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    • 4. 发明申请
    • Microactuator device and optical switching system using the same
    • 微致动器装置和使用其的光开关系统
    • US20050213878A1
    • 2005-09-29
    • US11099253
    • 2005-04-04
    • Keiichi AkagawaYoshihiko SuzukiKatsuhiko KurumadaToshiaki TamamuraMasatoshi Kanaya
    • Keiichi AkagawaYoshihiko SuzukiKatsuhiko KurumadaToshiaki TamamuraMasatoshi Kanaya
    • B81B3/00B81B7/04G01P15/125G02B6/26G02B6/35G02B6/42G02B26/08G02F1/09H02K33/18H02K41/035
    • G02B6/358G02B6/3516G02B6/3546G02B6/357G02B6/3572G02B6/3584G02B26/0858H02K33/18H02K41/0354
    • A movable plate 21 is fastened to a substrate 11 via flexure parts 27a and 27b, and can move upward and downward with respect to the substrate 11. The substrate 11 also serves as a fixed electrode. The movable plate 21 has second electrode parts 23a and 23b which can generate an electrostatic force between these electrode parts and the substrate 11 by means of a voltage that is applied across these electrode parts and the substrate 11, and a current path 25 which is disposed in a magnetic field, and which generates a Lorentz force when powered. A mirror 12 which advances into and withdraws from the optical path is disposed on the movable plate 21. When the movable plate 21 is caused to move from the lower position in which the electrostatic force is increased to the upper position, the control part controls the current so that the Lorentz force is generated in a downward orientation and gradually decreases while the movable plate 21 is moving from an intermediate position to the upper position. As a result, the mobility range of the movable part can be expanded without applying a high voltage or sacrificing compact size, and the power consumption can be reduced; furthermore, the reliability in the case of long-term operation can be increased.
    • 可移动板21通过挠曲部件27a和27b固定到基板11上,并且可相对于基板11上下移动。 基板11也用作固定电极。 可移动板21具有第二电极部分23a和23b,其可以通过施加在这些电极部分和基板11上的电压而在这些电极部分和基板11之间产生静电力,以及电流通路25, 被设置在磁场中,并且当通电时产生洛伦兹力。 在可动板21上设置有从光路前进和退出的反射镜12。 当可动板21从静电力增加的下部位置移动到上部位置时,控制部分控制电流,使得向下方向产生洛伦兹力并逐渐减小,而可动板21 从中间位置移动到上位置。 结果,可以在不施加高电压或牺牲紧凑尺寸的情况下扩大可移动部件的移动范围,并且可以降低功耗; 此外,可以增加长期运行情况下的可靠性。
    • 5. 发明授权
    • Waveguide type optical device and position detecting method
    • 波导型光学装置及位置检测方法
    • US07006722B2
    • 2006-02-28
    • US10509012
    • 2003-03-28
    • Katsuhiko KurumadaToshiaki TamamuraMasatoshi KanayaShigendo NishiKeiichi Akagawa
    • Katsuhiko KurumadaToshiaki TamamuraMasatoshi KanayaShigendo NishiKeiichi Akagawa
    • G02B6/26
    • G01D5/35345G01D5/342
    • A waveguide type optical device performs such monitoring as detection of a relative position of an insert plate to a groove. The waveguide type optical device comprises a groove disposed at an intersection position of a first optical waveguide and a second optical waveguide; an insert plate disposed to be insertable into the groove; means for applying a static magnetic field such that a vector product of a velocity vector (A) of the insert plate and its magnetic field vector (B) is nonzero; a cantilever that has electrical wiring including therein a wiring part lying in a direction perpendicular to both the velocity vector and the magnetic field vector and that supports the insert plate; and means for detecting a relative position of the insert plate to the groove by detecting a current induced in the electrical wiring.
    • 波导型光学器件执行诸如检测插入板相对于凹槽的相对位置的监视。 波导型光学器件包括设置在第一光波导和第二光波导的交叉位置处的槽; 插入板,其设置成可插入到所述凹槽中; 用于施加静态磁场的装置,使得插入板的速度矢量(A)和其磁场矢量(B)的矢量积不为零; 具有电线的悬臂,其中包括布置部分,所述布线部分位于垂直于所述速度矢量和所述磁场矢量的方向上并且支撑所述插入板; 以及用于通过检测在所述电线中感应出的电流来检测所述插入板到所述凹槽的相对位置的装置。
    • 9. 发明授权
    • Radiation-detection devices
    • 辐射检测装置
    • US06828557B2
    • 2004-12-07
    • US10000179
    • 2001-11-30
    • Tohru IshizuyaJunji SuzukiKeiichi Akagawa
    • Tohru IshizuyaJunji SuzukiKeiichi Akagawa
    • G01J538
    • G01J5/40G01J5/0853
    • Radiation detectors are disclosed that include at least one element (pixel). In a pixel, a desired positional relationship between two “effecting” elements is maintained regardless of changes in temperature or other prevailing variable. The detectors can be “electrical capacitance” or “optical-readout” types. A pixel of the electrical capacitance type includes two electrodes (reference electrode and response electrode) that face each other and have a set gap therebetween. The electrodes are attached to respective displaceable members (configured as thermal bimorphs) having identical structures. A pixel of the optical readout type includes a half-mirror and a reflector that face each other and have a set gap therebetween. The half-mirror and reflector are attached to respective displaceable members. Radiation is absorbed by a radiation absorber that transfers the heat to certain displaceable members that bend to tilt accordingly. Other displaceable members are not heated and do not bend. The displaceable members are formable simultaneously during respective fabrication steps.
    • 公开了包括至少一个元件(像素)的辐射检测器。 在一个像素中,保持两个“有效”元素之间的期望位置关系,而不管温度变化或其他主要变量。 检测器可以是“电容”或“光学读出”类型。 电容型的像素包括彼此相对并且在它们之间具有设定间隙的两个电极(参考电极和响应电极)。 电极连接到具有相同结构的相应的可移位构件(配置为热双压电晶片)。 光学读出型的像素包括半反射镜和反射镜,它们彼此面对并且在它们之间具有设定的间隙。 半反射镜和反射器连接到相应的可移位构件。 辐射被辐射吸收器吸收,辐射吸收器将热量转移到相应地弯曲倾斜的某些可移位构件。 其他可移位构件不加热并且不弯曲。 可移动构件在相应的制造步骤期间可同时成形。