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    • 2. 发明申请
    • Vacuum exhaust apparatus and drive method of vacuum exhaust apparatus
    • 真空排气装置及真空排气装置的驱动方法
    • US20080145238A1
    • 2008-06-19
    • US12070265
    • 2008-02-15
    • Kouji ShibayamaYuuichi YamashitaMitsuru YahagiTakahiko TashimaJunichi AikawaTomonari TanakaYukio KankeYuuji Fukaura
    • Kouji ShibayamaYuuichi YamashitaMitsuru YahagiTakahiko TashimaJunichi AikawaTomonari TanakaYukio KankeYuuji Fukaura
    • F04B49/00F01C1/24F04C2/24
    • F04C23/001F04C2220/12F16K15/042
    • Pairs of rotors (R1, R2, R3, R4, R5 and R6) driven rotationally by a motor (22) are disposed in the body (21) of a main pump (20) comprising a multistage Roots dry vacuum pump. A suction opening (23) communicating with the rotor chamber of the rotor R1 is provided in the upper wall portion at the left end of the body (21). A delivery section (24) communicating with the delivery side of the rotor chamber of rotor R6 on the final stage is coupled to an exhaust pipe (25) and is provided with a silencer (26) and further coupled to a check valve (28) through a pipe (27). The check valve (28) has its forward direction toward the atmospheric side. The delivery section (24), or a delivery section (24′) at the side intermediate stage, is coupled to an auxiliary pump (30) having an exhaust capacity smaller than that of the main pump (20). When the motor (22) is driven, gas exhausted through rotation of the rotors (R1-R6) is carried sequentially to the downstream side from the rotor chambers and a vacuum processing chamber coupled to the suction opening (23) is exhausted. The delivery section (24) on the final stage is exhausted by driving the auxiliary pump (30), and the pressure is reduced. Consequently, the burden of the exhaust action on the rotor (R6) on the final stage or the rotor (R5) on the intermediate stage is lessened, and the power consumption of the motor (22) can be reduced significantly as compared with the prior art.
    • 成对的转子(R 1,R 2,R 2,R 3,R 4,R 5, 由主电动机22旋转地驱动的电动机和/或副电动机)设置在包括多级罗茨干式真空泵的主泵(20)的主体(21)中。 在主体(21)的左端部的上壁部设置有与转子R 1 1的转子室连通的吸入口(23)。 与最终级上的转子R 6C的转子室的输送侧连通的输送部分(24)联接到排气管(25),并且设置有消声器(26),并且进一步 通过管道(27)联接到止回阀(28)。 止回阀(28)具有朝向大气侧的向前方向。 输送部分(24)或侧中间段的输送部分(24')联接到排气容量小于主泵(20)的排放能力的辅助泵(30)。 当电动机(22)被驱动时,通过转子(R SUB1〜6S)的旋转排出的气体顺序地从转子室输送到下游侧,并且 联接到吸入口(23)的真空处理室被排出。 通过驱动辅助泵(30)将最终级上的输送部分(24)排出,压力降低。 因此,中间级上的末级或转子(R 5 S 5)上的转子(R 6 S)的排气作用的负担减轻,并且功率 与现有技术相比,马达(22)的消耗可以显着降低。
    • 3. 发明申请
    • PUMP
    • US20120294740A1
    • 2012-11-22
    • US13522911
    • 2010-11-25
    • Koichi MaruyamaJunichi AikawaNaoto YotsugiKotaro Iwagoshi
    • Koichi MaruyamaJunichi AikawaNaoto YotsugiKotaro Iwagoshi
    • F04B23/00
    • F04C25/02F04C18/3441F04C28/06F04C28/24F04C28/28F04C29/02F04C29/12
    • A pump comprises: a pump body 10 which sucks in air from an inlet 7 and discharges the air; a hydraulic pump which pressure-feeds a lubricating oil to the pump body 10 in accordance with the driving of the pump body 10; a non-return valve 70 which is disposed in a valve accommodation portion 6 between the inlet 7 and the pump body 10 to open and close the valve accommodation portion 6; an air introduction path 19 which introduces air into a cylinder 74 of the non-return valve 70; and an air introduction valve 60 which opens the air introduction path 19 when the hydraulic pump is not operating. When the pump body 10 is stopped, the non-return valve 70 closes the inlet 7 in response to a difference in pressure between the pressure of the valve accommodation portion 6 reduced to a value equal to or less than atmospheric pressure by the operation of the pump body 10, and the pressure of the air introduced into the cylinder 74 by the opening of the air introduction valve 60 owing to the stoppage of the hydraulic pump associated with the stoppage of the pump body 10.
    • 泵包括:泵体10,其从入口7吸入空气并排出空气; 液压泵,其根据泵体10的驱动将润滑油加压到泵体10; 止回阀70,其设置在入口7和泵体10之间的阀容纳部6中,以打开和关闭阀容纳部6; 将空气引入到止回阀70的气缸74中的空气引入路径19; 以及当液压泵不工作时打开空气引入路径19的空气引入阀60。 当泵体10停止时,止回阀70响应于阀容纳部6的压力减小到等于或小于大气压的值之间的压力差而关闭入口7,通过操作 泵体10以及由于与泵体10的停止相关联的液压泵停止而通过空气导入阀60的打开引入气缸74的空气的压力。
    • 4. 发明授权
    • Pump
    • US09494156B2
    • 2016-11-15
    • US13522911
    • 2010-11-25
    • Koichi MaruyamaJunichi AikawaNaoto YotsugiKotaro Iwagoshi
    • Koichi MaruyamaJunichi AikawaNaoto YotsugiKotaro Iwagoshi
    • F04C25/02F04C18/344F04C28/06F04C29/02F04C28/24F04C28/28F04C29/12
    • F04C25/02F04C18/3441F04C28/06F04C28/24F04C28/28F04C29/02F04C29/12
    • A pump that includes a pump body 10 which sucks in air from an inlet 7 and discharges the air; a hydraulic pump which pressure-feeds a lubricating oil to the pump body 10 in accordance with the driving of the pump body 10; a non-return valve 70 which is disposed in a valve accommodation portion 6 between the inlet 7 and the pump body 10 to open and close the valve accommodation portion 6; an air introduction path 19 which introduces air into a cylinder 74 of the non-return valve 70; and an air introduction valve 60 which opens the air introduction path 19 when the hydraulic pump is not operating. When the pump body 10 is stopped, the non-return valve 70 closes the inlet 7 in response to a difference in pressure between the pressure of the valve accommodation portion 6 reduced to a value equal to or less than atmospheric pressure by the operation of the pump body 10, and the pressure of the air introduced into the cylinder 74 by the opening of the air introduction valve 60 owing to the stoppage of the hydraulic pump associated with the stoppage of the pump body 10.
    • 一种泵,包括:泵体10,其从入口7吸入空气并排出空气; 液压泵,其根据泵体10的驱动将润滑油加压到泵体10; 止回阀70,其设置在入口7和泵体10之间的阀容纳部6中,以打开和关闭阀容纳部6; 将空气引入到止回阀70的气缸74中的空气引入路径19; 以及当液压泵不工作时打开空气导入路径19的空气导入阀60。 当泵体10停止时,止回阀70响应于阀容纳部6的压力减小到等于或小于大气压的值之间的压力差而关闭入口7,通过操作 泵体10以及由于与泵体10的停止相关联的液压泵停止而通过空气导入阀60的打开引入气缸74的空气的压力。