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1. 发明授权

US07010200B2 Light-beam switching/adjusting apparatus and manufacturing method thereof 失效
标题翻译：光束切换/调节装置及其制造方法
公开(公告)号：US07010200B2
公开(公告)日：2006-03-07
申请号：US10500086
申请日：2002-12-12
申请人： Keiichi Akagawa , Yoshihiko Suzuki , Tohru Ishizuya , Junji Suzuki , Katsuhiko Kurumada , Masatoshi Kanaya , Toshiaki Tamamura
发明人： Keiichi Akagawa , Yoshihiko Suzuki , Tohru Ishizuya , Junji Suzuki , Katsuhiko Kurumada , Masatoshi Kanaya , Toshiaki Tamamura
IPC分类号： G02B6/26
CPC分类号： G02B6/3596 , G02B6/3512 , G02B6/3546 , G02B6/357 , G02B6/3582 , G02B6/3584 , H04Q11/0005 , H04Q2011/003 , H04Q2011/0039 , H04Q2011/0058
摘要： The light guide substrate 2 has mirror receiving grooves 24 and light guides. The light guides conduct light that is input into the input ports to selected output ports in accordance with the advance and retraction of the mirrors 31 with respect to the grooves 24. The actuator substrate 4 has mirrors 31 and actuators which place the mirrors 31 in a state in which the mirrors are drawn in toward the substrate 4, or a state in which the mirrors protrude from the substrate 4. The light guide substrate 2 and actuator substrate 4 are aligned using alignment marks and joined with a spacer 3 interposed so that the mirrors 31 retract from the grooves 24 when the mirrors 31 are drawn in toward the substrate 4, and so that the mirrors 31 advance into the grooves 24 when the mirrors 31 protrude from the substrate 4. This alignment is performed in a state in which all of the mirrors 31 are drawn in toward the substrate 4.
摘要翻译：导光基板2具有反射镜容纳槽24和光导。根据反射镜31相对于凹槽24的前进和后退，导光体将输入到输入端口的光导入所选择的输出端口。致动器基板4具有将反射镜31置于反射镜朝向基板4的状态的反射镜31和致动器，或反射镜从基板4突出的状态。导光基板2和致动器基板4使用对准标记对齐并且与间隔件3相接合，使得当反射镜31朝向基板4被拉入时，反射镜31从凹槽24缩回，并且使得反射镜31前进当反射镜31从基板4突出时，进入凹槽24。在将所有的反射镜31朝向基板4拉入的状态下进行该对准。

2. 发明申请

US20050018955A1 Light-beam switching/adjusting apparatus and manufacturing method thereof 失效
标题翻译：光束切换/调节装置及其制造方法
公开(公告)号：US20050018955A1
公开(公告)日：2005-01-27
申请号：US10500086
申请日：2002-12-12
申请人： Keiichi Akagawa , Yoshihiko Suzuki , Tohru Ishizuya , Junji Suzuki , Katsuhiko Kurumada , Masatoshi Kanaya , Toshiaki Tamamura
发明人： Keiichi Akagawa , Yoshihiko Suzuki , Tohru Ishizuya , Junji Suzuki , Katsuhiko Kurumada , Masatoshi Kanaya , Toshiaki Tamamura
IPC分类号： G02B6/35 , H01L25/065 , H04Q11/00 , G02B6/26
CPC分类号： G02B6/3596 , G02B6/3512 , G02B6/3546 , G02B6/357 , G02B6/3582 , G02B6/3584 , H04Q11/0005 , H04Q2011/003 , H04Q2011/0039 , H04Q2011/0058
摘要： The light guide substrate 2 has mirror receiving grooves 24 and light guides. The light guides conduct light that is input into the input ports to selected output ports in accordance with the advance and retraction of the mirrors 31 with respect to the grooves 24. The actuator substrate 4 has mirrors 31 and actuators which place the mirrors 31 in a state in which the mirrors are drawn in toward the substrate 4, or a state in which the mirrors protrude from the substrate 4. The light guide substrate 2 and actuator substrate 4 are aligned using alignment marks and joined with a spacer 3 interposed so that the mirrors 31 retract from the grooves 24 when the mirrors 31 are drawn in toward the substrate 4, and so that the mirrors 31 advance into the grooves 24 when the mirrors 31 protrude from the substrate 4. This alignment is performed in a state in which all of the mirrors 31 are drawn in toward the substrate 4.
摘要翻译：导光基板2具有反射镜容纳槽24和光导。根据反射镜31相对于凹槽24的前进和后退，导光板将输入到输入端口的光输入到选定的输出端口。致动器基板4具有反射镜31和将反射镜31放置在其中的致动器反射镜朝向基板4的状态，或反射镜从基板4突出的状态。导光基板2和致动器基板4使用对准标记对齐，并且与间隔件3相接合，当反射镜31朝向基板4被拉入时，反射镜31从凹槽24缩回，并且当反射镜31从基板4突出时，反射镜31前进到凹槽24中。该对准在所有反射镜31被朝向基板4拉入。

3. 发明申请

US20050206986A1 Micro-actuator utilizing electrostatic and lorentz forces, and micro-actuator device, optical switch and optical switch array using the same 审中-公开
标题翻译：微型致动器利用静电和左旋力，以及微型致动器装置，光学开关和使用其的光开关阵列
公开(公告)号：US20050206986A1
公开(公告)日：2005-09-22
申请号：US11131089
申请日：2005-05-16
申请人： Keiichi Akagawa , Junji Suzuki , Tohru Ishizuya , Yoshihiko Suzuki
发明人： Keiichi Akagawa , Junji Suzuki , Tohru Ishizuya , Yoshihiko Suzuki
IPC分类号： G02B26/08 , B81B3/00 , B81B7/02 , G02B6/12 , G02B6/35 , H04Q11/00 , B41J2/04
CPC分类号： G02B6/358 , B81B3/0037 , B81B2201/045 , B81B2203/0109 , B81B2203/053 , G02B6/3514 , G02B6/3546 , G02B6/357 , G02B6/3572 , G02B6/3584 , G02B2006/12104
摘要： The movable part 21 is fastened to the substrate 11 via flexure parts 27a and 27b, and can move upward and downward with respect to the substrate 11. The substrate 11 also serves as a fixed electrode. The movable part 21 has second electrode parts 23a and 23b which can generate an electrostatic force between these electrode parts and the substrate 11 by means of a voltage that is applied across these electrode parts and the substrate 11, and a current path 25 which is disposed in a magnetic field, and which generates a Lorentz force when a current is passed through this current path. A mirror 12 which advances into and withdraws from the light path is disposed on the movable part 21. As a result, the mobility range of the movable part can be broadened, and the power consumption can be reduced, without applying a high voltage or sacrificing small size.
摘要翻译：可动部21经由弯曲部件27a，27b被固定在基板11上，能够相对于基板11上下移动。基板11也用作固定电极。可动部21具有可以通过施加在这些电极部和基板11上的电压而在这些电极部和基板11之间产生静电力的第二电极部23a和23b，以及电流路径25 设置在磁场中，并且当电流通过该电流路径时产生洛伦兹力。在可移动部分21上设置有进入和退出光路的反射镜12.结果，可以扩大可移动部分的移动范围，并且可以在不施加高电压或牺牲的情况下降低功耗小尺寸。

4. 发明授权

US06936950B2 Micro-actuator utilizing electrostatic and Lorentz forces, and micro-actuator device, optical switch and optical switch array using the same 有权
标题翻译：使用静电和洛伦兹力的微型致动器，以及使用其的微型致动器装置，光学开关和光学开关阵列
公开(公告)号：US06936950B2
公开(公告)日：2005-08-30
申请号：US10792427
申请日：2004-03-02
申请人： Keiichi Akagawa , Junji Suzuki , Tohru Ishizuya , Yoshihiko Suzuki
发明人： Keiichi Akagawa , Junji Suzuki , Tohru Ishizuya , Yoshihiko Suzuki
IPC分类号： G02B26/08 , B81B3/00 , B81B7/02 , G02B6/12 , G02B6/35 , H04Q11/00 , H02N1/00 , G02B26/10
CPC分类号： G02B6/358 , B81B3/0037 , B81B2201/045 , B81B2203/0109 , B81B2203/053 , G02B6/3514 , G02B6/3546 , G02B6/357 , G02B6/3572 , G02B6/3584 , G02B2006/12104
摘要： The movable part 21 is fastened to the substrate 11 via flexure parts 27a and 27b, and can move upward and downward with respect to the substrate 11. The substrate 11 also serves as a fixed electrode. The movable part 21 has second electrode parts 23a and 23b which can generate an electrostatic force between these electrode parts and the substrate 11 by means of a voltage that is applied across these electrode parts and the substrate 11, and a current path 25 which is disposed in a magnetic field, and which generates a Lorentz force when a current is passed through this current path. A mirror 12 which advances into and withdraws from the light path is disposed on the movable part 21. As a result, the mobility range of the movable part can be broadened, and the power consumption can be reduced, without applying a high voltage or sacrificing small size.
摘要翻译：可动部21经由弯曲部件27a，27b被固定在基板11上，能够相对于基板11上下移动。基板11也用作固定电极。可动部21具有可以通过施加在这些电极部和基板11上的电压而在这些电极部和基板11之间产生静电力的第二电极部23a和23b，以及电流路径25 设置在磁场中，并且当电流通过该电流路径时产生洛伦兹力。在可移动部分21上设置有进入和退出光路的反射镜12.结果，可以扩大可移动部分的移动范围，并且可以在不施加高电压或牺牲的情况下降低功耗小尺寸。

5. 发明授权

US06828557B2 Radiation-detection devices 有权
标题翻译：辐射检测装置
公开(公告)号：US06828557B2
公开(公告)日：2004-12-07
申请号：US10000179
申请日：2001-11-30
申请人： Tohru Ishizuya , Junji Suzuki , Keiichi Akagawa
发明人： Tohru Ishizuya , Junji Suzuki , Keiichi Akagawa
IPC分类号： G01J538
CPC分类号： G01J5/40 , G01J5/0853
摘要： Radiation detectors are disclosed that include at least one element (pixel). In a pixel, a desired positional relationship between two “effecting” elements is maintained regardless of changes in temperature or other prevailing variable. The detectors can be “electrical capacitance” or “optical-readout” types. A pixel of the electrical capacitance type includes two electrodes (reference electrode and response electrode) that face each other and have a set gap therebetween. The electrodes are attached to respective displaceable members (configured as thermal bimorphs) having identical structures. A pixel of the optical readout type includes a half-mirror and a reflector that face each other and have a set gap therebetween. The half-mirror and reflector are attached to respective displaceable members. Radiation is absorbed by a radiation absorber that transfers the heat to certain displaceable members that bend to tilt accordingly. Other displaceable members are not heated and do not bend. The displaceable members are formable simultaneously during respective fabrication steps.
摘要翻译：公开了包括至少一个元件（像素）的辐射检测器。在一个像素中，保持两个“有效”元素之间的期望位置关系，而不管温度变化或其他主要变量。检测器可以是“电容”或“光学读出”类型。电容型的像素包括彼此相对并且在它们之间具有设定间隙的两个电极（参考电极和响应电极）。电极连接到具有相同结构的相应的可移位构件（配置为热双压电晶片）。光学读出型的像素包括半反射镜和反射镜，它们彼此面对并且在它们之间具有设定的间隙。半反射镜和反射器连接到相应的可移位构件。辐射被辐射吸收器吸收，辐射吸收器将热量转移到相应地弯曲倾斜的某些可移位构件。其他可移位构件不加热并且不弯曲。可移动构件在相应的制造步骤期间可同时成形。

6. 发明授权

US6080988A Optically readable radiation-displacement-conversion devices and methods, and image-rendering apparatus and methods employing same 失效
标题翻译：光学可读的辐射 - 位移 - 转换装置和方法，以及使用其的图像再现装置和方法
公开(公告)号：US6080988A
公开(公告)日：2000-06-27
申请号：US994949
申请日：1997-12-19
申请人： Tohru Ishizuya , Noboru Amemiya , Keiichi Akagawa
发明人： Tohru Ishizuya , Noboru Amemiya , Keiichi Akagawa
IPC分类号： G01J5/00 , G01J5/40 , G02B26/02 , G02B26/08 , H04N5/32 , H04N5/33 , G02F1/00
CPC分类号： G01J5/06 , G01J5/061 , G01J5/08 , G01J5/0809 , G01J5/0825 , G01J5/0831 , G01J5/0859 , G01J5/38 , G01J5/40 , G02B26/02 , G02B26/0866 , G01J2005/0077 , G01J2005/068 , G01J2005/583 , H04N5/32 , H04N5/33
摘要： Optically readable radiation-displacement conversion devices and image-rendering apparatus that incorporate same are disclosed. Also disclosed are related methods for detecting images and rendering images using such devices and apparatus. Such devices, apparatus and methods allow improved accuracy and sensitivity of radiation detection without having to use a cooler. A representative conversion device includes a substrate and a suspended portion attached to the substrate via a leg portion. The conversion device includes a radiation-absorbing film that receives and absorbs and incident invisible radiation (e.g., UV, IR, or X-rays) and generates heat from the absorbed radiation. The suspended portion includes a displaceable member that exhibits a displacement with respect to the substrate. The displacement also imparts a change to an incident readout light flux in accordance with the magnitude of the displacement. The change to the readout light is detected and used to form an image.
摘要翻译：公开了光学可读的辐射位移转换装置和包含其的图像再现装置。还公开了用于使用这种装置和装置检测图像和渲染图像的相关方法。这样的装置，装置和方法允许提高辐射检测的精度和灵敏度，而不必使用冷却器。代表性的转换装置包括基板和经由支脚部分附着到基板的悬挂部分。转换装置包括吸收和吸收不可见的辐射（例如，UV，IR或X射线）并从吸收的辐射产生热的辐射吸收膜。悬挂部分包括相对于基板移位的位移构件。位移还根据位移的大小对入射读出光通量进行改变。检测到读出光的变化并用于形成图像。

7. 发明授权

US07002730B2 Mirror device, optical switch, thin film elastic structure, and thin elastic structure producing method 失效
标题翻译：镜装置，光开关，薄膜弹性结构，薄弹性结构制造方法
公开(公告)号：US07002730B2
公开(公告)日：2006-02-21
申请号：US10473532
申请日：2002-04-18
申请人： Tohru Ishizuya , Keiichi Akagawa
发明人： Tohru Ishizuya , Keiichi Akagawa
IPC分类号： G02B26/08 , G02F1/29
CPC分类号： G02B26/0841 , B81B3/0062 , B81B2201/032 , B81B2201/045 , B81B2203/053 , B81B2203/055 , B81B2203/058
摘要： The mirror device has a mirror 2, and a supporting mechanism which elastically supports the mirror 2 on a substrate 1 in a state in which the mirror floats from the substrate 1, so that the mirror can be inclined in an arbitrary direction. The supporting mechanism has three supporting parts 3A, 3B and 3C that mechanically connect the substrate 1 and mirror 2. Each of the supporting parts 3A, 3B and 3C has one or more plate spring parts 5 that are constructed from a thin film consisting of one or more layers. One end portion of each plate spring part 5 is connected to the substrate 1 via a leg part 9 which has a rising part that rises from the substrate 1. The other end portion of the plate spring part 5 is mechanically connected to the mirror 2 via a connecting part which has a rising part that rises from this other end portion. The mirror 2 is supported on the substrate 1 only via the plate spring part 5 of the respective 3A, 3B and 3C. As a result, compactness and mass production characteristics can be greatly improved while maintaining superior optical characteristics.
摘要翻译：镜装置具有反射镜2和支撑机构，其以反射镜从基板1浮起的状态将基板1上的反射镜2弹性支撑，使得反射镜能够在任意方向上倾斜。支撑机构具有机械地连接基板1和反射镜2的三个支撑部分3A，3B和3C。每个支撑部分3A，3B和3C具有一个或多个由一层或多层构成的薄膜构成的板簧部分5。每个板簧部分5的一个端部经由腿部9连接到基板1，腿部9具有从基板1上升的上升部分。板簧部5的另一端部经由具有从该另一端部上升的上升部的连接部与镜2机械连接。反射镜2仅通过相应的3A，3B和3C的板簧部分5支撑在基板1上。因此，可以在保持优异的光学特性的同时，大大提高紧凑性和批量生产特性。

8. 发明授权

US5670382A Method for producing a solid state imaging device 失效
标题翻译：固态成像装置的制造方法
公开(公告)号：US5670382A
公开(公告)日：1997-09-23
申请号：US717357
申请日：1996-09-25
申请人： Tohru Ishizuya , Masahiro Shoda , Keiichi Akagawa
发明人： Tohru Ishizuya , Masahiro Shoda , Keiichi Akagawa
IPC分类号： H01L27/148 , H01L21/70
CPC分类号： H01L27/14831
摘要： A solid state imaging device reduces the occurrence of crosstalk between a plurality of picture elements arranged in a linear or matrix form. The solid state imaging device includes a plurality of photosensitive cells formed on a first principal surface of a semiconductor substrate, a transfer electrode formed in a gap area among the cells on the first principal surface to read out charges produced in the cells, a drive metal wiring formed on the transfer electrode within the gap area, a first insulating film covering the cells with a predetermined thickness, and a plurality of metal reflecting films formed on the first insulating film so that the whole surface of each of the metal reflecting films forms a reflecting surface substantially parallel to a surface of each of the cells on the side of the first principal surface. Light passed through the photosensitive cells from a side opposite to the first principal surface is reflected back to each of the photosensitive cells.
摘要翻译：固态成像装置减少以线性或矩阵形式布置的多个图像元素之间的串扰的发生。固态成像装置包括形成在半导体衬底的第一主表面上的多个感光单元，形成在第一主表面上的单元之间的间隙区域中的转印电极，以读出在单元中产生的电荷，驱动金属在间隙区域内的转印电极上形成的布线，覆盖预定厚度的单元的第一绝缘膜和形成在第一绝缘膜上的多个金属反射膜，使得每个金属反射膜的整个表面形成反射表面基本上平行于第一主表面侧的每个单元的表面。从与第一主表面相对的一侧通过感光单元的光被反射回每个感光单元。

9. 发明授权

US5416344A Solid state imaging device and method for producing the same 失效
标题翻译：固态成像装置及其制造方法
公开(公告)号：US5416344A
公开(公告)日：1995-05-16
申请号：US99493
申请日：1993-07-28
申请人： Tohru Ishizuya , Masahiro Shoda , Keiichi Akagawa
发明人： Tohru Ishizuya , Masahiro Shoda , Keiichi Akagawa
IPC分类号： H01L27/148 , H01L29/78 , H01L27/14 , H01L31/00
CPC分类号： H01L27/14831
摘要： A solid state imaging device which reduces the occurrence of crosstalk between a plurality of picture elements arranged in a linear or matrix form. The solid state imaging device includes a plurality of photosensitive cells formed on a first principal surface of a semiconductor substrate, a transfer electrode formed in a gap area among the cells on the first principal surface to read out charges produced in the cells, a drive metal wiring formed on the transfer electrode within the gap area, a first insulating film covering the cells with a predetermined thickness, and a plurality of metal reflecting films formed on the first insulating film in such a manner that the whole surface of each of the metal reflecting films forms a reflecting surface substantially parallel to a surface of each of the cells on the side of the first principal surface whereby light passed through the photosensitive cells from a side opposite to the first principal surface is reflected back to each of the photosensitive cells.
摘要翻译：一种固态成像装置，其减少以线性或矩阵形式布置的多个像素之间的串扰的发生。固态成像装置包括形成在半导体衬底的第一主表面上的多个感光单元，形成在第一主表面上的单元之间的间隙区域中的转印电极，以读出在单元中产生的电荷，驱动金属在间隙区域内形成在转印电极上的布线，覆盖预定厚度的单元的第一绝缘膜和形成在第一绝缘膜上的多个金属反射膜，使得每个金属反射的整个表面膜形成基本上平行于第一主表面侧的每个单元的表面的反射表面，由此从与第一主表面相对的一侧穿过光敏单元的光被反射回每个感光单元。

10. 发明授权

US07092593B2 Microactuator device and optical switching system using the same 有权
标题翻译：微致动器装置和使用其的光开关系统
公开(公告)号：US07092593B2
公开(公告)日：2006-08-15
申请号：US11099253
申请日：2005-04-04
申请人： Keiichi Akagawa , Yoshihiko Suzuki , Katsuhiko Kurumada , Toshiaki Tamamura , Masatoshi Kanaya
发明人： Keiichi Akagawa , Yoshihiko Suzuki , Katsuhiko Kurumada , Toshiaki Tamamura , Masatoshi Kanaya
IPC分类号： G02B6/26
CPC分类号： G02B6/358 , G02B6/3516 , G02B6/3546 , G02B6/357 , G02B6/3572 , G02B6/3584 , G02B26/0858 , H02K33/18 , H02K41/0354
摘要： A movable plate is fastened to a substrate via flexure parts and can move upward and downward with respect to the substrate. The substrate serves as a fixed electrode. The movable plate has second electrode parts which generate an electrostatic force between these electrode parts and the substrate by virtue of a voltage that is applied across these electrode parts and the substrate and a current path which is disposed in a magnetic field, and which generates a Lorentz force when powered. A mirror advances into and withdraws from the optical path. When the movable plate moves from the lower position in which the electrostatic force is increased to the upper position, the control part controls the current so that the Lorentz force is generated in a downward orientation and gradually decreases while the movable plate moves from an intermediate position to the upper position.
摘要翻译：可移动板通过弯曲部件固定到基板上，并可相对于基板上下移动。基板用作固定电极。可移动板具有第二电极部分，其通过施加在这些电极部分和基板上的电压和设置在磁场中的电流路径而在这些电极部分和基板之间产生静电力，并且产生动力时洛伦兹力。镜子进入和退出光路。当可动板从静电力增加的下部位置移动到上部位置时，控制部分控制电流，使得洛伦兹力在向下取向上产生并且当可动板从中间位置移动时逐渐减小到上位。

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