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1. 发明授权

US07381971B2 Method and apparatus for in-situ probe tip replacement inside a charged particle beam microscope 有权
标题翻译：用于在带电粒子束显微镜内进行原位探针尖端置换的方法和装置
公开(公告)号：US07381971B2
公开(公告)日：2008-06-03
申请号：US11186073
申请日：2005-07-21
申请人： Thomas M. Moore , Lyudmilla Zaykova-Feldman
发明人： Thomas M. Moore , Lyudmilla Zaykova-Feldman
IPC分类号： G21K7/00
CPC分类号： H01J37/20 , H01J37/26 , H01J2237/2005 , H01J2237/2006 , H01J2237/2007 , H01J2237/201 , H01J2237/204 , H01J2237/208 , H01J2237/26 , H01J2237/262 , H01J2237/31745 , H01J2237/31749
摘要： We disclose a gripper and associated apparatus and methods for delivering nano-manipulator probe tips inside a vacuum chamber. The gripper includes a tube; a compression cylinder inside of and coaxial with the tube; and at least one elastic ring adjacent to the compression cylinder. There is a vacuum seal coaxial with the compression cylinder for receiving and sealing against a probe tip. An actuator is connected to the compression cylinder for compressing the elastic ring and causing it to grip the probe tip. Thus the probe tip can be gripped, transferred to a different location in the vacuum chamber, and released there.Samples attached to the probe tips will be transferred to a TEM sample holder, shown in several embodiments, that includes a bar having opposed ends; an arm attached to each opposed end of the bar; one or more slots for receiving a probe tip; and, each slot having an inner part and an outer part, where the inner part is smaller than the outer part. The TEM sample holders just described are inserted into a carrier cassette. A cassette for transferring one or more TEM sample holders comprises a platform; at least one bar extending upwardly from the platform; the bar having a groove for receiving and holding a TEM sample holder. A rotatable magazine holds one or more probe tips and selectively releases the tips. The magazine includes a cartridge having a plurality of longitudinal openings for receiving probe tips and dispensing probe tips.
摘要翻译：我们公开了一种夹具和相关的装置和方法，用于在真空室内输送纳米机械手探针尖端。夹具包括管; 压缩缸内部并与管同轴; 以及与压缩圆筒相邻的至少一个弹性环。存在与压缩筒同轴的真空密封件，用于接收和密封探针尖端。致动器连接到压缩气缸，用于压缩弹性环并使其夹持探针尖端。因此，探针尖端可以被夹持，转移到真空室中的不同位置，并在那里释放。附接到探针尖端的样品将转移到TEM样品保持器，如几个实施方案中所示，其包括具有相对端的棒; 连接到杆的每个相对端的臂; 用于接收探针尖端的一个或多个狭槽; 并且每个狭槽具有内部部分和外部部分，其中内部部分小于外部部分。刚刚描述的TEM样品架被插入到载体盒中。用于转移一个或多个TEM样品保持器的盒子包括平台; 从平台向上延伸的至少一个杆; 该棒具有用于容纳和保持TEM样品保持器的凹槽。一个可旋转刀库可容纳一个或多个探针尖端并选择性地释放尖端。该盒包括具有多个用于接收探针尖端并分配探针尖端的多个纵向开口的盒。

2. 发明申请

US20130037713A1 METHOD FOR PROCESSING SAMPLES HELD BY A NANOMANIPULATOR 有权
标题翻译：用于处理纳米颗粒的样品的方法
公开(公告)号：US20130037713A1
公开(公告)日：2013-02-14
申请号：US13567487
申请日：2012-08-06
申请人： Cheryl D. Hartfield , Thomas M. Moore
发明人： Cheryl D. Hartfield , Thomas M. Moore
IPC分类号： H01J37/26 , G01N23/201 , G21K5/08
CPC分类号： G01N1/32 , B82Y10/00 , B82Y40/00 , G01N1/286 , G01N2001/2886 , G02B21/32 , H01J37/20 , H01J2237/0216 , H01J2237/208 , H01J2237/31745
摘要： A method for processing a sample in a charged-particle beam microscope. A sample is collected from a substrate and the sample is attached to the tip of a nanomanipulator. The sample is optionally oriented to optimize further processing. The nanomanipulator tip is brought into contact with a stabilizing support to minimize drift or vibration of the sample. The attached sample is then stabilized and available for preparation and analysis.
摘要翻译：一种在带电粒子束显微镜中处理样品的方法。从基材收集样品，并将样品连接到纳米机械手的末端。该样品任选定向以优化进一步的处理。纳米操纵器尖端与稳定支撑件接触以最小化样品的漂移或振动。然后将附着的样品稳定并可用于制备和分析。

3. 发明申请

US20110031397A1 METHOD FOR STEM SAMPLE INSPECTION IN A CHARGED PARTICLE BEAM INSTRUMENT 有权
公开(公告)号：US20110031397A1
公开(公告)日：2011-02-10
申请号：US12896281
申请日：2010-10-01
申请人： Lyudmila Zaykova-Feldman , Thomas M. Moore , Gonzalo Amador , Matthew Hammer
发明人： Lyudmila Zaykova-Feldman , Thomas M. Moore , Gonzalo Amador , Matthew Hammer
IPC分类号： H01J37/28
CPC分类号： G01N23/04 , H01J2237/208 , H01J2237/31745
摘要： A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.

4. 发明授权

US07414252B2 Method and apparatus for the automated process of in-situ lift-out 有权
标题翻译：用于现场提升自动化过程的方法和装置
公开(公告)号：US07414252B2
公开(公告)日：2008-08-19
申请号：US11265934
申请日：2005-11-03
申请人： Thomas M. Moore , Lyudmila Zaykova-Feldman
发明人： Thomas M. Moore , Lyudmila Zaykova-Feldman
IPC分类号： G21G5/00
CPC分类号： H01J37/302 , B82Y15/00 , G01N1/32 , H01J37/20 , H01J37/22 , H01J37/3056 , H01J2237/20 , H01J2237/202 , H01J2237/204 , H01J2237/206 , H01J2237/208 , H01J2237/2482 , H01J2237/28 , H01J2237/30411 , H01J2237/30472 , H01J2237/31745
摘要： An apparatus for performing automated in-situ lift-out of a sample from a specimen includes a computer having a memory with computer-readable instructions, a stage for a specimen and a nano-manipulator. The stage and the nano-manipulator are controlled by motion controllers connected to the computer. The nano-manipulator has a probe tip for attachment to samples excised from the specimen. The computer-readable instructions include instructions to cause the stage motion controllers and the nano-manipulator motion controllers, as well as an ion-beam source, to automatically perform in-situ lift-out of a sample from the specimen.
摘要翻译：用于从样本进行样品的自动原位提取的装置包括具有具有计算机可读指令的存储器的计算机，用于样本的台和纳米操纵器。舞台和纳米操纵器由连接到计算机的运动控制器控制。纳米操纵器具有用于附着到从样品切除的样品的探针尖端。计算机可读指令包括使载物台运动控制器和纳米操纵器运动控制器以及离子束源自动执行样品从样本的原位提取的指令。

5. 发明授权

US06561868B1 System and method for controlling a polishing machine 有权
标题翻译：用于控制抛光机的系统和方法
公开(公告)号：US06561868B1
公开(公告)日：2003-05-13
申请号：US09727187
申请日：2000-11-30
申请人： Henry Litzmann Edwards , Sung-Jen Fang , Thomas M. Moore
发明人： Henry Litzmann Edwards , Sung-Jen Fang , Thomas M. Moore
IPC分类号： B24B4900
CPC分类号： B24B37/30 , B24B37/013 , B24B49/10
摘要： A system for controlling a polishing machine during polishing of a workpiece, such as a semiconductor wafer, includes a carrier which has an interface surface for engaging a workpiece and establishing ultrasonic coupling thereto. At least one crystal oscillator is ultrasonically coupled to the carrier and operates at a resonant frequency in an ultrasonic band which is indicative of a desired polishing depth of the workpiece, such as the endpoint of polishing. A detector circuit provides an output signal which is representative of an output level of the crystal oscillator. A processor circuit receives the signal from the detector circuit and provides a signal to the polishing machine when the amplitude of the signal from the detector circuit indicates that the desired polishing endpoint has been reached. A number of crystal oscillators can be spatially arranged on the carrier to establish a local polishing depth detection array.
摘要翻译：一种用于在诸如半导体晶片的工件的抛光期间控制抛光机的系统包括具有用于接合工件并与其建立超声耦合的界面的载体。至少一个晶体振荡器被超声波耦合到载体上，并以超声波带的谐振频率工作，这表明了工件的期望的抛光深度，例如抛光的终点。检测器电路提供表示晶体振荡器的输出电平的输出信号。处理器电路接收来自检测器电路的信号，并且当来自检测器电路的信号的振幅指示已经达到所需的抛光端点时，向抛光机提供信号。可以将多个晶体振荡器空间布置在载体上以建立局部抛光深度检测阵列。

6. 发明授权

US06420722B2 Method for sample separation and lift-out with one cut 有权
标题翻译：一次切割样品分离和取出方法
公开(公告)号：US06420722B2
公开(公告)日：2002-07-16
申请号：US09863571
申请日：2001-05-23
申请人： Thomas M. Moore , Rocky D. Kruger , Cheryl Hartfield
发明人： Thomas M. Moore , Rocky D. Kruger , Cheryl Hartfield
IPC分类号： G01N2186
CPC分类号： H01L21/67092 , G01N1/32 , H01J2237/3109
摘要： When a desired portion is separated from an integrated circuit chip or a semiconductor wafer, the portion is separated so that the resulting sample can be moved to a location for examination by TEM, SEM or other means. A sample portion of the chip or wafer containing an area of interest is separated with a single cut by a focused ion-beam. Prior to separation, the sample is fixed to a micromanipulator probe. The sample is moved by the probe to the location for examination and fixed there. The probe is then detached from the sample by the focused ion-beam.
摘要翻译：当将期望的部分与集成电路芯片或半导体晶片分离时，该部分被分离，使得所得到的样品可以通过TEM，SEM或其它方式移动到用于检查的位置。包含感兴趣区域的芯片或晶片的样品部分用聚焦离子束的单个切割分离。在分离之前，将样品固定在显微操纵器探针上。样品被探针移动到位置进行检查并固定在那里。然后通过聚焦离子束将探针与样品分离。

7. 发明授权

US5627320A Apparatus and method for automated non-destructive inspection of integrated circuit packages 失效
标题翻译：用于集成电路封装的自动无损检测的装置和方法
公开(公告)号：US5627320A
公开(公告)日：1997-05-06
申请号：US479274
申请日：1995-06-07
申请人： Thomas M. Moore
发明人： Thomas M. Moore
IPC分类号： G01N29/06 , G01N29/11 , G01N29/36 , G01N29/38 , G01N29/48 , G01S7/52 , G01S15/89
CPC分类号： G01N29/0618 , G01N29/0681 , G01N29/11 , G01N29/36 , G01N29/38 , G01N29/48 , G01S15/8938 , G01S7/52025 , G01N2291/015 , G01N2291/0235 , G01N2291/101 , G01N2291/2632 , G01N2291/2698
摘要： A display system for non-destructive inspection of integrated circuit packages is disclosed for producing acoustical reflected images from selected planes within an integrated circuit package to detect flaws within the package.
摘要翻译：公开了用于集成电路封装的非破坏性检查的显示系统，用于从集成电路封装内的选定平面产生声反射图像，以检测封装内的缺陷。

8. 发明申请

US20100051802A1 SINGLE-CHANNEL OPTICAL PROCESSING SYSTEM FOR ENERGETIC-BEAM MICROSCOPES 有权
标题翻译：用于能量束显微镜的单通道光学处理系统
公开(公告)号：US20100051802A1
公开(公告)日：2010-03-04
申请号：US12201447
申请日：2008-08-29
申请人： Herschel M. Marchman , Thomas M. Moore , Rocky Kruger
发明人： Herschel M. Marchman , Thomas M. Moore , Rocky Kruger
IPC分类号： G01N23/00
CPC分类号： H01J37/226 , H01J37/3045 , H01J2237/2482 , H01J2237/317 , H01J2237/31749
摘要： A single-channel optical processing system for an energetic-beam instrument has separate sources for processing radiation and illumination radiation. The processing radiation and the illumination radiation are combined in a single optical path and directed to a sample surface inside the energetic-beam instrument through a self-focusing rod lens. The self-focusing rod lens thus has a working distance from the sample surface that will not interfere with typical arrangements of ion beams and electron beams in such instruments. A combination of polarizers and beam splitters allows separation of the combined incident radiation and the combined radiation reflected from the sample surface and returned through the same optical channel, so that the reflected radiation may be directed to an optical detector, such as a camera or spectrometer. In other embodiments, additional illumination of the sample surface is provided at an angle to the central axis of the self-focusing rod lens.
摘要翻译：用于能量束仪器的单通道光学处理系统具有用于处理辐射和照射辐射的单独源。处理辐射和照射辐射在单个光学路径中组合并通过自聚焦棒透镜指向能量束仪器内部的样品表面。因此，自聚焦棒透镜具有与样品表面的工作距离，其不会干扰这些仪器中的离子束和电子束的典型布置。偏振器和分束器的组合允许组合的入射辐射和从样品表面反射的组合辐射分离并通过相同的光学通道返回，使得反射的辐射可以被引导到诸如相机或光谱仪的光学检测器。在其他实施例中，样品表面的附加照明以与自聚焦棒透镜的中心轴成一定角度设置。

9. 发明申请

US20090078060A1 METHOD AND APPARATUS FOR TRANSFER OF SAMPLES IN A CONTROLLED ENVIRONMENT 有权
标题翻译：在控制环境中转移样品的方法和装置
公开(公告)号：US20090078060A1
公开(公告)日：2009-03-26
申请号：US11860663
申请日：2007-09-25
申请人： Thomas M. Moore , Gonzalo Amador
发明人： Thomas M. Moore , Gonzalo Amador
IPC分类号： G01N1/28 , G01N35/10
CPC分类号： G01N1/286 , B25J21/02 , G01N35/04 , G01N2035/00277 , G01N2035/00316 , H01J37/16 , H01J37/185 , H01J2237/184 , H01J2237/204 , H01J2237/31745 , Y10T436/25
摘要： An apparatus for the transfer of samples from an analytical instrument has a sealable transfer capsule and a means for connecting the transfer capsule to a vacuum instrument, such as a FIB, through an interface connected to the instrument. The capsule has a door that can be opened to insert a sample holder, such as a TEM sample holder, into the instrument, and then closed when the sample holder holding an excised sample is retracted back into the transfer capsule. The instrument interface contains means for sealing the instrument before the transfer capsule holding a sample is disconnected, and for purging the transfer capsule with an inert gas. The sample may thus be transported in the sealed transfer capsule without exposure to the ambient atmosphere. The sample may be transported to and connected to a glove box also purged with an inert gas for examination or further operations.
摘要翻译：用于从分析仪器传送样品的装置具有可密封的转移胶囊和用于通过连接到仪器的界面将转移胶囊连接到诸如FIB的真空装置的装置。胶囊具有可以打开的门，以将诸如TEM样品保持器的样品保持器插入仪器中，然后当保持切除的样品的样品架缩回到转移胶囊中时关闭。仪器接口包含用于在保持样品的转移胶囊断开之前密封仪器的装置，并且用惰性气体吹扫转移胶囊。因此，样品可以在密封的转移胶囊内运输而不暴露于环境大气中。样品可以运送到也连接到也用惰性气体吹扫的手套箱进行检查或进一步操作。

10. 发明授权

US07446542B2 Apparatus and method for automated stress testing of flip-chip packages 失效
标题翻译：倒装芯片封装自动应力测试的装置和方法
公开(公告)号：US07446542B2
公开(公告)日：2008-11-04
申请号：US11367562
申请日：2006-03-03
申请人： Lyudmila Zaykova-Feldman , Thomas M. Moore
发明人： Lyudmila Zaykova-Feldman , Thomas M. Moore
IPC分类号： G01R31/302 , G01R31/28
CPC分类号： G01R31/2881 , G01M7/08 , G01N3/00 , G01N3/307 , G01N3/313 , G01N2203/0044 , G01N2203/005 , G01N2203/0057 , G01N2203/0296 , G01N2203/0676 , G01R31/2868 , H01L21/67011
摘要： An apparatus for testing flip-chip packages has a programmed computer, a test-engine stage for applying an impact to at least one package under test, and a monitoring stage. The test-engine stage causes an impact on the package on the side opposite its ball-grid array. The test-engine stage has actuators connected to the test-engine stage and the computer, for moving and aligning the test-engine stage. The monitoring stage has a digital camera connected to the computer for transmitting digital images from the ball-grid array side of the package to the computer. A microscope is preferably connected to the digital camera. A sample stage located between the test-engine stage and the monitoring stage holds the package under test. The sample stage has an acoustic transducer capable of being removably connected to the package under test. The acoustic transducer is connected to the computer for transmitting signals from the acoustic transducer to the computer.
摘要翻译：用于测试倒装芯片封装的装置具有编程的计算机，用于对至少一个待测试包进行冲击的测试引擎阶段和监视阶段。测试引擎级在与球栅阵列相反的一侧对包装产生影响。测试发动机级具有连接到测试发动机级和计算机的致动器，用于移动和对准测试引擎级。监控级具有连接到计算机的数字照相机，用于将数字图像从包装的球栅阵列侧传输到计算机。显微镜优选地连接到数码相机。位于测试引擎级和监控级之间的样品台保持被测试的包装。样品台具有能够可拆卸地连接到被测试包装的声学换能器。声学换能器连接到计算机，用于将信号从声学传感器传输到计算机。

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