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1. 发明授权

US06819414B1 ABERRATION MEASURING APPARATUS, ABERRATION MEASURING METHOD, PROJECTION EXPOSURE APPARATUS HAVING THE SAME MEASURING APPARATUS, DEVICE MANUFACTURING METHOD USING THE SAME MEASURING METHOD, AND EXPOSURE METHOD 失效
标题翻译：测量装置，测量方法，具有相同测量装置的投影曝光装置，使用相同测量方法的装置制造方法和曝光方法
公开(公告)号：US06819414B1
公开(公告)日：2004-11-16
申请号：US09714183
申请日：2000-11-17
申请人： Hitoshi Takeuchi
发明人： Hitoshi Takeuchi
IPC分类号： G01B900
CPC分类号： G01M11/0264 , G03F7/70591 , G03F7/706
摘要： An aberration measuring apparatus has a converging lens L disposed on the light path of light beam to converge light beam traveling through a measurement target optical system PL on a predetermined surface IP, an aperture stop AP disposed on the light path of light beam to transmit a part of the light beams, a converging position detection unit DET disposed on the predetermined surface to detect a positional deviation of a converging position P of a part of the light beams traveling through the aperture stop on the predetermined surface IP, a moving unit M connected the aperture stop to move the aperture stop within the light beam, and an arithmetic processing unit connected the converging position detection unit to calculate an aberration of the measurement target optical system PL on the basis of an output signal from the converging position detection unit DET.
摘要翻译：像差测量装置具有设置在光束的光路上的会聚透镜L，以将在测量目标光学系统PL上行进的光束会聚在预定表面IP上，设置在光束的光路上的孔径光阑AP，部分光束，设置在预定表面上的会聚位置检测单元DET，以检测在预定表面IP上穿过孔径光阑传播的光束的一部分的会聚位置P的位置偏差;连接的移动单元M 孔径停止以使光束内的孔径光阑移动，并且算术处理单元连接会聚位置检测单元，以根据来自会聚位置检测单元DET的输出信号计算测量对象光学系统PL的像差。

2. 发明授权

US06816246B2 Method for measuring light transmittance and apparatus therefor 失效
标题翻译：测量透光率的方法及其设备
公开(公告)号：US06816246B2
公开(公告)日：2004-11-09
申请号：US10092442
申请日：2002-03-08
申请人： Hisanori Akiyama , Toshiro Yoda
发明人： Hisanori Akiyama , Toshiro Yoda
IPC分类号： G01B900
CPC分类号： G01M11/0285
摘要： The present invention provides an inexpensive and convenient method and apparatus for measuring light transmittance of an optical lens having refractive power. The method comprises obtaining the light transmittance of an examined lens from a value corresponding to a ratio between the intensity of measured light detected by a light detector when the examined lens is placed in the path of the measured light emitted from a light source and an intensity of measured light detected by the light detector when there is no lens undergoing examination placed in the path of the measured light so that the measured light does not pass through an examined lens and provides a baseline value. Specifically, the present invention focuses (converges) the measured light at or in a vicinity of a position where the examined lens is disposed when the examined lens is placed in the path of the measured light.
摘要翻译：本发明提供了一种用于测量具有屈光力的光学透镜的透光率的便宜且方便的方法和装置。所述方法包括：从被检查的透镜放置在从光源发射的测量光的路径中的光检测器检测到的测量光的强度与从光源发射的测量光的路径之间的比值对应的值时，当没有经过检查的镜片放置在测量光的路径中时，由光检测器检测到的测量光，使得测量的光不通过被检查的透镜并提供基线值。具体地说，本发明在被检查的透镜被放置在测量光的路径中时将测量的光聚焦（收敛）在被检查的透镜被放置的位置附近或附近。

3. 发明授权

US06788400B2 Method and apparatus for detecting aberrations in an optical system 有权
标题翻译：用于检测光学系统中的像差的方法和装置
公开(公告)号：US06788400B2
公开(公告)日：2004-09-07
申请号：US10001196
申请日：2001-12-04
申请人： J. Fung Chen
发明人： J. Fung Chen
IPC分类号： G01B900
CPC分类号： G03F7/706
摘要： A method of detecting aberrations associated with a projection lens utilized in an optical lithography system. The method includes the steps of forming a mask for transferring a lithographic pattern onto a substrate, forming a plurality of non-resolvable features disposed on the mask, where the plurality of non-resolvable features are arranged so as to form a predetermined pattern on the substrate, exposing the mask using an optical exposure tool so as to print the mask on the substrate, and analyzing the position of the predetermined pattern formed on the substrate and the position of the plurality of non-resolvable features disposed on the mask so as to determine if there is an aberration. If the position of the predetermined pattern formed on the substrate differs from an expected position, which is determined from the position of the plurality of non-resolvable features, this shift from the expected position indicates the presence of an aberration.
摘要翻译：一种检测与光学光刻系统中使用的投影透镜相关联的像差的方法。该方法包括以下步骤：形成用于将光刻图案转印到基板上的掩模，形成设置在掩模上的多个不可分辨特征，其中布置多个不可分辨特征以便在其上形成预定图案基板，使用光学曝光工具曝光掩模，以便在基板上印刷掩模，并且分析形成在基板上的预定图案的位置和设置在掩模上的多个不可分辨特征的位置，以便确定是否存在像差。如果形成在基板上的预定图案的位置与从多个不可分辨特征的位置确定的期望位置不同，则从预期位置的这种偏移表示存在像差。

4. 发明授权

US06753954B2 Method and apparatus for detecting aberrations in a projection lens utilized for projection optics 有权
标题翻译：用于检测用于投影光学器件的投影透镜中的像差的方法和装置
公开(公告)号：US06753954B2
公开(公告)日：2004-06-22
申请号：US09729695
申请日：2000-12-06
申请人： J. Fung Chen
发明人： J. Fung Chen
IPC分类号： G01B900
CPC分类号： G03F7/706
摘要： A method of detecting aberrations associated with a projection lens utilized in an optical lithography system. The method includes the steps of forming a mask for transferring a lithographic pattern onto a substrate, forming a plurality of non-resolvable features disposed on the mask, where the plurality of non-resolvable features are arranged so as to form a predetermined pattern on the substrate, exposing the mask using an optical exposure tool so as to print the mask on the substrate, and analyzing the position of the predetermined pattern formed on the substrate and the position of the plurality of non-resolvable features disposed on the mask so as to determine if there is an aberration. If the position of the predetermined pattern formed on the substrate differs from an expected position, which is determined from the position of the plurality of non-resolvable features, this shift from the expected position indicates the presence of an aberration.
摘要翻译：一种检测与光学光刻系统中使用的投影透镜相关联的像差的方法。该方法包括以下步骤：形成用于将光刻图案转印到基板上的掩模，形成设置在掩模上的多个不可分辨特征，其中布置多个不可分辨特征以便在其上形成预定图案基板，使用光学曝光工具曝光掩模，以便在基板上印刷掩模，并且分析形成在基板上的预定图案的位置和设置在掩模上的多个不可分辨特征的位置，以便确定是否存在像差。如果形成在基板上的预定图案的位置与从多个不可分辨特征的位置确定的期望位置不同，则从预期位置的这种偏移表示存在像差。

5. 发明授权

US06636299B1 Intraocular lens inspection method 有权
标题翻译：人工晶状体检查方法
公开(公告)号：US06636299B1
公开(公告)日：2003-10-21
申请号：US10123668
申请日：2002-04-16
申请人： Akira Miyata
发明人： Akira Miyata
IPC分类号： G01B900
CPC分类号： A61F9/00 , A61F2/16
摘要： An intraocular lens inspection method including: a process of extracting an intraocular lens for inspection for selecting an intraocular lens; this lens is next, in high temperature liquid immersion process, immersed in physiological saline and kept for a specific amount of time at high temperature that would not deteriorate the lens; then in low-temperature liquid immersion process, the lens is removed and transferred to physiological saline kept at low temperature, which is approximately the temperature when clinically used, and the lens is observed macroscopically; and then in inspection process the lens is put in a chamber kept at the same low temperature, its surface is washed and observed by a microscope, and after observation, the lens is returned to its original state, and when the changes are observed over time and consistent glistenings are detected with each observation, it is judged that clinically analogous glistenings will develop.
摘要翻译：一种眼内透镜检查方法，包括：提取用于检查的眼内透镜以选择眼内透镜的过程; 该镜片接下来在高温液浸工艺中浸入生理盐水中，并在高温下保持一定时间，不会使透镜变质; 然后在低温液体浸渍过程中，将镜片取出并转移到保持在低温下的生理盐水，即临床使用时的温度近似，并观察眼镜; 然后在检查过程中，将镜片放入保持在相同低温下的室内，其表面用显微镜进行洗涤和观察，观察后透镜返回到原始状态，并且当随时间观察到变化时并且每次观察发现一致的闪光，则判断出临床上类似的闪光发展。

6. 发明授权

US06563573B1 Method of evaluating imaging performance 有权
标题翻译：成像性能评估方法
公开(公告)号：US06563573B1
公开(公告)日：2003-05-13
申请号：US09394416
申请日：1999-09-13
申请人： Hiroshi Morohoshi , Hideki Ina
发明人： Hiroshi Morohoshi , Hideki Ina
IPC分类号： G01B900
CPC分类号： G03F9/7026 , G03F7/706 , G03F7/70616 , G03F9/7088
摘要： A method of evaluating an imaging performance of an imaging optical system includes providing a member having a measurement mark with a predetermined surface level difference, illuminating the member having the measurement mark through the imaging optical system, and receiving reflection light from the illuminated measurement mark again through the imaging optical system. A detection signal is produced based on the measurement mark, illuminated through the imaging optical system, wherein the detection signal is produced while changing a focus within a depth of focus of the imaging optical system. A positional deviation is measured on the basis of the detection signal, and the imaging performance is evaluated of the imaging optical system on the basis of a change in a measured value of the positional deviation measurement with respect to a change in the focus.
摘要翻译：评估成像光学系统的成像性能的方法包括提供具有预定表面水平差的测量标记的部件，通过成像光学系统照亮具有测量标记的部件，并再次接收来自照亮测量标记的反射光通过影像光学系统。基于通过成像光学系统照射的测量标记产生检测信号，其中在改变成像光学系统的焦深的焦点的同时产生检测信号。基于检测信号测量位置偏差，并且基于相对于焦点变化的位置偏差测量的测量值的变化来评估成像光学系统的成像性能。

7. 发明授权

US06271914B1 Objective measurement and correction of optical systems using wavefront analysis 有权
公开(公告)号：US06271914B1
公开(公告)日：2001-08-07
申请号：US09662083
申请日：2000-09-14
申请人： Rudolph W. Frey , James H. Burkhalter , Neil Zepkin , Edward Poppeliers , John A. Campin
发明人： Rudolph W. Frey , James H. Burkhalter , Neil Zepkin , Edward Poppeliers , John A. Campin
IPC分类号： G01B900
CPC分类号： A61B3/107 , A61B3/1015 , A61F9/00806 , A61F2009/00846 , A61F2009/00848 , A61F2009/00872 , A61F2009/0088
摘要： Vision in an eye is corrected using an energy source for generating a beam of optical radiation and focusing optics disposed in the path of the beam for directing the beam through the eye, where the beam is reflected back from the retina of the eye as a wavefront of radiation to be measured. An optical correction based on an optical path difference between the measured wavefront and a desired plane wave, and refractive indices of the media through which the wavefront passes is provided to a laser delivery system with a laser beam sufficient for ablating corneal material from the cornea of the eye. The laser beam is directed at selected locations on the cornea for ablating the corneal material in response to the optical correction to cause the measured wavefront to approximate the desired plane wave, and thus provide an optical correction.

8. 发明授权

US06201600B1 Method and apparatus for the automatic inspection of optically transmissive objects having a lens portion 失效
标题翻译：用于自动检查具有透镜部分的透光物体的方法和装置
公开(公告)号：US06201600B1
公开(公告)日：2001-03-13
申请号：US08995081
申请日：1997-12-19
申请人： Peter Winston Sites , Anthony Scott Nelms , Bernard A. Roche
发明人： Peter Winston Sites , Anthony Scott Nelms , Bernard A. Roche
IPC分类号： G01B900
CPC分类号： G01M11/0264 , G01M11/0278
摘要： A system for inspecting intraocular lenses which utilizes a light source and an electronic camera for obtaining images of the lens under test. A series of masks is utilized during the obtaining of the images and includes a bright field mask which allows the transmission of light through the lens, a dark field mask which blocks a portion of the light which would normally pass through the lens and a transition mask which is constituted by fine stripes. A signal processor analyzes the images obtained utilizing the masks and provides an indication of predetermined defects in the lens.
摘要翻译：一种用于检查利用光源的人工晶状体和用于获得被测镜片的图像的电子照相机的系统。在获得图像期间使用一系列掩模，并且包括允许透射透镜的光的明场掩模，阻挡通常透过透镜的光的一部分的暗场掩模和过渡掩模它由细条纹构成。信号处理器分析利用掩模获得的图像并提供镜片中预定缺陷的指示。

9. 发明授权

US06816247B1 Moiré method and a system for measuring the distortion of an optical imaging system 失效
标题翻译：莫尔方法和用于测量光学成像系统的失真的系统
公开(公告)号：US06816247B1
公开(公告)日：2004-11-09
申请号：US10217536
申请日：2002-08-14
申请人： Joachim Heppner , Juergen Massig , Michael Arnz , Michael Kuechel , Juergen Penzing , Uwe Schellhorn
发明人： Joachim Heppner , Juergen Massig , Michael Arnz , Michael Kuechel , Juergen Penzing , Uwe Schellhorn
IPC分类号： G01B900
CPC分类号： G03F7/706 , G01M11/0242 , G01M11/0264
摘要： In a moiré method for measuring the distortion of an optical imaging system in which and object grid having a two-dimensional object pattern is arranged in an object plane of the imaging system and an image grid having a two-dimensional image pattern is arranged in an image plane of the imaging system, these patterns are configured in the form of, for example cross-hatched patterns or checker board patterns, are adapted to suit one another such that a two-dimensional moiré fringe pattern that may be detected by a two-dimensional, spatially resolving, detection device is created when the object grid is imaged onto the image grid using the imaging system. Distortion components of the imaging system may be simultaneously determined along two differently oriented, in particular, two mutually orthogonal, image directions from a two-dimensional moiré fringe pattern.
摘要翻译：在用于测量光学成像系统的失真的莫尔方法中，其中具有二维对象图案的物体网格被布置在成像系统的物体平面中，并且具有二维图像图案的图像网格被布置在成像系统的图像平面，这些图案被配置为例如交叉阴影图案或棋盘图案的形式，适于彼此适应，使得可以由二维图案检测到的二维莫尔条纹图案，当使用成像系统将对象网格成像到图像网格上时，创建尺寸，空间分辨的检测装置。成像系统的失真分量可以沿着二维莫尔条纹图案沿两个不同方向，特别是两个相互正交的图像方向同时确定。

10. 发明授权

US06671039B2 Spectacle lens image sensing processing apparatus and spectacle lens positioning method 有权
标题翻译：眼镜镜片感光处理装置及眼镜镜片定位方法
公开(公告)号：US06671039B2
公开(公告)日：2003-12-30
申请号：US09888284
申请日：2001-06-21
申请人： Toshiro Yoda , Norihisa Tanaka , Masahiko Samukawa
发明人： Toshiro Yoda , Norihisa Tanaka , Masahiko Samukawa
IPC分类号： G01B900
CPC分类号： G01M11/0214 , G01M11/0207
摘要： A spectacle lens image sensing processing apparatus irradiates the convex surface of a lens to be examined with light from a light source, projects an image of the convex surface onto a reflection screen placed on the concave surface side of the lens. The apparatus senses the image of the convex surface, projected on the reflection screen, by using an image sensing unit, and performs image processing for the image of the convex surface sensed by the image sensing unit by using an image processing unit, thereby detecting optical characteristics of the lens. The image sensing unit is placed together with the light source on the convex surface side of the lens. The image of the convex surface of the lens is reflected by the reflection screen to return to the convex surface side of the lens, thereby forming the image on the image sensing unit. A spectacle lens positioning method is also disclosed.
摘要翻译：眼镜镜片摄像处理装置利用来自光源的光照射被检查镜片的凸面，将凸面的图像投影到放置在镜片的凹面侧的反射屏幕上。该装置通过使用图像感测单元来感测投射在反射屏幕上的凸面的图像，并且通过使用图像处理单元对由图像感测单元感测的凸面的图像执行图像处理，从而检测光学镜头的特点图像感测单元与光源一起放置在透镜的凸表面侧上。透镜的凸面的图像被反射屏幕反射回到透镜的凸面侧，从而在图像感测单元上形成图像。还公开了一种眼镜透镜定位方法。

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