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    • 2. 发明申请
    • Vacuum exhaust apparatus and drive method of vacuum exhaust apparatus
    • 真空排气装置及真空排气装置的驱动方法
    • US20080145238A1
    • 2008-06-19
    • US12070265
    • 2008-02-15
    • Kouji ShibayamaYuuichi YamashitaMitsuru YahagiTakahiko TashimaJunichi AikawaTomonari TanakaYukio KankeYuuji Fukaura
    • Kouji ShibayamaYuuichi YamashitaMitsuru YahagiTakahiko TashimaJunichi AikawaTomonari TanakaYukio KankeYuuji Fukaura
    • F04B49/00F01C1/24F04C2/24
    • F04C23/001F04C2220/12F16K15/042
    • Pairs of rotors (R1, R2, R3, R4, R5 and R6) driven rotationally by a motor (22) are disposed in the body (21) of a main pump (20) comprising a multistage Roots dry vacuum pump. A suction opening (23) communicating with the rotor chamber of the rotor R1 is provided in the upper wall portion at the left end of the body (21). A delivery section (24) communicating with the delivery side of the rotor chamber of rotor R6 on the final stage is coupled to an exhaust pipe (25) and is provided with a silencer (26) and further coupled to a check valve (28) through a pipe (27). The check valve (28) has its forward direction toward the atmospheric side. The delivery section (24), or a delivery section (24′) at the side intermediate stage, is coupled to an auxiliary pump (30) having an exhaust capacity smaller than that of the main pump (20). When the motor (22) is driven, gas exhausted through rotation of the rotors (R1-R6) is carried sequentially to the downstream side from the rotor chambers and a vacuum processing chamber coupled to the suction opening (23) is exhausted. The delivery section (24) on the final stage is exhausted by driving the auxiliary pump (30), and the pressure is reduced. Consequently, the burden of the exhaust action on the rotor (R6) on the final stage or the rotor (R5) on the intermediate stage is lessened, and the power consumption of the motor (22) can be reduced significantly as compared with the prior art.
    • 成对的转子(R 1,R 2,R 2,R 3,R 4,R 5, 由主电动机22旋转地驱动的电动机和/或副电动机)设置在包括多级罗茨干式真空泵的主泵(20)的主体(21)中。 在主体(21)的左端部的上壁部设置有与转子R 1 1的转子室连通的吸入口(23)。 与最终级上的转子R 6C的转子室的输送侧连通的输送部分(24)联接到排气管(25),并且设置有消声器(26),并且进一步 通过管道(27)联接到止回阀(28)。 止回阀(28)具有朝向大气侧的向前方向。 输送部分(24)或侧中间段的输送部分(24')联接到排气容量小于主泵(20)的排放能力的辅助泵(30)。 当电动机(22)被驱动时,通过转子(R SUB1〜6S)的旋转排出的气体顺序地从转子室输送到下游侧,并且 联接到吸入口(23)的真空处理室被排出。 通过驱动辅助泵(30)将最终级上的输送部分(24)排出,压力降低。 因此,中间级上的末级或转子(R 5 S 5)上的转子(R 6 S)的排气作用的负担减轻,并且功率 与现有技术相比,马达(22)的消耗可以显着降低。
    • 5. 发明申请
    • Stage apparatus
    • 舞台装置
    • US20090173278A1
    • 2009-07-09
    • US11989670
    • 2007-02-23
    • Yasuzou TanakaJunpei YuyamaMitsuru YahagiHirofumi Minami
    • Yasuzou TanakaJunpei YuyamaMitsuru YahagiHirofumi Minami
    • B05C13/00
    • H01L21/682G03F7/70716G03F7/70791G03F7/70975
    • To obtain a stage apparatus that can be divided for land transportation and can properly treat a substrate to be treated, the present invention provides a stage apparatus including a substrate holding plane which holds a substrate to be treated W, a pair of guide frames (13X) oppositely disposed with the substrate holding plane sandwiched therebetween, a gantry (13Y) which extends over the pair of guide frames (13X) and which is movably held by the pair of guide frames (13X), and a substrate treatment unit (14) which is disposed on the gantry (13Y). The guide frames (13X) each are composed of a connected structure of a main frame portion (15A) which forms a moving path (work region R1) of the gantry (13Y) necessary for the substrate treatment unit (14) to perform a substrate treatment, and a sub frame portion (15B) which is connected to one end portion or both end portions in a longitudinal direction of the main frame portion (15A) and which forms a moving path to a non-work position (non-work region R2) of the gantry (13Y).
    • 为了获得可以分割用于陆路运输并且可以适当地处理待处理的基板的台架装置,本发明提供了一种台架装置,其包括保持要处理的基板W的基板保持平面,一对引导框架(13X ),所述台架(13Y)在所述一对引导框架(13X)上延伸并且被所述一对引导框架(13X)可移动地保持;以及基板处理单元, 其设置在台架(13Y)上。 引导框架(13X)各自由形成基板处理单元(14)所需的台架(13Y)的移动路径(工作区域R1)的主框架部分(15A)的连接结构构成,以执行基板 处理,以及子框架部分(15B),其连接到主框架部分(15A)的纵向方向上的一个端部或两个端部,并且形成到非工作位置的移动路径(非工作区域 R2)(13Y)。
    • 8. 发明申请
    • PRINT HEAD, PRINTER
    • 打印头,打印机
    • US20110211026A1
    • 2011-09-01
    • US13085760
    • 2011-04-13
    • Takahiro MiyataMasao MurataSatoshi ShibaMitsuru YahagiJyunpei Yuyama
    • Takahiro MiyataMasao MurataSatoshi ShibaMitsuru YahagiJyunpei Yuyama
    • B41J2/045
    • B41J2/14274B41J2/055B41J2002/14403B41J2002/14419B41J2202/09H01L51/0005
    • Vibration is prevented from being transmitted via a common ink chamber or a fixed substrate. A porous member is disposed between the common ink chamber and a pressure generation chamber so that a discharge liquid passes through the interior of the porous member to move from the common ink chamber to the pressure generation chamber. Vibration generated in one pressure generation chamber is attenuated through the porous member when the vibration is transmitted to another pressure generation chamber via the common ink chamber; and thus, no cross-talk is generated. Furthermore, when piezoelectric vibrators having different lengths are mounted on the same fixed substrate and have the resonance frequencies different from each other, vibration is not transmitted to another pressure generation chamber via the fixed substrate and the piezoelectric vibrator; and therefore, the cross-talk is much less likely to be generated.
    • 防止振动通过公共墨水室或固定基板传输。 多孔构件设置在公共墨室和压力产生室之间,使得排出液体通过多孔构件的内部,以从共用墨室移动到压力产生室。 当振动通过公共墨水室传递到另一个压力产生室时,在一个压力产生室中产生的振动通过多孔构件衰减; 因此不产生串扰。 此外,当具有不同长度的压电振动器安装在相同的固定基板上并且谐振频率彼此不同时,振动不会经由固定基板和压电振动器传递到另一个压力产生室; 因此,串扰不太可能产生。
    • 10. 发明授权
    • Rotational adjustment apparatus for inkjet coating head
    • 喷墨涂装头旋转调节装置
    • US08348384B2
    • 2013-01-08
    • US13055196
    • 2010-03-04
    • Seiichi SatoMitsuru Yahagi
    • Seiichi SatoMitsuru Yahagi
    • B41J23/00
    • B41J29/38B41J25/003
    • There is provided a small-sized and inexpensive rotational adjustment apparatus for a linearly moveable inkjet coating head 6 without providing a rotary mechanism which is separate from and independent of a linear movement mechanism. The apparatus is capable of performing a rotational adjustment, about a rotary axis in a Z-axis direction, of the inkjet coating head in which the Z-axis direction is orthogonal to an X-axis direction which is a direction of movement of the coating head. The apparatus has: first and second moveable bodies, two in total, which are linearly moved by separate driving sources in the X-axis direction; and a converting mechanism which converts the inkjet coating head into a linear movement in the X-axis direction when the first and second moveable bodies synchronously move in the X-axis direction, and into a rotary movement, about the rotary axis of the inkjet coating head, when both the first and the second moveable bodies make a relative movement in the X-axis direction.
    • 提供了一种用于可直线移动的喷墨涂覆头6的小型和便宜的旋转调节装置,而不提供与线性运动机构分离并独立于其的旋转机构。 该装置能够沿着Z轴方向与作为涂层的移动方向的X轴方向正交的喷墨涂布头进行围绕Z轴方向的旋转轴的旋转调整 头。 该装置具有:第一和第二可移动体,总共两个,它们在X轴方向上由单独的驱动源线性移动; 以及转换机构,当第一和第二可移动体在X轴方向上同步移动时,将喷墨涂布头在X轴方向上转换成线性运动,并且围绕喷墨涂层的旋转轴旋转运动 当第一和第二可移动体都在X轴方向上相对移动时,头部。