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    • 6. 发明申请
    • Stage apparatus
    • 舞台装置
    • US20090173278A1
    • 2009-07-09
    • US11989670
    • 2007-02-23
    • Yasuzou TanakaJunpei YuyamaMitsuru YahagiHirofumi Minami
    • Yasuzou TanakaJunpei YuyamaMitsuru YahagiHirofumi Minami
    • B05C13/00
    • H01L21/682G03F7/70716G03F7/70791G03F7/70975
    • To obtain a stage apparatus that can be divided for land transportation and can properly treat a substrate to be treated, the present invention provides a stage apparatus including a substrate holding plane which holds a substrate to be treated W, a pair of guide frames (13X) oppositely disposed with the substrate holding plane sandwiched therebetween, a gantry (13Y) which extends over the pair of guide frames (13X) and which is movably held by the pair of guide frames (13X), and a substrate treatment unit (14) which is disposed on the gantry (13Y). The guide frames (13X) each are composed of a connected structure of a main frame portion (15A) which forms a moving path (work region R1) of the gantry (13Y) necessary for the substrate treatment unit (14) to perform a substrate treatment, and a sub frame portion (15B) which is connected to one end portion or both end portions in a longitudinal direction of the main frame portion (15A) and which forms a moving path to a non-work position (non-work region R2) of the gantry (13Y).
    • 为了获得可以分割用于陆路运输并且可以适当地处理待处理的基板的台架装置,本发明提供了一种台架装置,其包括保持要处理的基板W的基板保持平面,一对引导框架(13X ),所述台架(13Y)在所述一对引导框架(13X)上延伸并且被所述一对引导框架(13X)可移动地保持;以及基板处理单元, 其设置在台架(13Y)上。 引导框架(13X)各自由形成基板处理单元(14)所需的台架(13Y)的移动路径(工作区域R1)的主框架部分(15A)的连接结构构成,以执行基板 处理,以及子框架部分(15B),其连接到主框架部分(15A)的纵向方向上的一个端部或两个端部,并且形成到非工作位置的移动路径(非工作区域 R2)(13Y)。