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    • 1. 发明申请
    • COUPLING STRUCTURE FOR VACUUM EXHAUST DEVICE AND VACUUM EXHAUST SYSTEM
    • 真空排气装置联合结构和真空排气系统
    • US20130280062A1
    • 2013-10-24
    • US13988219
    • 2011-11-16
    • Toshio SuzukiTomonari TanakaKouji ShibayamaMasatomo Okamoto
    • Toshio SuzukiTomonari TanakaKouji ShibayamaMasatomo Okamoto
    • F01D25/24
    • F01D25/24F01C1/084F01C1/126F01C21/007F01C21/10F04C2/084F04C2/126F04C11/001F04C18/126F04C23/00F04C23/001F04C25/02
    • Provided is a coupling structure for vacuum exhaust devices each including a pump chamber and a casing that demarcates the pump chamber. The coupling structure includes a first end surface formed on a first side of the casing, and a second end surface formed on the second side of the casing, the second side being the opposite side of the first side. The casing of a first vacuum exhaust device and the casing of a second vacuum exhaust device among a plurality of vacuum exhaust devices are arranged to be directly superposed on each other such that the first end surface provided to the first vacuum exhaust device and the second end surface provided to the second vacuum exhaust device come into contact with each other. By fastening the first end surface and the second end surface, the first vacuum exhaust device and the second vacuum exhaust device are connected to each other such that gas can flow between the casing of the first vacuum exhaust device and the casing of the second vacuum exhaust device.
    • 提供了一种用于真空排气装置的联接结构,每个包括泵室和限定泵室的壳体。 联接结构包括形成在壳体的第一侧上的第一端面和形成在壳体的第二侧上的第二端面,第二侧与第一侧相反。 第一真空排气装置的壳体和多个真空排气装置中的第二真空排气装置的壳体被布置成彼此直接叠置,使得提供给第一真空排气装置的第一端面和第二端部 提供给第二真空排气装置的表面彼此接触。 通过紧固第一端面和第二端面,第一真空排气装置和第二真空排气装置彼此连接,使得气体可以在第一真空排气装置的壳体和第二真空排气装置的壳体之间流动 设备。
    • 3. 发明申请
    • GATE VALVE
    • 闸阀
    • US20120161055A1
    • 2012-06-28
    • US13393804
    • 2010-09-03
    • Kyuzo NakamuraKouji ShibayamaShinichi WadaSeiya Sakoda
    • Kyuzo NakamuraKouji ShibayamaShinichi WadaSeiya Sakoda
    • F16K3/30
    • F16K3/10F16K1/2085F16K3/188
    • A gate valve includes: a valve box; a support body disposed inside a hollow portion; a valve plate including a fixed valving section, a movable valving section sliding in a direction in which a flow passage is extended, a first peripheral region; and a second peripheral region; a first biasing section disposed at the first peripheral region, allowing the movable valving section to move toward a first opening portion, allowing the movable valving section to come into contact with an inner surface, pressing the movable valving section onto the inner surface, and closing the flow passage; and a second biasing section disposed at the second peripheral region, allowing the movable valving section to move toward a second opening portion, and releasing the flow passage by separating the movable valving section from the inner surface.
    • 闸阀包括:阀箱; 设置在中空部内的支撑体; 阀板,包括固定阀部分,沿流动通道延伸的方向滑动的可动阀部分,第一周边区域; 和第二周边区域; 第一偏压部,设置在第一周边区域,允许可动阀部朝向第一开口部移动,允许可动阀部与内表面接触,将可动阀部压入内表面,闭合 流路; 以及第二偏压部,其设置在所述第二周边区域,允许所述可动阀部朝向第二开口部移动,并且通过将所述可动阀部从所述内表面分离来释放所述流路。
    • 5. 发明授权
    • Gate valve
    • 闸阀
    • US08733734B2
    • 2014-05-27
    • US13393804
    • 2010-09-03
    • Kyuzo NakamuraKouji ShibayamaShinichi WadaSeiya Sakoda
    • Kyuzo NakamuraKouji ShibayamaShinichi WadaSeiya Sakoda
    • F16K25/00
    • F16K3/10F16K1/2085F16K3/188
    • A gate valve includes: a valve box; a support body disposed inside a hollow portion; a valve plate including a fixed valving section, a movable valving section sliding in a direction in which a flow passage is extended, a first peripheral region; and a second peripheral region; a first biasing section disposed at the first peripheral region, allowing the movable valving section to move toward a first opening portion, allowing the movable valving section to come into contact with an inner surface, pressing the movable valving section onto the inner surface, and closing the flow passage; and a second biasing section disposed at the second peripheral region, allowing the movable valving section to move toward a second opening portion, and releasing the flow passage by separating the movable valving section from the inner surface.
    • 闸阀包括:阀箱; 设置在中空部内的支撑体; 阀板,包括固定阀部分,沿流动通道延伸的方向滑动的可动阀部分,第一周边区域; 和第二周边区域; 第一偏压部,设置在第一周边区域,允许可动阀部朝向第一开口部移动,允许可动阀部与内表面接触,将可动阀部压入内表面,闭合 流路; 以及第二偏压部,其设置在所述第二周边区域,允许所述可动阀部朝向第二开口部移动,并且通过将所述可动阀部从所述内表面分离来释放所述流路。
    • 6. 发明申请
    • Vacuum exhaust apparatus and drive method of vacuum exhaust apparatus
    • 真空排气装置及真空排气装置的驱动方法
    • US20080145238A1
    • 2008-06-19
    • US12070265
    • 2008-02-15
    • Kouji ShibayamaYuuichi YamashitaMitsuru YahagiTakahiko TashimaJunichi AikawaTomonari TanakaYukio KankeYuuji Fukaura
    • Kouji ShibayamaYuuichi YamashitaMitsuru YahagiTakahiko TashimaJunichi AikawaTomonari TanakaYukio KankeYuuji Fukaura
    • F04B49/00F01C1/24F04C2/24
    • F04C23/001F04C2220/12F16K15/042
    • Pairs of rotors (R1, R2, R3, R4, R5 and R6) driven rotationally by a motor (22) are disposed in the body (21) of a main pump (20) comprising a multistage Roots dry vacuum pump. A suction opening (23) communicating with the rotor chamber of the rotor R1 is provided in the upper wall portion at the left end of the body (21). A delivery section (24) communicating with the delivery side of the rotor chamber of rotor R6 on the final stage is coupled to an exhaust pipe (25) and is provided with a silencer (26) and further coupled to a check valve (28) through a pipe (27). The check valve (28) has its forward direction toward the atmospheric side. The delivery section (24), or a delivery section (24′) at the side intermediate stage, is coupled to an auxiliary pump (30) having an exhaust capacity smaller than that of the main pump (20). When the motor (22) is driven, gas exhausted through rotation of the rotors (R1-R6) is carried sequentially to the downstream side from the rotor chambers and a vacuum processing chamber coupled to the suction opening (23) is exhausted. The delivery section (24) on the final stage is exhausted by driving the auxiliary pump (30), and the pressure is reduced. Consequently, the burden of the exhaust action on the rotor (R6) on the final stage or the rotor (R5) on the intermediate stage is lessened, and the power consumption of the motor (22) can be reduced significantly as compared with the prior art.
    • 成对的转子(R 1,R 2,R 2,R 3,R 4,R 5, 由主电动机22旋转地驱动的电动机和/或副电动机)设置在包括多级罗茨干式真空泵的主泵(20)的主体(21)中。 在主体(21)的左端部的上壁部设置有与转子R 1 1的转子室连通的吸入口(23)。 与最终级上的转子R 6C的转子室的输送侧连通的输送部分(24)联接到排气管(25),并且设置有消声器(26),并且进一步 通过管道(27)联接到止回阀(28)。 止回阀(28)具有朝向大气侧的向前方向。 输送部分(24)或侧中间段的输送部分(24')联接到排气容量小于主泵(20)的排放能力的辅助泵(30)。 当电动机(22)被驱动时,通过转子(R SUB1〜6S)的旋转排出的气体顺序地从转子室输送到下游侧,并且 联接到吸入口(23)的真空处理室被排出。 通过驱动辅助泵(30)将最终级上的输送部分(24)排出,压力降低。 因此,中间级上的末级或转子(R 5 S 5)上的转子(R 6 S)的排气作用的负担减轻,并且功率 与现有技术相比,马达(22)的消耗可以显着降低。
    • 7. 发明申请
    • VACUUM EVACUATION DEVICE
    • 真空灭火装置
    • US20110164992A1
    • 2011-07-07
    • US13063040
    • 2009-09-10
    • Kouji ShibayamaToshio Suzuki
    • Kouji ShibayamaToshio Suzuki
    • F04B23/14
    • F04B37/14F04B41/06
    • A vacuum evacuation device including: a main pump; an auxiliary pump connected in series to the main pump; and an inter-pump piping for interconnecting an outlet of the main pump and an inlet of the auxiliary pump, wherein the main pump includes a mechanical booster pump; a ratio of the maximum power of a motor for the main pump to the maximum pumping rate of the main pump is no less than 5 W/(m3/h); the inter-pump piping includes a branch pipe branched from the middle of the inter-pump piping; and a check valve for releasing gas in the inter-pump piping and preventing a back flow of the gas is provided in the middle of the branch pipe.
    • 一种真空排气装置,包括:主泵; 辅助泵与主泵串联连接; 以及用于将主泵的出口和辅助泵的入口互连的泵间管道,其中主泵包括机械增压泵; 主泵的电动机的最大功率与主泵的最大泵送速率的比不小于5W /(m3 / h); 所述泵间配管包括从所述泵间配管的中部分支的分支管; 并且在分支管的中部设置有用于释放所述泵间配管中的气体并防止气体的回流的止回阀。