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1. 发明授权

US06339219B1 Radiation imaging device and radiation detector 有权
标题翻译：辐射成像装置和辐射探测器
公开(公告)号：US06339219B1
公开(公告)日：2002-01-15
申请号：US09335782
申请日：1999-06-18
申请人： Tohru Ishizuya , Motoo Koyama
发明人： Tohru Ishizuya , Motoo Koyama
IPC分类号： G02F101
CPC分类号： G01J5/40
摘要： An imaging device is provided for efficient and accurate conversion of invisible infrared radiation into a visible optical image. In an example, the image device employs an improved configuration of a substrate transmissive to infrared radiation, an infrared lens system, an optical readout radiation/displacement conversion unit for converting the infrared radiation into displacements, a readout optical system for directing readout light towards reflectors of the optical readout radiation/displacement conversion unit. The image device also provides for ease in assembly and calibration by adopting an improved arrangement of the parts.
摘要翻译：提供了一种成像装置，用于将不可见的红外辐射有效且准确地转换成可见光学图像。在一个示例中，图像装置采用对红外辐射透射的基板的改进配置，红外透镜系统，用于将红外辐射转换成位移的光学读出辐射/位移转换单元，用于将读出光引导到反射器的读出光学系统的光读出辐射/位移转换单元。图像装置还通过采用改进的部件布置来提供组装和校准的容易性。

2. 发明授权

US07010200B2 Light-beam switching/adjusting apparatus and manufacturing method thereof 失效
标题翻译：光束切换/调节装置及其制造方法
公开(公告)号：US07010200B2
公开(公告)日：2006-03-07
申请号：US10500086
申请日：2002-12-12
申请人： Keiichi Akagawa , Yoshihiko Suzuki , Tohru Ishizuya , Junji Suzuki , Katsuhiko Kurumada , Masatoshi Kanaya , Toshiaki Tamamura
发明人： Keiichi Akagawa , Yoshihiko Suzuki , Tohru Ishizuya , Junji Suzuki , Katsuhiko Kurumada , Masatoshi Kanaya , Toshiaki Tamamura
IPC分类号： G02B6/26
CPC分类号： G02B6/3596 , G02B6/3512 , G02B6/3546 , G02B6/357 , G02B6/3582 , G02B6/3584 , H04Q11/0005 , H04Q2011/003 , H04Q2011/0039 , H04Q2011/0058
摘要： The light guide substrate 2 has mirror receiving grooves 24 and light guides. The light guides conduct light that is input into the input ports to selected output ports in accordance with the advance and retraction of the mirrors 31 with respect to the grooves 24. The actuator substrate 4 has mirrors 31 and actuators which place the mirrors 31 in a state in which the mirrors are drawn in toward the substrate 4, or a state in which the mirrors protrude from the substrate 4. The light guide substrate 2 and actuator substrate 4 are aligned using alignment marks and joined with a spacer 3 interposed so that the mirrors 31 retract from the grooves 24 when the mirrors 31 are drawn in toward the substrate 4, and so that the mirrors 31 advance into the grooves 24 when the mirrors 31 protrude from the substrate 4. This alignment is performed in a state in which all of the mirrors 31 are drawn in toward the substrate 4.
摘要翻译：导光基板2具有反射镜容纳槽24和光导。根据反射镜31相对于凹槽24的前进和后退，导光体将输入到输入端口的光导入所选择的输出端口。致动器基板4具有将反射镜31置于反射镜朝向基板4的状态的反射镜31和致动器，或反射镜从基板4突出的状态。导光基板2和致动器基板4使用对准标记对齐并且与间隔件3相接合，使得当反射镜31朝向基板4被拉入时，反射镜31从凹槽24缩回，并且使得反射镜31前进当反射镜31从基板4突出时，进入凹槽24。在将所有的反射镜31朝向基板4拉入的状态下进行该对准。

3. 发明申请

US20050238282A1 Three-demensional structure element and method of manufacturing the element, optical switch, and micro device 有权
标题翻译：三维结构元件和元件制造方法，光开关和微型器件
公开(公告)号：US20050238282A1
公开(公告)日：2005-10-27
申请号：US10523267
申请日：2003-07-31
申请人： Tohru Ishizuya
发明人： Tohru Ishizuya
IPC分类号： B81B3/00 , B81C1/00 , G02B6/35 , G02B26/08 , G02B6/26 , H01L29/22 , G02B5/08
CPC分类号： B81B3/0072 , B81C2201/0108 , G02B6/3518 , G02B6/3546 , G02B6/3572 , G02B6/3584 , G02B6/3596 , Y10S438/926
摘要： A three-dimensional structure element having a plurality of three-dimensional structural bodies and capable of being uniformly formed without producing a dispersion in shape of the three-dimensional structural bodies, comprising a substrate (11) and the three-dimensional structural bodies (1) disposed in a predetermined effective area (20) on the substrate (11), the three-dimensional structural bodies (1) further comprising space parts formed in the clearances thereof from the substrate (11) by removing sacrificing layers, the substrate (11) further comprising a dummy area (21) having dummy structural bodies (33) so as to surround the effective area (20), the dummy structural body (33) further comprising space parts formed in the clearances thereof from the substrate (11) by removing the sacrificing layers, whereby since the dummy area (21) is heated merely to approx. the same temperature as the effective area (20) in an ashing process for removing the sacrificing layers to prevent a temperature distribution from occurring in the effective area (20).
摘要翻译：一种具有多个三维结构体并能够均匀形成而不产生三维结构体形状分散的三维结构元件，包括基底（11）和三维结构体（1）），所述三维结构体（1）还包括通过去除牺牲层从所述基板（11）形成在其间隙中的空间部分，所述基板（11）被布置在所述基板（11）上的预定有效区域（20））还包括具有虚拟结构体（33）以围绕所述有效区域（20）的虚拟区域（21），所述虚拟结构体（33）还包括通过所述基板（11）从所述基板（11）的间隙形成的空间部分，去除牺牲层，由此由于虚拟区域（21）被加热到约在用于去除牺牲层的灰化过程中与有效区域（20）相同的温度以防止在有效区域（20）中发生温度分布。

4. 发明授权

US6080988A Optically readable radiation-displacement-conversion devices and methods, and image-rendering apparatus and methods employing same 失效
标题翻译：光学可读的辐射 - 位移 - 转换装置和方法，以及使用其的图像再现装置和方法
公开(公告)号：US6080988A
公开(公告)日：2000-06-27
申请号：US994949
申请日：1997-12-19
申请人： Tohru Ishizuya , Noboru Amemiya , Keiichi Akagawa
发明人： Tohru Ishizuya , Noboru Amemiya , Keiichi Akagawa
IPC分类号： G01J5/00 , G01J5/40 , G02B26/02 , G02B26/08 , H04N5/32 , H04N5/33 , G02F1/00
CPC分类号： G01J5/06 , G01J5/061 , G01J5/08 , G01J5/0809 , G01J5/0825 , G01J5/0831 , G01J5/0859 , G01J5/38 , G01J5/40 , G02B26/02 , G02B26/0866 , G01J2005/0077 , G01J2005/068 , G01J2005/583 , H04N5/32 , H04N5/33
摘要： Optically readable radiation-displacement conversion devices and image-rendering apparatus that incorporate same are disclosed. Also disclosed are related methods for detecting images and rendering images using such devices and apparatus. Such devices, apparatus and methods allow improved accuracy and sensitivity of radiation detection without having to use a cooler. A representative conversion device includes a substrate and a suspended portion attached to the substrate via a leg portion. The conversion device includes a radiation-absorbing film that receives and absorbs and incident invisible radiation (e.g., UV, IR, or X-rays) and generates heat from the absorbed radiation. The suspended portion includes a displaceable member that exhibits a displacement with respect to the substrate. The displacement also imparts a change to an incident readout light flux in accordance with the magnitude of the displacement. The change to the readout light is detected and used to form an image.
摘要翻译：公开了光学可读的辐射位移转换装置和包含其的图像再现装置。还公开了用于使用这种装置和装置检测图像和渲染图像的相关方法。这样的装置，装置和方法允许提高辐射检测的精度和灵敏度，而不必使用冷却器。代表性的转换装置包括基板和经由支脚部分附着到基板的悬挂部分。转换装置包括吸收和吸收不可见的辐射（例如，UV，IR或X射线）并从吸收的辐射产生热的辐射吸收膜。悬挂部分包括相对于基板移位的位移构件。位移还根据位移的大小对入射读出光通量进行改变。检测到读出光的变化并用于形成图像。

5. 发明授权

US07298015B2 Three-dimensional structure element and method of manufacturing the element, optical switch, and micro device 有权
标题翻译：三维结构元件和元件制造方法，光开关和微型器件
公开(公告)号：US07298015B2
公开(公告)日：2007-11-20
申请号：US10523267
申请日：2003-07-31
申请人： Tohru Ishizuya
发明人： Tohru Ishizuya
IPC分类号： H01L29/82
CPC分类号： B81B3/0072 , B81C2201/0108 , G02B6/3518 , G02B6/3546 , G02B6/3572 , G02B6/3584 , G02B6/3596 , Y10S438/926
摘要： A three-dimensional structure element having a plurality of three-dimensional structural bodies and capable of being uniformly formed without producing a dispersion in shape of the three-dimensional structural bodies, comprising a substrate (11) and the three-dimensional structural bodies (1) disposed in a predetermined effective area (20) on the substrate (11), the three-dimensional structural bodies (1) further comprising space parts formed in the clearances thereof from the substrate (11) by removing sacrificing layers, the substrate (11) further comprising a dummy area (21) having dummy structural bodies (33) so as to surround the effective area (20), the dummy structural body (33) further comprising space parts formed in the clearances thereof from the substrate (11) by removing the sacrificing layers, whereby since the dummy area (21) is heated merely to approx. the same temperature as the effective area (20) in an ashing process for removing the sacrificing layers to prevent a temperature distribution from occurring in the effective area (20).
摘要翻译：一种具有多个三维结构体并能够均匀形成而不产生三维结构体形状分散的三维结构元件，包括基底（11）和三维结构体（1）），所述三维结构体（1）还包括通过去除牺牲层从所述基板（11）形成在其间隙中的空间部分，所述基板（11）被布置在所述基板（11）上的预定有效区域（20））还包括具有虚拟结构体（33）以围绕所述有效区域（20）的虚拟区域（21），所述虚拟结构体（33）还包括通过所述基板（11）从所述基板（11）的间隙形成的空间部分，去除牺牲层，由此由于虚拟区域（21）被加热到约在用于去除牺牲层的灰化过程中与有效区域（20）相同的温度以防止在有效区域（20）中发生温度分布。

6. 发明授权

US07116192B2 Micro actuator and optical switch using the actuator 有权
标题翻译：微动执行器和光开关使用执行器
公开(公告)号：US07116192B2
公开(公告)日：2006-10-03
申请号：US10947530
申请日：2004-09-22
申请人： Tohru Ishizuya , Junji Suzuki
发明人： Tohru Ishizuya , Junji Suzuki
IPC分类号： H01H51/22
CPC分类号： G02B6/3566 , G02B6/3512 , G02B6/3546 , G02B6/357 , G02B6/3584 , G02B6/3596 , G02B26/0833 , G02B26/0841
摘要： The movable part is constructed from a bridge part 13 with a cantilever structure in which the fixed end is fastened via a leg part 12. The bridge part 13 has two bridge constituent parts 14 and 15 that are connected in series between the fixed end and the free end. The bridge constituent part 14 on the side of the fixed end is a plate spring part. The bridge constituent part 15 on the side of the free end is a rigid part that possesses rigidity. The bridge constituent part 14 is bent toward the opposite side from the substrate 11 in a state in which the bridge part 13 receives no force. The mirror 2 is disposed on the free end side of the bridge constituent part 15. As a result, a microactuator can be obtained which can be operated by a small driving force.
摘要翻译：可移动部分由具有悬臂结构的桥部13构成，其中固定端经由腿部12固定。桥部13具有两个桥构成部分14和15，其串联连接在固定端和自由结束固定端侧的桥构成部14是板簧部。自由端侧的桥构成部15是具有刚性的刚性部。桥结构部14在桥接部13不受力的状态下朝向与基板11相反的一侧弯曲。反射镜2设置在桥构成部件15的自由端侧。结果，可以获得可以通过小的驱动力操作的微型致动器。

7. 发明申请

US20050206986A1 Micro-actuator utilizing electrostatic and lorentz forces, and micro-actuator device, optical switch and optical switch array using the same 审中-公开
标题翻译：微型致动器利用静电和左旋力，以及微型致动器装置，光学开关和使用其的光开关阵列
公开(公告)号：US20050206986A1
公开(公告)日：2005-09-22
申请号：US11131089
申请日：2005-05-16
申请人： Keiichi Akagawa , Junji Suzuki , Tohru Ishizuya , Yoshihiko Suzuki
发明人： Keiichi Akagawa , Junji Suzuki , Tohru Ishizuya , Yoshihiko Suzuki
IPC分类号： G02B26/08 , B81B3/00 , B81B7/02 , G02B6/12 , G02B6/35 , H04Q11/00 , B41J2/04
CPC分类号： G02B6/358 , B81B3/0037 , B81B2201/045 , B81B2203/0109 , B81B2203/053 , G02B6/3514 , G02B6/3546 , G02B6/357 , G02B6/3572 , G02B6/3584 , G02B2006/12104
摘要： The movable part 21 is fastened to the substrate 11 via flexure parts 27a and 27b, and can move upward and downward with respect to the substrate 11. The substrate 11 also serves as a fixed electrode. The movable part 21 has second electrode parts 23a and 23b which can generate an electrostatic force between these electrode parts and the substrate 11 by means of a voltage that is applied across these electrode parts and the substrate 11, and a current path 25 which is disposed in a magnetic field, and which generates a Lorentz force when a current is passed through this current path. A mirror 12 which advances into and withdraws from the light path is disposed on the movable part 21. As a result, the mobility range of the movable part can be broadened, and the power consumption can be reduced, without applying a high voltage or sacrificing small size.
摘要翻译：可动部21经由弯曲部件27a，27b被固定在基板11上，能够相对于基板11上下移动。基板11也用作固定电极。可动部21具有可以通过施加在这些电极部和基板11上的电压而在这些电极部和基板11之间产生静电力的第二电极部23a和23b，以及电流路径25 设置在磁场中，并且当电流通过该电流路径时产生洛伦兹力。在可移动部分21上设置有进入和退出光路的反射镜12.结果，可以扩大可移动部分的移动范围，并且可以在不施加高电压或牺牲的情况下降低功耗小尺寸。

8. 发明授权

US06835932B2 Thermal displacement element and radiation detector using the element 有权
标题翻译：热位移元件和辐射探测器使用该元件
公开(公告)号：US06835932B2
公开(公告)日：2004-12-28
申请号：US10129338
申请日：2002-05-03
申请人： Tohru Ishizuya , Junji Suzuki
发明人： Tohru Ishizuya , Junji Suzuki
IPC分类号： G01J500
CPC分类号： B81B3/0081 , B81B2201/0278 , B81B2201/042 , B81B2203/0109 , G01J5/40 , H01L27/14812 , H01L27/14818 , H01L27/14875
摘要： A thermal displacement element comprises a substrate, and a supported member supported on the substrate. The supported member includes first and second displacement portions, a heat separating portion exhibiting a high thermal resistance and a radiation absorbing portion receiving the radiation and converting it into heat. Each of the first and second displacement portions has at least two layers of different materials having different expansion coefficients and stacked on each other. The first displacement portion is mechanically continuous to the substrate without through the heat separating portion. The radiation absorbing portion and the second displacement portion are mechanically continuous to the substrate through the heat separating portion and the first displacement portion. The second displacement portion is thermally connected to the radiation absorbing portion. A radiation detecting device comprises a thermal displacement element and a displacement reading member fixed to the second displacement portion of the thermal displacement element and used for obtaining a predetermined change corresponding to a displacement in the second displacement portion.

9. 发明授权

US06469301B1 Radiation detectors including thermal-type displaceable element with increased responsiveness 有权
标题翻译：辐射检测器，包括具有增加的响应性的热式可位移元件
公开(公告)号：US06469301B1
公开(公告)日：2002-10-22
申请号：US09570767
申请日：2000-05-12
申请人： Junji Suzuki , Tohru Ishizuya
发明人： Junji Suzuki , Tohru Ishizuya
IPC分类号： G01J520
CPC分类号： G01J5/38
摘要： Radiation detector arrays are provided that include one or more thermal-type displaceable elements having reduced thickness without compromising mechanical strength or sensitivity of the displaceable elements to incident radiation. An exemplary displaceable element includes first and second membrane layers made of materials having different coefficients of thermal expansion. The layers are supported relative to a substrate by a leg. The displaceable element can also serve as an absorbing member for the incident radiation to be detected. Each element can also include a reflector of signal light. When the displaceable element incident radiation (such as infrared radiation) to be detected, it undergoes heating which bends the element. Displacement of the element is detected as a change in signal light or as a change in capacitance. If the displaceable member includes a signal-light reflector, the reflector includes a planar portion including “dropped” edges serving to strengthen the planar portion and allow the thickness of the planar portion to be reduced.
摘要翻译：提供辐射检测器阵列，其包括具有减小的厚度的一个或多个热型可位移元件，而不会影响可移位元件对入射辐射的机械强度或灵敏度。示例性可移位元件包括由具有不同热膨胀系数的材料制成的第一和第二膜层。这些层通过腿部相对于基底支撑。可移动元件还可以用作待检测的入射辐射的吸收构件。每个元件还可以包括信号光的反射器。当可移动元件入射辐射（例如红外辐射）被检测时，它经历加热使元件弯曲。元件的位移被检测为信号光的变化或电容的变化。如果可移动部件包括信号光反射器，则反射器包括平面部分，其包括用于加强平面部分的“下落”边缘，并允许平坦部分的厚度减小。

10. 发明授权

US06936950B2 Micro-actuator utilizing electrostatic and Lorentz forces, and micro-actuator device, optical switch and optical switch array using the same 有权
标题翻译：使用静电和洛伦兹力的微型致动器，以及使用其的微型致动器装置，光学开关和光学开关阵列
公开(公告)号：US06936950B2
公开(公告)日：2005-08-30
申请号：US10792427
申请日：2004-03-02
申请人： Keiichi Akagawa , Junji Suzuki , Tohru Ishizuya , Yoshihiko Suzuki
发明人： Keiichi Akagawa , Junji Suzuki , Tohru Ishizuya , Yoshihiko Suzuki
IPC分类号： G02B26/08 , B81B3/00 , B81B7/02 , G02B6/12 , G02B6/35 , H04Q11/00 , H02N1/00 , G02B26/10
CPC分类号： G02B6/358 , B81B3/0037 , B81B2201/045 , B81B2203/0109 , B81B2203/053 , G02B6/3514 , G02B6/3546 , G02B6/357 , G02B6/3572 , G02B6/3584 , G02B2006/12104
摘要： The movable part 21 is fastened to the substrate 11 via flexure parts 27a and 27b, and can move upward and downward with respect to the substrate 11. The substrate 11 also serves as a fixed electrode. The movable part 21 has second electrode parts 23a and 23b which can generate an electrostatic force between these electrode parts and the substrate 11 by means of a voltage that is applied across these electrode parts and the substrate 11, and a current path 25 which is disposed in a magnetic field, and which generates a Lorentz force when a current is passed through this current path. A mirror 12 which advances into and withdraws from the light path is disposed on the movable part 21. As a result, the mobility range of the movable part can be broadened, and the power consumption can be reduced, without applying a high voltage or sacrificing small size.
摘要翻译：可动部21经由弯曲部件27a，27b被固定在基板11上，能够相对于基板11上下移动。基板11也用作固定电极。可动部21具有可以通过施加在这些电极部和基板11上的电压而在这些电极部和基板11之间产生静电力的第二电极部23a和23b，以及电流路径25 设置在磁场中，并且当电流通过该电流路径时产生洛伦兹力。在可移动部分21上设置有进入和退出光路的反射镜12.结果，可以扩大可移动部分的移动范围，并且可以在不施加高电压或牺牲的情况下降低功耗小尺寸。

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