装置的容器，配备有这种装置的微光刻投影曝光机以及可借助该装置进行的方法。相邻于一个或多个物体侧测试光学部件和/或图像侧测试光学部件中的至少一个被引入浸没流体。这种装置和方法通过使用具有剪切或点衍射干涉测量或莫尔测量技术的波前检测的高数值孔径的微光刻投影物镜提供光学测量。

4. 发明授权

US08120763B2 Device and method for the optical measurement of an optical system by using an immersion fluid 有权
标题翻译：通过使用浸液进行光学系统的光学测量的装置和方法
公开(公告)号：US08120763B2
公开(公告)日：2012-02-21
申请号：US12489639
申请日：2009-06-23
申请人： Ulrich Wegmann , Uwe Schellhorn , Joachim Stuehler , Albrecht Ehrmann , Martin Schriever , Markus Goeppert , Helmut Haidner
发明人： Ulrich Wegmann , Uwe Schellhorn , Joachim Stuehler , Albrecht Ehrmann , Martin Schriever , Markus Goeppert , Helmut Haidner
IPC分类号： G01B9/00 , G01B9/02 , G03B27/42
CPC分类号： G03F7/2041 , G03F7/70341 , G03F7/706
摘要： A device for the optical measurement of an optical system, in particular an optical imaging system, is provided. The device includes at least one test optics component arranged on an object side or an image side of the optical system. An immersion fluid is adjacent to at least one of the test optics components. A container for use in this device, a microlithography projection exposure machine equipped with this device, and a method which can be carried out with the aid of this device are also provided. The device and method provide for optical measurement of microlithography projection objectives with high numerical apertures by using wavefront detection with shearing or point diffraction interferometry, or a Moiré measuring technique.
摘要翻译：提供了一种用于光学系统，特别是光学成像系统的光学测量的装置。该装置包括布置在光学系统的物体侧或像侧上的至少一个测试光学部件。浸没流体与至少一个测试光学部件相邻。还提供了一种用于该装置的容器，配备有该装置的微光投影曝光机以及可借助该装置进行的方法。该装置和方法通过使用具有剪切或点衍射干涉测量的波前检测或莫尔测量技术来提供具有高数值孔径的微光刻投影物镜的光学测量。

5. 发明申请

US20090257049A1 DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM BY USING AN IMMERSION FLUID 有权
标题翻译：通过使用浸没液对光学系统进行光学测量的装置和方法
公开(公告)号：US20090257049A1
公开(公告)日：2009-10-15
申请号：US12489639
申请日：2009-06-23
申请人： Ulrich Wegmann , Uwe Schellhorn , Joachim Stuehler , Albrecht Ehrmann , Martin Schriever , Markus Goeppert , Helmut Haidner
发明人： Ulrich Wegmann , Uwe Schellhorn , Joachim Stuehler , Albrecht Ehrmann , Martin Schriever , Markus Goeppert , Helmut Haidner
IPC分类号： G01B9/00 , G03B27/80
CPC分类号： G03F7/2041 , G03F7/70341 , G03F7/706
摘要： A device for the optical measurement of an optical system, in particular an optical imaging system, is provided. The device includes at least one test optics component arranged on an object side or an image side of the optical system. An immersion fluid is adjacent to at least one of the test optics components. A container for use in this device, a microlithography projection exposure machine equipped with this device, and a method which can be carried out with the aid of this device are also provided. The device and method provide for optical measurement of microlithography projection objectives with high numerical apertures by using wavefront detection with shearing or point diffraction interferometry, or a Moiré measuring technique.
摘要翻译：提供了一种用于光学系统，特别是光学成像系统的光学测量的装置。该装置包括布置在光学系统的物体侧或像侧上的至少一个测试光学部件。浸没流体与至少一个测试光学部件相邻。还提供了一种用于该装置的容器，配备有该装置的微光投影曝光机以及可借助该装置进行的方法。该装置和方法通过使用具有剪切或点衍射干涉测量的波前检测或莫尔测量技术来提供具有高数值孔径的微光刻投影物镜的光学测量。

6. 发明申请

US20120113429A1 DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM BY USING AN IMMERSION FLUID 审中-公开
标题翻译：通过使用浸没液对光学系统进行光学测量的装置和方法
公开(公告)号：US20120113429A1
公开(公告)日：2012-05-10
申请号：US13351710
申请日：2012-01-17
申请人： Ulrich Wegmann , Uwe Schellhorn , Joachim Stuehler , Albrecht Ehrmann , Martin Schriever , Markus Goeppert , Helmut Haidner
发明人： Ulrich Wegmann , Uwe Schellhorn , Joachim Stuehler , Albrecht Ehrmann , Martin Schriever , Markus Goeppert , Helmut Haidner
IPC分类号： G01B9/02
CPC分类号： G03F7/2041 , G03F7/70341 , G03F7/706
摘要： A device for the optical measurement of an optical system, in particular an optical imaging system, is provided. The device includes at least one test optics component arranged on an object side or an image side of the optical system. An immersion fluid is adjacent to at least one of the test optics components. A container for use in this device, a microlithography projection exposure machine equipped with this device, and a method which can be carried out with the aid of this device are also provided. The device and method provide for optical measurement of microlithography projection objectives with high numerical apertures by using wavefront detection with shearing or point diffraction interferometry, or a Moiré measuring technique.
摘要翻译：提供了一种用于光学系统，特别是光学成像系统的光学测量的装置。该装置包括布置在光学系统的物体侧或像侧上的至少一个测试光学部件。浸没流体与至少一个测试光学部件相邻。还提供了一种用于该装置的容器，配备有该装置的微光投影曝光机以及可借助该装置进行的方法。该装置和方法通过使用具有剪切或点衍射干涉测量的波前检测或莫尔测量技术来提供具有高数值孔径的微光刻投影物镜的光学测量。

7. 发明申请

US20090021726A1 DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM BY USING AN IMMERSION FLUID 审中-公开
公开(公告)号：US20090021726A1
公开(公告)日：2009-01-22
申请号：US12147034
申请日：2008-06-26
申请人： Ulrich Wegmann , Uwe Schellhorn , Joachim Stuehler , Albrecht Ehrmann , Martin Schriever , Markus Goeppert , Helmut Haidner
发明人： Ulrich Wegmann , Uwe Schellhorn , Joachim Stuehler , Albrecht Ehrmann , Martin Schriever , Markus Goeppert , Helmut Haidner
IPC分类号： G01B9/00
CPC分类号： G03F7/2041 , G03F7/70341 , G03F7/706
摘要： A device for the optical measurement of an optical system, in particular an optical imaging system, is provided. The device includes at least one test optics component arranged on an object side or an image side of the optical system. An immersion fluid is adjacent to at least one of the test optics components. A container for use in this device, a microlithography projection exposure machine equipped with this device, and a method which can be carried out with the aid of this device are also provided. The device and method provide for optical measurement of microlithography projection objectives with high numerical apertures by using wavefront detection with shearing or point diffraction interferometry, or a Moiré measuring technique.

8. 发明授权

US07408652B2 Device and method for the optical measurement of an optical system by using an immersion fluid 有权
标题翻译：通过使用浸液进行光学系统的光学测量的装置和方法
公开(公告)号：US07408652B2
公开(公告)日：2008-08-05
申请号：US11080525
申请日：2005-03-16
申请人： Ulrich Wegmann , Uwe Schellhorn , Joachim Stuehler , Helmut Haidner , Albrecht Ehrmann , Martin Schriever , Markus Gobppert
发明人： Ulrich Wegmann , Uwe Schellhorn , Joachim Stuehler , Helmut Haidner , Albrecht Ehrmann , Martin Schriever , Markus Gobppert
IPC分类号： G01B9/02 , G02B27/40
CPC分类号： G03F7/2041 , G03F7/70341 , G03F7/706
摘要： A device for the optical measurement of an optical system, in particular an optical imaging system, is provided. The device includes at least one test optics component arranged on an object side or an image side of the optical system. An immersion fluid is adjacent to at least one of the test optics components. A container for use in this device, a microlithography projection exposure machine equipped with this device, and a method which can be carried out with the aid of this device are also provided. The device and method provide for optical measurement of microlithography projection objectives with high numerical apertures by using wavefront detection with shearing or point diffraction interferometry, or a Moiré measuring technique.
摘要翻译：提供了一种用于光学系统，特别是光学成像系统的光学测量的装置。该装置包括布置在光学系统的物体侧或像侧上的至少一个测试光学部件。浸没流体与至少一个测试光学部件相邻。还提供了一种用于该装置的容器，配备有该装置的微光投影曝光机以及可借助该装置进行的方法。该装置和方法通过使用具有剪切或点衍射干涉测量的波前检测或莫尔测量技术来提供具有高数值孔径的微光刻投影物镜的光学测量。

9. 发明授权

US06816247B1 Moiré method and a system for measuring the distortion of an optical imaging system 失效
标题翻译：莫尔方法和用于测量光学成像系统的失真的系统
公开(公告)号：US06816247B1
公开(公告)日：2004-11-09
申请号：US10217536
申请日：2002-08-14
申请人： Joachim Heppner , Juergen Massig , Michael Arnz , Michael Kuechel , Juergen Penzing , Uwe Schellhorn
发明人： Joachim Heppner , Juergen Massig , Michael Arnz , Michael Kuechel , Juergen Penzing , Uwe Schellhorn
IPC分类号： G01B900
CPC分类号： G03F7/706 , G01M11/0242 , G01M11/0264
摘要： In a moiré method for measuring the distortion of an optical imaging system in which and object grid having a two-dimensional object pattern is arranged in an object plane of the imaging system and an image grid having a two-dimensional image pattern is arranged in an image plane of the imaging system, these patterns are configured in the form of, for example cross-hatched patterns or checker board patterns, are adapted to suit one another such that a two-dimensional moiré fringe pattern that may be detected by a two-dimensional, spatially resolving, detection device is created when the object grid is imaged onto the image grid using the imaging system. Distortion components of the imaging system may be simultaneously determined along two differently oriented, in particular, two mutually orthogonal, image directions from a two-dimensional moiré fringe pattern.
摘要翻译：在用于测量光学成像系统的失真的莫尔方法中，其中具有二维对象图案的物体网格被布置在成像系统的物体平面中，并且具有二维图像图案的图像网格被布置在成像系统的图像平面，这些图案被配置为例如交叉阴影图案或棋盘图案的形式，适于彼此适应，使得可以由二维图案检测到的二维莫尔条纹图案，当使用成像系统将对象网格成像到图像网格上时，创建尺寸，空间分辨的检测装置。成像系统的失真分量可以沿着二维莫尔条纹图案沿两个不同方向，特别是两个相互正交的图像方向同时确定。

10. 发明申请

US20100097608A1 METHOD FOR DETERMINATION OF RESIDUAL ERRORS 有权
标题翻译：确定残差错误的方法
公开(公告)号：US20100097608A1
公开(公告)日：2010-04-22
申请号：US12513452
申请日：2007-10-23
申请人： Uwe Schellhorn , Matthias Manger
发明人： Uwe Schellhorn , Matthias Manger
IPC分类号： G01B11/00
CPC分类号： G03F7/70775 , G01B21/042 , G03F7/70516 , G03F7/706 , G03F7/70616 , G03F7/70725
摘要： There is provided a method for determining residual errors, compromising the following steps: in a first step, a test plate comprising a first pattern is used, and in a second step, a test plate comprising a second pattern which is reflected and/or rotated with respect to the first step is used.
摘要翻译：提供了一种用于确定残余误差的方法，损害了以下步骤：在第一步骤中，使用包括第一图案的测试板，并且在第二步骤中，测试板包括被反射和/或旋转的第二图案相对于第一步使用。

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