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1. 发明授权

US08512474B2 Apparatus for precursor delivery system for irradiation beam instruments 有权
标题翻译：用于照射束仪器的前驱体输送系统的装置
公开(公告)号：US08512474B2
公开(公告)日：2013-08-20
申请号：US13357741
申请日：2012-01-25
申请人： Rocky Kruger , Aaron Smith , Thomas M. Moore
发明人： Rocky Kruger , Aaron Smith , Thomas M. Moore
IPC分类号： C23C16/00 , B05C11/00
CPC分类号： C23C16/4481 , C23C16/45561 , C23C16/48 , C23C16/52 , C23C16/54
摘要： A precursor delivery system for an irradiation beam instrument includes an injection tube for injecting gasses into the instrument vacuum chamber and a main gas line having an inlet and an outlet. The outlet is connected to the injection tube, and the inlet is connected to a sequential pair of valves connected to a carrier gas source. A crucible for holding precursor material is selectively connected to the main gas line at a location between the pair of valves and the injection tube. The source of carrier gas may be selectively connected to the inlet by sequential operation of the pair of carrier gas valves, so that pulses of carrier gas assist the flow of precursor material to the injection tube. Rapid purging of the system between precursors is enabled by a valve selectively connecting the main line to an envelope in communication with the instrument vacuum.
摘要翻译：用于照射束仪器的前体传送系统包括用于将气体注入仪器真空室的注入管和具有入口和出口的主气体管线。出口连接到注射管，入口连接到连接到载气源的顺序一对阀。用于保持前体材料的坩埚在一对阀和注射管之间的位置处选择性地连接到主气体管线。载气源可以通过一对载气阀的顺序操作选择性地连接到入口，使得载气的脉冲有助于前体材料流到注射管。通过阀选择性地将主管线连接到与仪器真空连通的外壳，能够快速清洗前体之间的系统。

2. 发明申请

US20100068408A1 METHODS FOR ELECTRON-BEAM INDUCED DEPOSITION OF MATERIAL INSIDE ENERGETIC-BEAM MICROSCOPES 审中-公开
标题翻译：电子束诱导材料在能量束微结构中的沉积方法
公开(公告)号：US20100068408A1
公开(公告)日：2010-03-18
申请号：US12211638
申请日：2008-09-16
申请人： Lyudmila Zaykova-Feldman , Rocky Kruger , Thomas M. Moore , Herschel M. Marchman
发明人： Lyudmila Zaykova-Feldman , Rocky Kruger , Thomas M. Moore , Herschel M. Marchman
IPC分类号： C23C16/46 , C23C16/02
CPC分类号： C23C16/487 , C23C16/0227 , C23C16/48 , C23C16/483
摘要： We disclose method for materials deposition on a surface inside an energetic-beam instrument, where the energetic beam instrument is provided with a laser beam, an electron beam, and a source of precursor gas. The electron beam is focused on the surface, and the laser beam is focused to a focal point that is at a distance above the surface of about 5 microns to one mm, preferably from 5 to 50 microns. The focal point of the laser beam will thus be within the stream of precursor gas injected at the sample surface, so that the laser beam will facilitate reactions in this gas cloud with less heating of the surface. A second laser may be used for cleaning the surface.
摘要翻译：我们公开了在能量束仪器内的表面上沉积材料的方法，其中能量束仪器设置有激光束，电子束和前体气体源。电子束聚焦在表面上，并且激光束被聚焦到距离大约5微米至1毫米，优选5至50微米的表面之上的焦点。因此，激光束的焦点将在样品表面注入的前体气体流中，使得激光束将有助于在该气体云中的反应较少，而表面的加热较少。可以使用第二激光器来清洁表面。

3. 发明申请

US20090223451A1 METHOD AND APPARATUS FOR PRECURSOR DELIVERY SYSTEM FOR IRRADIATION BEAM INSTRUMENTS 有权
标题翻译：用于辐照光束仪器的前驱器传送系统的方法和装置
公开(公告)号：US20090223451A1
公开(公告)日：2009-09-10
申请号：US12399579
申请日：2009-03-06
申请人： Rocky Kruger , Aaron Smith , Thomas M. Moore
发明人： Rocky Kruger , Aaron Smith , Thomas M. Moore
IPC分类号： C23C16/54
CPC分类号： C23C16/4481 , C23C16/45561 , C23C16/48 , C23C16/52 , C23C16/54
摘要： A precursor delivery system for an irradiation beam instrument having a vacuum chamber includes an injection tube for injecting gasses into the vacuum chamber of the instrument and a main gas line having an inlet and an outlet. The outlet is connected to the injection tube, and the inlet is connected to a sequential pair of valves connected to a carrier gas source. A crucible for holding precursor material is selectively connected to the main gas line at a location between the pair of valves and the injection tube. The source of carrier gas may be selectively connected to the inlet by sequential operation of the pair of carrier gas valves, so that pulses of carrier gas assist the flow of precursor material to the injection tube. Rapid purging of the system between precursors is enabled by a valve selectively connecting the main line to an envelope in communication with the instrument vacuum. Methods of CVD and etching using the system are also disclosed.
摘要翻译：具有真空室的照射束装置的前体输送系统包括用于将气体注入仪器的真空室的注入管和具有入口和出口的主气体管线。出口连接到注射管，入口连接到连接到载气源的顺序一对阀。用于保持前体材料的坩埚在一对阀和注射管之间的位置处选择性地连接到主气体管线。载气源可以通过一对载气阀的顺序操作选择性地连接到入口，使得载气的脉冲有助于前体材料流到注射管。通过阀选择性地将主管线连接到与仪器真空连通的外壳，能够快速清洗前体之间的系统。还公开了使用该系统的CVD和蚀刻的方法。

4. 发明授权

US08394454B2 Method and apparatus for precursor delivery system for irradiation beam instruments 有权
标题翻译：用于照射束仪的前驱体输送系统的方法和装置
公开(公告)号：US08394454B2
公开(公告)日：2013-03-12
申请号：US12399579
申请日：2009-03-06
申请人： Rocky Kruger , Aaron Smith , Thomas M. Moore
发明人： Rocky Kruger , Aaron Smith , Thomas M. Moore
IPC分类号： C23C16/00 , C23C8/00
CPC分类号： C23C16/4481 , C23C16/45561 , C23C16/48 , C23C16/52 , C23C16/54
摘要： A precursor delivery system for an irradiation beam instrument having a vacuum chamber includes an injection tube for injecting gasses into the vacuum chamber of the instrument and a main gas line having an inlet and an outlet. The outlet is connected to the injection tube, and the inlet is connected to a sequential pair of valves connected to a carrier gas source. A crucible for holding precursor material is selectively connected to the main gas line at a location between the pair of valves and the injection tube. The source of carrier gas may be selectively connected to the inlet by sequential operation of the pair of carrier gas valves, so that pulses of carrier gas assist the flow of precursor material to the injection tube. Rapid purging of the system between precursors is enabled by a valve selectively connecting the main line to an envelope in communication with the instrument vacuum. Methods of CVD and etching using the system are also disclosed.
摘要翻译：具有真空室的照射束装置的前体输送系统包括用于将气体注入仪器的真空室的注入管和具有入口和出口的主气体管线。出口连接到注射管，入口连接到连接到载气源的顺序一对阀。用于保持前体材料的坩埚在一对阀和注射管之间的位置处选择性地连接到主气体管线。载气源可以通过一对载气阀的顺序操作选择性地连接到入口，使得载气的脉冲有助于前体材料流到注射管。通过阀选择性地将主管线连接到与仪器真空连通的外壳，能够快速清洗前体之间的系统。还公开了使用该系统的CVD和蚀刻的方法。

5. 发明申请

US20130025536A1 APPARATUS FOR PRECURSOR DELIVERY SYSTEM FOR IRRADIATION BEAM INSTRUMENTS 有权
标题翻译：用于辐射光束仪器的前驱递送系统的装置
公开(公告)号：US20130025536A1
公开(公告)日：2013-01-31
申请号：US13357741
申请日：2012-01-25
申请人： Rocky Kruger , Aaron Smith , Thomas M. Moore
发明人： Rocky Kruger , Aaron Smith , Thomas M. Moore
IPC分类号： C23C16/452
CPC分类号： C23C16/4481 , C23C16/45561 , C23C16/48 , C23C16/52 , C23C16/54
摘要： A precursor delivery system for an irradiation beam instrument includes an injection tube for injecting gasses into the instrument vacuum chamber and a main gas line having an inlet and an outlet. The outlet is connected to the injection tube, and the inlet is connected to a sequential pair of valves connected to a carrier gas source. A crucible for holding precursor material is selectively connected to the main gas line at a location between the pair of valves and the injection tube. The source of carrier gas may be selectively connected to the inlet by sequential operation of the pair of carrier gas valves, so that pulses of carrier gas assist the flow of precursor material to the injection tube. Rapid purging of the system between precursors is enabled by a valve selectively connecting the main line to an envelope in communication with the instrument vacuum.
摘要翻译：用于照射束仪器的前体传送系统包括用于将气体注入仪器真空室的注入管和具有入口和出口的主气体管线。出口连接到注射管，入口连接到连接到载气源的顺序一对阀。用于保持前体材料的坩埚在一对阀和注射管之间的位置处选择性地连接到主气体管线。载气源可以通过一对载气阀的顺序操作选择性地连接到入口，使得载气的脉冲有助于前体材料流到注射管。通过阀选择性地将主管线连接到与仪器真空连通的外壳，能够快速清洗前体之间的系统。

6. 发明授权

US07961397B2 Single-channel optical processing system for energetic-beam microscopes 有权
标题翻译：用于能量束显微镜的单通道光学处理系统
公开(公告)号：US07961397B2
公开(公告)日：2011-06-14
申请号：US12201447
申请日：2008-08-29
申请人： Herschel M. Marchman , Thomas M. Moore , Rocky Kruger
发明人： Herschel M. Marchman , Thomas M. Moore , Rocky Kruger
IPC分类号： G02B27/10
CPC分类号： H01J37/226 , H01J37/3045 , H01J2237/2482 , H01J2237/317 , H01J2237/31749
摘要： A single-channel optical processing system for an energetic-beam instrument has separate sources for processing radiation and illumination radiation. The processing radiation and the illumination radiation are combined in a single optical path and directed to a sample surface inside the energetic-beam instrument through a self-focusing rod lens. The self-focusing rod lens thus has a working distance from the sample surface that will not interfere with typical arrangements of ion beams and electron beams in such instruments. A combination of polarizers and beam splitters allows separation of the combined incident radiation and the combined radiation reflected from the sample surface and returned through the same optical channel, so that the reflected radiation may be directed to an optical detector, such as a camera or spectrometer. In other embodiments, additional illumination of the sample surface is provided at an angle to the central axis of the self-focusing rod lens.
摘要翻译：用于能量束仪器的单通道光学处理系统具有用于处理辐射和照射辐射的单独源。处理辐射和照射辐射在单个光学路径中组合并通过自聚焦棒透镜指向能量束仪器内部的样品表面。因此，自聚焦棒透镜具有与样品表面的工作距离，其不会干扰这些仪器中的离子束和电子束的典型布置。偏振器和分束器的组合允许组合的入射辐射和从样品表面反射的组合辐射分离并通过相同的光学通道返回，使得反射的辐射可以被引导到诸如相机或光谱仪的光学检测器。在其他实施例中，样品表面的附加照明以与自聚焦棒透镜的中心轴成一定角度设置。

7. 发明申请

US20100051802A1 SINGLE-CHANNEL OPTICAL PROCESSING SYSTEM FOR ENERGETIC-BEAM MICROSCOPES 有权
标题翻译：用于能量束显微镜的单通道光学处理系统
公开(公告)号：US20100051802A1
公开(公告)日：2010-03-04
申请号：US12201447
申请日：2008-08-29
申请人： Herschel M. Marchman , Thomas M. Moore , Rocky Kruger
发明人： Herschel M. Marchman , Thomas M. Moore , Rocky Kruger
IPC分类号： G01N23/00
CPC分类号： H01J37/226 , H01J37/3045 , H01J2237/2482 , H01J2237/317 , H01J2237/31749
摘要： A single-channel optical processing system for an energetic-beam instrument has separate sources for processing radiation and illumination radiation. The processing radiation and the illumination radiation are combined in a single optical path and directed to a sample surface inside the energetic-beam instrument through a self-focusing rod lens. The self-focusing rod lens thus has a working distance from the sample surface that will not interfere with typical arrangements of ion beams and electron beams in such instruments. A combination of polarizers and beam splitters allows separation of the combined incident radiation and the combined radiation reflected from the sample surface and returned through the same optical channel, so that the reflected radiation may be directed to an optical detector, such as a camera or spectrometer. In other embodiments, additional illumination of the sample surface is provided at an angle to the central axis of the self-focusing rod lens.
摘要翻译：用于能量束仪器的单通道光学处理系统具有用于处理辐射和照射辐射的单独源。处理辐射和照射辐射在单个光学路径中组合并通过自聚焦棒透镜指向能量束仪器内部的样品表面。因此，自聚焦棒透镜具有与样品表面的工作距离，其不会干扰这些仪器中的离子束和电子束的典型布置。偏振器和分束器的组合允许组合的入射辐射和从样品表面反射的组合辐射分离并通过相同的光学通道返回，使得反射的辐射可以被引导到诸如相机或光谱仪的光学检测器。在其他实施例中，样品表面的附加照明以与自聚焦棒透镜的中心轴成一定角度设置。

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