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    • 6. 发明授权
    • Apparatus and methods for measuring stress in a specimen including a thin membrane
    • 用于测量包括薄膜的试样中的应力的装置和方法
    • US06457359B1
    • 2002-10-01
    • US09656974
    • 2000-09-07
    • Yoshihiko Suzuki
    • Yoshihiko Suzuki
    • G01N2900
    • G01N29/4427G01N29/12G01N29/2418G01N29/46G01N2291/0237
    • Apparatus and methods are provided for measuring stresses in specimens (e.g., reticles and reticle blanks used in charged-particle-beam microlithography) that include a membrane. The disclosed apparatus and methods provide such measurements at a higher throughput than obtainable using conventional apparatus and methods. A representative stress-measuring apparatus includes a vibration-applying device that remotely (over a distance) applies a desired vibration to the membrane of the specimen. Meanwhile, a laser light source irradiates the vibrating membrane with laser light. A light receiver receives light reflected from the membrane. Electrical signals from the light receiver are processed to convert the output from the light receiver into a respective vibration spectrum. The vibration spectrum is analyzed against standard data to ascertain a strength characteristic of the membrane.
    • 提供了用于测量包括膜的样品(例如,用于带电粒子束微光刻中的掩模版和掩模版坯料)中的应力的装置和方法。 所公开的装置和方法以比使用常规装置和方法可获得的更高的吞吐量提供这种测量。 一种代表性的应力测量装置包括远程(一段距离)对试样的膜施加期望的振动的振动施加装置。 同时,激光光源用激光照射振动膜。 光接收器接收从膜反射的光。 来自光接收器的电信号被处理以将来自光接收器的输出转换成相应的振动频谱。 根据标准数据分析振动谱,以确定膜的强度特性。