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1. 发明授权

US06816247B1 Moiré method and a system for measuring the distortion of an optical imaging system 失效
标题翻译：莫尔方法和用于测量光学成像系统的失真的系统
公开(公告)号：US06816247B1
公开(公告)日：2004-11-09
申请号：US10217536
申请日：2002-08-14
申请人： Joachim Heppner , Juergen Massig , Michael Arnz , Michael Kuechel , Juergen Penzing , Uwe Schellhorn
发明人： Joachim Heppner , Juergen Massig , Michael Arnz , Michael Kuechel , Juergen Penzing , Uwe Schellhorn
IPC分类号： G01B900
CPC分类号： G03F7/706 , G01M11/0242 , G01M11/0264
摘要： In a moiré method for measuring the distortion of an optical imaging system in which and object grid having a two-dimensional object pattern is arranged in an object plane of the imaging system and an image grid having a two-dimensional image pattern is arranged in an image plane of the imaging system, these patterns are configured in the form of, for example cross-hatched patterns or checker board patterns, are adapted to suit one another such that a two-dimensional moiré fringe pattern that may be detected by a two-dimensional, spatially resolving, detection device is created when the object grid is imaged onto the image grid using the imaging system. Distortion components of the imaging system may be simultaneously determined along two differently oriented, in particular, two mutually orthogonal, image directions from a two-dimensional moiré fringe pattern.
摘要翻译：在用于测量光学成像系统的失真的莫尔方法中，其中具有二维对象图案的物体网格被布置在成像系统的物体平面中，并且具有二维图像图案的图像网格被布置在成像系统的图像平面，这些图案被配置为例如交叉阴影图案或棋盘图案的形式，适于彼此适应，使得可以由二维图案检测到的二维莫尔条纹图案，当使用成像系统将对象网格成像到图像网格上时，创建尺寸，空间分辨的检测装置。成像系统的失真分量可以沿着二维莫尔条纹图案沿两个不同方向，特别是两个相互正交的图像方向同时确定。

2. 发明申请

US20130063730A1 IN SITU CALIBRATION OF INTERFEROMETERS 有权
公开(公告)号：US20130063730A1
公开(公告)日：2013-03-14
申请号：US13608848
申请日：2012-09-10
申请人： Daniel M. Sykora , Michael Kuechel
发明人： Daniel M. Sykora , Michael Kuechel
IPC分类号： G01B9/02 , G01B11/24
CPC分类号： G01B9/02072 , G01B9/0201 , G01B9/02032 , G01B9/02057 , G01B9/02068 , G01B11/2441
摘要： In-situ calibration of an interferometer includes making a sequence of phase measurements of a test object using the interferometer, each of the measurements having a same carrier fringe frequency, where at least some of the measurements are made at three or more different orientations of carrier fringes, and determining information about the test object based on at least some of the phase measurements, in which determining the information includes reducing errors in the measurements arising from imperfections in the interferometer based on the measurements made at the three or more different orientations.

3. 发明授权

US06876453B2 Metrology system for precision 3D motion 失效
标题翻译：精密3D运动计量系统
公开(公告)号：US06876453B2
公开(公告)日：2005-04-05
申请号：US10454285
申请日：2003-06-04
申请人： Matthew Van Doren , Michael Kuechel , Christopher James Evans
发明人： Matthew Van Doren , Michael Kuechel , Christopher James Evans
IPC分类号： G01B9/02 , G01B11/00 , G01B11/02
CPC分类号： G01B9/02027 , G01B9/02021 , G01B2290/15
摘要： The instant invention is a method and apparatus for the measurement, with low uncertainty, of the six degrees of freedom of a first structure relative to a second structure. The apparatus is comprised of compact, rigid, thermally stable structures. The invention uses linear displacement transducers which have no active pointing to maintain a desired orientation of the linear displacement transducers with other parts of the measurement system.
摘要翻译：本发明是用于相对于第二结构测量第一结构的六个自由度的具有低不确定性的方法和装置。该设备由紧凑，刚性，热稳定的结构组成。本发明使用没有主动指向的线性位移传感器来维持线性位移传感器与测量系统的其它部分的期望取向。

4. 发明授权

US06804011B2 Apparatus and method(s) for reducing the effects of coherent artifacts in an interferometer 有权
标题翻译：用于减少干涉仪中相干伪像的影响的装置和方法
公开(公告)号：US06804011B2
公开(公告)日：2004-10-12
申请号：US10053741
申请日：2002-01-22
申请人： Michael Kuechel
发明人： Michael Kuechel
IPC分类号： G01B902
CPC分类号： G01B9/02059 , G01B9/02034 , G01B9/02057 , G01J9/02
摘要： Interferometric apparatus and methods for reducing the effects of coherent artifacts in interferometers. Fringe contrast in interferograms is preserved while coherent artifacts that would otherwise be present in the interferogram because of coherent superposition of unwanted radiation generated in the interferometer are suppressed. Use is made of illumination and interferogrammetric imaging architectures that generate individual interferograms of the selected characteristics of a test surface from the perspective of different off-axis locations of illumination in an interferometer and then combine them to preserve fringe contrast while at the same time arranging for artifacts to exist at different field locations so that their contribution in the combined interferogram is diluted.
摘要翻译：用于减少干涉仪中相干伪像的影响的干涉仪和方法。保留了干涉图中的边缘对比度，同时由于在干涉仪中产生的不期望的辐射的相干叠加而干涉图中存在的相干伪影被抑制。使用照明和干涉测量成像架构，其从干涉仪中的照明的不同离轴位置的角度产生测试表面的所选特征的单独干涉图，然后将它们组合以保留条纹对比度，同时安排人造物存在于不同的场地，使得它们在组合干涉图中的贡献被稀释。

5. 发明授权

US09103649B2 In situ calibration of interferometers 有权
标题翻译：干涉仪原位校准
公开(公告)号：US09103649B2
公开(公告)日：2015-08-11
申请号：US13608848
申请日：2012-09-10
申请人： Daniel M. Sykora , Michael Kuechel
发明人： Daniel M. Sykora , Michael Kuechel
IPC分类号： G01B11/02 , G01B9/02 , G01B11/24
CPC分类号： G01B9/02072 , G01B9/0201 , G01B9/02032 , G01B9/02057 , G01B9/02068 , G01B11/2441
摘要： In-situ calibration of an interferometer includes making a sequence of phase measurements of a test object using the interferometer, each of the measurements having a same carrier fringe frequency, where at least some of the measurements are made at three or more different orientations of carrier fringes, and determining information about the test object based on at least some of the phase measurements, in which determining the information includes reducing errors in the measurements arising from imperfections in the interferometer based on the measurements made at the three or more different orientations.
摘要翻译：干涉仪的原位校准包括使用干涉仪进行测试对象的相位测量序列，每个测量具有相同的载体边缘频率，其中至少一些测量在载体的三个或更多个不同取向上进行并且基于至少一些相位测量来确定关于测试对象的信息，其中确定信息包括基于在三个或更多个不同取向进行的测量来减少由干涉仪中的缺陷引起的测量中的误差。

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