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1. 发明申请

US20110031397A1 METHOD FOR STEM SAMPLE INSPECTION IN A CHARGED PARTICLE BEAM INSTRUMENT 有权
公开(公告)号：US20110031397A1
公开(公告)日：2011-02-10
申请号：US12896281
申请日：2010-10-01
申请人： Lyudmila Zaykova-Feldman , Thomas M. Moore , Gonzalo Amador , Matthew Hammer
发明人： Lyudmila Zaykova-Feldman , Thomas M. Moore , Gonzalo Amador , Matthew Hammer
IPC分类号： H01J37/28
CPC分类号： G01N23/04 , H01J2237/208 , H01J2237/31745
摘要： A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.

2. 发明申请

US20090078060A1 METHOD AND APPARATUS FOR TRANSFER OF SAMPLES IN A CONTROLLED ENVIRONMENT 有权
标题翻译：在控制环境中转移样品的方法和装置
公开(公告)号：US20090078060A1
公开(公告)日：2009-03-26
申请号：US11860663
申请日：2007-09-25
申请人： Thomas M. Moore , Gonzalo Amador
发明人： Thomas M. Moore , Gonzalo Amador
IPC分类号： G01N1/28 , G01N35/10
CPC分类号： G01N1/286 , B25J21/02 , G01N35/04 , G01N2035/00277 , G01N2035/00316 , H01J37/16 , H01J37/185 , H01J2237/184 , H01J2237/204 , H01J2237/31745 , Y10T436/25
摘要： An apparatus for the transfer of samples from an analytical instrument has a sealable transfer capsule and a means for connecting the transfer capsule to a vacuum instrument, such as a FIB, through an interface connected to the instrument. The capsule has a door that can be opened to insert a sample holder, such as a TEM sample holder, into the instrument, and then closed when the sample holder holding an excised sample is retracted back into the transfer capsule. The instrument interface contains means for sealing the instrument before the transfer capsule holding a sample is disconnected, and for purging the transfer capsule with an inert gas. The sample may thus be transported in the sealed transfer capsule without exposure to the ambient atmosphere. The sample may be transported to and connected to a glove box also purged with an inert gas for examination or further operations.
摘要翻译：用于从分析仪器传送样品的装置具有可密封的转移胶囊和用于通过连接到仪器的界面将转移胶囊连接到诸如FIB的真空装置的装置。胶囊具有可以打开的门，以将诸如TEM样品保持器的样品保持器插入仪器中，然后当保持切除的样品的样品架缩回到转移胶囊中时关闭。仪器接口包含用于在保持样品的转移胶囊断开之前密封仪器的装置，并且用惰性气体吹扫转移胶囊。因此，样品可以在密封的转移胶囊内运输而不暴露于环境大气中。样品可以运送到也连接到也用惰性气体吹扫的手套箱进行检查或进一步操作。

3. 发明申请

US20080258056A1 METHOD FOR STEM SAMPLE INSPECTION IN A CHARGED PARTICLE BEAM INSTRUMENT 有权
标题翻译：充电颗粒光束仪器中的样品检测方法
公开(公告)号：US20080258056A1
公开(公告)日：2008-10-23
申请号：US12041217
申请日：2008-03-03
申请人： Lyudmila Zaykova-Feldman , Thomas M. Moore , Gonzalo Amador , Matthew Hammer
发明人： Lyudmila Zaykova-Feldman , Thomas M. Moore , Gonzalo Amador , Matthew Hammer
IPC分类号： G01N23/00
CPC分类号： G01N23/04 , H01J2237/208 , H01J2237/31745
摘要： A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.
摘要翻译：在双光束FIB中的样本检查的方法根据FIB的几何形状和样本台的倾斜度来计算作为第二，第三和第四角度的函数的第一角度。根据所述角度计算第五角度，其中第五角度是切除样本的长轴与探针轴的轴线在X-Y平面上的突起之间的角度。样品台按计算出的第五个角度旋转，然后连接到探针尖端并提起。然后可以通过探针轴通过第一角度的旋转，将样品定位成垂直于FIB电子束的轴线进行STEM分析。

4. 发明授权

US08247768B2 Method for stem sample inspection in a charged particle beam instrument 有权
标题翻译：带电粒子束仪器中的茎样品检查方法
公开(公告)号：US08247768B2
公开(公告)日：2012-08-21
申请号：US12896281
申请日：2010-10-01
申请人： Lyudmila Zaykova-Feldman , Thomas M. Moore , Gonzalo Amador , Matthew Hammer
发明人： Lyudmila Zaykova-Feldman , Thomas M. Moore , Gonzalo Amador , Matthew Hammer
IPC分类号： G01N23/00
CPC分类号： G01N23/04 , H01J2237/208 , H01J2237/31745
摘要： A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.
摘要翻译：在双光束FIB中的样本检查的方法根据FIB的几何形状和样本台的倾斜度来计算作为第二，第三和第四角度的函数的第一角度。根据所述角度计算第五角度，其中第五角度是切除样本的长轴与探针轴的轴线在X-Y平面上的投影之间的角度。样品台按计算出的第五个角度旋转，然后连接到探针尖端并提起。然后可以通过探针轴通过第一角度的旋转，将样品定位成垂直于FIB电子束的轴线进行STEM分析。

5. 发明授权

US07935937B2 Method of forming TEM sample holder 有权
标题翻译：形成TEM样品架的方法
公开(公告)号：US07935937B2
公开(公告)日：2011-05-03
申请号：US12391552
申请日：2009-02-24
申请人： Thomas M. Moore , Gonzalo Amador , Lyudmila Zaykova-Feldman
发明人： Thomas M. Moore , Gonzalo Amador , Lyudmila Zaykova-Feldman
IPC分类号： G01N23/00 , G01F23/00
CPC分类号： H01J37/20 , G01N1/286 , G01N23/2204 , H01J37/26 , H01J37/3056 , H01J37/31 , H01J2237/31745 , H01J2237/31749
摘要： A TEM sample holder is formed from at least one nano-manipulator probe tip and a TEM sample holder pre-form. The probe tip is permanently attached to the TEM sample-holder pre-form to create a TEM sample holder before attachment of a sample to the point of the probe tip inside a FIB. In the preferred embodiment the probe tip is attached to the TEM sample holder pre-form by applying pressure to the pre-form and the probe tip, so as to cause plastic flow of the pre-form material about the probe tip. The TEM sample holder may have smaller dimensions than the TEM sample holder pre-form; in this case the TEM sample holder is cut from the larger TEM sample holder pre-form, preferably in the same operation as attaching the probe tip.
摘要翻译： TEM样品保持器由至少一个纳米机械手探针尖端和TEM样品架预成型件形成。在将样品连接到FIB内的探针尖端的位置之前，探针尖端永久地附着到TEM样品架预成型件上以形成TEM样品架。在优选实施例中，通过向预成型件和探针针尖施加压力，将探头尖端连接到TEM样品架预成型件上，以便使预成型材料围绕探针尖端塑性流动。 TEM样品架可能具有比TEM样品架预制件更小的尺寸; 在这种情况下，TEM样品架从较大的TEM样品保持器预成型切割，优选地在与附接探针尖端相同的操作中。

6. 发明申请

US20110017927A1 METHOD AND APPARATUS FOR THE MONITORING OF SAMPLE MILLING IN A CHARGED PARTICLE INSTRUMENT 有权
标题翻译：用于监测充电颗粒仪器中样品铣削的方法和装置
公开(公告)号：US20110017927A1
公开(公告)日：2011-01-27
申请号：US12842105
申请日：2010-07-23
申请人： Lyudmila Zaykova-Feldman , Thomas M. Moore , Gonzalo Amador
发明人： Lyudmila Zaykova-Feldman , Thomas M. Moore , Gonzalo Amador
IPC分类号： H01J37/22 , H01J37/305 , H01J37/20
CPC分类号： H01J37/3056 , G01N1/32 , H01J37/304 , H01J2237/20207 , H01J2237/2482 , H01J2237/30466 , H01J2237/31745
摘要： An apparatus for monitoring sample milling in a charged-particle instrument has a variable-tilt specimen holder (130) attached to the instrument tilt stage (120). The variable-tilt specimen holder (130) includes a first pivoting plate (260) having a slot (280) for holding a specimen (290) rotatably supported in the variable-tilt specimen holder (130). The first pivoting plate (260) has a range of rotation sufficient to move the preferred axis of thinning of the specimen (290) from a first position where the tilt stage (120) is placed at its maximum range of tilt and the angle between the preferred axis of thinning of the specimen (290) and the axis of the ion beam column (110) of the instrument is greater than zero, to a second position where the preferred axis for thinning of the specimen (290) is substantially parallel to the axis of the ion-beam column (110). A light detector (250) is positioned to intercept light passing through the specimen (290) as it is thinned by ion-beam milling. The intensity of the light passing through the specimen (290) may be compared to the intensity recorded for previous stages of milling to determine an endpoint for milling of the specimen.
摘要翻译：用于监测带电粒子仪器中的样品研磨的装置具有附接到仪器倾斜台（120）的可变倾斜试样保持器（130）。可变倾斜试样架（130）包括第一枢转板（260），其具有用于保持可旋转地支撑在可变倾斜试样保持器（130）中的试样（290）的狭槽（280）。第一枢转板（260）具有足够的旋转范围，以便将倾斜台（120）放置在其最大倾斜范围内的第一位置移动样本（290）的优选稀疏轴线，样品（290）的薄化的优选轴线和仪器的离子束柱（110）的轴线大于零，到第二位置，其中样品（290）的薄化优选轴线基本上平行于离子束柱（110）的轴线。光检测器（250）被定位成通过离子束铣削来遮蔽通过样品（290）的光线。通过样品（290）的光的强度可以与先前研磨阶段记录的强度进行比较，以确定样品研磨的终点。

7. 发明授权

US07834315B2 Method for STEM sample inspection in a charged particle beam instrument 有权
标题翻译：带电粒子束仪器中STEM样品检测方法
公开(公告)号：US07834315B2
公开(公告)日：2010-11-16
申请号：US12041217
申请日：2008-03-03
申请人： Lyudmila Zaykova-Feldman , Thomas M. Moore , Gonzalo Amador , Matthew Hammer
发明人： Lyudmila Zaykova-Feldman , Thomas M. Moore , Gonzalo Amador , Matthew Hammer
IPC分类号： G01N23/00
CPC分类号： G01N23/04 , H01J2237/208 , H01J2237/31745
摘要： A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.
摘要翻译：在双光束FIB中的样本检查的方法根据FIB的几何形状和样本台的倾斜度来计算作为第二，第三和第四角度的函数的第一角度。根据所述角度计算第五角度，其中第五角度是切除样本的长轴与探针轴的轴线在X-Y平面上的突起之间的角度。样品台按计算出的第五个角度旋转，然后连接到探针尖端并提起。然后可以通过探针轴通过第一角度的旋转，将样品定位成垂直于FIB电子束的轴线进行STEM分析。

8. 发明授权

US08227781B2 Variable-tilt specimen holder and method and for monitoring milling in a charged-particle instrument 有权
标题翻译：可变倾斜试样架和方法，用于监测带电粒子仪器中的铣削
公开(公告)号：US08227781B2
公开(公告)日：2012-07-24
申请号：US12842105
申请日：2010-07-23
申请人： Lyudmila Zaykova-Feldman , Thomas M. Moore , Gonzalo Amador
发明人： Lyudmila Zaykova-Feldman , Thomas M. Moore , Gonzalo Amador
IPC分类号： G01N21/86
CPC分类号： H01J37/3056 , G01N1/32 , H01J37/304 , H01J2237/20207 , H01J2237/2482 , H01J2237/30466 , H01J2237/31745
摘要： An apparatus for monitoring sample milling in a charged-particle instrument has a variable-tilt specimen holder attached to the instrument tilt stage. The variable-tilt specimen holder includes a first pivoting plate having a slot for holding a specimen rotatably supported in the specimen holder. The first pivoting plate has a range of rotation sufficient to move the axis of thinning of the specimen from a first position where the tilt stage is placed at its maximum range of tilt and the angle between the preferred axis of thinning of the specimen and the axis of the ion beam column of the instrument is greater than zero, to a second position where the axis for thinning of the specimen is substantially parallel to the axis of the ion-beam column. A light detector intercepts light passing through the specimen as it is thinned to determine an endpoint for milling of the specimen.
摘要翻译：用于监测带电粒子仪器中的样品研磨的装置具有连接到仪器倾斜台上的可变倾斜的样品支架。可变倾斜试样架包括第一枢转板，其具有用于保持可旋转地支撑在试样保持器中的试样的狭槽。第一枢转板具有足够的旋转范围，以使样品的变薄轴从第一位置移动，其中倾斜台被放置在其最大倾斜范围内，并且样品的优选减薄轴线与轴线之间的角度的仪器的离子束柱大于零，到第二位置，其中用于使样品变薄的轴线基本上平行于离子束柱的轴线。光检测器在被稀释时拦截通过样品的光，以确定试样的铣削终点。

9. 发明授权

US08168949B2 Method for stem sample inspection in a charged particle beam instrument 有权
公开(公告)号：US08168949B2
公开(公告)日：2012-05-01
申请号：US12896274
申请日：2010-10-01
申请人： Lyudmila Zaykova-Feldman , Thomas M. Moore , Gonzalo Amador , Matthew Hammer
发明人： Lyudmila Zaykova-Feldman , Thomas M. Moore , Gonzalo Amador , Matthew Hammer
IPC分类号： G01N23/00
CPC分类号： G01N23/04 , H01J2237/208 , H01J2237/31745
摘要： A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.

10. 发明申请

US20110031396A1 METHOD FOR STEM SAMPLE INSPECTION IN A CHARGED PARTICLE BEAM INSTRUMENT 有权
标题翻译：充电颗粒光束仪器中的样品检测方法
公开(公告)号：US20110031396A1
公开(公告)日：2011-02-10
申请号：US12896274
申请日：2010-10-01
申请人： Lyudmila Zaykova-Feldman , Thomas M. Moore , Gonzalo Amador , Matthew Hammer
发明人： Lyudmila Zaykova-Feldman , Thomas M. Moore , Gonzalo Amador , Matthew Hammer
IPC分类号： G01N23/00
CPC分类号： G01N23/04 , H01J2237/208 , H01J2237/31745
摘要： A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.
摘要翻译：在双光束FIB中的样本检查的方法根据FIB的几何形状和样本台的倾斜度来计算作为第二，第三和第四角度的函数的第一角度。根据所述角度计算第五角度，其中第五角度是切除样本的长轴与探针轴的轴线在X-Y平面上的突起之间的角度。样品台按计算出的第五个角度旋转，然后连接到探针尖端并提起。然后可以通过探针轴通过第一角度的旋转，将样品定位成垂直于FIB电子束的轴线进行STEM分析。

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